JP2018142681A5 - - Google Patents
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- Publication number
- JP2018142681A5 JP2018142681A5 JP2017037713A JP2017037713A JP2018142681A5 JP 2018142681 A5 JP2018142681 A5 JP 2018142681A5 JP 2017037713 A JP2017037713 A JP 2017037713A JP 2017037713 A JP2017037713 A JP 2017037713A JP 2018142681 A5 JP2018142681 A5 JP 2018142681A5
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- film
- conversion device
- distance
- normal direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000006243 chemical reaction Methods 0.000 claims 41
- 239000000758 substrate Substances 0.000 claims 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 6
- 150000003377 silicon compounds Chemical class 0.000 claims 4
- 229910052757 nitrogen Inorganic materials 0.000 claims 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 239000012528 membrane Substances 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 150000003609 titanium compounds Chemical class 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017037713A JP6650898B2 (ja) | 2017-02-28 | 2017-02-28 | 光電変換装置、電子機器および輸送機器 |
| US15/905,409 US10431617B2 (en) | 2017-02-28 | 2018-02-26 | Photoelectric conversion device and apparatus |
| CN201810165284.8A CN108511472B (zh) | 2017-02-28 | 2018-02-28 | 光电转换设备和装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017037713A JP6650898B2 (ja) | 2017-02-28 | 2017-02-28 | 光電変換装置、電子機器および輸送機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018142681A JP2018142681A (ja) | 2018-09-13 |
| JP2018142681A5 true JP2018142681A5 (enExample) | 2018-10-25 |
| JP6650898B2 JP6650898B2 (ja) | 2020-02-19 |
Family
ID=63246465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017037713A Active JP6650898B2 (ja) | 2017-02-28 | 2017-02-28 | 光電変換装置、電子機器および輸送機器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10431617B2 (enExample) |
| JP (1) | JP6650898B2 (enExample) |
| CN (1) | CN108511472B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10498947B2 (en) * | 2017-10-30 | 2019-12-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Image sensor including light shielding layer and patterned dielectric layer |
| JP7520558B2 (ja) * | 2020-04-07 | 2024-07-23 | キヤノン株式会社 | 光電変換装置および機器 |
| TWI818248B (zh) | 2021-04-07 | 2023-10-11 | 元太科技工業股份有限公司 | 顯示裝置及其製造方法 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05190818A (ja) | 1992-01-10 | 1993-07-30 | Sony Corp | 固体撮像装置 |
| JP3386286B2 (ja) | 1995-05-24 | 2003-03-17 | 松下電器産業株式会社 | 固体撮像装置 |
| JP3827909B2 (ja) * | 2000-03-21 | 2006-09-27 | シャープ株式会社 | 固体撮像装置およびその製造方法 |
| JP2004319896A (ja) | 2003-04-18 | 2004-11-11 | Seiko Epson Corp | 固体撮像装置及びその製造方法 |
| JP2004356269A (ja) | 2003-05-28 | 2004-12-16 | Canon Inc | 光電変換装置およびその製造方法 |
| US7453109B2 (en) * | 2004-09-03 | 2008-11-18 | Canon Kabushiki Kaisha | Solid-state image sensor and imaging system |
| JP4878117B2 (ja) * | 2004-11-29 | 2012-02-15 | キヤノン株式会社 | 固体撮像装置及び撮像システム |
| JP2006294773A (ja) | 2005-04-08 | 2006-10-26 | Sony Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| JP2007242697A (ja) * | 2006-03-06 | 2007-09-20 | Canon Inc | 撮像装置および撮像システム |
| JP5364989B2 (ja) | 2007-10-02 | 2013-12-11 | ソニー株式会社 | 固体撮像装置およびカメラ |
| JP5314914B2 (ja) * | 2008-04-04 | 2013-10-16 | キヤノン株式会社 | 光電変換装置、撮像システム、設計方法、及び光電変換装置の製造方法 |
| JP2010239076A (ja) | 2009-03-31 | 2010-10-21 | Sony Corp | 固体撮像装置とその製造方法、及び電子機器 |
| JP2011124522A (ja) * | 2009-12-14 | 2011-06-23 | Canon Inc | 光電変換装置 |
| JP2011142234A (ja) | 2010-01-07 | 2011-07-21 | Fujifilm Corp | 固体撮像素子及びその製造方法 |
| JP2011171575A (ja) | 2010-02-19 | 2011-09-01 | Panasonic Corp | 固体撮像素子とその製造方法 |
| JP2012182426A (ja) * | 2011-02-09 | 2012-09-20 | Canon Inc | 固体撮像装置、固体撮像装置を用いた撮像システム及び固体撮像装置の製造方法 |
| EP2487717B1 (en) * | 2011-02-09 | 2014-09-17 | Canon Kabushiki Kaisha | Photoelectric conversion element, photoelectric conversion apparatus and image sensing system |
| JP2012209439A (ja) * | 2011-03-30 | 2012-10-25 | Seiko Epson Corp | 電気光学装置の製造方法 |
| JP2012227478A (ja) | 2011-04-22 | 2012-11-15 | Panasonic Corp | 固体撮像装置 |
| JP2013038383A (ja) | 2011-07-12 | 2013-02-21 | Sony Corp | 固体撮像素子、固体撮像素子の製造方法、および電子機器 |
| JP5956866B2 (ja) * | 2011-09-01 | 2016-07-27 | キヤノン株式会社 | 固体撮像装置 |
| JP2014130890A (ja) * | 2012-12-28 | 2014-07-10 | Canon Inc | 光電変換装置 |
| JP5518231B2 (ja) | 2013-04-08 | 2014-06-11 | キヤノン株式会社 | 固体撮像装置の製造方法 |
| JP6479519B2 (ja) | 2015-03-19 | 2019-03-06 | 三菱電機株式会社 | 光電変換素子およびその製造方法 |
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2017
- 2017-02-28 JP JP2017037713A patent/JP6650898B2/ja active Active
-
2018
- 2018-02-26 US US15/905,409 patent/US10431617B2/en active Active
- 2018-02-28 CN CN201810165284.8A patent/CN108511472B/zh active Active