JP2019012067A - 光学式エンコーダ - Google Patents
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Abstract
【解決手段】照明光源1020は、構造化照明1034’’をスケール1010へ出力する。光検出器構造1060は、検出干渉縞移動方向DFMDに配列されたN個の空間位相検出器からなるセットを有する。スケール1010のスケール格子は、光検出器構造1060に干渉縞パターン1035を形成するスケール光を出力する。干渉縞パターン1035は、周期性を有する高光強度及び低光強度のバンドで構成される。構造化照明生成部1033は、第1及び第2の照明光源回折格子を有する。検出干渉縞周期PDFと検出干渉縞移動方向DFMDとは、少なくとも部分的に0以外の照明干渉縞ヨー角に依存している。バンドは、スケール格子が測定軸方向MAに変位するにつれて、検出干渉縞移動方向DFMDに移動する。光検出器構造1060はバンドの変位を検出して、空間位相変位信号を与える。
【選択図】図10
Description
実質的に測定軸方向に平行なスケール面に配列され、前記測定軸方向に細く、前記測定軸方向と交差するスケール格子バー方向に長く、前記測定軸方向にスケールピッチPSFで周期的に配列されたスケール格子バーで構成されるスケール格子を有する、前記測定軸方向に延在するスケールと、
光を出力する光源と、前記光が入力され、前記測定軸方向に細く、前記測定軸方向と交差する方向に向いた照明干渉縞方向に長い縞で構成される照明干渉縞パターンを有する構造化照明を、光源光経路SOLPを介して、前記スケール面の照明領域へ出力する構造化照明生成部と、を有する照明光源と、
前記測定軸方向と交差する検出干渉縞移動方向に検出器ピッチPDで配列されたN個の空間位相検出器からなるセットを有し、前記空間位相検出器のそれぞれは空間位相検出器信号を与えるように構成され、少なくとも過半数の前記空間位相検出器は、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、前記N個の空間位相検出器からなるセットは、空間位相列に、前記検出干渉縞移動方向に沿って配列される、光検出器構造と、を備え、
前記スケール格子は、前記照明領域に前記照明干渉縞パターンが入力され、前記光検出器構造に干渉縞パターンを形成するスケール光を、スケール光経路SCLPを介して出力し、前記干渉縞パターンは、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、かつ、検出干渉縞周期PDFの周期性を有する、周期的な高光強度及び低光強度のバンドで構成され、
前記スケール格子バーは、光源光経路SOLP及びスケール光経路SCLPによって定義されるリードヘッド面RHPに対して0以外のヨー角ψSCをなす方向に向いており、
前記検出干渉縞周期PDFと前記測定軸方向と交差する前記検出干渉縞移動方向とは、少なくとも部分的に前記0以外のヨー角ψSCに依存し、
前記高光強度及び低光強度のバンドは、前記スケール格子が前記測定軸方向に変位するにつれて、前記測定軸方向と交差する前記検出干渉縞移動方向に移動し、
リードヘッド面RHPの法線は、前記測定軸方向に対して0以外のピッチ角φをなす方向に向いており、
前記光検出器構造は、前記測定軸方向と交差する前記検出干渉縞移動方向での前記高光強度及び低光強度のバンドの変位を検出し、かつ、スケールの変位を示す空間位相変位信号を与えるものである。
空間位相検出器のそれぞれの過半数は、測定軸方向MAに比較的長く、測定軸方向MAに直交する方向に比較的細い。空間位相検出器のそれぞれの少なくとも過半数は、周期的なスケール光パターンに応じた空間位相検出器の空間位相のそれぞれに対応して配置された、測定軸方向MAに沿って空間周期的なスケール光受光領域を有し、かつ、それぞれ空間位相検出器信号を与えるように構成される。空間位相列内では、内側の群の空間位相検出器のそれぞれは、当該空間位相検出器とは異なる空間位相を有する空間位相検出器によって先行され、かつ、後続される。先行及び後続する空間位相検出器は、それぞれ異なる空間位相を有する。換言すれば、1つの空間位相検出器に注目した場合、注目した空間位相検出器は、測定軸方向MAと交差する方向で、後続する1又は複数の空間位相検出器と、先行する1又は複数の空間位相検出器とによって挟まれている。但し、内側の群において測定軸方向MAと交差する方向の端部に設けられた空間位相検出器に注目した場合、注目した空間位相検出器は、1つの外側位相検出と、内側の群に属するその他の空間位相検出器とによって挟まれることとなる。
様々な実施例においては、ψ1及びψ2は、同じ大きさで異なる符号の動的ギャップエラーを与えるように選択されてもよい。検出器干渉縞パターン1035を形成する干渉光ビームの2つの干渉光の位相は、Φ+及びΦ−で表されてもよい。光源1030から出力された光の波長は、λである。動的なギャップ誤差DGEは、測定軸方向MAとスケール格子バー方向SGBD(すなわち、Z方向)とに垂直な方向のギャップ変動Δgに関係する。動的なギャップ誤差DGEは、以下の式で表される。
