JP2018506171A5 - - Google Patents
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- JP2018506171A5 JP2018506171A5 JP2017530257A JP2017530257A JP2018506171A5 JP 2018506171 A5 JP2018506171 A5 JP 2018506171A5 JP 2017530257 A JP2017530257 A JP 2017530257A JP 2017530257 A JP2017530257 A JP 2017530257A JP 2018506171 A5 JP2018506171 A5 JP 2018506171A5
- Authority
- JP
- Japan
- Prior art keywords
- chip
- support substrate
- substrate
- tso
- vss
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000000758 substrate Substances 0.000 claims description 60
- 229920000642 polymer Polymers 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- 239000000945 filler Substances 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- SWPMTVXRLXPNDP-UHFFFAOYSA-N 4-hydroxy-2,6,6-trimethylcyclohexene-1-carbaldehyde Chemical compound CC1=C(C=O)C(C)(C)CC(O)C1 SWPMTVXRLXPNDP-UHFFFAOYSA-N 0.000 claims description 2
- 101100460147 Sarcophaga bullata NEMS gene Proteins 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000011796 hollow space material Substances 0.000 claims description 2
- 239000002105 nanoparticle Substances 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 238000005304 joining Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014118214.6 | 2014-12-09 | ||
| DE102014118214.6A DE102014118214B4 (de) | 2014-12-09 | 2014-12-09 | Einfach herstellbares elektrisches Bauelement und Verfahren zur Herstellung eines elektrischen Bauelements |
| PCT/EP2015/074148 WO2016091438A1 (de) | 2014-12-09 | 2015-10-19 | Einfach herstellbares elektrisches bauelement und verfahren zur herstellung eines elektrischen bauelements |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018506171A JP2018506171A (ja) | 2018-03-01 |
| JP2018506171A5 true JP2018506171A5 (enExample) | 2018-11-08 |
| JP6672301B2 JP6672301B2 (ja) | 2020-03-25 |
Family
ID=54330770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017530257A Active JP6672301B2 (ja) | 2014-12-09 | 2015-10-19 | 簡易に製造可能な電気部品及び電気部品の製造方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US11245977B2 (enExample) |
| EP (1) | EP3231010B1 (enExample) |
| JP (1) | JP6672301B2 (enExample) |
| KR (1) | KR102561741B1 (enExample) |
| CN (1) | CN107004664B (enExample) |
| BR (1) | BR112017012118A2 (enExample) |
| DE (1) | DE102014118214B4 (enExample) |
| ES (1) | ES2873364T3 (enExample) |
| MX (1) | MX380533B (enExample) |
| WO (1) | WO2016091438A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11067768B2 (en) * | 2017-11-16 | 2021-07-20 | Tdk Taiwan Corp. | Optical member driving mechanism |
| CN111003682A (zh) * | 2018-10-08 | 2020-04-14 | 凤凰先驱股份有限公司 | 电子封装件及其制法 |
| CN109999343B (zh) * | 2019-03-30 | 2020-08-25 | 深圳硅基仿生科技有限公司 | 植入式器件的电子封装体及视网膜刺激器 |
| CN111422821A (zh) * | 2020-03-13 | 2020-07-17 | 清华大学 | 微系统封装方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7434305B2 (en) | 2000-11-28 | 2008-10-14 | Knowles Electronics, Llc. | Method of manufacturing a microphone |
| DE10164494B9 (de) * | 2001-12-28 | 2014-08-21 | Epcos Ag | Verkapseltes Bauelement mit geringer Bauhöhe sowie Verfahren zur Herstellung |
| US6781231B2 (en) * | 2002-09-10 | 2004-08-24 | Knowles Electronics Llc | Microelectromechanical system package with environmental and interference shield |
| JP4484544B2 (ja) | 2004-02-25 | 2010-06-16 | 京セラ株式会社 | 高周波モジュールの製造方法 |
