Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/8806—Specially adapted optical and illumination features
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B21/00—Microscopes
  • G02B21/06—Means for illuminating specimens
  • G02B21/08—Condensers
  • G02B21/082—Condensers for incident illumination only
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/8806—Specially adapted optical and illumination features
  • G01N2021/8812—Diffuse illumination, e.g. "sky"
  • G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs

Definitions

• the present invention refers to an illumination system.
• the present invention refers to an inspection tool with an illumination system.
• the present invention refers to a method of operating an illumination system.
• Japanese patent application JP 2013-145123 A discloses a wide-angle reflection optical system with coaxial illumination.
• the optical system has a camera for forming an image of an object to be inspected on an area sensor of the camera.
• a branch optical element is disposed rearward a lens, which is close to the object side to be inspected.
• the branch optical element is located on an optical axis of the optical system.
• a light source is provided for coaxial illumination of the inspection object. The illumination luminous flux from the light source enters the branch optical element from a direction so that it crosses the optical axis of the image capture optical system.
• Japanese patent application JP 201 1 -106912 A discloses an imaging illumination device that uses coaxial illumination to capture a bright image with an element to be imaged.
• the illumination light irradiated from a light source is made incident to a half mirror via a diffusion plate. A portion of the light is reflected and illuminates a substrate. A portion of the light reflected by the substrate passes through the half mirror and is incident on the imaging element of an imaging device. The pattern image formed on the substrate is photographed.
• a reflecting member (mirror) that totally reflects the illumination light to the object to be illuminated is fixed to the outside of the portion of the half mirror, where the image of an imaging object (imaging area) passes through and the incident side of the illumination light.
• the illumination light from the light source is reflected by the half mirror and has the substrate that is reflected by this reflecting member irradiated. As a result, the substrate (object to be illuminated) can be illuminated brightly.
• the above object is achieved by an illumination system for collimated illumination.
• the illumination system comprises: a configurable area light source arranged in an optical axis of an illumination beam path, wherein the area light source is configured such that different beam diameters are settable; an optical axis of an imaging beam path; and at least one illumination lens is positioned in the illumination beam path for directing a collimated beam onto at least a field of view on a surface of an object, wherein a value of an angle of incidence of the optical axis of the illumination beam path equals a value of an angle of reflectance of the optical axis of the imaging beam path.
• a further object of the invention is to provide an inspection tool which enables the inspection of objects with different illumination conditions in one physical setup and the different illumination conditions for the object under inspection should be selected in real time.
• an inspection tool which comprises: a camera, arranged in an optical axis of an imaging beam path; an imaging lens positioned in the imaging beam path for imaging at least a portion of a surface of an object into an image plane of the camera;
• an illumination system with a configurable area light source wherein the configurable area light source is arranged in an optical axis of an illumination beam path and the configurable area light source is configured such that different beam diameters are settable;
• At least one illumination lens is positioned in the illumination beam path for directing a collimated beam onto a field of view on the surface of the object, wherein a value of an angle of incidence of the optical axis of the illumination beam path equals a value of an angle of reflectance of the optical axis of the imaging beam path.
• An additional object of the invention is to provide a method for inspecting an object with different illumination conditions in one physical setup and the different illumination conditions (wide beam coaxial light and all collimation angles) for the object under inspection should be selected in real time.
• the above object is achieved by a method for inspecting an object wherein the method comprises: a. directing illumination light, defining a light beam opening angle, from a
• the advantage of the inventive illumination system, the inventive inspection tool and the inventive method are that the collimation angle is selectable at real time (e.g. when different collimation angles are desired for different consecutive camera images). This is achieved because all wide beam coaxial light and all collimation angles are combined in one physical setup. According to the invention it is possible to combine the functionality of a wide angle coaxial illumination and a collimated coaxial illumination in one illumination system. Instead of using a point light source, an area light source is used on which different area diameters can be selected or addressed.
• the illumination is comparable to the point light source functionality.
• this selection is comparable to putting the "diffuse area light source” from a "wide angle coaxial illumination” at the location of the "point light source” of a collimated coaxial illumination.
• the result of this setup is a very wide beam coaxial illumination which is comparable to the light coming from a traditional "wide angle coaxial illumination” and the exception is that the light is now projected through the illumination lens.
• the inventive illumination system allows an additional setup, which is that only the outer diameters of the area light source are used. This setup results in a dark field near coaxial illumination.
• the illumination lens of the inventive illumination system is a Fresnel lens.
• the illumination lens of the present invention is a Fresnel lens, it will be clear to those skilled in the art that the illumination lens is not limited to a Fresnel lens.
