JP2018519528A5 - - Google Patents
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- JP2018519528A5 JP2018519528A5 JP2018500386A JP2018500386A JP2018519528A5 JP 2018519528 A5 JP2018519528 A5 JP 2018519528A5 JP 2018500386 A JP2018500386 A JP 2018500386A JP 2018500386 A JP2018500386 A JP 2018500386A JP 2018519528 A5 JP2018519528 A5 JP 2018519528A5
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- Prior art keywords
- application
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- july
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/795,729 | 2015-07-09 | ||
| US14/795,729 US9927317B2 (en) | 2015-07-09 | 2015-07-09 | Ionization pressure gauge with bias voltage and emission current control and measurement |
| PCT/US2016/032070 WO2017007531A1 (en) | 2015-07-09 | 2016-05-12 | Ionization pressure gauge with bias voltage and emission current control and measurement |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018519528A JP2018519528A (ja) | 2018-07-19 |
| JP2018519528A5 true JP2018519528A5 (OSRAM) | 2019-06-27 |
| JP6814789B2 JP6814789B2 (ja) | 2021-01-20 |
Family
ID=56084395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018500386A Expired - Fee Related JP6814789B2 (ja) | 2015-07-09 | 2016-05-12 | バイアス電圧及び放出電流の制御及び測定を伴う電離圧力計 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9927317B2 (OSRAM) |
| EP (1) | EP3298374B1 (OSRAM) |
| JP (1) | JP6814789B2 (OSRAM) |
| KR (1) | KR102228612B1 (OSRAM) |
| CN (1) | CN107850506B (OSRAM) |
| DK (1) | DK3298374T3 (OSRAM) |
| WO (1) | WO2017007531A1 (OSRAM) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9927317B2 (en) | 2015-07-09 | 2018-03-27 | Mks Instruments, Inc. | Ionization pressure gauge with bias voltage and emission current control and measurement |
| EP3443579B1 (en) * | 2016-05-02 | 2021-03-17 | MKS Instruments, Inc. | Cold cathode ionization vacuum gauge with multiple cathodes |
| WO2019244826A1 (ja) * | 2018-06-18 | 2019-12-26 | 株式会社アルバック | 電離真空計及び制御装置 |
| CN108918026B (zh) * | 2018-09-11 | 2020-12-25 | 北京东方计量测试研究所 | 一种热阴极电离真空计电参数校准装置及方法 |
| CN116362179B (zh) * | 2023-03-24 | 2023-11-17 | 深圳京鸿源科技有限公司 | 一种基于动态调节mosfet电路功耗的控制方法 |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4035720A (en) * | 1975-12-31 | 1977-07-12 | Harvey Philip C | Ion gauge system |
| US4158794A (en) * | 1978-07-14 | 1979-06-19 | P. R. Mallory & Co. Inc. | Drive means and method for vacuum fluorescent display systems |
| JPS5697865A (en) * | 1980-01-07 | 1981-08-06 | Hitachi Ltd | Ionization detector |
| GB2105047B (en) | 1981-08-28 | 1986-04-03 | British Oxygen Co Ltd | Pirani gauges |
| JPS60157151A (ja) * | 1984-01-25 | 1985-08-17 | Hitachi Ltd | 真空排気制御装置 |
| CN85200112U (zh) * | 1985-04-01 | 1986-09-24 | 北京大学 | 饿流放大式电离真空计发射电流稳定器 |
| JP2672950B2 (ja) * | 1987-10-20 | 1997-11-05 | 株式会社芝浦製作所 | エミッションコントロール装置 |
| DE3930699C2 (de) * | 1989-09-14 | 1994-02-03 | Perzl Peter | Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung |
| US5250906A (en) | 1991-10-17 | 1993-10-05 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| US5608384A (en) | 1992-10-23 | 1997-03-04 | Sentech Corporation | Method and apparatus for monitoring for the presence of a gas |
