JP2018098497A5 - - Google Patents

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JP2018098497A5
JP2018098497A5 JP2017224113A JP2017224113A JP2018098497A5 JP 2018098497 A5 JP2018098497 A5 JP 2018098497A5 JP 2017224113 A JP2017224113 A JP 2017224113A JP 2017224113 A JP2017224113 A JP 2017224113A JP 2018098497 A5 JP2018098497 A5 JP 2018098497A5
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substrate support
mesas
region
depth
mesa
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JP2017224113A
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JP2018098497A (ja
JP7111460B2 (ja
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Priority claimed from US15/363,558 external-priority patent/US20180148835A1/en
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JP2017224113A 2016-11-29 2017-11-22 メサ間の領域の深さが異なる基板支持体および対応する温度依存の加工方法 Active JP7111460B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/363,558 US20180148835A1 (en) 2016-11-29 2016-11-29 Substrate support with varying depths of areas between mesas and corresponding temperature dependent method of fabricating
US15/363,558 2016-11-29

Publications (3)

Publication Number Publication Date
JP2018098497A JP2018098497A (ja) 2018-06-21
JP2018098497A5 true JP2018098497A5 (https=) 2021-01-28
JP7111460B2 JP7111460B2 (ja) 2022-08-02

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JP2017224113A Active JP7111460B2 (ja) 2016-11-29 2017-11-22 メサ間の領域の深さが異なる基板支持体および対応する温度依存の加工方法

Country Status (6)

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US (2) US20180148835A1 (https=)
JP (1) JP7111460B2 (https=)
KR (1) KR102537060B1 (https=)
CN (1) CN108335993B (https=)
SG (1) SG10201708450PA (https=)
TW (1) TWI783955B (https=)

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