JP2017163023A - 光検出器およびこれを用いた被写体検知システム - Google Patents
光検出器およびこれを用いた被写体検知システム Download PDFInfo
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Abstract
【解決手段】光検出器1は、第1領域と、第1領域に隣接する第2領域とを有する第1導電型の半導体基板10と、第1領域に配置された第2導電型の第1半導体層21と、第1半導体層21と半導体基板10との間に配置され第1半導体層21に接合する第1導電型の第2半導体層23と、第2半導体層23と離間して半導体基板10に配置された第1導電型の第3半導体層25と、第1半導体層21に電圧を印加する第1電極27aと、第3半導体層25に電圧を印加する第2電極27bと、を備えた少なくとも1つの光検出セル20ij(i,j=1,2,3)と、第2領域に配置され、入射光を半導体基板10の表面に平行な第1方向に第1半導体層10と第2半導体層21との接合部に導く光ガイド部40と、を備えている。
【選択図】図1
Description
第1実施形態による光検出器を図1に示す。この光検出器1は、半導体基板(例えば、p−型シリコン基板)10と、この半導体基板10にマトリクス状に配置された複数の光検出セル2011〜2033と、光ガイド部40,反射防止膜42と、備えている。複数の光検出セル2011〜2033は、半導体基板10のセルアレイ領域14に配置される。
次に、光ガイド部40のテーパ角について図2(a)乃至図3を参照して説明する。テーパ角αを有する光ガイド部40のテーパ面に入射光50が入射角βで入射し、光50が光ガイド部40中を水平に伝播する場合を示す図である。シリコンからなる光ガイド部40のテーパ角αを10°としたとき、光ガイド部40中を光が水平に伝播するためには、光50の入射角βは、63.4°であることが計算によって求められ、これを図2(b)に示す。また、シリコンからなる光ガイド部40のテーパ角αを15°としたとき、光ガイド部40中を光が水平に伝播するためには、光50の入射角βは、42.3°であることが計算によって求められ、これを図2(c)に示す。図2(b)、2(c)に示す光線の追跡においては、シリコンの屈折率が3.42、空気の屈折率が1.0として計算した。
第1実施形態において、各光検出セル10ij(i,j=1,2,3)は、例えばシリコン材料を用いたアバランシェフォトダイオード(以下、APD)を有する光検出セルを用いることができる。
第2実施形態による光検出器を図6に示す。この第2実施形態の光検出器1Aは、図1に示す第1実施形態の光検出器1において、光ガイド部40を光ガイド部40Aに置き換えた構成を有している。
第3実施形態による被写体検知システムを図7に示す。この実施形態の被写体検知システム200は、光投射部210と、光検出部250とを備え、光投射部210より被写体100へ光を投射し、被写体100によって反射されて照射方向と同一方向へ戻ってくる反射光を光検出部250が検知し、その戻り時間(光飛行時間)、強度等を算出することで、光の飛行時間からその被写体100までの距離、光強度から被写体100の反射率等を推定する装置である。
Claims (11)
- 第1領域と、前記第1領域に隣接する第2領域とを有する第1導電型の半導体基板と、
前記第1領域に配置された第2導電型の第1半導体層と、前記第1半導体層と前記半導体基板との間に配置され前記第1半導体層に接合する第1導電型の第2半導体層と、前記第2半導体層と離間して前記半導体基板に配置された第1導電型の第3半導体層と、前記半導体基板上に前記第1半導体層に電圧を印加する第1電極と、前記半導体基板上に前記第3半導体層に電圧を印加する第2電極と、を備えた少なくとも1つの光検出セルと、
前記第2領域に配置され、入射光を前記半導体基板の表面に平行な第1方向に前記第1半導体層と前記第2半導体層との接合部に導く光ガイド部と、
を備えた光検出器。 - 前記光ガイド部は、前記半導体基板の表面から前記表面に垂直な第2方向に沿って配置された開口であるか、または前記開口に埋め込まれた前記入射光に対して透明な部材であり、前記開口は前記第1領域と前記第2領域との境界に、前記第2方向に対して所定の角度傾いている側面を有している請求項1記載の光検出器。
- 前記光ガイド部は、前記半導体基板の表面から前記表面に垂直な第2方向に沿って配置された開口であり、前記開口は前記第1領域と前記第2領域との境界に前記第2方向に平行な側面と、前記第2方向に対して所定の角度傾いている底面と、を有している請求項1記載の光検出器。
- 前記所定の角度は、0度より大きく17度以下である請求項2または3記載の光検出器。
- 前記側面に反射防止層が配置されている請求項2乃至4のいずれかに記載の光検出器。
- 前記第1領域に配置され光を反射する反射領域を更に備え、前記少なくとも1つの光検出セルは、前記反射領域と前記光ガイド部との間に位置する請求項1乃至5のいずれかに記載の光検出器。
- 前記光検出セルは、アバランシェフォトダイオードである請求項1乃至6のいずれかに記載の光検出器。
- 前記光検出セルは、波長が750nm〜1000nmの近赤外光を検出する請求項1乃至7のいずれかに記載の光検出器。
- 前記少なくとも1つの光検出セルは、前記第1方向に沿って前記半導体基板の前記第1領域に配置された複数の光検出セルである請求項1乃至8のいずれかに記載の光検出器。
- 前記複数の光検出セルのうち隣接する2つ光検出セルの間に、前記2つの光検出セルの一方の前記第2電極が配置されている請求項9記載の光検出器。
- 光を投射する光照射部と、前記光および被写体からの前記光の反射光を分割する光分割部、前記投射光を前記被写体に向かって走査する光走査部と、前記光分割部によって分割された前記反射光を検出する光検出器と、前記光検出器を駆動し前記光検出器から前記反射光の強さを読み出す駆動および読み出し回路と、前記光照射部から投射される光のタイミングの同期を得る同期回路と、前記同期回路からの同期のタイミングを用いて前記光照射部から投射された光の戻り時間を演算する時間演算処理部と、を備え、前記光検出器は請求項1乃至10のいずれかに記載の光検出器である被写体検知システム。
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US9383512B2 (en) * | 2012-12-31 | 2016-07-05 | Infinera Corporation | Light absorption and scattering devices in a photonic integrated circuit that minimize optical feedback and noise |
US10950743B2 (en) | 2019-05-02 | 2021-03-16 | Stmicroelectronics (Research & Development) Limited | Time of flight (TOF) sensor with transmit optic providing for reduced parallax effect |
US11346924B2 (en) | 2019-12-09 | 2022-05-31 | Waymo Llc | SiPM with cells of different sizes |
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