JP7079670B2 - 光学式エンコーダ - Google Patents
光学式エンコーダ Download PDFInfo
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- JP7079670B2 JP7079670B2 JP2018120411A JP2018120411A JP7079670B2 JP 7079670 B2 JP7079670 B2 JP 7079670B2 JP 2018120411 A JP2018120411 A JP 2018120411A JP 2018120411 A JP2018120411 A JP 2018120411A JP 7079670 B2 JP7079670 B2 JP 7079670B2
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- 230000003287 optical effect Effects 0.000 title claims description 99
- 238000005259 measurement Methods 0.000 claims description 107
- 238000005286 illumination Methods 0.000 claims description 79
- 238000001514 detection method Methods 0.000 claims description 50
- 230000000737 periodic effect Effects 0.000 claims description 32
- 238000006073 displacement reaction Methods 0.000 claims description 30
- 238000000819 phase cycle Methods 0.000 claims description 22
- 230000001419 dependent effect Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000012071 phase Substances 0.000 description 237
- 230000007547 defect Effects 0.000 description 49
- 238000011109 contamination Methods 0.000 description 19
- 238000010586 diagram Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 14
- 238000012545 processing Methods 0.000 description 14
- 239000011295 pitch Substances 0.000 description 8
- XZVHHLNLLVICFA-SNVBAGLBSA-N α-difluoromethyl-dopa Chemical compound FC(F)[C@](C(O)=O)(N)CC1=CC=C(O)C(O)=C1 XZVHHLNLLVICFA-SNVBAGLBSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000008385 outer phase Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000002547 anomalous effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010561 standard procedure Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
- G01D5/24433—Error prevention by mechanical means
- G01D5/24438—Special design of the sensing element or scale
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
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- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
- G01D3/032—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure affecting incoming signal, e.g. by averaging; gating undesired signals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24428—Error prevention
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
- G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
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Description