• a beam splitter is positioned in the illumination beam path after the at least one illumination lens.
• the beam splitter directs the collimated illumination light (illumination condition selected according to the addressed areas of the area light source) from the area light source along a redirected optical axis of the illumination beam path onto the surface of the object.
• the arrangement of the optical axis of the imaging beam path is coaxial with the redirected optical axis of the illumination beam path. It is obvious for a skilled person that the same effect may be achieved by swapping the imaging beam path and the illumination beam path to the opposite side of the beam splitter.
• the illumination beam path goes direct through the beam splitter.
• the imaging beam path is now folded (reflected) by the beam splitter.
• the area light source is a 2-dimensional arrangement of a plurality of discrete light emitting elements.
• the discrete light emitting elements are light emitting diodes.
• the 2-dimensional arrangement of the plurality of light emitting elements is a matrix arrangement wherein the light emitting elements are addressable individually by a control and drive device assigned to the configurable area light source. With the control and drive device it is possible to address the light emitting elements in such a way that concentric geometrical shapes on the area light source emit light.
• Another possible embodiment of the configurable area light source comprises at least one homogeneous light emitting element and at least one configurable shutter element, which is arranged downstream of the at least one homogeneous light emitting element in the illumination beam path.
• the configurable area light source comprises a single light emitting element, providing a homogeneous area lightning.
• the LCD-screen is positioned in front of the single light emitting element.
• the LCD-screen comprises a plurality of individual pixels, which are arranged in a 2-dimensioanl arrangement. The individual pixels are addressable in order to change a transmittance value of each individual pixel.
• the configurable area light source is configured as an arrangement of light emitting elements on a carrier in the form of concentric geometrical shapes.
• An ideal solution for the concentric geometrical shapes is concentric circles.
• Another possibility of the concentric geometrical shapes is a plurality of concentric rectangles. This arrangement would be the easiest solution (for instance LED positioning), but the collimation angles are different for the diagonal direction versus the horizontal/vertical direction of the rectangle.
• a good compromise could be to use concentric hexagons, which can be realized for example by a staggered grid of light emitting elements (LED grid).
• the design of the area light source can be such that in fact any pattern can be projected. This will result in light beams having a light beam opening angle
• the configuration of the area light source is not limited to concentric geometrical shapes. It is understood by a skilled person that the projected pattern of the area light source is not limited to concentric geometrical shapes. According to the invention any pattern can be projected.
• the individual light emitting elements can be addressed by a computer or a control and drive device so that the desired pattern is achieved.
• the pixels of an LCD screen, covering the single area light source are addressed individually (addressed LCD pixels block the light from the area light source), so that any desired pattern can be projected.
• An additional inventive concept is the integration of the inventive configurable area light source into an inspection tool.
• a camera is arranged in an optical axis of an imaging beam path.
• An imaging lens is positioned in the image beam path for imaging at least a portion of a surface of an object into an image plane of the camera.
• An illumination system with an area light source is arranged in an optical axis of an illumination beam path.
• the configurable area light source is configured such that different beam diameters for illumination are settable.
• At least one illumination lens is positioned in the illumination beam path for directing a collimated beam onto a field of view on the surface of the object, wherein a value of an angle of incidence of the optical axis of the illumination beam path equals a value of an angle of reflectance of the optical axis of the imaging beam path.
• a beam splitter is positioned in the illumination beam path after the at least one illumination lens.
• the beam splitter directs the collimated illumination light from the area light source along a redirected optical axis of the illumination beam path, which is parallel to the imaging beam path, onto the surface of the object. Consequently, the optical axis of the imaging beam path is coaxial with the redirected optical axis of the illumination beam path.
• an inspection tool with a configurable illumination for example configurable light beam opening angles
• the configuration of the light beam opening angle ranges from collimated light beams up to wide opening angle light beams.
• the different light diameters or shapes can be switched on in real time as independent channels. This leaves the possibility to change for instance the collimation angle of the illumination for consecutive camera images.
• the beam splitter of the inventive illumination system is mounted in a holder.
• An object to be inspected faces with its surface a first side face of the holder.
• a mirror is mounted to a second side face of said holder such that light from the configurable area light source is directed via the illumination lens onto the beam splitter and from there onto the surface of the object.
• the advantage of providing different light beam opening angles in one coaxial illumination setup and thus in one inspection tool is that a user can carry out several different inspection routines with one and the same tool.
• FIG. 1 is a schematic view of a prior art wide angle coaxial illumination system using a big diffuse light source.
