KR102272438B1 - 조명 시스템, 조명 시스템을 구비한 검사 도구, 및 조명 시스템 동작 방법 - Google Patents

조명 시스템, 조명 시스템을 구비한 검사 도구, 및 조명 시스템 동작 방법 Download PDF

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KR102272438B1
KR102272438B1 KR1020177014639A KR20177014639A KR102272438B1 KR 102272438 B1 KR102272438 B1 KR 102272438B1 KR 1020177014639 A KR1020177014639 A KR 1020177014639A KR 20177014639 A KR20177014639 A KR 20177014639A KR 102272438 B1 KR102272438 B1 KR 102272438B1
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illumination
light source
beam path
shape
configurable
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KR20170080631A (ko
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필립 카우벤베르그스
그리브 요한 드
폴린 베곡
코엔 구르만
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케이엘에이 코포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020177014639A 2014-10-31 2015-10-30 조명 시스템, 조명 시스템을 구비한 검사 도구, 및 조명 시스템 동작 방법 Active KR102272438B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462073393P 2014-10-31 2014-10-31
US62/073,393 2014-10-31
PCT/US2015/058486 WO2016070133A1 (en) 2014-10-31 2015-10-30 Illumination system, inspection tool with illumination system, and method of operating an illumination system

Publications (2)

Publication Number Publication Date
KR20170080631A KR20170080631A (ko) 2017-07-10
KR102272438B1 true KR102272438B1 (ko) 2021-07-02

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Country Status (9)

Country Link
EP (1) EP3140638B1 (https=)
JP (2) JP2017533437A (https=)
KR (1) KR102272438B1 (https=)
CN (2) CN106796181A (https=)
MY (1) MY188346A (https=)
PH (1) PH12017500736B1 (https=)
SG (1) SG11201702728UA (https=)
TW (1) TWI697662B (https=)
WO (1) WO2016070133A1 (https=)

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KR101795322B1 (ko) 2016-12-30 2017-11-08 허철 유기발광다이오드 검사용 듀얼 이미징 텔레센트릭 광학장치
EP3803494A1 (de) * 2018-06-04 2021-04-14 JENOPTIK Optical Systems GmbH Mikroskop und verfahren zum aufnehmen eines mikroskopischen bildes und verwendung eines plattenförmigen reflektors
US20220070343A1 (en) * 2019-01-14 2022-03-03 Orbotech Ltd. Multiplexed Image Acquisition Device for Optical System
US10816464B2 (en) * 2019-01-23 2020-10-27 Applied Materials, Inc. Imaging reflectometer
JP7392582B2 (ja) 2020-06-12 2023-12-06 オムロン株式会社 検査システムおよび検査方法
JP7837231B2 (ja) * 2021-11-19 2026-03-30 株式会社豊田中央研究所 外観検査装置
EP4689618A1 (en) * 2023-04-03 2026-02-11 Cognex Corporation System and method for illumination of an imaged scene using a programmable light source
KR20250079668A (ko) 2023-11-27 2025-06-04 한국기계연구원 축열식 연소 산화 장치
KR20250079667A (ko) 2023-11-27 2025-06-04 한국기계연구원 축열식 연소 산화 장치
KR20250081011A (ko) 2023-11-29 2025-06-05 한국기계연구원 축열식 연소 산화 장치
KR20250081010A (ko) 2023-11-29 2025-06-05 한국기계연구원 축류형 전기 산화 어셈블리 및 이를 포함하는 축열식 전기 산화 장치
WO2026047530A1 (en) * 2024-08-27 2026-03-05 Sacmi Cooperativa Meccanici Imola Societa' Cooperativa Cutting apparatus and method for making an incision in a side wall of a cap

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JP2002039956A (ja) * 2000-04-10 2002-02-06 Ccs Inc 表面検査装置
US20040165759A1 (en) 2003-02-26 2004-08-26 Leo Baldwin Coaxial narrow angle dark field lighting
WO2010029549A1 (en) 2008-09-12 2010-03-18 Ceramicam Ltd. Surface scanning device

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US20040223342A1 (en) * 2001-12-31 2004-11-11 Klipstein Donald L. LED inspection lamp, cluster LED, and LED with stabilizing agents
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JP2012083211A (ja) 2010-10-12 2012-04-26 Canon Inc 表面状態検査装置、表面状態検査方法及びプログラム
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JP2002039956A (ja) * 2000-04-10 2002-02-06 Ccs Inc 表面検査装置
US20040165759A1 (en) 2003-02-26 2004-08-26 Leo Baldwin Coaxial narrow angle dark field lighting
WO2010029549A1 (en) 2008-09-12 2010-03-18 Ceramicam Ltd. Surface scanning device

Also Published As

Publication number Publication date
KR20170080631A (ko) 2017-07-10
TWI697662B (zh) 2020-07-01
EP3140638A1 (en) 2017-03-15
EP3140638A4 (en) 2018-01-24
JP2017533437A (ja) 2017-11-09
JP7193571B2 (ja) 2022-12-20
SG11201702728UA (en) 2017-05-30
CN106796181A (zh) 2017-05-31
EP3140638B1 (en) 2024-02-14
PH12017500736B1 (en) 2023-03-17
JP2021101194A (ja) 2021-07-08
WO2016070133A1 (en) 2016-05-06
CN114813758A (zh) 2022-07-29
MY188346A (en) 2021-12-01
PH12017500736A1 (en) 2017-10-09
TW201627656A (zh) 2016-08-01

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