JP2018026453A5 - - Google Patents

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Publication number
JP2018026453A5
JP2018026453A5 JP2016157371A JP2016157371A JP2018026453A5 JP 2018026453 A5 JP2018026453 A5 JP 2018026453A5 JP 2016157371 A JP2016157371 A JP 2016157371A JP 2016157371 A JP2016157371 A JP 2016157371A JP 2018026453 A5 JP2018026453 A5 JP 2018026453A5
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JP
Japan
Prior art keywords
stress
high pressure
wafer
dispersion plate
shape
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JP2016157371A
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English (en)
Japanese (ja)
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JP6713377B2 (ja
JP2018026453A (ja
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Priority claimed from JP2016157371A external-priority patent/JP6713377B2/ja
Priority to JP2016157371A priority Critical patent/JP6713377B2/ja
Priority to KR1020170099002A priority patent/KR102366241B1/ko
Priority to US15/670,504 priority patent/US10300577B2/en
Priority to TW106126866A priority patent/TWI730154B/zh
Priority to CN201710679978.9A priority patent/CN107717719B/zh
Publication of JP2018026453A publication Critical patent/JP2018026453A/ja
Publication of JP2018026453A5 publication Critical patent/JP2018026453A5/ja
Publication of JP6713377B2 publication Critical patent/JP6713377B2/ja
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JP2016157371A 2016-08-10 2016-08-10 研磨ヘッド、研磨ヘッドを有するｃｍｐ研磨装置およびそれを用いた半導体集積回路装置の製造方法 Expired - Fee Related JP6713377B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2016157371A JP6713377B2 (ja) 2016-08-10 2016-08-10 研磨ヘッド、研磨ヘッドを有するｃｍｐ研磨装置およびそれを用いた半導体集積回路装置の製造方法
KR1020170099002A KR102366241B1 (ko) 2016-08-10 2017-08-04 연마 헤드, 연마 헤드를 갖는 cmp 연마 장치 및 cmp 연마 장치를 이용한 반도체 집적회로 장치의 제조 방법
US15/670,504 US10300577B2 (en) 2016-08-10 2017-08-07 Polishing head, CMP apparatus including a polishing head, and manufacturing method of semiconductor integrated circuit device using a CMP apparatus
TW106126866A TWI730154B (zh) 2016-08-10 2017-08-09 研磨頭、具有研磨頭的cmp研磨裝置以及使用該cmp研磨裝置的半導體積體電路裝置的製造方法
CN201710679978.9A CN107717719B (zh) 2016-08-10 2017-08-10 研磨头、cmp研磨装置、和半导体集成电路装置的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016157371A JP6713377B2 (ja) 2016-08-10 2016-08-10 研磨ヘッド、研磨ヘッドを有するｃｍｐ研磨装置およびそれを用いた半導体集積回路装置の製造方法

Publications (3)

Publication Number Publication Date
JP2018026453A JP2018026453A (ja) 2018-02-15
JP2018026453A5 true JP2018026453A5 (enExample) 2019-07-11
JP6713377B2 JP6713377B2 (ja) 2020-06-24

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Family Applications (1)

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JP2016157371A Expired - Fee Related JP6713377B2 (ja) 2016-08-10 2016-08-10 研磨ヘッド、研磨ヘッドを有するｃｍｐ研磨装置およびそれを用いた半導体集積回路装置の製造方法

Country Status (5)

Country Link
US (1) US10300577B2 (enExample)
JP (1) JP6713377B2 (enExample)
KR (1) KR102366241B1 (enExample)
CN (1) CN107717719B (enExample)
TW (1) TWI730154B (enExample)

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* Cited by examiner, † Cited by third party
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JP7158223B2 (ja) * 2018-09-20 2022-10-21 株式会社荏原製作所 研磨ヘッドおよび研磨装置
CN111168561B (zh) * 2019-12-26 2022-05-13 西安奕斯伟材料科技有限公司 研磨头及晶圆研磨装置
KR102304948B1 (ko) * 2020-01-13 2021-09-24 (주)제이쓰리 반도체 웨이퍼 형상을 제어하는 웨이퍼 가공용 헤드 장치
CN111993268A (zh) * 2020-08-24 2020-11-27 台州市老林装饰有限公司 一种晶圆研磨头装置
CN112677047A (zh) * 2020-12-09 2021-04-20 杭州蒙托机械科技有限公司 一种避免摇晃且能够吹散灰尘的小型抛光头保护装置
CN115673908B (zh) * 2023-01-03 2023-03-10 北京特思迪半导体设备有限公司 一种半导体基材抛光设备中晶圆压头及其设计方法

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US5643053A (en) * 1993-12-27 1997-07-01 Applied Materials, Inc. Chemical mechanical polishing apparatus with improved polishing control
JP3770956B2 (ja) * 1996-05-20 2006-04-26 松下電器産業株式会社 研磨装置及び研磨方法
JP3183388B2 (ja) * 1996-07-12 2001-07-09 株式会社東京精密 半導体ウェーハ研磨装置
JPH10230455A (ja) * 1997-02-17 1998-09-02 Nec Corp 研磨装置
TW431942B (en) * 1997-04-04 2001-05-01 Tokyo Seimitsu Co Ltd Polishing device
EP0881039B1 (en) * 1997-05-28 2003-04-16 Tokyo Seimitsu Co.,Ltd. Wafer polishing apparatus with retainer ring
WO1999048645A1 (en) * 1998-03-23 1999-09-30 Speedfam-Ipec Corporation Backing pad for workpiece carrier
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JP2001345297A (ja) * 2000-05-30 2001-12-14 Hitachi Ltd 半導体集積回路装置の製造方法及び研磨装置
KR20010007867A (ko) * 2000-10-12 2001-02-05 김종옥 연삭 숫돌용 자동 밸런스 장치
JP3922887B2 (ja) * 2001-03-16 2007-05-30 株式会社荏原製作所 ドレッサ及びポリッシング装置
US6568991B2 (en) * 2001-08-28 2003-05-27 Speedfam-Ipec Corporation Method and apparatus for sensing a wafer in a carrier
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JP2004237373A (ja) * 2003-02-04 2004-08-26 Mitsubishi Electric Corp Ｃｍｐ研磨装置
JP4718107B2 (ja) * 2003-05-20 2011-07-06 株式会社荏原製作所 基板保持装置及び研磨装置
JP4086722B2 (ja) * 2003-06-24 2008-05-14 株式会社荏原製作所 基板保持装置及び研磨装置
JP2005268566A (ja) 2004-03-19 2005-09-29 Ebara Corp 化学機械研磨装置の基板把持機構のヘッド構造
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