• Fig. 2 is a schematic view of a prior art collimated coaxial illumination system using a point light source.
• Fig. 3 is a schematic view of an inventive concept of a collimated coaxial
• Fig. 4 is a schematic view of an inventive concept of a collimated illumination
• Fig. 5 is a schematic view of the degree of the collimation beam opening angle of the light from an area light source without the use of an illumination lens.
• Fig. 6 is a schematic view of the degree of the collimation beam opening angle of the light from a configurable area light source, wherein the illumination system provides a huge spot size from the area light source in combination with the illumination lens.
• Fig. 7 is a schematic view of the degree of the collimation beam opening angle of the light from a configurable area light source, wherein the illumination system provides an intermediate spot size from the area light source in combination with the illumination lens.
• Fig. 8 is a schematic view of the degree of the collimation beam opening angle of the light from a configurable area light source wherein the illumination system provides a small spot size from the area light source in combination with the illumination lens.
• Fig. 9 is a top view of an embodiment of a configurable area light source.
• Fig. 10 is a side view of the embodiment of the configurable area light source of Fig.
• FIG. 9 shows one embodiment of a configurable area light source.
• Fig. 12 shows another embodiment of a configurable area light source.
• Fig. 13 shows a further embodiment of a configurable area light source.
• Fig. 14 shows the integration of the inventive illumination system into an inspection tool or apparatus.
• Fig. 15 is a top view of a further embodiment of the configurable area light source, wherein a LCD is used for forming the illumination pattern.
• Fig. 16 is a side view of the embodiment of the configurable area light source of Fig.
• Figure 1 is a schematic view of a prior art illumination system 100 which is configured as wide angle coaxial illumination system 100 using a big diffuse area light source 2.
• the working principle of the wide angle coaxial illumination system 100 is that the big diffuse area light source 2 projects its light 3 via a beam splitter 4 towards a surface 5 of an object 6.
• the light source 2 is arranged in an optical axis 20 of an illumination beam path 21 .
• the illumination system 100 is a coaxial illumination system 100, because downstream from the beam splitter 4 the light 3 from the light source 2 has the same approximate direction D as an imaging optical axis 80 of an imaging beam path 81 .
• a camera 8 is arranged in the imaging optical axis 80 of the imaging beam path 81 .
• An imaging lens 7 images a portion or field of view of the surface 5 of the object 6 onto an image plane 9 of the camera 8.
• the light 10 reflected from the surface 5 of the object 6 travels along the imaging optical axis 80 of the imaging beam path 81 and, after passing the beam splitter 4, reaches the imaging lens 7 of the camera 8.
• FIG 2 is a schematic view of a prior art illumination system 100, which is configured as a collimated coaxial illumination system 100 using a point light source 15.
• a point light source 15 is projected by an illumination lens 12 via beam splitter 4 towards surface 5 of object 6.
• the point light source 15 is arranged in an optical axis 20 of an illumination beam path 21 .
• the illumination system 100 is a collimated coaxial illumination system 100, because downstream from the beam splitter 4 the light 3 from the point light source 15 has the same approximate direction D as an imaging optical axis 80 of an imaging beam path 81 and is focused on the aperture 83 of the imaging lens 7 (provided the object 6 is a mirror-like device).
• the camera 8 is arranged in the imaging optical axis 80 of the imaging beam path 81 .
• the point light source 15 would be projected and focused exactly on the lens pupil (aperture) 83 (see Figure 3) of the imaging lens 7. This is the case if the imaging lens 7 is a perspective lens. In case the imaging lens 7 is a telecentric lens, the point light source 15 would be projected to infinity.
• the imaging lens 7 images a portion or field of view of the surface 5 of the object 6 onto an image plane 9 of the camera 8.
• the light 10 reflected from the surface 5 of the object 6 travels along the imaging optical axis 80 of an imaging beam path 81 and, after passing the beam splitter 4, reaches the imaging lens 7 of the camera 8.
• Figure 3 is a schematic view of an embodiment of the inventive concept for an illumination system 100, which is a collimated coaxial illumination system 100.
• the inventive illumination system 100 combines the functionality of a wide angle coaxial illumination and a collimated coaxial illumination in one area light source 2.
• the configurable area light source 2 is configured such that different area diameters 2i, 2 2 2 N can be selected or initialized.
• the illumination system 100 is comparable to the illumination system 100 of figure 2 using the point light source functionality.
• the selection of the smallest area diameter 2i results in very narrow beam of collimated coaxial illumination.
• the set-up is comparable to the set-up with the diffuse area light source 2 of figure 1 wherein the diffuse area light source 2 is at the location of the point light source 15 of figure 2.
