JP2019012066A - 光学式エンコーダ - Google Patents
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- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
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- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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Abstract
Description
実質的に測定軸方向に平行なスケール面に配列され、前記測定軸方向に細く、前記測定軸方向と交差するスケール格子バー方向に長く、前記測定軸方向にスケールピッチPSFで周期的に配列されたスケール格子バーで構成されるスケール格子を有する、前記測定軸方向に延在するスケールと、
光を出力する光源と、前記光が入力され、前記測定軸方向に細く、前記測定軸方向と交差する方向に向いた照明干渉縞方向に長い縞で構成される照明干渉縞パターンを有する構造化照明を、光源光経路SOLPを介して、前記スケール面の照明領域へ出力する構造化照明生成部と、を有する照明光源と、
前記測定軸方向と交差する検出干渉縞移動方向に検出器ピッチPDで配列されたN個の空間位相検出器からなるセットを有し、前記空間位相検出器のそれぞれは空間位相検出器信号を与えるように構成され、少なくとも過半数の前記空間位相検出器は、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、前記N個の空間位相検出器からなるセットは、空間位相列に、前記検出干渉縞移動方向に沿って配列される、光検出器構造と、を有し、
前記スケール格子は、前記照明領域に前記照明干渉縞パターンが入力され、前記光検出器構造に干渉縞パターンを形成するスケール光を、スケール光経路SCLPを介して出力し、前記干渉縞パターンは、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、かつ、検出干渉縞周期PDFの周期性を有する、周期的な高光強度及び低光強度のバンドで構成され、
前記スケール格子バーは、光源光経路SOLP及びスケール光経路SCLPによって定義されるリードヘッド面RHPに対して0以外のヨー角ψSCをなす方向に向いており、
前記構造化照明生成部は、
第1インデックス面に第1インデックスピッチP1で周期的に配列され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記リードヘッド面RHPに対して角度ψ1だけ回転している第1インデックス格子バー方向に延在する第1照明光源格子バーで構成される第1照明光源回折格子と、
前記第1インデックス面と平行な第2インデックス面に第2インデックスピッチP2で周期的に配列され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記リードヘッド面RHPに対して角度ψ2だけ回転している第2のインデックス格子バー方向に延在する第2照明光源格子バーで構成される第2照明光源回折格子と、を備え、
前記検出干渉縞周期PDFと前記測定軸方向と交差する前記検出干渉縞移動方向とは、少なくとも部分的に前記0以外のヨー角ψSCに依存し、
前記高光強度及び低光強度のバンドは、前記スケール格子が前記測定軸方向に変位するにつれて、前記測定軸方向と交差する前記検出干渉縞移動方向に移動し、
前記光検出器構造は、前記測定軸方向と交差する前記検出干渉縞移動方向での前記高光強度及び低光強度のバンドの変位を検出し、かつ、スケールの変位を示す空間位相変位信号を与える、ものである。
様々な実施例においては、ψ1及びψ2は、同じ大きさで異なる符号の動的ギャップエラーを与えるように選択されてもよい。検出器干渉縞パターン1035を形成する干渉光ビームの2つの干渉光の位相は、Φ+及びΦ−で表されてもよい。光源1030から出力された光の波長は、λである。動的なギャップ誤差DGEは、測定軸方向MAとスケール格子バー方向SGBD(すなわち、Z方向)とに垂直な方向のギャップ変動Δgに関係する。動的なギャップ誤差DGEは、以下の式で表される。
第2項の
110 スケール格子
120 照明部
130 照明光源、
131 光源
132 コリメートレンズ
134 光源光
135 周期的スケール光パターン
140 第1の照明格子
150 第2の照明格子
160、360、460A、460B、560、660、860、960A、960B、1060 光検出器構造
210、510、1010 スケール
520、1020 照明光源
530、1030 光源
531、1031 点光源
532、1032 コリメートレンズ
533、1033 構造化照明生成部
534、534’、1034、1034’ 光
534’’、1034’’ 構造化照明
535、635 検出器干渉縞パターン
540、1040 第1照明光源回折格子
550、1050 第2照明光源回折格子
635D 暗又は低光強度のバンド
635L 明又は高光強度のバンド
A1〜AM 空間位相検出器信号
DA 検出器軸
DFMD 検出干渉縞移動方向
GB 格子バー
GBD 格子バー方向
IFD 照明干渉縞方向
IFP 照明干渉縞パターン
IR 照明領域
SL1、SL2 スケール光成分
MA 測定軸方向
SP スケール面
S1〜SM サブセット
SCLP スケール光経路
SOLP 光源光経路
Claims (6)
- 実質的に測定軸方向に平行なスケール面に配列され、前記測定軸方向に細く、前記測定軸方向と交差するスケール格子バー方向に長く、前記測定軸方向にスケールピッチPSFで周期的に配列されたスケール格子バーで構成されるスケール格子を有する、前記測定軸方向に延在するスケールと、
光を出力する光源と、前記光が入力され、前記測定軸方向に細く、前記測定軸方向と交差する方向に向いた照明干渉縞方向に長い縞で構成される照明干渉縞パターンを有する構造化照明を、光源光経路SOLPを介して、前記スケール面の照明領域へ出力する構造化照明生成部と、を有する照明光源と、
前記測定軸方向と交差する検出干渉縞移動方向に検出器ピッチPDで配列されたN個の空間位相検出器からなるセットを有し、前記空間位相検出器のそれぞれは空間位相検出器信号を与えるように構成され、少なくとも過半数の前記空間位相検出器は、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、前記N個の空間位相検出器からなるセットは、空間位相列に、前記検出干渉縞移動方向に沿って配列される、光検出器構造と、を備え、
