JP2018509300A5 - - Google Patents

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Publication number
JP2018509300A5
JP2018509300A5 JP2017545573A JP2017545573A JP2018509300A5 JP 2018509300 A5 JP2018509300 A5 JP 2018509300A5 JP 2017545573 A JP2017545573 A JP 2017545573A JP 2017545573 A JP2017545573 A JP 2017545573A JP 2018509300 A5 JP2018509300 A5 JP 2018509300A5
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JP
Japan
Prior art keywords
laser beam
positioning system
workpiece
positions
spot
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JP2017545573A
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English (en)
Japanese (ja)
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JP6785238B2 (ja
JP2018509300A (ja
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Priority claimed from PCT/US2016/019752 external-priority patent/WO2016138367A1/en
Publication of JP2018509300A publication Critical patent/JP2018509300A/ja
Publication of JP2018509300A5 publication Critical patent/JP2018509300A5/ja
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Publication of JP6785238B2 publication Critical patent/JP6785238B2/ja
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JP2017545573A 2015-02-27 2016-02-26 クロス軸微細加工のための高速ビーム操作 Active JP6785238B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562126420P 2015-02-27 2015-02-27
US62/126,420 2015-02-27
PCT/US2016/019752 WO2016138367A1 (en) 2015-02-27 2016-02-26 Fast beam manipulation for cross-axis micromachining

Publications (3)

Publication Number Publication Date
JP2018509300A JP2018509300A (ja) 2018-04-05
JP2018509300A5 true JP2018509300A5 (enExample) 2019-04-04
JP6785238B2 JP6785238B2 (ja) 2020-11-18

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JP2017545573A Active JP6785238B2 (ja) 2015-02-27 2016-02-26 クロス軸微細加工のための高速ビーム操作

Country Status (6)

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US (1) US10507544B2 (enExample)
JP (1) JP6785238B2 (enExample)
KR (1) KR102387132B1 (enExample)
CN (1) CN107405724B (enExample)
TW (1) TWI718127B (enExample)
WO (1) WO2016138367A1 (enExample)

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