• the result is a collimated coaxial illumination having a very wide beam coaxial illumination.
• This illumination is comparable to the light coming from a traditional "wide angle coaxial illumination”.
• the light from the configurable area light source 2 is projected now through the illumination lens 12 onto the beam splitter 4 and from there onto the surface 5 of the sample 6.
• the area light source 2 is arranged in the optical axis 20 of the illumination beam path 21 .
• the configurable area light source 2 is configured such that the different settable area diameters 2-i, 2 2 2 N result in different beam diameters. Any area diameter 2i, 2 2 2 N between the smallest diameter 2 ⁇ ⁇ and the largest area diameter 2N allows a variation of the collimation beam opening angle 22.
• the configurable area light source 2 is set such that only the outer area diameters 2 2 2 N are used (send out light) a dark spot remains in the center 2C of the configurable area light source 2. This set-up results in a dark field near coaxial illumination.
• the illumination lens 12 in the illumination beam path 21 illuminates a collimated beam onto a field of view 13 on the surface 5 of the object 6. From the surface 5 of the object 6 the field of view 13 is imaged along the imaging optical axis 80 of imaging beam path 81 onto the imaging lens pupil (aperture) 83 of the imaging lens (imaging lens and camera not shown here).
• Figure 4 is a schematic view of a further embodiment of the inventive concept for an illumination system 100.
• the beam splitter 4 is omitted.
• the configurable area light source 2 is arranged such that the optical axis 20 of the illumination beam path 21 is tilted at an angle a with respect to surface 5 of the object 6.
• the light from the area light source 2 is imaged by the illumination lens 12 onto the surface 5 of the object 6.
• the light reflected from the surface 5 of the object 6 propagates along the imaging optical axis 80 of the illumination beam path 81
• the field of view 13 on the surface 5 of the object 6 is imaged onto the imaging lens pupil (aperture) 83 (imaging lens and camera not shown).
• the imaging optical axis 80 of the imaging beam path 81 is tilted at an angle ⁇ with respect to the surface 5 of the object 6.
• the optical setup of the illumination system 100 is such that the value of an angle a of the optical axis 20 of the illumination beam path 21 equals the value of an angle ⁇ of the imaging optical axis 80 of the imaging beam path 81 .
• the bright field illumination is achieved without the use of the beam splitter. In other words: an inspection tool where the value of the illumination angle a equals the value of the imaging angle ⁇ .
• Figure 5 is a schematic view of the value degree of the collimation beam opening angle 84 without the use of an illumination lens 12. Instead of the illumination lens 12 a diffuser plate 1 1 of an area light source (nor shown here) is positioned prior to the beam splitter 4. As a result from the illumination of the object 6 with a wide beam and without an illumination lens 12 one obtains an asymmetric wide beam which is a traditional wide coaxial illumination. Because of the wide beam opening angle 22 (see Figure 3) the imaging quality of the object 6 in the camera 8 will not be sensitive to a tilt of surface 5 of object.
• Figure 6 to Figure 8 show the dependence of the collimation beam opening angle 84 from the spot size (area diameter) of the illumination light.
• Figure 6 is a schematic view of the degree of collimation beam opening angle 84 using a configurable area light source 2 with a huge spot size (huge area diameter) and an illumination lens 12. Due to the huge spot size (huge area diameter) set by the configurable area light source a portion 24 of the collimation beam opening angle 84 is cut off. This makes the beam opening angle 84 asymmetrical towards the edges of the field of view 13. The light, reflected from the surface 5 of the object 6, is not sensitive to a tilt of the beam splitter 4.
• Figure 7 is a schematic view of the degree of collimation beam opening angle 84 using a configurable area light source with an intermediate spot size (reduced spot size compared to figure 6).
• FIG. 8 is a schematic view of the degree of collimation beam opening angle 84. Compared with the schematic view of figure 7 the spot size is reduced further.
• the configurable area light source 2 has now a small spot size (small area diameter). The result of the narrow beam opening angle is that the set-up of the illumination system is very sensitive to the tilt of the surface 5 of the object 6. Additionally, the light reflected from the surface 5 of the object 6 becomes more collimated compared with the spot sizes (area diameters) shown in figure 6 or 7.
• FIG 9 is a top view of an embodiment of a configurable area light source 2.
• the area light source 2 is configured by a plurality of light emitting elements 14, which are arranged in a 2-dimensional manner on a carrier 16.
• the light emitting elements 14 are arranged in rows 17-i, 17 2 ,...,17 N and columns 18-1 , 18 2 ,...,18N and thereby form a matrix.
