JP2018511816A5 - - Google Patents
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- Publication number
- JP2018511816A5 JP2018511816A5 JP2017538195A JP2017538195A JP2018511816A5 JP 2018511816 A5 JP2018511816 A5 JP 2018511816A5 JP 2017538195 A JP2017538195 A JP 2017538195A JP 2017538195 A JP2017538195 A JP 2017538195A JP 2018511816 A5 JP2018511816 A5 JP 2018511816A5
- Authority
- JP
- Japan
- Prior art keywords
- antioxidant
- ribs
- attaching
- wgp
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims 15
- 239000003963 antioxidant agent Substances 0.000 claims 13
- 230000003078 antioxidant effect Effects 0.000 claims 13
- 238000010521 absorption reaction Methods 0.000 claims 6
- 239000011248 coating agent Substances 0.000 claims 6
- 238000000576 coating method Methods 0.000 claims 6
- 229910001404 rare earth metal oxide Inorganic materials 0.000 claims 6
- 238000000034 method Methods 0.000 claims 5
- 230000002209 hydrophobic effect Effects 0.000 claims 4
- 238000007740 vapor deposition Methods 0.000 claims 4
- 230000004888 barrier function Effects 0.000 claims 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 3
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 3
- ABLZXFCXXLZCGV-UHFFFAOYSA-N Phosphorous acid Chemical group OP(O)=O ABLZXFCXXLZCGV-UHFFFAOYSA-N 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 125000003118 aryl group Chemical group 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 125000001165 hydrophobic group Chemical group 0.000 claims 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910001928 zirconium oxide Inorganic materials 0.000 claims 2
- 229910052729 chemical element Inorganic materials 0.000 claims 1
- 125000003636 chemical group Chemical group 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (15)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562142854P | 2015-04-03 | 2015-04-03 | |
| US62/142,854 | 2015-04-03 | ||
| US201562190188P | 2015-07-08 | 2015-07-08 | |
| US62/190,188 | 2015-07-08 | ||
| US201562209024P | 2015-08-24 | 2015-08-24 | |
| US62/209,024 | 2015-08-24 | ||
| US201562216782P | 2015-09-10 | 2015-09-10 | |
| US62/216,782 | 2015-09-10 | ||
| US201562242883P | 2015-10-16 | 2015-10-16 | |
| US62/242,883 | 2015-10-16 | ||
| US201562265773P | 2015-12-10 | 2015-12-10 | |
| US62/265,773 | 2015-12-10 | ||
| US15/078,495 | 2016-03-23 | ||
| US15/078,495 US10054717B2 (en) | 2015-04-03 | 2016-03-23 | Oxidation and moisture barrier layers for wire grid polarizer |
| PCT/US2016/024713 WO2016160803A1 (en) | 2015-04-03 | 2016-03-29 | Oxidation and moisture barrier layers for wire grid polarizer |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020088222A Division JP7088497B2 (ja) | 2015-04-03 | 2020-05-20 | ワイヤグリッドポラライザ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018511816A JP2018511816A (ja) | 2018-04-26 |
| JP2018511816A5 true JP2018511816A5 (https=) | 2018-09-06 |
| JP7059497B2 JP7059497B2 (ja) | 2022-04-26 |
Family
ID=57007562
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017538195A Active JP7059497B2 (ja) | 2015-04-03 | 2016-03-29 | ワイヤグリッドポラライザ用の酸化バリア層および吸湿バリア層 |
| JP2020088222A Active JP7088497B2 (ja) | 2015-04-03 | 2020-05-20 | ワイヤグリッドポラライザ |
| JP2022003989A Pending JP2022044664A (ja) | 2015-04-03 | 2022-01-13 | ワイヤグリッドポラライザ |
| JP2022089259A Pending JP2022107723A (ja) | 2015-04-03 | 2022-05-31 | 水溶性材料を使用したワイヤグリッドポラライザ |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020088222A Active JP7088497B2 (ja) | 2015-04-03 | 2020-05-20 | ワイヤグリッドポラライザ |
