CN106637091B - 用于薄膜太阳能电池制造的高温蒸发炉 - Google Patents
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Abstract
用于薄膜太阳能电池制造的高温蒸发炉，包括导流件、吊装法兰、隔热屏、坩埚、导流加热器、坩埚加热器；所述隔热屏设在导流件和坩埚外围，所述导流件为管状空心结构，坩埚是具有一开口的罐状容器，导流件与坩埚通过开口相连通，所述导流件的侧壁设有可透射物料的喷孔；所述导流加热器设置在导流件外围，所述导流加热器设置通过具有绝缘性的固定环设置在导流件与隔热屏之间；所述坩埚加热器设置在坩埚外围，所述坩埚加热器设置设置在坩埚与隔热屏之间；所述隔热屏侧壁设有对应喷孔的通道，所述吊装法兰将导流件与隔热屏组装固定。
Description
技术领域
本发明涉及用于薄膜太阳能电池制造的高温蒸发炉，尤其适用于不能承受高温材料的镀膜工艺。
背景技术
铜铟镓硒薄膜太阳能电池光吸收层的制备工艺中，其蒸发过程包括三个阶段：第一阶段：控制衬底温度在200℃～300℃，控制镓的蒸发温度在900℃～1100℃之间，并在第一阶段均匀地降温35℃～45℃，控制铟的蒸发温度在800℃～1000℃之间，并在第一阶段均匀地升温45℃～55℃，控制硒的蒸发温度在200℃～300℃之间；第二阶段：停止蒸发铟和镓，提高衬底温度到450℃～600℃之间，维持硒的蒸发温度与第一阶段相同，控制铜的蒸发温度在1300℃～1500℃之间；第三阶段：停止蒸发铜，维持衬底温度与第二阶段相同，维持硒的蒸发温度与第二阶段相同，控制镓的蒸发温度在900℃～1100℃之间，并在第三阶段均匀地升温35℃～45℃，控制铟的蒸发温度在800℃～1000℃之间，并在第三阶段均匀地降温45℃～55℃；从而得到所述铜铟镓硒薄膜太阳能电池的光吸收层。
铜铟镓硒四种单质在不同温度下分阶段蒸发，而铜的蒸发温度相对于硒的蒸发温度高很多，达到1200摄氏度以上，铟的蒸发温度需要达到1000摄氏度以上，镓的蒸发温度达到1100摄氏度以上，蒸发CIG的同时要蒸发硒(Se)，而硒(Se)炉的坩埚距离铜炉或者铟镓炉很近，因此容易受到较大影响，因而硒蒸发速率难以控制，而且还会造成工艺腔体内的温度过高，造成衬底受热温度过高损坏。
发明内容
本发明的目的在于克服现有技术中存在的上述不足，从而提供一种炉体小、隔热好、耐高温、结构紧凑的用于薄膜太阳能电池制造的高温蒸发炉。
本发明解决上述问题所采用的技术方案是：用于薄膜太阳能电池制造的高温蒸发炉，包括导流件、吊装法兰、隔热屏、坩埚、导流加热器、坩埚加热器；所述隔热屏设在导流件和坩埚外围，所述导流件为管状空心结构，坩埚是具有一开口的罐状容器，导流件与坩埚通过开口相连通，所述导流件的侧壁设有可透射物料的喷孔；所述导流加热器设置在导流件外围，所述导流加热器设置通过具有绝缘性的固定环设置在导流件与隔热屏之间；所述坩埚加热器设置在坩埚外围，所述坩埚加热器设置设置在坩埚与隔热屏之间；所述隔热屏侧壁设有对应喷孔的通道，所述吊装法兰将导流件与隔热屏组装固定。
进一步说，还包括喷头，所述喷头呈喇叭口型，喷头设置在通道内对应喷孔设置。
进一步说，所述导流件与坩埚螺纹连接，所述导流件与坩埚的密封面呈刀口状，导流件与坩埚的密封面之间设有密封件，密封件为石墨材料。
进一步说，所述喷孔的孔径为0.5至12mm，所述喷孔的数量是1至50个。技术效果：为了适应更多的蒸发有效幅宽。
进一步说，各喷孔的孔径大小不一，喷孔之间的间距不等。
