PH12017500736B1 - Illumination system, inspection tool with illumination system, and method of operating an illumination system - Google Patents
Illumination system, inspection tool with illumination system, and method of operating an illumination systemInfo
- Publication number
- PH12017500736B1 PH12017500736B1 PH1/2017/500736A PH12017500736A PH12017500736B1 PH 12017500736 B1 PH12017500736 B1 PH 12017500736B1 PH 12017500736 A PH12017500736 A PH 12017500736A PH 12017500736 B1 PH12017500736 B1 PH 12017500736B1
- Authority
- PH
- Philippines
- Prior art keywords
- illumination
- illumination system
- beam path
- optical axis
- inspection tool
- Prior art date
Links
- 238000005286 illumination Methods 0.000 title abstract 13
- 238000007689 inspection Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 abstract 3
- 238000003384 imaging method Methods 0.000 abstract 2
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
- G02B21/08—Condensers
- G02B21/082—Condensers for incident illumination only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8812—Diffuse illumination, e.g. "sky"
- G01N2021/8816—Diffuse illumination, e.g. "sky" by using multiple sources, e.g. LEDs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462073393P | 2014-10-31 | 2014-10-31 | |
| PCT/US2015/058486 WO2016070133A1 (en) | 2014-10-31 | 2015-10-30 | Illumination system, inspection tool with illumination system, and method of operating an illumination system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| PH12017500736A1 PH12017500736A1 (en) | 2017-10-09 |
| PH12017500736B1 true PH12017500736B1 (en) | 2023-03-17 |
Family
ID=55858432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PH1/2017/500736A PH12017500736B1 (en) | 2014-10-31 | 2015-10-30 | Illumination system, inspection tool with illumination system, and method of operating an illumination system |
Country Status (9)
| Country | Link |
|---|---|
| EP (1) | EP3140638B1 (https=) |
| JP (2) | JP2017533437A (https=) |
| KR (1) | KR102272438B1 (https=) |
| CN (2) | CN106796181A (https=) |
| MY (1) | MY188346A (https=) |
| PH (1) | PH12017500736B1 (https=) |
| SG (1) | SG11201702728UA (https=) |
| TW (1) | TWI697662B (https=) |
| WO (1) | WO2016070133A1 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101795322B1 (ko) | 2016-12-30 | 2017-11-08 | 허철 | 유기발광다이오드 검사용 듀얼 이미징 텔레센트릭 광학장치 |
| EP3803494A1 (de) * | 2018-06-04 | 2021-04-14 | JENOPTIK Optical Systems GmbH | Mikroskop und verfahren zum aufnehmen eines mikroskopischen bildes und verwendung eines plattenförmigen reflektors |
| US20220070343A1 (en) * | 2019-01-14 | 2022-03-03 | Orbotech Ltd. | Multiplexed Image Acquisition Device for Optical System |
| US10816464B2 (en) * | 2019-01-23 | 2020-10-27 | Applied Materials, Inc. | Imaging reflectometer |
| JP7392582B2 (ja) | 2020-06-12 | 2023-12-06 | オムロン株式会社 | 検査システムおよび検査方法 |
| JP7837231B2 (ja) * | 2021-11-19 | 2026-03-30 | 株式会社豊田中央研究所 | 外観検査装置 |
| EP4689618A1 (en) * | 2023-04-03 | 2026-02-11 | Cognex Corporation | System and method for illumination of an imaged scene using a programmable light source |
| KR20250079668A (ko) | 2023-11-27 | 2025-06-04 | 한국기계연구원 | 축열식 연소 산화 장치 |
| KR20250079667A (ko) | 2023-11-27 | 2025-06-04 | 한국기계연구원 | 축열식 연소 산화 장치 |
| KR20250081011A (ko) | 2023-11-29 | 2025-06-05 | 한국기계연구원 | 축열식 연소 산화 장치 |
| KR20250081010A (ko) | 2023-11-29 | 2025-06-05 | 한국기계연구원 | 축류형 전기 산화 어셈블리 및 이를 포함하는 축열식 전기 산화 장치 |
| WO2026047530A1 (en) * | 2024-08-27 | 2026-03-05 | Sacmi Cooperativa Meccanici Imola Societa' Cooperativa | Cutting apparatus and method for making an incision in a side wall of a cap |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9325932D0 (en) * | 1993-12-18 | 1994-02-23 | Ibm | Faceplate bonding process for a visual display unit |
