JP2017533437A - 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 - Google Patents

照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 Download PDF

Info

Publication number
JP2017533437A
JP2017533437A JP2017523513A JP2017523513A JP2017533437A JP 2017533437 A JP2017533437 A JP 2017533437A JP 2017523513 A JP2017523513 A JP 2017523513A JP 2017523513 A JP2017523513 A JP 2017523513A JP 2017533437 A JP2017533437 A JP 2017533437A
Authority
JP
Japan
Prior art keywords
illumination
light source
beam path
imaging
configurable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017523513A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017533437A5 (https=
Inventor
フィリップ コーウェンバーグス
フィリップ コーウェンバーグス
グリーヴ ジョアン デ
グリーヴ ジョアン デ
ポリーヌ ベゴック
ポリーヌ ベゴック
クーン ホールマン
クーン ホールマン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Corp filed Critical KLA Corp
Publication of JP2017533437A publication Critical patent/JP2017533437A/ja
Publication of JP2017533437A5 publication Critical patent/JP2017533437A5/ja
Priority to JP2021057066A priority Critical patent/JP7193571B2/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2017523513A 2014-10-31 2015-10-30 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法 Pending JP2017533437A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021057066A JP7193571B2 (ja) 2014-10-31 2021-03-30 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462073393P 2014-10-31 2014-10-31
US62/073,393 2014-10-31
PCT/US2015/058486 WO2016070133A1 (en) 2014-10-31 2015-10-30 Illumination system, inspection tool with illumination system, and method of operating an illumination system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021057066A Division JP7193571B2 (ja) 2014-10-31 2021-03-30 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法

Publications (2)

Publication Number Publication Date
JP2017533437A true JP2017533437A (ja) 2017-11-09
JP2017533437A5 JP2017533437A5 (https=) 2018-12-06

Family

ID=55858432

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2017523513A Pending JP2017533437A (ja) 2014-10-31 2015-10-30 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法
JP2021057066A Active JP7193571B2 (ja) 2014-10-31 2021-03-30 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021057066A Active JP7193571B2 (ja) 2014-10-31 2021-03-30 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法

Country Status (9)

Country Link
EP (1) EP3140638B1 (https=)
JP (2) JP2017533437A (https=)
KR (1) KR102272438B1 (https=)
CN (2) CN106796181A (https=)
MY (1) MY188346A (https=)
PH (1) PH12017500736B1 (https=)
SG (1) SG11201702728UA (https=)
TW (1) TWI697662B (https=)
WO (1) WO2016070133A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021196240A (ja) * 2020-06-12 2021-12-27 オムロン株式会社 検査システムおよび検査方法
JP2023075897A (ja) * 2021-11-19 2023-05-31 株式会社豊田中央研究所 外観検査装置

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101795322B1 (ko) 2016-12-30 2017-11-08 허철 유기발광다이오드 검사용 듀얼 이미징 텔레센트릭 광학장치
EP3803494A1 (de) * 2018-06-04 2021-04-14 JENOPTIK Optical Systems GmbH Mikroskop und verfahren zum aufnehmen eines mikroskopischen bildes und verwendung eines plattenförmigen reflektors
US20220070343A1 (en) * 2019-01-14 2022-03-03 Orbotech Ltd. Multiplexed Image Acquisition Device for Optical System
US10816464B2 (en) * 2019-01-23 2020-10-27 Applied Materials, Inc. Imaging reflectometer
EP4689618A1 (en) * 2023-04-03 2026-02-11 Cognex Corporation System and method for illumination of an imaged scene using a programmable light source
KR20250079668A (ko) 2023-11-27 2025-06-04 한국기계연구원 축열식 연소 산화 장치
KR20250079667A (ko) 2023-11-27 2025-06-04 한국기계연구원 축열식 연소 산화 장치
KR20250081011A (ko) 2023-11-29 2025-06-05 한국기계연구원 축열식 연소 산화 장치
KR20250081010A (ko) 2023-11-29 2025-06-05 한국기계연구원 축류형 전기 산화 어셈블리 및 이를 포함하는 축열식 전기 산화 장치
WO2026047530A1 (en) * 2024-08-27 2026-03-05 Sacmi Cooperativa Meccanici Imola Societa' Cooperativa Cutting apparatus and method for making an incision in a side wall of a cap

