CN106796181A - 照明系统、具有照明系统的检验工具及操作照明系统的方法 - Google Patents

照明系统、具有照明系统的检验工具及操作照明系统的方法 Download PDF

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Publication number
CN106796181A
CN106796181A CN201580055825.6A CN201580055825A CN106796181A CN 106796181 A CN106796181 A CN 106796181A CN 201580055825 A CN201580055825 A CN 201580055825A CN 106796181 A CN106796181 A CN 106796181A
Authority
CN
China
Prior art keywords
illumination
light source
beam path
imaging
configurable area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201580055825.6A
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English (en)
Chinese (zh)
Inventor
F·考文贝里斯
J·德格里夫
P·贝古奇
K·戈尔曼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
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KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Priority to CN202210561988.3A priority Critical patent/CN114813758A/zh
Publication of CN106796181A publication Critical patent/CN106796181A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/082—Condensers for incident illumination only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201580055825.6A 2014-10-31 2015-10-30 照明系统、具有照明系统的检验工具及操作照明系统的方法 Pending CN106796181A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210561988.3A CN114813758A (zh) 2014-10-31 2015-10-30 照明系统、具有照明系统的检验工具及操作照明系统的方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201462073393P 2014-10-31 2014-10-31
US62/073,393 2014-10-31
PCT/US2015/058486 WO2016070133A1 (en) 2014-10-31 2015-10-30 Illumination system, inspection tool with illumination system, and method of operating an illumination system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202210561988.3A Division CN114813758A (zh) 2014-10-31 2015-10-30 照明系统、具有照明系统的检验工具及操作照明系统的方法

Publications (1)

Publication Number Publication Date
CN106796181A true CN106796181A (zh) 2017-05-31

Family

ID=55858432

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201580055825.6A Pending CN106796181A (zh) 2014-10-31 2015-10-30 照明系统、具有照明系统的检验工具及操作照明系统的方法
CN202210561988.3A Pending CN114813758A (zh) 2014-10-31 2015-10-30 照明系统、具有照明系统的检验工具及操作照明系统的方法

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Country Status (9)

Country Link
EP (1) EP3140638B1 (https=)
JP (2) JP2017533437A (https=)
KR (1) KR102272438B1 (https=)
CN (2) CN106796181A (https=)
MY (1) MY188346A (https=)
PH (1) PH12017500736B1 (https=)
SG (1) SG11201702728UA (https=)
TW (1) TWI697662B (https=)
WO (1) WO2016070133A1 (https=)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN113287001A (zh) * 2019-01-14 2021-08-20 奥宝科技有限公司 用于光学系统的多重图像获取装置
CN113330299A (zh) * 2019-01-23 2021-08-31 应用材料公司 成像反射计

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KR101795322B1 (ko) 2016-12-30 2017-11-08 허철 유기발광다이오드 검사용 듀얼 이미징 텔레센트릭 광학장치
EP3803494A1 (de) * 2018-06-04 2021-04-14 JENOPTIK Optical Systems GmbH Mikroskop und verfahren zum aufnehmen eines mikroskopischen bildes und verwendung eines plattenförmigen reflektors
JP7392582B2 (ja) 2020-06-12 2023-12-06 オムロン株式会社 検査システムおよび検査方法
JP7837231B2 (ja) * 2021-11-19 2026-03-30 株式会社豊田中央研究所 外観検査装置
EP4689618A1 (en) * 2023-04-03 2026-02-11 Cognex Corporation System and method for illumination of an imaged scene using a programmable light source
KR20250079668A (ko) 2023-11-27 2025-06-04 한국기계연구원 축열식 연소 산화 장치
KR20250079667A (ko) 2023-11-27 2025-06-04 한국기계연구원 축열식 연소 산화 장치
KR20250081011A (ko) 2023-11-29 2025-06-05 한국기계연구원 축열식 연소 산화 장치
KR20250081010A (ko) 2023-11-29 2025-06-05 한국기계연구원 축류형 전기 산화 어셈블리 및 이를 포함하는 축열식 전기 산화 장치
WO2026047530A1 (en) * 2024-08-27 2026-03-05 Sacmi Cooperativa Meccanici Imola Societa' Cooperativa Cutting apparatus and method for making an incision in a side wall of a cap