実質的に測定軸方向に平行なスケール面に配列され、前記測定軸方向に細く、前記測定軸方向と交差する格子バー方向に長く、前記測定軸方向にスケールピッチPSFで周期的に配列された格子バーで構成されるスケール格子を有する、前記測定軸方向に延在するスケールと、
光を出力する光源と、前記光が入力され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記格子バー方向に対して0以外の照明干渉縞ヨー角をなす方向に向いた照明干渉縞方向に長い縞で構成される照明干渉縞パターンを有する構造化照明を、前記スケール面の照明領域へ出力する構造化照明生成部と、を有する照明光源と、
前記測定軸方向と交差する検出干渉縞移動方向に検出器ピッチPDで配列されたN個の空間位相検出器からなるセットを有し、前記空間位相検出器のそれぞれは空間位相検出器信号を与えるように構成され、少なくとも過半数の前記空間位相検出器は、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、前記N個の空間位相検出器からなるセットは、空間位相列に、前記検出干渉縞移動方向に沿って配列される、光検出器構造と、を有し、
前記スケール格子は、前記照明領域に前記照明干渉縞パターンが入力され、前記光検出器構造に干渉縞パターンを形成するスケール光を出力し、
前記干渉縞パターンは、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、かつ、検出干渉縞周期PDFの周期性を有する、周期的な高光強度及び低光強度のバンドで構成され、
前記検出干渉縞周期PDFと前記測定軸方向と交差する前記検出干渉縞移動方向とは、少なくとも部分的に前記0以外の照明干渉縞ヨー角に依存し、
前記高光強度及び低光強度のバンドは、前記スケール格子が前記測定軸方向に変位するにつれて、前記測定軸方向と交差する前記検出干渉縞移動方向に移動し、
前記光検出器構造は、前記測定軸方向と交差する前記検出干渉縞移動方向での前記高光強度及び低光強度のバンドの変位を検出し、かつ、スケールの変位を示す空間位相変位信号を与えるものである。
110 スケール格子
120 照明部
130 照明光源
131 光源
132 コリメートレンズ
134 光源光
135 周期的スケール光パターン
140 第1の照明格子
150 第2の照明格子
160、360、460A、460B、560、660、860、960A、960B 光検出器構造
210、510 スケール
520 照明光源
530 光源
531 点光源
532 コリメートレンズ
533 構造化照明生成部
534、534’ 光
534’’ 構造化照明
535、635 検出器干渉縞パターン
540 第1照明光源回折格子
550 第2照明光源回折格子
560 光検出器構造
635D 暗又は低光強度のバンド
635L 明又は高光強度のバンド
A1~AM 空間位相変位信号
DA 検出器軸
DFMD 検出干渉縞移動方向
GB 格子バー
GBD 格子バー方向
IFD 照明干渉縞方向
IFP 照明干渉縞パターン
IR 照明領域
SL1、SL2 スケール光成分
MA 測定軸方向
SP スケール面
S1~SM サブセット
SCLP スケール光経路
SOLP 光源光経路
Claims (20)
- 実質的に測定軸方向に平行なスケール面に配列され、前記測定軸方向に細く、前記測定軸方向と交差する格子バー方向に長く、前記測定軸方向にスケールピッチPSFで周期的に配列された格子バーで構成されるスケール格子を有する、前記測定軸方向に延在するスケールと、
光を出力する光源と、前記光が入力され、前記測定軸方向に細く、前記測定軸方向と交差し、かつ、前記格子バー方向に対して0以外の照明干渉縞ヨー角をなす方向に向いた照明干渉縞方向に長い縞で構成される照明干渉縞パターンを有する構造化照明を、前記スケール面の照明領域へ出力する構造化照明生成部と、を有する照明光源と、
前記測定軸方向と交差する検出干渉縞移動方向に検出器ピッチPDで配列されたN個の空間位相検出器からなるセットを有し、前記空間位相検出器のそれぞれは空間位相検出器信号を与えるように構成され、少なくとも過半数の前記空間位相検出器は、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、前記N個の空間位相検出器からなるセットは、空間位相列に、前記検出干渉縞移動方向に沿って配列される、光検出器構造と、を備え、
前記スケール格子は、前記照明領域に前記照明干渉縞パターンが入力され、前記光検出器構造に干渉縞パターンを形成するスケール光を出力し、
前記干渉縞パターンは、比較的長い寸法にわたって前記測定軸方向に延在し、前記測定軸方向と交差する前記検出干渉縞移動方向に比較的細く、かつ、検出干渉縞周期PDFの周期性を有する、周期的な高光強度及び低光強度のバンドで構成され、
前記検出干渉縞周期PDFと前記測定軸方向と交差する前記検出干渉縞移動方向とは、少なくとも部分的に前記0以外の照明干渉縞ヨー角に依存し、
前記高光強度及び低光強度のバンドは、前記スケール格子が前記測定軸方向に変位するにつれて、前記測定軸方向と交差する前記検出干渉縞移動方向に移動し、
前記光検出器構造は、前記測定軸方向と交差する前記検出干渉縞移動方向での前記高光強度及び低光強度のバンドの変位を検出し、かつ、スケールの変位を示す空間位相変位信号を与える、
光学式エンコーダ。 - 構造化照明生成部は、第1照明光源回折格子と、第2照明光源回折格子と、を備える、