| US5801535A (en) | 1996-11-12 | 1998-09-01 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| JP3734913B2 (ja) | 1997-01-27 | 2006-01-11 | 株式会社アルバック | 電離真空計制御装置 |
| US6025723A (en) * | 1997-08-27 | 2000-02-15 | Granville-Phillips Company | Miniature ionization gauge utilizing multiple ion collectors |
| JP3324522B2 (ja) | 1998-09-16 | 2002-09-17 | 日本電気株式会社 | 可変利得増幅回路及び利得制御方法 |
| JP4339948B2 (ja) | 1999-02-25 | 2009-10-07 | キヤノンアネルバ株式会社 | 熱陰極電離真空計 |
| JP4493139B2 (ja) | 2000-02-02 | 2010-06-30 | キヤノンアネルバ株式会社 | 電離真空計 |
| JP4092246B2 (ja) | 2002-05-27 | 2008-05-28 | インフィネオン テクノロジーズ アクチエンゲゼルシャフト | パワースイッチデバイス |
| US6756785B2 (en) | 2002-07-25 | 2004-06-29 | Mks Instruments, Inc. | Pressure controlled degas system for hot cathode ionization pressure gauges |
| US7295015B2 (en) | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
| KR20060131979A (ko) * | 2004-03-12 | 2006-12-20 | 브룩스 오토메이션, 인크. | 이온화 게이지 |
| JP3108712U (ja) | 2004-11-11 | 2005-04-28 | アルプス電気株式会社 | 可変利得増幅回路 |
| EP1698878A1 (en) * | 2005-03-04 | 2006-09-06 | Inficon GmbH | Electrode configuration and pressure measuring apparatus |
| WO2006121173A1 (ja) | 2005-05-09 | 2006-11-16 | Vaclab Inc. | 電離真空計 |
| CN101411149A (zh) | 2006-03-27 | 2009-04-15 | Nxp股份有限公司 | 具有匹配输出阻抗的低电压和低功耗差分驱动器 |
| US7429863B2 (en) | 2006-07-18 | 2008-09-30 | Brooks Automation, Inc. | Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments |
| CN101657718B (zh) * | 2007-04-16 | 2013-01-30 | 株式会社爱发科 | 质谱仪的控制方法和质谱仪 |
| CN101952703A (zh) | 2007-12-19 | 2011-01-19 | 布鲁克机械公司 | 具有电子倍增器冷发射源的离子计 |
| JP5728728B2 (ja) | 2008-02-21 | 2015-06-03 | エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計 |
| JP5136892B2 (ja) * | 2008-03-03 | 2013-02-06 | 株式会社ネットコムセック | 電圧制御装置、電源装置、電子管及び高周波回路システム |
| JP5223497B2 (ja) | 2008-06-27 | 2013-06-26 | 富士通セミコンダクター株式会社 | ピークホールド回路 |
| JP2012503199A (ja) | 2008-09-19 | 2012-02-02 | ブルックス オートメーション インコーポレイテッド | 放出電流およびバイアス電圧を制御する電離真空計 |
| JP4636461B2 (ja) | 2009-01-13 | 2011-02-23 | セイコーインスツル株式会社 | 電源電圧監視回路、および該電源電圧監視回路を備える電子回路 |
| US8288715B2 (en) | 2009-03-18 | 2012-10-16 | Ulvac, Inc. | Oxygen detection method, air leakage determination method, gas component detection device, and vacuum processing apparatus |
| JP5716346B2 (ja) | 2010-10-13 | 2015-05-13 | 株式会社リコー | 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置 |
| JP2014164577A (ja) | 2013-02-26 | 2014-09-08 | Sumitomo Electric Ind Ltd | 駆動回路 |
| US9927317B2 (en) | 2015-07-09 | 2018-03-27 | Mks Instruments, Inc. | Ionization pressure gauge with bias voltage and emission current control and measurement |
-
2015
- 2015-07-09 US US14/795,729 patent/US9927317B2/en active Active
-
2016
- 2016-05-12 DK DK16725689T patent/DK3298374T3/da active
- 2016-05-12 KR KR1020187003398A patent/KR102228612B1/ko not_active Expired - Fee Related
- 2016-05-12 CN CN201680040313.7A patent/CN107850506B/zh active Active
- 2016-05-12 WO PCT/US2016/032070 patent/WO2017007531A1/en not_active Ceased
- 2016-05-12 EP EP16725689.0A patent/EP3298374B1/en active Active
- 2016-05-12 JP JP2018500386A patent/JP6814789B2/ja not_active Expired - Fee Related
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