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5949584A (en) * 1997-05-13 1999-09-07 Northeast Robotics Llc Wafer
JP2002039956A (ja) * 2000-04-10 2002-02-06 Ccs Inc 表面検査装置
US20050134860A1 (en) * 2003-10-24 2005-06-23 Chinowsky Timothy M. Surface plasmon resonance imaging system and method
JP2006514308A (ja) * 2003-02-26 2006-04-27 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 同軸狭角暗視野照明
WO2010029549A1 (en) * 2008-09-12 2010-03-18 Ceramicam Ltd. Surface scanning device
JP2014190811A (ja) * 2013-03-27 2014-10-06 Toppan Printing Co Ltd 照明装置及び検査装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9325932D0 (en) * 1993-12-18 1994-02-23 Ibm Faceplate bonding process for a visual display unit
JP2000271155A (ja) * 1999-03-24 2000-10-03 Ushio Inc 歯科用光重合照射器
US20040223342A1 (en) * 2001-12-31 2004-11-11 Klipstein Donald L. LED inspection lamp, cluster LED, and LED with stabilizing agents
US20040042001A1 (en) * 2002-04-18 2004-03-04 Kla-Tencor Technologies Corporation Simultaneous multi-spot inspection and imaging
CN2605171Y (zh) * 2003-03-14 2004-03-03 南开大学 发光二极管阵列铁路信号装置
CN100433245C (zh) * 2004-03-11 2008-11-12 株式会社液晶先端技术开发中心 激光结晶设备及激光结晶方法
JP2006011371A (ja) * 2004-05-26 2006-01-12 Fuji Photo Film Co Ltd パターン形成方法
US7738092B1 (en) * 2008-01-08 2010-06-15 Kla-Tencor Corporation System and method for reducing speckle noise in die-to-die inspection systems
US7990531B2 (en) * 2008-06-05 2011-08-02 Coopervision International Holding Company, Lp Multi-imaging automated inspection methods and systems for wet ophthalmic lenses
JP2012083211A (ja) 2010-10-12 2012-04-26 Canon Inc 表面状態検査装置、表面状態検査方法及びプログラム
JP5027946B1 (ja) * 2011-12-28 2012-09-19 新明和工業株式会社 検査システム
JP2013145123A (ja) * 2012-01-13 2013-07-25 Seiwa Optical Co Ltd 広角反射同軸照明付光学系
US9395066B2 (en) * 2012-01-13 2016-07-19 Laser Devices, Inc. Adjustable beam illuminator
DE102012001398B4 (de) * 2012-01-26 2015-09-24 Airbus Defence and Space GmbH Sendevorrichtung zur optischen Freiraum-Datenkommunikation basierend auf diskreten Leistungspegeln nebst Verwendung
US9128064B2 (en) * 2012-05-29 2015-09-08 Kla-Tencor Corporation Super resolution inspection system
JP2014154644A (ja) * 2013-02-06 2014-08-25 Stanley Electric Co Ltd Ｌｅｄパッケージ及びこれを備えた発光装置
US9255887B2 (en) * 2013-06-19 2016-02-09 Kla-Tencor Corporation 2D programmable aperture mechanism

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5949584A (en) * 1997-05-13 1999-09-07 Northeast Robotics Llc Wafer
JP2002039956A (ja) * 2000-04-10 2002-02-06 Ccs Inc 表面検査装置
JP2006514308A (ja) * 2003-02-26 2006-04-27 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 同軸狭角暗視野照明
US20050134860A1 (en) * 2003-10-24 2005-06-23 Chinowsky Timothy M. Surface plasmon resonance imaging system and method
WO2010029549A1 (en) * 2008-09-12 2010-03-18 Ceramicam Ltd. Surface scanning device
JP2014190811A (ja) * 2013-03-27 2014-10-06 Toppan Printing Co Ltd 照明装置及び検査装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021196240A (ja) * 2020-06-12 2021-12-27 オムロン株式会社 検査システムおよび検査方法
JP7392582B2 (ja) 2020-06-12 2023-12-06 オムロン株式会社 検査システムおよび検査方法
US12430742B2 (en) 2020-06-12 2025-09-30 Omron Corporation Inspection system and inspection method
JP2023075897A (ja) * 2021-11-19 2023-05-31 株式会社豊田中央研究所 外観検査装置
JP7837231B2 (ja) 2021-11-19 2026-03-30 株式会社豊田中央研究所 外観検査装置

Also Published As

Publication number Publication date
KR20170080631A (ko) 2017-07-10
TWI697662B (zh) 2020-07-01
EP3140638A1 (en) 2017-03-15
EP3140638A4 (en) 2018-01-24
JP7193571B2 (ja) 2022-12-20
SG11201702728UA (en) 2017-05-30
CN106796181A (zh) 2017-05-31
EP3140638B1 (en) 2024-02-14
KR102272438B1 (ko) 2021-07-02
PH12017500736B1 (en) 2023-03-17
JP2021101194A (ja) 2021-07-08
WO2016070133A1 (en) 2016-05-06
CN114813758A (zh) 2022-07-29
MY188346A (en) 2021-12-01
PH12017500736A1 (en) 2017-10-09
TW201627656A (zh) 2016-08-01

Similar Documents

Publication Publication Date Title
JP7193571B2 (ja) 照明システム、照明システムを有する検査ツール、および照明システムを作動させる方法
US10379057B2 (en) Illumination system, inspection tool with illumination system, and method of operating an illumination system
EP1398659B1 (en) Illumination apparatus and image projection apparatus using the illumination apparatus
CN103069436B (zh) 照明系统
JP3385432B2 (ja) 検査装置
KR102226444B1 (ko) 적응적 확산 조명 시스템들 및 방법들
JP2006515676A (ja) ２−ｄおよび表面凹凸形状の同時検査のための方法および装置
US9332166B2 (en) Imaging apparatus equipped with illumination optical system having a plurality of optical integrators that guide light
JP6370626B2 (ja) 照明光学系、照明装置、及び照明光学素子
JP2017533437A5 (https=)
TWI702386B (zh) 遠心亮場與環形暗場無縫融合式照射
EP2137518B1 (en) Through-substrate optical imaging device and method
CN119804484B (zh) 照明装置、暗场检测系统及方法
JP2007007660A (ja) レーザ加工装置
JP7692265B2 (ja) 同軸照明装置
JP2006071353A (ja) 顕微鏡装置、外観検査装置、半導体外観検査装置及び顕微鏡装置における試料照明方法
JP2013083726A (ja) 拡大観察装置
JP2021085815A (ja) 光照射装置、検査システム、及び、光照射方法
JP2002196259A (ja) 視野位置表示装置
WO2025187232A1 (ja) レンズ、光学システム、撮像装置及び検査装置
WO2026033508A1 (en) Systems and methods for generating images of seam-lines in light-guide optical elements
JP2024065760A (ja) ライン光照射装置及び検査システム
JPH08220016A (ja) 欠陥検出用光学装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20181024

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20181024

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190822

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190827

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20191125

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200226

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200728

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201022

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20201208