| US5949584A (en) * | 1997-05-13 | 1999-09-07 | Northeast Robotics Llc | Wafer |
| JP2000271155A (ja) * | 1999-03-24 | 2000-10-03 | Ushio Inc | 歯科用光重合照射器 |
| JP3472750B2 (ja) * | 2000-04-10 | 2003-12-02 | シーシーエス株式会社 | 表面検査装置 |
| US20040223342A1 (en) * | 2001-12-31 | 2004-11-11 | Klipstein Donald L. | LED inspection lamp, cluster LED, and LED with stabilizing agents |
| US20040042001A1 (en) * | 2002-04-18 | 2004-03-04 | Kla-Tencor Technologies Corporation | Simultaneous multi-spot inspection and imaging |
| US6870949B2 (en) * | 2003-02-26 | 2005-03-22 | Electro Scientific Industries | Coaxial narrow angle dark field lighting |
| CN2605171Y (zh) * | 2003-03-14 | 2004-03-03 | 南开大学 | 发光二极管阵列铁路信号装置 |
| US7352467B2 (en) * | 2003-10-24 | 2008-04-01 | University Of Washington | Surface plasmon resonance imaging system and method |
| CN100433245C (zh) * | 2004-03-11 | 2008-11-12 | 株式会社液晶先端技术开发中心 | 激光结晶设备及激光结晶方法 |
| JP2006011371A (ja) * | 2004-05-26 | 2006-01-12 | Fuji Photo Film Co Ltd | パターン形成方法 |
| US7738092B1 (en) * | 2008-01-08 | 2010-06-15 | Kla-Tencor Corporation | System and method for reducing speckle noise in die-to-die inspection systems |
| US7990531B2 (en) * | 2008-06-05 | 2011-08-02 | Coopervision International Holding Company, Lp | Multi-imaging automated inspection methods and systems for wet ophthalmic lenses |
| EP2335047A4 (en) * | 2008-09-12 | 2012-02-22 | Ceramicam Ltd | SURFACE SCANNING DEVICE |
| JP2012083211A (ja) | 2010-10-12 | 2012-04-26 | Canon Inc | 表面状態検査装置、表面状態検査方法及びプログラム |
| JP5027946B1 (ja) * | 2011-12-28 | 2012-09-19 | 新明和工業株式会社 | 検査システム |
| JP2013145123A (ja) * | 2012-01-13 | 2013-07-25 | Seiwa Optical Co Ltd | 広角反射同軸照明付光学系 |
| US9395066B2 (en) * | 2012-01-13 | 2016-07-19 | Laser Devices, Inc. | Adjustable beam illuminator |
| DE102012001398B4 (de) * | 2012-01-26 | 2015-09-24 | Airbus Defence and Space GmbH | Sendevorrichtung zur optischen Freiraum-Datenkommunikation basierend auf diskreten Leistungspegeln nebst Verwendung |
| US9128064B2 (en) * | 2012-05-29 | 2015-09-08 | Kla-Tencor Corporation | Super resolution inspection system |
| JP2014154644A (ja) * | 2013-02-06 | 2014-08-25 | Stanley Electric Co Ltd | Ｌｅｄパッケージ及びこれを備えた発光装置 |
| JP6205780B2 (ja) * | 2013-03-27 | 2017-10-04 | 凸版印刷株式会社 | 照明装置及び検査装置 |
| US9255887B2 (en) * | 2013-06-19 | 2016-02-09 | Kla-Tencor Corporation | 2D programmable aperture mechanism |
-
2015
- 2015-10-30 KR KR1020177014639A patent/KR102272438B1/ko active Active
- 2015-10-30 JP JP2017523513A patent/JP2017533437A/ja active Pending
- 2015-10-30 TW TW104135916A patent/TWI697662B/zh active
- 2015-10-30 CN CN201580055825.6A patent/CN106796181A/zh active Pending
- 2015-10-30 PH PH1/2017/500736A patent/PH12017500736B1/en unknown
- 2015-10-30 CN CN202210561988.3A patent/CN114813758A/zh active Pending
- 2015-10-30 WO PCT/US2015/058486 patent/WO2016070133A1/en not_active Ceased
- 2015-10-30 MY MYPI2016002118A patent/MY188346A/en unknown
- 2015-10-30 EP EP15853870.2A patent/EP3140638B1/en active Active
- 2015-10-30 SG SG11201702728UA patent/SG11201702728UA/en unknown
-
2021
- 2021-03-30 JP JP2021057066A patent/JP7193571B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170080631A (ko) | 2017-07-10 |
| TWI697662B (zh) | 2020-07-01 |
| EP3140638A1 (en) | 2017-03-15 |
| EP3140638A4 (en) | 2018-01-24 |
| JP2017533437A (ja) | 2017-11-09 |
| JP7193571B2 (ja) | 2022-12-20 |
| SG11201702728UA (en) | 2017-05-30 |
| CN106796181A (zh) | 2017-05-31 |
| EP3140638B1 (en) | 2024-02-14 |
| KR102272438B1 (ko) | 2021-07-02 |
| JP2021101194A (ja) | 2021-07-08 |
| WO2016070133A1 (en) | 2016-05-06 |
| CN114813758A (zh) | 2022-07-29 |
| MY188346A (en) | 2021-12-01 |
| PH12017500736A1 (en) | 2017-10-09 |
| TW201627656A (zh) | 2016-08-01 |
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