JP2017533437A5 - - Google Patents
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- Publication number
- JP2017533437A5 JP2017533437A5 JP2017523513A JP2017523513A JP2017533437A5 JP 2017533437 A5 JP2017533437 A5 JP 2017533437A5 JP 2017523513 A JP2017523513 A JP 2017523513A JP 2017523513 A JP2017523513 A JP 2017523513A JP 2017533437 A5 JP2017533437 A5 JP 2017533437A5
- Authority
- JP
- Japan
- Prior art keywords
- illumination
- light source
- beam path
- imaging
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005286 illumination Methods 0.000 claims 74
- 238000003384 imaging method Methods 0.000 claims 25
- 238000007689 inspection Methods 0.000 claims 19
- 230000003287 optical effect Effects 0.000 claims 18
- 238000000034 method Methods 0.000 claims 9
- 239000011159 matrix material Substances 0.000 claims 3
- 238000002834 transmittance Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021057066A JP7193571B2 (ja) | 2014-10-31 | 2021-03-30 | 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462073393P | 2014-10-31 | 2014-10-31 | |
| US62/073,393 | 2014-10-31 | ||
| PCT/US2015/058486 WO2016070133A1 (en) | 2014-10-31 | 2015-10-30 | Illumination system, inspection tool with illumination system, and method of operating an illumination system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021057066A Division JP7193571B2 (ja) | 2014-10-31 | 2021-03-30 | 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017533437A JP2017533437A (ja) | 2017-11-09 |
| JP2017533437A5 true JP2017533437A5 (https=) | 2018-12-06 |
Family
ID=55858432
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017523513A Pending JP2017533437A (ja) | 2014-10-31 | 2015-10-30 | 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 |
| JP2021057066A Active JP7193571B2 (ja) | 2014-10-31 | 2021-03-30 | 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021057066A Active JP7193571B2 (ja) | 2014-10-31 | 2021-03-30 | 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 |
Country Status (9)
| Country | Link |
|---|---|
| EP (1) | EP3140638B1 (https=) |
| JP (2) | JP2017533437A (https=) |
| KR (1) | KR102272438B1 (https=) |
| CN (2) | CN106796181A (https=) |
| MY (1) | MY188346A (https=) |
| PH (1) | PH12017500736B1 (https=) |
| SG (1) | SG11201702728UA (https=) |
| TW (1) | TWI697662B (https=) |
| WO (1) | WO2016070133A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101795322B1 (ko) | 2016-12-30 | 2017-11-08 | 허철 | 유기발광다이오드 검사용 듀얼 이미징 텔레센트릭 광학장치 |
| EP3803494A1 (de) * | 2018-06-04 | 2021-04-14 | JENOPTIK Optical Systems GmbH | Mikroskop und verfahren zum aufnehmen eines mikroskopischen bildes und verwendung eines plattenförmigen reflektors |
| US20220070343A1 (en) * | 2019-01-14 | 2022-03-03 | Orbotech Ltd. | Multiplexed Image Acquisition Device for Optical System |
| US10816464B2 (en) * | 2019-01-23 | 2020-10-27 | Applied Materials, Inc. | Imaging reflectometer |
| JP7392582B2 (ja) | 2020-06-12 | 2023-12-06 | オムロン株式会社 | 検査システムおよび検査方法 |
| JP7837231B2 (ja) * | 2021-11-19 | 2026-03-30 | 株式会社豊田中央研究所 | 外観検査装置 |
| EP4689618A1 (en) * | 2023-04-03 | 2026-02-11 | Cognex Corporation | System and method for illumination of an imaged scene using a programmable light source |
| KR20250079668A (ko) | 2023-11-27 | 2025-06-04 | 한국기계연구원 | 축열식 연소 산화 장치 |
| KR20250079667A (ko) | 2023-11-27 | 2025-06-04 | 한국기계연구원 | 축열식 연소 산화 장치 |
| KR20250081011A (ko) | 2023-11-29 | 2025-06-05 | 한국기계연구원 | 축열식 연소 산화 장치 |
| KR20250081010A (ko) | 2023-11-29 | 2025-06-05 | 한국기계연구원 | 축류형 전기 산화 어셈블리 및 이를 포함하는 축열식 전기 산화 장치 |