前記スケール格子は、前記照明領域に前記照明干渉縞パターンが入力され、前記光検出器構造に干渉縞パターンを形成するスケール光を、スケール光経路SCLPを介して出力し、前記干渉縞パターンは、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、かつ、検出干渉縞周期PDFの周期性を有する、周期的な高光強度及び低光強度のバンドで構成され、
前記スケール格子バーは、光源光経路SOLP及びスケール光経路SCLPによって定義されるリードヘッド面RHPに対して0以外のヨー角ψSCをなす方向に向いており、
前記構造化照明生成部は、
第1インデックス面に第1インデックスピッチP1で周期的に配列され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記リードヘッド面RHPに対して角度ψ1だけ回転している第1インデックス格子バー方向に延在する第1照明光源格子バーで構成される第1照明光源回折格子と、
前記第1インデックス面と平行な第2インデックス面に第2インデックスピッチP2で周期的に配列され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記リードヘッド面RHPに対して角度ψ2だけ回転している第2のインデックス格子バー方向に延在する第2照明光源格子バーで構成される第2照明光源回折格子と、を備え、
前記検出干渉縞周期PDFと前記測定軸方向と交差する前記検出干渉縞移動方向とは、少なくとも部分的に前記0以外のヨー角ψSCに依存し、
前記高光強度及び低光強度のバンドは、前記スケール格子が前記測定軸方向に変位するにつれて、前記測定軸方向と交差する前記検出干渉縞移動方向に移動し、
前記光検出器構造は、前記測定軸方向と交差する前記検出干渉縞移動方向での前記高光強度及び低光強度のバンドの変位を検出し、かつ、スケールの変位を示す空間位相変位信号を与える、
光学式エンコーダ。 - 前記第1照明光源回折格子及び第2照明光源回折格子は、位相格子である、
請求項1に記載の光学式エンコーダ。 - 前記検出干渉縞周期PDFは、40μm以上である、
請求項1に記載の光学式エンコーダ。
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/637,750 | 2017-06-29 | ||
US15/637,750 US10168189B1 (en) | 2017-06-29 | 2017-06-29 | Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis |
US15/702,520 US10295378B2 (en) | 2017-06-29 | 2017-09-12 | Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals |
US15/702,520 | 2017-09-12 | ||
US15/858,218 US10302466B2 (en) | 2017-06-29 | 2017-12-29 | Contamination and defect resistant optical encoder configuration including first and second illumination source diffraction gratings arranged in first and second parallel planes for providing displacement signals |
US15/858,218 | 2017-12-29 |
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Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3882482A (en) | 1969-09-12 | 1975-05-06 | Sperry Rand Corp | Optical radiant energy encoding and correlating apparatus |
US4109389A (en) | 1976-03-08 | 1978-08-29 | Cetec Corporation | Shaft angle transducer |
US4414754A (en) | 1982-03-04 | 1983-11-15 | The Laitram Corporation | High resolution compass card position decoder |
US4964727A (en) | 1988-11-23 | 1990-10-23 | The Boeing Company | Multi-track analog optical sensing system and method |
US5237391A (en) | 1988-11-23 | 1993-08-17 | The Boeing Company | Multitrack multilevel sensing system |
AT395071B (de) | 1989-02-09 | 1992-09-10 | Rieder & Schwaiger Sentop | Inkrementales messsystem |
US5239178A (en) * | 1990-11-10 | 1993-08-24 | Carl Zeiss | Optical device with an illuminating grid and detector grid arranged confocally to an object |
US5279044A (en) | 1991-03-12 | 1994-01-18 | U.S. Philips Corporation | Measuring device for determining an absolute position of a movable element and scale graduation element suitable for use in such a measuring device |