請求項1に記載の光学式エンコーダ。 - 前記第1照明光源回折格子及び前記第2照明光源回折格子は位相格子である、
請求項2に記載の光学式エンコーダ。 - Nは6以上の整数である、
請求項1に記載の光学式エンコーダ。 - 前記空間位相検出器は前記空間位相列において前記検出干渉縞移動方向に配列され、Nは6以上の整数であり、前記空間位相列は、前記測定軸方向と交差する前記検出干渉縞移動方向の始まり及び終わりに位置する2つの外側空間位相検出器と、2つの外側空間位相検出器の間に位置する空間位相検出器の内側の群と、を有し、
前記内側の群の前記空間位相検出器のそれぞれは、当該空間位相検出器とは異なる空間位相を有する空間位相検出器によって先行され、かつ、後続され、先行及び後続する前記空間位相検出器は、それぞれ異なる空間位相を有し、
前記空間位相検出器のそれぞれは、前記検出干渉縞移動方向に空間周期性を有し、かつ、周期的なスケール光パターンに応じた空間位相検出器の空間位相のそれぞれに対応して配置されたスケール光受光領域を有する、
請求項4に記載の光学式エンコーダ。 - 前記N個の空間位相検出器からなるセットは、空間位相検出器の少なくともM個のサブセットを有し、Mは2以上の整数であり、前記M個のサブセットのそれぞれは、それぞれの空間位相を与える、前記N個の空間位相検出器からなるセットに含まれる空間位相検出器を有する、
請求項5に記載の光学式エンコーダ。 - Mは、4以上である、
請求項6に記載の光学式エンコーダ。 - Mは、6以上である、
請求項6に記載の光学式エンコーダ。 - 前記M個のサブセットのそれぞれは、同じ空間位相列サブセット内に配置された、同じ空間位相を与える空間位相検出器を有する、
請求項6に記載の光学式エンコーダ。 - 前記空間位相検出器のサブセットのそれぞれは、それぞれ120度ずつ離れた空間位相を有する3つの空間位相検出器を有する、
請求項9に記載の光学式エンコーダ。 - Nは、8以上であり、
前記空間位相検出器のサブセットのそれぞれは、それぞれ90度ずつ離れた空間位相を有する4つの空間位相検出器を有する、
請求項9に記載の光学式エンコーダ。 - 前記光検出器構造は、同じ空間位相に対応する空間位相検出器信号を合成し、かつ、合成した信号のそれぞれを空間位相位置信号として出力する接続部を有する、
請求項5に記載の光学式エンコーダ。 - 前記光検出器構造は、120度ずつ離れた空間位相に対応する3つの空間位相位置信号を出力する、
請求項12に記載の光学式エンコーダ。 - 前記光検出器構造は、90度ずつ離れた空間位相に対応する4つの空間位相位置信号を出力する、
請求項12に記載の光学式エンコーダ。 - 前記N個の空間位相検出器の隣接ペアのそれぞれの前記スケール光受光領域間の前記検出干渉縞移動方向の距離YSEPは、25μm以下である、
請求項5に記載の光学式エンコーダ。 - 前記N個の空間位相検出器の隣接ペアのそれぞれの前記スケール光受光領域間の前記検出干渉縞移動方向の距離YSEPは、同じである、
請求項5に記載の光学式エンコーダ。 - 前記N個の空間位相検出器のそれぞれは、空間位相マスクで覆われた光検出器を有し、前記空間位相マスクは、前記空間位相マスクに設けられた開口を通るものを除いて、前記光検出器が前記周期的なスケール光パターンを受光しないように、前記スケール光パターンを遮断し、前記スケール光受光領域は、前記空間位相マスクの前記開口を通じて暴露された光検出器領域を有する、
請求項5に記載の光学式エンコーダ。 - 前記N個の空間位相検出器のそれぞれは、前記周期的なスケール光パターンを受け取る電気的かつ相互的に接続された光検出器領域の周期的なアレイを有し、
前記スケール光受光領域は、光検出器の周期的なアレイである前記光検出器領域を有する、
請求項5に記載の光学式エンコーダ。 - 前記N個の空間位相検出器のそれぞれは、偶数個の前記スケール光受光領域を有する、
請求項5に記載の光学式エンコーダ。 - 前記検出干渉縞周期PDFは、40μm以上である、
請求項1に記載の光学式エンコーダ。
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US15/637,750 US10168189B1 (en) | 2017-06-29 | 2017-06-29 | Contamination and defect resistant optical encoder configuration for providing displacement signal having a plurality of spatial phase detectors arranged in a spatial phase sequence along a direction transverse to the measuring axis |
US15/702,520 US10295378B2 (en) | 2017-06-29 | 2017-09-12 | Contamination and defect resistant optical encoder configuration outputting structured illumination to a scale plane for providing displacement signals |
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