DK3298374T3 - Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm - Google Patents
Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm Download PDFInfo
- Publication number
- DK3298374T3 DK3298374T3 DK16725689T DK16725689T DK3298374T3 DK 3298374 T3 DK3298374 T3 DK 3298374T3 DK 16725689 T DK16725689 T DK 16725689T DK 16725689 T DK16725689 T DK 16725689T DK 3298374 T3 DK3298374 T3 DK 3298374T3
- Authority
- DK
- Denmark
- Prior art keywords
- bias
- regulation
- measurement
- pressure gauge
- emission current
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/30—Vacuum gauges by making use of ionisation effects
- G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/795,729 US9927317B2 (en) | 2015-07-09 | 2015-07-09 | Ionization pressure gauge with bias voltage and emission current control and measurement |
| PCT/US2016/032070 WO2017007531A1 (en) | 2015-07-09 | 2016-05-12 | Ionization pressure gauge with bias voltage and emission current control and measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DK3298374T3 true DK3298374T3 (da) | 2019-11-11 |
Family
ID=56084395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DK16725689T DK3298374T3 (da) | 2015-07-09 | 2016-05-12 | Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9927317B2 (da) |
| EP (1) | EP3298374B1 (da) |
| JP (1) | JP6814789B2 (da) |
| KR (1) | KR102228612B1 (da) |
| CN (1) | CN107850506B (da) |
| DK (1) | DK3298374T3 (da) |
| WO (1) | WO2017007531A1 (da) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9927317B2 (en) | 2015-07-09 | 2018-03-27 | Mks Instruments, Inc. | Ionization pressure gauge with bias voltage and emission current control and measurement |
| EP3443579B1 (en) * | 2016-05-02 | 2021-03-17 | MKS Instruments, Inc. | Cold cathode ionization vacuum gauge with multiple cathodes |
| JP6772391B2 (ja) * | 2018-06-18 | 2020-10-21 | 株式会社アルバック | 電離真空計及び制御装置 |
| CN108918026B (zh) * | 2018-09-11 | 2020-12-25 | 北京东方计量测试研究所 | 一种热阴极电离真空计电参数校准装置及方法 |
| CN116362179B (zh) * | 2023-03-24 | 2023-11-17 | 深圳京鸿源科技有限公司 | 一种基于动态调节mosfet电路功耗的控制方法 |
Family Cites Families (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4035720A (en) * | 1975-12-31 | 1977-07-12 | Harvey Philip C | Ion gauge system |
| US4158794A (en) * | 1978-07-14 | 1979-06-19 | P. R. Mallory & Co. Inc. | Drive means and method for vacuum fluorescent display systems |
| JPS5697865A (en) * | 1980-01-07 | 1981-08-06 | Hitachi Ltd | Ionization detector |
| GB2105047B (en) | 1981-08-28 | 1986-04-03 | British Oxygen Co Ltd | Pirani gauges |
| CN85200112U (zh) * | 1985-04-01 | 1986-09-24 | 北京大学 | 饿流放大式电离真空计发射电流稳定器 |
| DE3930699C2 (de) * | 1989-09-14 | 1994-02-03 | Perzl Peter | Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung |
| US5250906A (en) | 1991-10-17 | 1993-10-05 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| US5608384A (en) | 1992-10-23 | 1997-03-04 | Sentech Corporation | Method and apparatus for monitoring for the presence of a gas |
| US5801535A (en) | 1996-11-12 | 1998-09-01 | Granville-Phillips Company | Ionization gauge and method of using and calibrating same |
| JP3734913B2 (ja) | 1997-01-27 | 2006-01-11 | 株式会社アルバック | 電離真空計制御装置 |
| US6025723A (en) * | 1997-08-27 | 2000-02-15 | Granville-Phillips Company | Miniature ionization gauge utilizing multiple ion collectors |