| US7323675B2 (en) | 2005-09-21 | 2008-01-29 | Sigurd Microelectronics Corp. | Packaging structure of a light-sensing device with a spacer wall |
| DE102005053765B4 (de) | 2005-11-10 | 2016-04-14 | Epcos Ag | MEMS-Package und Verfahren zur Herstellung |
| JP2008091639A (ja) * | 2006-10-02 | 2008-04-17 | Nec Electronics Corp | 電子装置およびその製造方法 |
| JP4903540B2 (ja) * | 2006-11-29 | 2012-03-28 | 京セラ株式会社 | 微小電子機械部品封止用基板及び複数個取り形態の微小電子機械部品封止用基板、並びに微小電子機械装置及び微小電子機械装置の製造方法 |
| KR100826394B1 (ko) * | 2007-05-17 | 2008-05-02 | 삼성전기주식회사 | 반도체 패키지 제조방법 |
| CN101325823B (zh) * | 2007-06-11 | 2011-08-17 | 美律实业股份有限公司 | 硅晶麦克风的封装构造 |
| TWI348872B (en) | 2007-10-17 | 2011-09-11 | Ind Tech Res Inst | Electro-acoustic sensing device |
| US8900931B2 (en) | 2007-12-26 | 2014-12-02 | Skyworks Solutions, Inc. | In-situ cavity integrated circuit package |
| DE102009019446B4 (de) | 2009-04-29 | 2014-11-13 | Epcos Ag | MEMS Mikrofon |
| US8227904B2 (en) | 2009-06-24 | 2012-07-24 | Intel Corporation | Multi-chip package and method of providing die-to-die interconnects in same |
| US8428286B2 (en) * | 2009-11-30 | 2013-04-23 | Infineon Technologies Ag | MEMS microphone packaging and MEMS microphone module |
| TWI451538B (zh) * | 2010-01-19 | 2014-09-01 | Gen Mems Corp | 微機電系統（ｍｅｍｓ）麥克風封裝體及其製造方法 |
| DE102010006132B4 (de) | 2010-01-29 | 2013-05-08 | Epcos Ag | Miniaturisiertes elektrisches Bauelement mit einem Stapel aus einem MEMS und einem ASIC |
| EP2420470B1 (en) * | 2010-08-18 | 2015-10-14 | Nxp B.V. | MEMS Microphone |
| US9239386B2 (en) * | 2011-10-05 | 2016-01-19 | Infineon Technologies Ag | Sonic sensors and packages |
| US9210516B2 (en) * | 2012-04-23 | 2015-12-08 | Infineon Technologies Ag | Packaged MEMS device and method of calibrating a packaged MEMS device |
| JP5565544B2 (ja) * | 2012-08-01 | 2014-08-06 | 株式会社村田製作所 | 電子部品及び電子部品モジュール |
| CN102917303B (zh) * | 2012-10-30 | 2015-03-18 | 无锡芯奥微传感技术有限公司 | 塑料壳封装麦克风 |
| US9040349B2 (en) * | 2012-11-15 | 2015-05-26 | Amkor Technology, Inc. | Method and system for a semiconductor device package with a die to interposer wafer first bond |
| DE102012112058B4 (de) * | 2012-12-11 | 2020-02-27 | Snaptrack, Inc. | MEMS-Bauelement und Verfahren zur Verkapselung von MEMS-Bauelementen |
| CN103491490B (zh) * | 2013-08-16 | 2019-03-19 | 上海集成电路研发中心有限公司 | 一种mems麦克风结构及其制造方法 |
| CN103888879A (zh) * | 2014-03-31 | 2014-06-25 | 山东共达电声股份有限公司 | 一种指向性mems麦克风 |
| US9666514B2 (en) * | 2015-04-14 | 2017-05-30 | Invensas Corporation | High performance compliant substrate |
| JP6450416B2 (ja) * | 2016-04-29 | 2019-01-09 | キヤノン株式会社 | 超音波トランスデューサ及びその製造方法 |
-
2014
- 2014-12-09 DE DE102014118214.6A patent/DE102014118214B4/de active Active
-
2015
- 2015-10-19 US US15/532,454 patent/US11245977B2/en active Active
- 2015-10-19 CN CN201580063060.0A patent/CN107004664B/zh active Active
- 2015-10-19 KR KR1020177013197A patent/KR102561741B1/ko active Active
- 2015-10-19 WO PCT/EP2015/074148 patent/WO2016091438A1/de not_active Ceased
- 2015-10-19 EP EP15781664.6A patent/EP3231010B1/de active Active
- 2015-10-19 ES ES15781664T patent/ES2873364T3/es active Active
- 2015-10-19 MX MX2017007254A patent/MX380533B/es unknown
- 2015-10-19 BR BR112017012118-2A patent/BR112017012118A2/pt not_active Application Discontinuation
- 2015-10-19 JP JP2017530257A patent/JP6672301B2/ja active Active
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