CN201614405U - 一种旋转溅射靶 - Google Patents
一种旋转溅射靶 Download PDFInfo
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- CN201614405U CN201614405U CN2009202018131U CN200920201813U CN201614405U CN 201614405 U CN201614405 U CN 201614405U CN 2009202018131 U CN2009202018131 U CN 2009202018131U CN 200920201813 U CN200920201813 U CN 200920201813U CN 201614405 U CN201614405 U CN 201614405U
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CN2009202018131U CN201614405U (zh) | 2009-12-03 | 2009-12-03 | 一种旋转溅射靶 |
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CN2009202018131U CN201614405U (zh) | 2009-12-03 | 2009-12-03 | 一种旋转溅射靶 |
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CN201614405U true CN201614405U (zh) | 2010-10-27 |
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CN2009202018131U Expired - Fee Related CN201614405U (zh) | 2009-12-03 | 2009-12-03 | 一种旋转溅射靶 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102330054A (zh) * | 2010-07-13 | 2012-01-25 | Tcb韩国公司 | 溅镀用旋转靶材的粘接合成物及利用上述合成物的旋转靶材粘接方法 |
CN104032275A (zh) * | 2014-06-12 | 2014-09-10 | 上海和辉光电有限公司 | 拼接式旋转靶及其形成方法 |
CN110408897A (zh) * | 2019-08-13 | 2019-11-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN111408864A (zh) * | 2020-04-27 | 2020-07-14 | 宁波江丰电子材料股份有限公司 | 一种旋转靶材的装配方法 |
CN112404461A (zh) * | 2020-10-26 | 2021-02-26 | 宁波江丰电子材料股份有限公司 | 一种钛靶材组件的车削方法 |
CN113249693A (zh) * | 2021-05-08 | 2021-08-13 | 浙江大学台州研究院 | 一种管靶绑定装置 |
-
2009
- 2009-12-03 CN CN2009202018131U patent/CN201614405U/zh not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102330054A (zh) * | 2010-07-13 | 2012-01-25 | Tcb韩国公司 | 溅镀用旋转靶材的粘接合成物及利用上述合成物的旋转靶材粘接方法 |
CN102330054B (zh) * | 2010-07-13 | 2014-02-19 | 攀石公司 | 溅镀用旋转靶材的粘接合成物及利用上述合成物的旋转靶材粘接方法 |
CN104032275A (zh) * | 2014-06-12 | 2014-09-10 | 上海和辉光电有限公司 | 拼接式旋转靶及其形成方法 |
CN110408897A (zh) * | 2019-08-13 | 2019-11-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN110408897B (zh) * | 2019-08-13 | 2023-05-05 | 北京航大微纳科技有限公司 | 一种旋转靶材的垂直绑定装置以及绑定方法 |
CN111408864A (zh) * | 2020-04-27 | 2020-07-14 | 宁波江丰电子材料股份有限公司 | 一种旋转靶材的装配方法 |
CN111408864B (zh) * | 2020-04-27 | 2022-01-11 | 宁波江丰电子材料股份有限公司 | 一种旋转靶材的装配方法 |
CN112404461A (zh) * | 2020-10-26 | 2021-02-26 | 宁波江丰电子材料股份有限公司 | 一种钛靶材组件的车削方法 |
CN113249693A (zh) * | 2021-05-08 | 2021-08-13 | 浙江大学台州研究院 | 一种管靶绑定装置 |
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Owner name: SHENZHEN HTARGETS TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: WANG QI Effective date: 20120704 |
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Effective date of registration: 20120704 Address after: 518108, Guangdong, Shiyan City, Shenzhen province Baoan District stone street should be stone community Tianbao road Xiang Xiang Industrial Zone 9 Building (first floor, B) Patentee after: Shenzhen HTargets Technology Co., Ltd. Address before: 315040, room 8, No. 829, Lane 306, Zhongxing Road, Jiangdong District, Zhejiang, Ningbo Patentee before: Wang Qi |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101027 Termination date: 20171203 |
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CF01 | Termination of patent right due to non-payment of annual fee |