| JP3324522B2 (ja) | 1998-09-16 | 2002-09-17 | 日本電気株式会社 | 可変利得増幅回路及び利得制御方法 |
| JP4339948B2 (ja) | 1999-02-25 | 2009-10-07 | キヤノンアネルバ株式会社 | 熱陰極電離真空計 |
| JP4493139B2 (ja) | 2000-02-02 | 2010-06-30 | キヤノンアネルバ株式会社 | 電離真空計 |
| JP4092246B2 (ja) | 2002-05-27 | 2008-05-28 | インフィネオン テクノロジーズ アクチエンゲゼルシャフト | パワースイッチデバイス |
| US6756785B2 (en) | 2002-07-25 | 2004-06-29 | Mks Instruments, Inc. | Pressure controlled degas system for hot cathode ionization pressure gauges |
| US7295015B2 (en) | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
| JP2007529096A (ja) * | 2004-03-12 | 2007-10-18 | ブルックス オートメーション インコーポレイテッド | 電離真空計 |
| JP3108712U (ja) | 2004-11-11 | 2005-04-28 | アルプス電気株式会社 | 可変利得増幅回路 |
| EP1698878A1 (en) * | 2005-03-04 | 2006-09-06 | Inficon GmbH | Electrode configuration and pressure measuring apparatus |
| US7741852B2 (en) | 2005-05-09 | 2010-06-22 | Mori Patent Office | Ionization vacuum gauge |
| EP2002623A1 (en) | 2006-03-27 | 2008-12-17 | Nxp B.V. | A low voltage and low power differential driver with matching output impedances |
| US7429863B2 (en) | 2006-07-18 | 2008-09-30 | Brooks Automation, Inc. | Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments |
| WO2008133074A1 (ja) * | 2007-04-16 | 2008-11-06 | Ulvac, Inc. | 質量分析計の制御方法及び質量分析計 |
| KR101541273B1 (ko) | 2007-12-19 | 2015-08-03 | 엠케이에스 인스트루먼츠, 인코포레이티드 | 전자 멀티플라이어 냉 방출 소스를 갖는 이온화 게이지 |
| WO2009105506A1 (en) | 2008-02-21 | 2009-08-27 | Brooks Automation, Inc. | Ionization gauge with operational parameters and geometry designed for high pressure operation |
| JP5136892B2 (ja) * | 2008-03-03 | 2013-02-06 | 株式会社ネットコムセック | 電圧制御装置、電源装置、電子管及び高周波回路システム |
| JP5223497B2 (ja) | 2008-06-27 | 2013-06-26 | 富士通セミコンダクター株式会社 | ピークホールド回路 |
| CN102159929A (zh) | 2008-09-19 | 2011-08-17 | 布鲁克机械公司 | 具有发射电流及偏压电位控制的电离计 |
| JP4636461B2 (ja) | 2009-01-13 | 2011-02-23 | セイコーインスツル株式会社 | 電源電圧監視回路、および該電源電圧監視回路を備える電子回路 |
| JP5054226B2 (ja) | 2009-03-18 | 2012-10-24 | 株式会社アルバック | 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置 |
| JP5716346B2 (ja) | 2010-10-13 | 2015-05-13 | 株式会社リコー | 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置 |
| JP2014164577A (ja) | 2013-02-26 | 2014-09-08 | Sumitomo Electric Ind Ltd | 駆動回路 |
| US9927317B2 (en) | 2015-07-09 | 2018-03-27 | Mks Instruments, Inc. | Ionization pressure gauge with bias voltage and emission current control and measurement |
-
2015
- 2015-07-09 US US14/795,729 patent/US9927317B2/en active Active
-
2016
- 2016-05-12 CN CN201680040313.7A patent/CN107850506B/zh active Active
- 2016-05-12 JP JP2018500386A patent/JP6814789B2/ja active Active
- 2016-05-12 WO PCT/US2016/032070 patent/WO2017007531A1/en active Application Filing
- 2016-05-12 EP EP16725689.0A patent/EP3298374B1/en active Active
- 2016-05-12 KR KR1020187003398A patent/KR102228612B1/ko active IP Right Grant
- 2016-05-12 DK DK16725689T patent/DK3298374T3/da active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2018519528A (ja) | 2018-07-19 |
| WO2017007531A1 (en) | 2017-01-12 |
| KR102228612B1 (ko) | 2021-03-16 |
| US9927317B2 (en) | 2018-03-27 |
| CN107850506A (zh) | 2018-03-27 |
| KR20180027542A (ko) | 2018-03-14 |
| EP3298374A1 (en) | 2018-03-28 |
| JP6814789B2 (ja) | 2021-01-20 |
| CN107850506B (zh) | 2020-09-11 |
| EP3298374B1 (en) | 2019-09-25 |
| US20170010172A1 (en) | 2017-01-12 |
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