DK3298374T3 - Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm - Google Patents

Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm Download PDF

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Publication number
DK3298374T3
DK3298374T3 DK16725689T DK16725689T DK3298374T3 DK 3298374 T3 DK3298374 T3 DK 3298374T3 DK 16725689 T DK16725689 T DK 16725689T DK 16725689 T DK16725689 T DK 16725689T DK 3298374 T3 DK3298374 T3 DK 3298374T3
Authority
DK
Denmark
Prior art keywords
bias
regulation
measurement
pressure gauge
emission current
Prior art date
Application number
DK16725689T
Other languages
Danish (da)
English (en)
Inventor
Douglas C Hansen
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Application granted granted Critical
Publication of DK3298374T3 publication Critical patent/DK3298374T3/da

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
DK16725689T 2015-07-09 2016-05-12 Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm DK3298374T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/795,729 US9927317B2 (en) 2015-07-09 2015-07-09 Ionization pressure gauge with bias voltage and emission current control and measurement
PCT/US2016/032070 WO2017007531A1 (en) 2015-07-09 2016-05-12 Ionization pressure gauge with bias voltage and emission current control and measurement

Publications (1)

Publication Number Publication Date
DK3298374T3 true DK3298374T3 (da) 2019-11-11

Family

ID=56084395

Family Applications (1)

Application Number Title Priority Date Filing Date
DK16725689T DK3298374T3 (da) 2015-07-09 2016-05-12 Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm

Country Status (7)

Country Link
US (1) US9927317B2 (OSRAM)
EP (1) EP3298374B1 (OSRAM)
JP (1) JP6814789B2 (OSRAM)
KR (1) KR102228612B1 (OSRAM)
CN (1) CN107850506B (OSRAM)
DK (1) DK3298374T3 (OSRAM)
WO (1) WO2017007531A1 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
EP3443579B1 (en) * 2016-05-02 2021-03-17 MKS Instruments, Inc. Cold cathode ionization vacuum gauge with multiple cathodes
WO2019244826A1 (ja) * 2018-06-18 2019-12-26 株式会社アルバック 電離真空計及び制御装置
CN108918026B (zh) * 2018-09-11 2020-12-25 北京东方计量测试研究所 一种热阴极电离真空计电参数校准装置及方法
CN116362179B (zh) * 2023-03-24 2023-11-17 深圳京鸿源科技有限公司 一种基于动态调节mosfet电路功耗的控制方法

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JPS60157151A (ja) * 1984-01-25 1985-08-17 Hitachi Ltd 真空排気制御装置
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JP2672950B2 (ja) * 1987-10-20 1997-11-05 株式会社芝浦製作所 エミッションコントロール装置
DE3930699C2 (de) * 1989-09-14 1994-02-03 Perzl Peter Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung
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JP3734913B2 (ja) 1997-01-27 2006-01-11 株式会社アルバック 電離真空計制御装置
US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
JP3324522B2 (ja) 1998-09-16 2002-09-17 日本電気株式会社 可変利得増幅回路及び利得制御方法
JP4339948B2 (ja) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 熱陰極電離真空計
JP4493139B2 (ja) 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
JP4092246B2 (ja) 2002-05-27 2008-05-28 インフィネオン テクノロジーズ アクチエンゲゼルシャフト パワースイッチデバイス
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JP3108712U (ja) 2004-11-11 2005-04-28 アルプス電気株式会社 可変利得増幅回路
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WO2006121173A1 (ja) 2005-05-09 2006-11-16 Vaclab Inc. 電離真空計
CN101411149A (zh) 2006-03-27 2009-04-15 Nxp股份有限公司 具有匹配输出阻抗的低电压和低功耗差分驱动器
US7429863B2 (en) 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
CN101657718B (zh) * 2007-04-16 2013-01-30 株式会社爱发科 质谱仪的控制方法和质谱仪
CN101952703A (zh) 2007-12-19 2011-01-19 布鲁克机械公司 具有电子倍增器冷发射源的离子计
JP5728728B2 (ja) 2008-02-21 2015-06-03 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 高圧力動作用に設計された動作パラメータと形状とを有する電離真空計
JP5136892B2 (ja) * 2008-03-03 2013-02-06 株式会社ネットコムセック 電圧制御装置、電源装置、電子管及び高周波回路システム
JP5223497B2 (ja) 2008-06-27 2013-06-26 富士通セミコンダクター株式会社 ピークホールド回路
JP2012503199A (ja) 2008-09-19 2012-02-02 ブルックス オートメーション インコーポレイテッド 放出電流およびバイアス電圧を制御する電離真空計
JP4636461B2 (ja) 2009-01-13 2011-02-23 セイコーインスツル株式会社 電源電圧監視回路、および該電源電圧監視回路を備える電子回路
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JP5716346B2 (ja) 2010-10-13 2015-05-13 株式会社リコー 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置
JP2014164577A (ja) 2013-02-26 2014-09-08 Sumitomo Electric Ind Ltd 駆動回路
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement

Also Published As

Publication number Publication date
US9927317B2 (en) 2018-03-27
JP6814789B2 (ja) 2021-01-20
CN107850506B (zh) 2020-09-11
KR20180027542A (ko) 2018-03-14
EP3298374A1 (en) 2018-03-28
WO2017007531A1 (en) 2017-01-12
KR102228612B1 (ko) 2021-03-16
CN107850506A (zh) 2018-03-27
EP3298374B1 (en) 2019-09-25
JP2018519528A (ja) 2018-07-19
US20170010172A1 (en) 2017-01-12

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DK3298374T3 (da) Ioniseringstrykmåler med forspænding og regulering og måling af emissionsstrøm