| WO2026047530A1 (en) * | 2024-08-27 | 2026-03-05 | Sacmi Cooperativa Meccanici Imola Societa' Cooperativa | Cutting apparatus and method for making an incision in a side wall of a cap |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9325932D0 (en) * | 1993-12-18 | 1994-02-23 | Ibm | Faceplate bonding process for a visual display unit |
| US5949584A (en) * | 1997-05-13 | 1999-09-07 | Northeast Robotics Llc | Wafer |
| JP2000271155A (ja) * | 1999-03-24 | 2000-10-03 | Ushio Inc | 歯科用光重合照射器 |
| JP3472750B2 (ja) * | 2000-04-10 | 2003-12-02 | シーシーエス株式会社 | 表面検査装置 |
| US20040223342A1 (en) * | 2001-12-31 | 2004-11-11 | Klipstein Donald L. | LED inspection lamp, cluster LED, and LED with stabilizing agents |
| US20040042001A1 (en) * | 2002-04-18 | 2004-03-04 | Kla-Tencor Technologies Corporation | Simultaneous multi-spot inspection and imaging |
| US6870949B2 (en) * | 2003-02-26 | 2005-03-22 | Electro Scientific Industries | Coaxial narrow angle dark field lighting |
| CN2605171Y (zh) * | 2003-03-14 | 2004-03-03 | 南开大学 | 发光二极管阵列铁路信号装置 |
| US7352467B2 (en) * | 2003-10-24 | 2008-04-01 | University Of Washington | Surface plasmon resonance imaging system and method |
| CN100433245C (zh) * | 2004-03-11 | 2008-11-12 | 株式会社液晶先端技术开发中心 | 激光结晶设备及激光结晶方法 |
| JP2006011371A (ja) * | 2004-05-26 | 2006-01-12 | Fuji Photo Film Co Ltd | パターン形成方法 |
| US7738092B1 (en) * | 2008-01-08 | 2010-06-15 | Kla-Tencor Corporation | System and method for reducing speckle noise in die-to-die inspection systems |
| US7990531B2 (en) * | 2008-06-05 | 2011-08-02 | Coopervision International Holding Company, Lp | Multi-imaging automated inspection methods and systems for wet ophthalmic lenses |
| EP2335047A4 (en) * | 2008-09-12 | 2012-02-22 | Ceramicam Ltd | SURFACE SCANNING DEVICE |
| JP2012083211A (ja) | 2010-10-12 | 2012-04-26 | Canon Inc | 表面状態検査装置、表面状態検査方法及びプログラム |
| JP5027946B1 (ja) * | 2011-12-28 | 2012-09-19 | 新明和工業株式会社 | 検査システム |
| JP2013145123A (ja) * | 2012-01-13 | 2013-07-25 | Seiwa Optical Co Ltd | 広角反射同軸照明付光学系 |
| US9395066B2 (en) * | 2012-01-13 | 2016-07-19 | Laser Devices, Inc. | Adjustable beam illuminator |
| DE102012001398B4 (de) * | 2012-01-26 | 2015-09-24 | Airbus Defence and Space GmbH | Sendevorrichtung zur optischen Freiraum-Datenkommunikation basierend auf diskreten Leistungspegeln nebst Verwendung |
| US9128064B2 (en) * | 2012-05-29 | 2015-09-08 | Kla-Tencor Corporation | Super resolution inspection system |
| JP2014154644A (ja) * | 2013-02-06 | 2014-08-25 | Stanley Electric Co Ltd | Ｌｅｄパッケージ及びこれを備えた発光装置 |
| JP6205780B2 (ja) * | 2013-03-27 | 2017-10-04 | 凸版印刷株式会社 | 照明装置及び検査装置 |
| US9255887B2 (en) * | 2013-06-19 | 2016-02-09 | Kla-Tencor Corporation | 2D programmable aperture mechanism |
-
2015
- 2015-10-30 KR KR1020177014639A patent/KR102272438B1/ko active Active
- 2015-10-30 JP JP2017523513A patent/JP2017533437A/ja active Pending
- 2015-10-30 TW TW104135916A patent/TWI697662B/zh active
- 2015-10-30 CN CN201580055825.6A patent/CN106796181A/zh active Pending
- 2015-10-30 PH PH1/2017/500736A patent/PH12017500736B1/en unknown
- 2015-10-30 CN CN202210561988.3A patent/CN114813758A/zh active Pending
- 2015-10-30 WO PCT/US2015/058486 patent/WO2016070133A1/en not_active Ceased
- 2015-10-30 MY MYPI2016002118A patent/MY188346A/en unknown
- 2015-10-30 EP EP15853870.2A patent/EP3140638B1/en active Active
- 2015-10-30 SG SG11201702728UA patent/SG11201702728UA/en unknown
-
2021
- 2021-03-30 JP JP2021057066A patent/JP7193571B2/ja active Active
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