JP2018041964A5 - - Google Patents

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Publication number
JP2018041964A5
JP2018041964A5 JP2017184957A JP2017184957A JP2018041964A5 JP 2018041964 A5 JP2018041964 A5 JP 2018041964A5 JP 2017184957 A JP2017184957 A JP 2017184957A JP 2017184957 A JP2017184957 A JP 2017184957A JP 2018041964 A5 JP2018041964 A5 JP 2018041964A5
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charged particle
particle beam
cooling
high voltage
electrode
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JP2017184957A
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English (en)
Japanese (ja)
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JP6430606B2 (ja
JP2018041964A (ja
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JP2017184957A 2012-05-14 2017-09-26 荷電粒子ビーム発生器の高電圧シールド及び冷却 Active JP6430606B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261646839P 2012-05-14 2012-05-14
US61/646,839 2012-05-14

Related Parent Applications (1)

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JP2015512040A Division JP6219374B2 (ja) 2012-05-14 2013-05-14 荷電粒子リソグラフィシステムおよびビーム発生器

Publications (3)

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JP2018041964A JP2018041964A (ja) 2018-03-15
JP2018041964A5 true JP2018041964A5 (https=) 2018-04-26
JP6430606B2 JP6430606B2 (ja) 2018-11-28

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JP2015512040A Active JP6219374B2 (ja) 2012-05-14 2013-05-14 荷電粒子リソグラフィシステムおよびビーム発生器
JP2015512032A Active JP6239596B2 (ja) 2012-05-14 2013-05-14 荷電粒子リソグラフィシステムおよびビーム発生器
JP2017184957A Active JP6430606B2 (ja) 2012-05-14 2017-09-26 荷電粒子ビーム発生器の高電圧シールド及び冷却

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JP2015512040A Active JP6219374B2 (ja) 2012-05-14 2013-05-14 荷電粒子リソグラフィシステムおよびビーム発生器
JP2015512032A Active JP6239596B2 (ja) 2012-05-14 2013-05-14 荷電粒子リソグラフィシステムおよびビーム発生器

Country Status (8)

Country Link
US (2) US9653261B2 (https=)
EP (1) EP2852966A1 (https=)
JP (3) JP6219374B2 (https=)
KR (2) KR101961914B1 (https=)
CN (3) CN104428866A (https=)
NL (4) NL2010802C2 (https=)
TW (2) TW201401330A (https=)
WO (2) WO2013171214A1 (https=)

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