JP2018084519A5 - - Google Patents

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Publication number
JP2018084519A5
JP2018084519A5 JP2016228406A JP2016228406A JP2018084519A5 JP 2018084519 A5 JP2018084519 A5 JP 2018084519A5 JP 2016228406 A JP2016228406 A JP 2016228406A JP 2016228406 A JP2016228406 A JP 2016228406A JP 2018084519 A5 JP2018084519 A5 JP 2018084519A5
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JP
Japan
Prior art keywords
detection sensor
force detection
sensor according
base
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016228406A
Other languages
English (en)
Japanese (ja)
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JP6862794B2 (ja
JP2018084519A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2016228406A priority Critical patent/JP6862794B2/ja
Priority claimed from JP2016228406A external-priority patent/JP6862794B2/ja
Priority to CN201711019828.1A priority patent/CN108106757B/zh
Priority to US15/805,777 priority patent/US10682768B2/en
Priority to EP17203041.3A priority patent/EP3327416B1/en
Publication of JP2018084519A publication Critical patent/JP2018084519A/ja
Publication of JP2018084519A5 publication Critical patent/JP2018084519A5/ja
Application granted granted Critical
Publication of JP6862794B2 publication Critical patent/JP6862794B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2016228406A 2016-11-24 2016-11-24 力検出センサー、力覚センサー、トルクセンサーおよびロボット Expired - Fee Related JP6862794B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016228406A JP6862794B2 (ja) 2016-11-24 2016-11-24 力検出センサー、力覚センサー、トルクセンサーおよびロボット
CN201711019828.1A CN108106757B (zh) 2016-11-24 2017-10-26 力检测传感器、力传感器、扭矩传感器及机器人
US15/805,777 US10682768B2 (en) 2016-11-24 2017-11-07 Force detection sensor, force sensor, torque sensor, and robot
EP17203041.3A EP3327416B1 (en) 2016-11-24 2017-11-22 Force detection sensor, force sensor, torque sensor, and robot

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016228406A JP6862794B2 (ja) 2016-11-24 2016-11-24 力検出センサー、力覚センサー、トルクセンサーおよびロボット

Publications (3)

Publication Number Publication Date
JP2018084519A JP2018084519A (ja) 2018-05-31
JP2018084519A5 true JP2018084519A5 (enExample) 2019-09-26
JP6862794B2 JP6862794B2 (ja) 2021-04-21

Family

ID=60450485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016228406A Expired - Fee Related JP6862794B2 (ja) 2016-11-24 2016-11-24 力検出センサー、力覚センサー、トルクセンサーおよびロボット

Country Status (4)

Country Link
US (1) US10682768B2 (enExample)
EP (1) EP3327416B1 (enExample)
JP (1) JP6862794B2 (enExample)
CN (1) CN108106757B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6789853B2 (ja) * 2017-03-08 2020-11-25 日本電産コパル電子株式会社 力覚センサ
CN108917668B (zh) * 2018-06-12 2024-07-05 重庆大学 一种差分式双谐振器声波拉伸应变传感器芯片
JP7127513B2 (ja) * 2018-11-30 2022-08-30 トヨタ自動車株式会社 センサシステムおよびロボットハンド
CN110274717A (zh) * 2019-01-17 2019-09-24 上海肇擎传感技术有限公司 一种单轴力矩传感器及其敏感方法
JP7375345B2 (ja) * 2019-06-27 2023-11-08 セイコーエプソン株式会社 ロボット
US11491663B2 (en) * 2020-06-16 2022-11-08 Ati Industrial Automation, Inc. Robotic force/torque sensor with controlled thermal conduction
US11796378B1 (en) * 2021-06-25 2023-10-24 Amazon Technologies, Inc. Piezoelectric weight sensing apparatus

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JP6102341B2 (ja) 2013-02-27 2017-03-29 セイコーエプソン株式会社 力検出装置、ロボット、電子部品搬送装置、電子部品検査装置、部品加工装置および移動体
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