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CN1691278A (zh) * 2004-03-11 2005-11-02 株式会社液晶先端技术开发中心 激光结晶设备及激光结晶方法
CN1754175A (zh) * 2003-02-26 2006-03-29 电科学工业公司 共轴小角度暗场光照
US7352467B2 (en) * 2003-10-24 2008-04-01 University Of Washington Surface plasmon resonance imaging system and method
WO2009148862A2 (en) * 2008-06-05 2009-12-10 Coopervision International Holding Company, Lp Multi-imaging automated inspection methods and systems for wet ophthalmic lenses
WO2010029549A1 (en) * 2008-09-12 2010-03-18 Ceramicam Ltd. Surface scanning device
US20140375987A1 (en) * 2013-06-19 2014-12-25 Kla-Tencor Corporation 2d programmable aperture mechanism

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JP3472750B2 (ja) * 2000-04-10 2003-12-02 シーシーエス株式会社 表面検査装置
US20040223342A1 (en) * 2001-12-31 2004-11-11 Klipstein Donald L. LED inspection lamp, cluster LED, and LED with stabilizing agents
US20040042001A1 (en) * 2002-04-18 2004-03-04 Kla-Tencor Technologies Corporation Simultaneous multi-spot inspection and imaging
CN2605171Y (zh) * 2003-03-14 2004-03-03 南开大学 发光二极管阵列铁路信号装置
JP2006011371A (ja) * 2004-05-26 2006-01-12 Fuji Photo Film Co Ltd パターン形成方法
US7738092B1 (en) * 2008-01-08 2010-06-15 Kla-Tencor Corporation System and method for reducing speckle noise in die-to-die inspection systems
JP2012083211A (ja) 2010-10-12 2012-04-26 Canon Inc 表面状態検査装置、表面状態検査方法及びプログラム
JP5027946B1 (ja) * 2011-12-28 2012-09-19 新明和工業株式会社 検査システム
JP2013145123A (ja) * 2012-01-13 2013-07-25 Seiwa Optical Co Ltd 広角反射同軸照明付光学系
US9395066B2 (en) * 2012-01-13 2016-07-19 Laser Devices, Inc. Adjustable beam illuminator
DE102012001398B4 (de) * 2012-01-26 2015-09-24 Airbus Defence and Space GmbH Sendevorrichtung zur optischen Freiraum-Datenkommunikation basierend auf diskreten Leistungspegeln nebst Verwendung
US9128064B2 (en) * 2012-05-29 2015-09-08 Kla-Tencor Corporation Super resolution inspection system
JP2014154644A (ja) * 2013-02-06 2014-08-25 Stanley Electric Co Ltd Ｌｅｄパッケージ及びこれを備えた発光装置
JP6205780B2 (ja) * 2013-03-27 2017-10-04 凸版印刷株式会社 照明装置及び検査装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5949584A (en) * 1997-05-13 1999-09-07 Northeast Robotics Llc Wafer
CN1754175A (zh) * 2003-02-26 2006-03-29 电科学工业公司 共轴小角度暗场光照
US7352467B2 (en) * 2003-10-24 2008-04-01 University Of Washington Surface plasmon resonance imaging system and method
CN1691278A (zh) * 2004-03-11 2005-11-02 株式会社液晶先端技术开发中心 激光结晶设备及激光结晶方法
WO2009148862A2 (en) * 2008-06-05 2009-12-10 Coopervision International Holding Company, Lp Multi-imaging automated inspection methods and systems for wet ophthalmic lenses
WO2010029549A1 (en) * 2008-09-12 2010-03-18 Ceramicam Ltd. Surface scanning device
US20140375987A1 (en) * 2013-06-19 2014-12-25 Kla-Tencor Corporation 2d programmable aperture mechanism

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113287001A (zh) * 2019-01-14 2021-08-20 奥宝科技有限公司 用于光学系统的多重图像获取装置
CN113287001B (zh) * 2019-01-14 2023-04-04 奥宝科技有限公司 用于光学系统的多重图像获取装置
CN113330299A (zh) * 2019-01-23 2021-08-31 应用材料公司 成像反射计
CN113330299B (zh) * 2019-01-23 2024-06-07 应用材料公司 成像反射计

Also Published As

Publication number Publication date
KR20170080631A (ko) 2017-07-10
TWI697662B (zh) 2020-07-01
EP3140638A1 (en) 2017-03-15
EP3140638A4 (en) 2018-01-24
JP2017533437A (ja) 2017-11-09
JP7193571B2 (ja) 2022-12-20
SG11201702728UA (en) 2017-05-30
EP3140638B1 (en) 2024-02-14
KR102272438B1 (ko) 2021-07-02
PH12017500736B1 (en) 2023-03-17
JP2021101194A (ja) 2021-07-08
WO2016070133A1 (en) 2016-05-06
CN114813758A (zh) 2022-07-29
MY188346A (en) 2021-12-01
PH12017500736A1 (en) 2017-10-09
TW201627656A (zh) 2016-08-01

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Application publication date: 20170531

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