| JP2022003989A Pending JP2022044664A (ja) | 2015-04-03 | 2022-01-13 | ワイヤグリッドポラライザ |
| JP2022089259A Pending JP2022107723A (ja) | 2015-04-03 | 2022-05-31 | 水溶性材料を使用したワイヤグリッドポラライザ |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10054717B2 (https=) |
| EP (1) | EP3237943B1 (https=) |
| JP (4) | JP7059497B2 (https=) |
| KR (1) | KR20170134422A (https=) |
| CN (2) | CN111766656A (https=) |
| WO (1) | WO2016160803A1 (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102422109B1 (ko) | 2015-01-08 | 2022-07-19 | 삼성디스플레이 주식회사 | 액정 표시 장치 및 이를 제조하는 방법 |
| US20160291227A1 (en) * | 2015-04-03 | 2016-10-06 | Moxtek, Inc. | Wire Grid Polarizer with Water-Soluble Materials |
| US10534120B2 (en) | 2015-04-03 | 2020-01-14 | Moxtek, Inc. | Wire grid polarizer with protected wires |
| US10444410B2 (en) | 2016-08-16 | 2019-10-15 | Moxtek, Inc. | Overcoat wire grid polarizer having conformal coat layer with oxidation barrier and moisture barrier |
| WO2018097873A1 (en) * | 2016-11-22 | 2018-05-31 | Moxtek, Inc. | Overcoat wire grid polarizer |
| CN107102394B (zh) * | 2017-07-03 | 2020-05-22 | 京东方科技集团股份有限公司 | 一种线栅偏振器、其制作方法及显示面板 |
| JP2019061125A (ja) * | 2017-09-27 | 2019-04-18 | デクセリアルズ株式会社 | 偏光板及びその製造方法、並びに光学機器 |
| JP6678630B2 (ja) * | 2017-09-28 | 2020-04-08 | デクセリアルズ株式会社 | 偏光板及びこれを備える光学機器 |
| US10852464B2 (en) * | 2018-03-01 | 2020-12-01 | Moxtek, Inc. | High-contrast polarizer |
| JP7333168B2 (ja) | 2018-11-19 | 2023-08-24 | デクセリアルズ株式会社 | 偏光素子、偏光素子の製造方法及び光学機器 |
| US11746418B2 (en) * | 2018-12-03 | 2023-09-05 | Moxtek, Inc. | Chemical vapor deposition of thick inorganic coating on a polarizer |
| PH12020050238A1 (en) * | 2019-08-27 | 2021-06-14 | Moxtek Inc | Wire grid polarizer with slanted support-ribs |
| DE112022000926T5 (de) * | 2021-02-03 | 2023-11-16 | Gyrus Acmi, Inc. D/B/A Olympus Surgical Technologies America | Strukturierte elektrode für die dampftaschenentzündung |
| US20220291434A1 (en) * | 2021-03-12 | 2022-09-15 | Moxtek, Inc. | Wire Grid Polarizer Wire Sidewall Protection |
| US12554056B2 (en) | 2021-07-16 | 2026-02-17 | Moxtek, Inc. | Wire grid polarizer having wires with silicon core and silicon dioxide ribs |
| US20230236347A1 (en) * | 2022-01-26 | 2023-07-27 | Moxtek, Inc. | Reflective ultraviolet wire grid polarizer |
| TW202422131A (zh) * | 2022-11-22 | 2024-06-01 | 日商牛尾電機股份有限公司 | 反射型相位差構造體及其製造方法 |
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| US20160291227A1 (en) * | 2015-04-03 | 2016-10-06 | Moxtek, Inc. | Wire Grid Polarizer with Water-Soluble Materials |
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-
2016
- 2016-03-23 US US15/078,495 patent/US10054717B2/en active Active
- 2016-03-29 CN CN202010697586.7A patent/CN111766656A/zh active Pending
- 2016-03-29 JP JP2017538195A patent/JP7059497B2/ja active Active
- 2016-03-29 KR KR1020177027671A patent/KR20170134422A/ko not_active Ceased
- 2016-03-29 EP EP16773995.2A patent/EP3237943B1/en active Active
- 2016-03-29 WO PCT/US2016/024713 patent/WO2016160803A1/en not_active Ceased
- 2016-03-29 CN CN201680018879.XA patent/CN107533172B/zh active Active
-
2020
- 2020-05-20 JP JP2020088222A patent/JP7088497B2/ja active Active
-
2022
- 2022-01-13 JP JP2022003989A patent/JP2022044664A/ja active Pending
- 2022-05-31 JP JP2022089259A patent/JP2022107723A/ja active Pending
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