进一步说，所述导流加热器和坩埚加热器均包括加热体和导流加热器电极，加热体连接导流加热器电极，所述导流加热器与导流件采用螺丝连接，所述螺丝为石墨、钽、钼材料中的任一一种。
进一步说，隔热屏包括设置在导流件外围的导流件隔热屏、设置在坩埚外围的坩埚隔热屏，所述导流件隔热屏与坩埚隔热屏相拼接，所述导流件隔热屏包括若干层隔热片，若干层的隔热片由内向外相互套设，各隔热片之间具有间隙距离。
进一步说，所述隔热屏、坩埚均采用石墨、钽、钼材料中的任一一种或其相互组合。
进一步说，还包括水冷管道，所述水冷管道设置在隔热屏的最外层，所述水冷管道是采用不锈钢板材焊接在隔热屏最外层的外侧。
进一步说，所述隔热片呈圆管状，所述隔热片包括大半圆片和小半圆片，大半圆片和小半圆片相拼合组成单个隔热片，各层隔热片在设置时其拼接线呈左右交错设置。
本发明与现有技术相比，具有以下优点和效果：
1、本发明整体结构紧凑，保温性能好，且能有效阻隔热辐射，整体结构组装方便，隔热层之间尽量热传递小，蒸发均匀。
2、本发明是适用于各种高温蒸发设备的蒸发源炉，尤其适用于不能承受高温材料的镀膜工艺：如太阳能行业的铜铟镓硒太阳能电池制备工艺。
附图说明
图1是本发明的结构示意图。
图2是本发明所述隔热屏的结构示意图。
图3是本发明所述隔热片的结构示意图。
具体实施方式
下面结合附图并通过实施例对本发明作进一步的详细说明，以下实施例是对本发明的解释而本发明并不局限于以下实施例。
实施例1
参见图1至图3，本实施例所述用于薄膜太阳能电池制造的高温蒸发炉，包括导流件1、吊装法兰2、隔热屏3、坩埚4、导流加热器5、坩埚加热器6；所述隔热屏3设在导流件1和坩埚4外围，所述导流件1为管状空心结构，坩埚4是具有一开口的罐状容器，导流件1与坩埚4通过开口相连通，所述导流件1的侧壁设有可透射物料的喷孔10；所述导流加热器5设置在导流件1外围，所述导流加热器5设置通过具有绝缘性的固定环7设置在导流件1与隔热屏3之间；所述坩埚加热器6设置在坩埚4外围，所述坩埚加热器6设置设置在坩埚4与隔热屏3之间；所述隔热屏3侧壁设有对应喷孔10的通道，所述吊装法兰2将导流件1与隔热屏3组装固定。
本实施例还包括喷头8，所述喷头8呈喇叭口型，喷头8设置在通道内对应喷孔10设置。
本实施例所述导流件1与坩埚4螺纹连接，所述导流件1与坩埚4的密封面呈刀口状，导流件1与坩埚4的密封面之间设有密封件，密封件为石墨材料。采用螺纹方式连接，并将密封面制作呈刀口形面，并增加石墨垫作为密封件，其具有优异的密封效果。
本实施例所述喷孔10的孔径r为0.5至12mm，所述喷孔10的数量是1至50个，各喷孔10的孔径r大小不一，喷孔10之间的间距不等。该结构具有溅射作业均匀，可适应更多的蒸发有效幅宽的特点。
本实施例所述导流加热器5和坩埚加热器6均包括加热体和导流加热器电极，加热体连接导流加热器电极，所述导流加热器5与导流件1采用螺丝连接，所述螺丝为石墨、钽、钼材料中的任一一种。采用钽、钼等耐高温材料，具有不易脆断的特点。
本实施例所述隔热屏3包括设置在导流件1外围的导流件隔热屏31、设置在坩埚4外围的坩埚隔热屏32，所述导流件隔热屏31与坩埚隔热屏32相拼接，所述导流件隔热屏31包括若干层隔热片311，若干层的隔热片311由内向外相互套设，各隔热片311之间具有间隙距离，各的隔热片311之间采用螺栓固定。该结构具有组合装配简单，隔热性能优异等特点。
本实施例所述隔热屏3、坩埚4均可采用石墨、钽、钼材料中的任一一种或其相互组合。
