CN201614405U - 一种旋转溅射靶 - Google Patents
一种旋转溅射靶 Download PDFInfo
- Publication number
- CN201614405U CN201614405U CN2009202018131U CN200920201813U CN201614405U CN 201614405 U CN201614405 U CN 201614405U CN 2009202018131 U CN2009202018131 U CN 2009202018131U CN 200920201813 U CN200920201813 U CN 200920201813U CN 201614405 U CN201614405 U CN 201614405U
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- Prior art keywords
- metal
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- round shape
- inner core
- metal inner
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- 238000005477 sputtering target Methods 0.000 title claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 122
- 239000002184 metal Substances 0.000 claims abstract description 122
- 238000002844 melting Methods 0.000 claims abstract description 41
- 230000008018 melting Effects 0.000 claims description 39
- 239000000853 adhesive Substances 0.000 claims description 13
- 230000001070 adhesive effect Effects 0.000 claims description 13
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 150000002739 metals Chemical class 0.000 claims description 7
- 239000011225 non-oxide ceramic Substances 0.000 claims description 7
- 229910052575 non-oxide ceramic Inorganic materials 0.000 claims description 7
- 229910052574 oxide ceramic Inorganic materials 0.000 claims description 7
- 239000011224 oxide ceramic Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 abstract description 10
- 239000000919 ceramic Substances 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 6
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 239000013077 target material Substances 0.000 abstract 6
- 230000005611 electricity Effects 0.000 abstract 1
- 230000002708 enhancing effect Effects 0.000 abstract 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 14
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 11
- 239000010408 film Substances 0.000 description 7
- 239000011787 zinc oxide Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 6
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 229910052725 zinc Inorganic materials 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 230000004927 fusion Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202018131U CN201614405U (zh) | 2009-12-03 | 2009-12-03 | 一种旋转溅射靶 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2009202018131U CN201614405U (zh) | 2009-12-03 | 2009-12-03 | 一种旋转溅射靶 |
Publications (1)
Publication Number | Publication Date |
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CN201614405U true CN201614405U (zh) | 2010-10-27 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN2009202018131U Expired - Fee Related CN201614405U (zh) | 2009-12-03 | 2009-12-03 | 一种旋转溅射靶 |
Country Status (1)
Country | Link |
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CN (1) | CN201614405U (zh) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102330054A (zh) * | 2010-07-13 | 2012-01-25 | Tcb韩国公司 | 溅镀用旋转靶材的粘接合成物及利用上述合成物的旋转靶材粘接方法 |
CN104032275A (zh) * | 2014-06-12 | 2014-09-10 | 上海和辉光电有限公司 | 拼接式旋转靶及其形成方法 |
CN110408897A (zh) * | 2019-08-13 | 2019-11-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN111408864A (zh) * | 2020-04-27 | 2020-07-14 | 宁波江丰电子材料股份有限公司 | 一种旋转靶材的装配方法 |
CN112404461A (zh) * | 2020-10-26 | 2021-02-26 | 宁波江丰电子材料股份有限公司 | 一种钛靶材组件的车削方法 |
CN113249693A (zh) * | 2021-05-08 | 2021-08-13 | 浙江大学台州研究院 | 一种管靶绑定装置 |
-
2009
- 2009-12-03 CN CN2009202018131U patent/CN201614405U/zh not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102330054A (zh) * | 2010-07-13 | 2012-01-25 | Tcb韩国公司 | 溅镀用旋转靶材的粘接合成物及利用上述合成物的旋转靶材粘接方法 |
CN102330054B (zh) * | 2010-07-13 | 2014-02-19 | 攀石公司 | 溅镀用旋转靶材的粘接合成物及利用上述合成物的旋转靶材粘接方法 |
CN104032275A (zh) * | 2014-06-12 | 2014-09-10 | 上海和辉光电有限公司 | 拼接式旋转靶及其形成方法 |
CN110408897A (zh) * | 2019-08-13 | 2019-11-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN110408897B (zh) * | 2019-08-13 | 2023-05-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN111408864A (zh) * | 2020-04-27 | 2020-07-14 | 宁波江丰电子材料股份有限公司 | 一种旋转靶材的装配方法 |
CN111408864B (zh) * | 2020-04-27 | 2022-01-11 | 宁波江丰电子材料股份有限公司 | 一种旋转靶材的装配方法 |
CN112404461A (zh) * | 2020-10-26 | 2021-02-26 | 宁波江丰电子材料股份有限公司 | 一种钛靶材组件的车削方法 |
CN113249693A (zh) * | 2021-05-08 | 2021-08-13 | 浙江大学台州研究院 | 一种管靶绑定装置 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
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Owner name: SHENZHEN HTARGETS TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: WANG QI Effective date: 20120704 |
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C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 315040 ROOM 306, NO.8, LANE 829, ZHONGXING ROAD, JIANG DISTRICT(EAST), NINGBO CITY, ZHEJIANG PROVINCE TO: 518108 B, (YI HOUSE, BUILDING 9, XIANGXIANG INDUSTRY DISTRICT FACTORY SUITE, TIANBAO ROAD, DAOYINGRENSHISHE DISTRICT, SHIYAN STREET, BAOAN DISTRICT, SHENZHEN CITY, GUANGDONG PROVINCE |
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Effective date of registration: 20120704 Address after: 518108, Guangdong, Shiyan City, Shenzhen province Baoan District stone street should be stone community Tianbao road Xiang Xiang Industrial Zone 9 Building (first floor, B) Patentee after: Shenzhen HTargets Technology Co., Ltd. Address before: 315040, room 8, No. 829, Lane 306, Zhongxing Road, Jiangdong District, Zhejiang, Ningbo Patentee before: Wang Qi |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101027 Termination date: 20171203 |
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CF01 | Termination of patent right due to non-payment of annual fee |