第2項の
110 スケール格子
120 照明部
130 照明光源、
131 光源
132 コリメートレンズ
134 光源光
135 周期的スケール光パターン
140 第1の照明格子
150 第2の照明格子
160、360、460A、460B、560、660、860、960A、960B、1060 光検出器構造
210、510、1010 スケール
520、1020 照明光源
530、1030 光源
531、1031 点光源
532、1032 コリメートレンズ
533、1033 構造化照明生成部
534、534’、1034、1034’ 光
534’’、1034’’ 構造化照明
535、635 検出器干渉縞パターン
540、1040 第1照明光源回折格子
550、1050 第2照明光源回折格子
635D 暗又は低光強度のバンド
635L 明又は高光強度のバンド
A1〜AM 空間位相検出器信号
DA 検出器軸
DFMD 検出干渉縞移動方向
GB 格子バー
GBD 格子バー方向
IFD 照明干渉縞方向
IFP 照明干渉縞パターン
IR 照明領域
SL1、SL2 スケール光成分
MA 測定軸方向
SP スケール面
S1〜SM サブセット
SCLP スケール光経路
SOLP 光源光経路
Claims (9)
- 実質的に測定軸方向に平行なスケール面に配列され、前記測定軸方向に細く、前記測定軸方向と交差するスケール格子バー方向に長く、前記測定軸方向にスケールピッチPSFで周期的に配列されたスケール格子バーで構成されるスケール格子を有する、前記測定軸方向に延在するスケールと、
光を出力する光源と、前記光が入力され、前記測定軸方向に細く、前記測定軸方向と交差する方向に向いた照明干渉縞方向に長い縞で構成される照明干渉縞パターンを有する構造化照明を、光源光経路SOLPを介して、前記スケール面の照明領域へ出力する構造化照明生成部と、を有する照明光源と、
前記測定軸方向と交差する検出干渉縞移動方向に検出器ピッチPDで配列されたN個の空間位相検出器からなるセットを有し、前記空間位相検出器のそれぞれは空間位相検出器信号を与えるように構成され、少なくとも過半数の前記空間位相検出器は、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、前記N個の空間位相検出器からなるセットは、空間位相列に、前記検出干渉縞移動方向に沿って配列される、光検出器構造と、を備え、
前記スケール格子は、前記照明領域に前記照明干渉縞パターンが入力され、前記光検出器構造に干渉縞パターンを形成するスケール光を、スケール光経路SCLPを介して出力し、前記干渉縞パターンは、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、かつ、検出干渉縞周期PDFの周期性を有する、周期的な高光強度及び低光強度のバンドで構成され、
前記スケール格子バーは、光源光経路SOLP及びスケール光経路SCLPによって定義されるリードヘッド面RHPに対して0以外のヨー角ψSCをなす方向に向いており、
前記検出干渉縞周期PDFと前記測定軸方向と交差する前記検出干渉縞移動方向とは、少なくとも部分的に前記0以外のヨー角ψSCに依存し、
前記高光強度及び低光強度のバンドは、前記スケール格子が前記測定軸方向に変位するにつれて、前記測定軸方向と交差する前記検出干渉縞移動方向に移動し、
リードヘッド面RHPの法線は、前記測定軸方向に対して0以外のピッチ角φをなす方向に向いており、
前記光検出器構造は、前記測定軸方向と交差する前記検出干渉縞移動方向での前記高光強度及び低光強度のバンドの変位を検出し、かつ、スケールの変位を示す空間位相変位信号を与える、
光学式エンコーダ。 - φは、0.3°よりも大きく、2.0°よりも小さい、
請求項1に記載の光学式エンコーダ。 - N個の位相検出器のそれぞれは、偶数個のスケール光受光領域を有する、
請求項1に記載の光学式エンコーダ。 - 前記構造化照明生成部は、
第1インデックス面に第1インデックスピッチP1で周期的に配列され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記リードヘッド面RHPに対して角度ψ1だけ回転している第1インデックス格子バー方向に延在する第1照明光源格子バーで構成される第1照明光源回折格子と、
前記第1インデックス面と平行な第2インデックス面に第2インデックスピッチP2で周期的に配列され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記リードヘッド面RHPに対して角度ψ2だけ回転している第2のインデックス格子バー方向に延在する第2照明光源格子バーで構成される第2照明光源回折格子と、を備える、
請求項1に記載の光学式エンコーダ。 - 前記第1照明光源回折格子及び第2照明光源回折格子は、位相格子である、
請求項4に記載の光学式エンコーダ。 - 前記検出干渉縞周期PDFは、40μm以上である、
請求項4に記載の光学式エンコーダ。
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