CN205099745U - 溅射镀膜旋转靶材绑定的内部加热器 - Google Patents
溅射镀膜旋转靶材绑定的内部加热器 Download PDFInfo
- Publication number
- CN205099745U CN205099745U CN201520876503.5U CN201520876503U CN205099745U CN 205099745 U CN205099745 U CN 205099745U CN 201520876503 U CN201520876503 U CN 201520876503U CN 205099745 U CN205099745 U CN 205099745U
- Authority
- CN
- China
- Prior art keywords
- outer tube
- heating
- low melting
- pipe
- sputter coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520876503.5U CN205099745U (zh) | 2015-11-03 | 2015-11-03 | 溅射镀膜旋转靶材绑定的内部加热器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520876503.5U CN205099745U (zh) | 2015-11-03 | 2015-11-03 | 溅射镀膜旋转靶材绑定的内部加热器 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205099745U true CN205099745U (zh) | 2016-03-23 |
Family
ID=55515535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201520876503.5U Active CN205099745U (zh) | 2015-11-03 | 2015-11-03 | 溅射镀膜旋转靶材绑定的内部加热器 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN205099745U (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110408897A (zh) * | 2019-08-13 | 2019-11-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN110453187A (zh) * | 2019-08-21 | 2019-11-15 | 东莞市欧莱溅射靶材有限公司 | 一种ito靶管与钛背管绑定预处理的方法 |
-
2015
- 2015-11-03 CN CN201520876503.5U patent/CN205099745U/zh active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110408897A (zh) * | 2019-08-13 | 2019-11-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN110408897B (zh) * | 2019-08-13 | 2023-05-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN110453187A (zh) * | 2019-08-21 | 2019-11-15 | 东莞市欧莱溅射靶材有限公司 | 一种ito靶管与钛背管绑定预处理的方法 |
CN110453187B (zh) * | 2019-08-21 | 2020-09-01 | 东莞市欧莱溅射靶材有限公司 | 一种ito靶管与钛背管绑定预处理的方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN203741407U (zh) | 磁控溅射旋转靶 | |
CN110373643A (zh) | 一种ito旋转靶绑定方法 | |
CN205099745U (zh) | 溅射镀膜旋转靶材绑定的内部加热器 | |
CN204286623U (zh) | 一种用于快速响应温度测量的薄膜温度传感器 | |
CN101798184A (zh) | 一种新型中高温太阳能集热管金属与玻璃的封接方法 | |
CN104404454A (zh) | 一种用于多弧离子镀设备沉积涂层工装及其使用方法 | |
CN105624627A (zh) | 绑定式磁控溅射旋转靶材及其制备方法 | |
CN104582026B (zh) | 一种金属/陶瓷层状复合材料内加热器 | |
CN203498465U (zh) | 一种用于涡轮叶片局部涂覆涂层的夹具 | |
WO2010051738A1 (zh) | 电磁加热陶瓷容器 | |
CN104320868A (zh) | 椭圆面聚焦型管式加热装置 | |
CN208762573U (zh) | 一种真空低温磁控溅射镀膜机 | |
CN208991758U (zh) | 一种电阻热熔融金属丝材3d打印系统 | |
CN101709454A (zh) | 一种旋转溅射靶及其制作方法 | |
CN201614405U (zh) | 一种旋转溅射靶 | |
CN104089423A (zh) | 全玻璃高温真空集热管及其镀膜方法 | |
CN208501086U (zh) | 一种绑定式旋转靶材 | |
CN103308200B (zh) | 测温热电偶固定用膨胀耐火泥 | |
CN203869512U (zh) | 一种硼扩散炉防止粘连的自热炉门 | |
CN205347565U (zh) | 焊接式溅射管靶 | |
WO2015078088A1 (zh) | 玻璃可伐结合体与无氧铜的钎焊方法及装置 | |
CN103014623A (zh) | 一种铜铟硒基太阳能薄膜电池光吸收层用陶瓷靶材制备方法 | |
CN103643203B (zh) | 一种在铁基led引线支架表面沉积铜+钨复合涂层的工艺 | |
CN110220824A (zh) | 一种气保护钎料铺展试验方法及其装置 | |
CN110527966A (zh) | 一种用于长管镀膜的卧式磁控溅射设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Inner heating ware that rotatory target of sputter coating was bound Effective date of registration: 20200616 Granted publication date: 20160323 Pledgee: Jiangsu Suzhou Rural Commercial Bank Co., Ltd. Lili sub branch Pledgor: JIMAIKE MATERIAL TECHNOLOGY (SUZHOU) Co.,Ltd. Registration number: Y2020320010048 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210608 Granted publication date: 20160323 Pledgee: Jiangsu Suzhou Rural Commercial Bank Co., Ltd. Lili sub branch Pledgor: JIMAIKE MATERIAL TECHNOLOGY (SUZHOU) Co.,Ltd. Registration number: Y2020320010048 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Internal heater for sputtering coating rotating target Effective date of registration: 20210611 Granted publication date: 20160323 Pledgee: Jiangsu Suzhou Rural Commercial Bank Co., Ltd. Lili sub branch Pledgor: JIMAIKE MATERIAL TECHNOLOGY (SUZHOU) Co.,Ltd. Registration number: Y2021320010207 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right |