本实施例还包括水冷管道9，所述水冷管道9设置在隔热屏3的最外层，所述水冷管道9是采用不锈钢板材焊接在隔热屏3最外层的外侧。设置水冷管道9可调控温度，采用不锈钢板材直接贴合隔热屏3设置水冷介质与隔热屏3之间直接接触具有调控精度高，且节省材料等优点。
本实施例所述隔热片311呈圆管状，所述隔热片311包括大半圆片3112和小半圆片3111，大半圆片3112和小半圆片3111相拼合组成单个隔热片311，各层隔热片311在设置时其拼接线呈左右交错设置。隔热屏3的整体制造工艺采用装配是结构，具有装配简单快速等特点，交错设置可保证整体结构的均衡性。
本说明书中所描述的以上内容仅仅是对本发明所作的举例说明。本发明所属技术领域的技术人员可以对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代，只要不偏离本发明说明书的内容或者超越本权利要求书所定义的范围，均应属于本发明的保护范围。
Claims (7)
1.用于薄膜太阳能电池制造的高温蒸发炉，其特征是，包括导流件、吊装法兰、隔热屏、坩埚、导流加热器、坩埚加热器；所述隔热屏设在导流件和坩埚外围，所述导流件为管状空心结构，坩埚是具有一开口的罐状容器，导流件与坩埚通过开口相连通，所述导流件的侧壁设有可透射物料的喷孔；所述导流加热器设置在导流件外围，所述导流加热器设置通过具有绝缘性的固定环设置在导流件与隔热屏之间；所述坩埚加热器设置在坩埚外围，所述坩埚加热器设置设置在坩埚与隔热屏之间；所述隔热屏侧壁设有对应喷孔的通道，所述吊装法兰将导流件与隔热屏组装固定；
隔热屏包括设置在导流件外围的导流件隔热屏、设置在坩埚外围的坩埚隔热屏，所述导流件隔热屏与坩埚隔热屏相拼接，所述导流件隔热屏包括若干层隔热片，若干层的隔热片由内向外相互套设，各隔热片之间具有间隙距离；
所述隔热片呈圆管状，所述隔热片包括大半圆片和小半圆片，大半圆片和小半圆片相拼合组成单个隔热片，各层隔热片在设置时其拼接线呈左右交错设置；
所述隔热屏、坩埚均采用石墨、钽、钼材料中的任意一种或其相互组合。
2.如权利要求1所述的用于薄膜太阳能电池制造的高温蒸发炉，其特征是：还包括喷头，所述喷头呈喇叭口型，喷头设置在通道内对应喷孔设置。
3.如权利要求1所述的用于薄膜太阳能电池制造的高温蒸发炉，其特征是：所述导流件与坩埚螺纹连接，所述导流件与坩埚的密封面呈刀口状，导流件与坩埚的密封面之间设有密封件，密封件为石墨材料。
4.如权利要求1所述的用于薄膜太阳能电池制造的高温蒸发炉，其特征是：所述喷孔的孔径为0.5至12mm，所述喷孔的数量是1至50个。
5.如权利要求1所述的用于薄膜太阳能电池制造的高温蒸发炉，其特征是：各喷孔的孔径大小不一，喷孔之间的间距不等。
6.如权利要求1所述的用于薄膜太阳能电池制造的高温蒸发炉，其特征是：所述导流加热器和坩埚加热器均包括加热体和导流加热器电极，加热体连接导流加热器电极，所述导流加热器与导流件采用螺丝连接，所述螺丝为石墨、钽、钼材料中的任意一种。
7.如权利要求1所述的用于薄膜太阳能电池制造的高温蒸发炉，其特征是：还包括水冷管道，所述水冷管道设置在隔热屏的最外层，所述水冷管道是采用不锈钢板材焊接在隔热屏最外层的外侧。
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| CN108048801A (zh) * | 2017-12-14 | 2018-05-18 | 深圳先进技术研究院 | 线性蒸发源及连续式蒸镀设备 |
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