JP2017538039A5 - - Google Patents

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Publication number
JP2017538039A5
JP2017538039A5 JP2017530018A JP2017530018A JP2017538039A5 JP 2017538039 A5 JP2017538039 A5 JP 2017538039A5 JP 2017530018 A JP2017530018 A JP 2017530018A JP 2017530018 A JP2017530018 A JP 2017530018A JP 2017538039 A5 JP2017538039 A5 JP 2017538039A5
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JP
Japan
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vacuum
substrate
deposition system
substrates
vacuum chamber
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JP2017530018A
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English (en)
Japanese (ja)
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JP2017538039A (ja
JP6550464B2 (ja
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Priority claimed from PCT/EP2014/076747 external-priority patent/WO2016087005A1/en
Publication of JP2017538039A publication Critical patent/JP2017538039A/ja
Publication of JP2017538039A5 publication Critical patent/JP2017538039A5/ja
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JP2017530018A 2014-12-05 2014-12-05 材料堆積システム及び材料堆積システムで材料を堆積する方法 Active JP6550464B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2014/076747 WO2016087005A1 (en) 2014-12-05 2014-12-05 Material deposition system and method for depositing material in a material deposition system

Publications (3)

Publication Number Publication Date
JP2017538039A JP2017538039A (ja) 2017-12-21
JP2017538039A5 true JP2017538039A5 (cg-RX-API-DMAC7.html) 2018-07-05
JP6550464B2 JP6550464B2 (ja) 2019-07-24

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ID=52130229

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JP2017530018A Active JP6550464B2 (ja) 2014-12-05 2014-12-05 材料堆積システム及び材料堆積システムで材料を堆積する方法

Country Status (5)

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JP (1) JP6550464B2 (cg-RX-API-DMAC7.html)
KR (1) KR101932943B1 (cg-RX-API-DMAC7.html)
CN (1) CN107002223B (cg-RX-API-DMAC7.html)
TW (1) TWI619823B (cg-RX-API-DMAC7.html)
WO (1) WO2016087005A1 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106637091B (zh) * 2017-02-24 2019-08-30 旭科新能源股份有限公司 用于薄膜太阳能电池制造的高温蒸发炉
CN109699190B (zh) 2017-08-24 2023-04-28 应用材料公司 在真空处理系统中非接触地传输装置及方法
KR20230021169A (ko) * 2017-11-16 2023-02-13 어플라이드 머티어리얼스, 인코포레이티드 증착 소스를 냉각시키는 방법, 증착 소스를 냉각시키기 위한 챔버, 및 증착 시스템
CN111902563A (zh) * 2018-03-28 2020-11-06 应用材料公司 真空处理设备以及用于处理基板的方法
CN111663104A (zh) * 2020-06-24 2020-09-15 武汉华星光电半导体显示技术有限公司 蒸镀系统及蒸镀方法
WO2022107945A1 (ko) * 2020-11-23 2022-05-27 엘지전자 주식회사 자가조립장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8900366B2 (en) * 2002-04-15 2014-12-02 Samsung Display Co., Ltd. Apparatus for depositing a multilayer coating on discrete sheets
JP4013859B2 (ja) * 2003-07-17 2007-11-28 富士電機ホールディングス株式会社 有機薄膜の製造装置
JP4685404B2 (ja) * 2003-10-15 2011-05-18 三星モバイルディスプレイ株式會社 有機電界発光素子の垂直蒸着方法，その装置，及び有機電界発光素子の垂直蒸着装置に使用される蒸着源
KR100635496B1 (ko) * 2005-02-25 2006-10-17 삼성에스디아이 주식회사 격벽을 구비하는 측면 분사형 선형 증발원 및 그 증발원을구비하는 증착장치
KR100784953B1 (ko) * 2006-05-23 2007-12-11 세메스 주식회사 다수의 도가니를 이용한 유기발광소자 박막 제작을 위한선형증발원
US20080131587A1 (en) * 2006-11-30 2008-06-05 Boroson Michael L Depositing organic material onto an oled substrate
US8119204B2 (en) * 2007-04-27 2012-02-21 Semiconductor Energy Laboratory Co., Ltd. Film formation method and method for manufacturing light-emitting device
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
KR101097737B1 (ko) * 2009-03-31 2011-12-22 에스엔유 프리시젼 주식회사 박막 증착 장치와 박막 증착 방법 및 박막 증착 시스템
US20110052795A1 (en) * 2009-09-01 2011-03-03 Samsung Mobile Display Co., Ltd. Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
KR101708420B1 (ko) * 2010-09-15 2017-02-21 삼성디스플레이 주식회사 기판 증착 시스템 및 이를 이용한 증착 방법
JP2014005478A (ja) * 2010-10-08 2014-01-16 Kaneka Corp 蒸着装置
KR20140054222A (ko) * 2011-08-25 2014-05-08 어플라이드 머티어리얼스, 인코포레이티드 직사각형 기판 상에 층을 증착하기 위한 마스크 구조물, 장치 및 방법
JP2013163837A (ja) * 2012-02-09 2013-08-22 Canon Tokki Corp 蒸着装置並びに蒸着装置を用いた成膜方法
EP3187618A1 (en) * 2013-12-10 2017-07-05 Applied Materials, Inc. Evaporation source for organic material, deposition apparatus for depositing organic materials in a vacuum chamber having an evaporation source for organic material, and method for evaporating organic material

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