US5442166A (en) | 1993-11-15 | 1995-08-15 | Hughes Aircraft Company | Linear absolute position sensor |
FR2735225B1 (fr) | 1995-06-12 | 1997-09-05 | Motorola Semiconducteurs | Capteur de position optoelectronique et systeme de compensation pour un tel capteur |
JP3631551B2 (ja) | 1996-01-23 | 2005-03-23 | 株式会社ミツトヨ | 光学式エンコーダ |
US5886519A (en) | 1997-01-29 | 1999-03-23 | Mitutoyo Corporation | Multi-scale induced current absolute position transducer |
US5965879A (en) | 1997-05-07 | 1999-10-12 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method and apparatus for ultra-high-sensitivity, incremental and absolute optical encoding |
JP4350220B2 (ja) * | 1999-08-06 | 2009-10-21 | 株式会社ミツトヨ | 変位測定装置 |
JP4703059B2 (ja) | 2001-08-28 | 2011-06-15 | 株式会社ミツトヨ | 光電式エンコーダ |
JP4924879B2 (ja) * | 2006-11-14 | 2012-04-25 | 株式会社ニコン | エンコーダ |
EP2233892B1 (en) | 2009-03-27 | 2015-05-27 | SICK STEGMANN GmbH | Cylindrical Grating Rotation Sensor |
US8658964B2 (en) * | 2009-10-23 | 2014-02-25 | Mitutoyo Corporation | Photoelectric encoder with optical grating |
EP2367058A1 (en) | 2010-03-17 | 2011-09-21 | Université Jean-Monnet | Fabrication method of cylindrical gratings |
US8493572B2 (en) | 2010-05-05 | 2013-07-23 | Mitutoyo Corporation | Optical encoder having contamination and defect resistant signal processing |
EP2562568B1 (en) | 2011-08-23 | 2014-06-25 | SICK STEGMANN GmbH | Fabrication method of cylindrical gratings |
US9018578B2 (en) | 2011-12-23 | 2015-04-28 | Mitutoyo Corporation | Adaptable resolution optical encoder having structured illumination and spatial filtering |
US8941052B2 (en) | 2011-12-23 | 2015-01-27 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
US9080899B2 (en) | 2011-12-23 | 2015-07-14 | Mitutoyo Corporation | Optical displacement encoder having plural scale grating portions with spatial phase offset of scale pitch |
US9029757B2 (en) | 2011-12-23 | 2015-05-12 | Mitutoyo Corporation | Illumination portion for an adaptable resolution optical encoder |
JP6359340B2 (ja) * | 2014-05-27 | 2018-07-18 | 株式会社ミツトヨ | スケール及び光学式エンコーダ |
JP6664155B2 (ja) * | 2015-06-11 | 2020-03-13 | 株式会社ミツトヨ | 光学式エンコーダ |
US9651404B2 (en) * | 2015-09-29 | 2017-05-16 | Mitutoyo Corporation | Optical encoder having an optical portion comprising dual lenses and an aperture portion positioned in relation to a moiré grating |
CN105910631B (zh) * | 2016-04-07 | 2018-04-10 | 广东工业大学 | 绝对式光栅尺及其测量方法 |
US10295648B2 (en) | 2017-06-29 | 2019-05-21 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals |
US20190033100A1 (en) | 2017-06-29 | 2019-01-31 | Mitutoyo Corporation | Contamination and defect resistant rotary optical encoder configuration for providing displacement signals |
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Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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