• the light emitting elements 14 are light emitting diodes (LEDs).
• the configurable area light source 2 is assigned to a control and drive device 30, or any embedded system which can address the area light source 2 accordingly.
• Figure 9 shows one embodiment how the different sizes 19i, 192,...,19N of the configurable area light source 2 are initialized .
• the light emitting elements 14 are addressed by the control and drive device 30 such that various sizes of the circles of the area light source 2 are addressed. It has to be noted that the addressable form of circles of the configurable area light source 2 should not be considered as a limiting factor.
• Figure 10 is a side view of the embodiment of the configurable area light source 2 of figure 9.
• the light emitting elements 14 are arranged on the carrier 16.
• the configurable area light source 2 in addition can be provided with a diffuser (not shown) in order to achieve a uniform light distribution (area) of the addressed light emitting elements 14 on the carrier 16.
• the configurable area light source 2 can typically be an area made of concentric geometrical shapes 23.
• the ideal solution would be to use concentric circles 25.
• This embodiment is shown in Figure 11 , wherein the configurable area light source 2 is formed by the light emitting elements 14 already positioned in the shape of the concentric circles 25.
• Figure 12 shows another embodiment of a configurable area light source 2.
• the easiest solution for the positioning of the light emitting elements 14 would be to use concentric rectangles 26.
• the geometrical shapes 23 are rectangles, which have the drawback that the collimation angles are different for the diagonal direction versus the horizontal/vertical direction of the rectangles.
• Figure 13 shows a further embodiment of a configurable area light source 2.
• a good compromise compared with the embodiment shown in figure 12, is to use concentric hexagons 27 as the concentric shapes 23. This may be achieved for example by making a staggered grid of light emitting elements 14 (not shown here).
• the design of the area light source is not limited to concentric geometrical shapes 23 shown in figures 1 1 to 13. In fact any pattern can be projected by addressing the light emitting elements 14 of the area light source 2. This will result in light beams having the desired pattern and the desired light beam opening angle.
• Figure 14 shows a possible embodiment of the integration of the inventive illumination system 100 into an inspection apparatus 200.
• the inventive illumination system 100 is integrated in an existing housing 40 of the inspection apparatus 200.
• the inventive illumination system 100 provides different light beam opening angles in one coaxial illumination setup.
• the light 10 from the configurable area light source 2 is directed via a mirror 41 to the illumination lens 12 (one possible embodiment of the illumination lens 12 is a Fresnel lens).
• the mirror 41 is necessary for folding illumination beam path 21 . This saves space and enables the integration of the illumination system 100 into the inspection apparatus 200.
• the beam splitter 4 of the inventive illumination system 100 is mounted in a holder 43.
• the object 6, to be inspected is held by a carrier 45 so that the surface 5 of the object 6 faces a first side face 43A of the holder 43.
• the mirror 41 is mounted to a second side face 43B of the holder 43 such that illumination light 10 from the configurable area light source 2 is directed via the illumination lens 12 onto the beam splitter 4 and from there onto the surface 5 of the object 6.
• the light reflected from the surface 5 of the object 6 travels along the imaging beam path 81 to the camera 8.
• the imaging lens 7 images a field of view 13 of the surface 5 of the object 6 into the image plane 9 of the camera 8.
• two additional mirrors 82 are provided in the imaging beam path 81 , in order to fold the imaging beam path 81 for space reasons.
• FIG 15 shows an additional embodiment of a configurable area light source 2.
• a LCD-screen 50 is positioned after at least one light emitting element 14.
• a single light emitting element 14 is used which provides a homogeneous area lightning of the back of the LCD 50 (see the side view configurable area light source 2 as shown in Figure 16).
• the plurality of pixels 51 of the LCD 50 can be addressed individually.
• the LCD 50 comprises a plurality of pixels 51 , arranged in a 2-dimensional manner. Accordingly, various illumination patterns can be formed by addressing the pixels 51 individually by a known control device (not shown).
• the pixels 51 of the configurable area light source 2 are addressed in a manner , so that a group of pixels block the light 55 from the light emitting element 14 completely and the other pixels 51 let the light 55 from the light emitting element 14 pass (see figure 16). It is evident for a skilled person that the transmittance of the individual pixels 51 can be adjusted as well.

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• 2015
  • 2015-10-30 KR KR1020177014639A patent/KR102272438B1/ko active Active
  • 2015-10-30 JP JP2017523513A patent/JP2017533437A/ja active Pending
  • 2015-10-30 TW TW104135916A patent/TWI697662B/zh active
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