JP2016024195A5 - - Google Patents

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Publication number
JP2016024195A5
JP2016024195A5 JP2015141727A JP2015141727A JP2016024195A5 JP 2016024195 A5 JP2016024195 A5 JP 2016024195A5 JP 2015141727 A JP2015141727 A JP 2015141727A JP 2015141727 A JP2015141727 A JP 2015141727A JP 2016024195 A5 JP2016024195 A5 JP 2016024195A5
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JP
Japan
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optical
illumination
integrated
central
optical concentrator
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JP2015141727A
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Japanese (ja)
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JP2016024195A (ja
JP6670561B2 (ja
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JP2015141727A 2014-07-17 2015-07-16 テレセントリック明視野および環状暗視野のシームレス融合型照明 Active JP6670561B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201462026030P 2014-07-17 2014-07-17
US62/026,030 2014-07-17

Publications (3)

Publication Number Publication Date
JP2016024195A JP2016024195A (ja) 2016-02-08
JP2016024195A5 true JP2016024195A5 (https=) 2018-07-26
JP6670561B2 JP6670561B2 (ja) 2020-03-25

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JP2015141727A Active JP6670561B2 (ja) 2014-07-17 2015-07-16 テレセントリック明視野および環状暗視野のシームレス融合型照明

Country Status (4)

Country Link
JP (1) JP6670561B2 (https=)
KR (1) KR102373287B1 (https=)
CN (1) CN105424600B (https=)
TW (1) TWI702386B (https=)

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* Cited by examiner, † Cited by third party
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KR101839207B1 (ko) * 2016-05-20 2018-04-26 한국광기술원 광원 모듈용 집광렌즈 및 이를 이용한 광원모듈
US10872418B2 (en) * 2016-10-11 2020-12-22 Kabushiki Kaisha Toshiba Edge detection device, an edge detection method, and an object holding device
CN108072659B (zh) * 2016-11-11 2022-05-31 三星显示有限公司 多光学视觉设备
US20220070343A1 (en) * 2019-01-14 2022-03-03 Orbotech Ltd. Multiplexed Image Acquisition Device for Optical System
TWI845693B (zh) 2019-07-11 2024-06-21 以色列商奧寶科技有限公司 用於檢驗之光學設備及方法
KR102224835B1 (ko) * 2021-01-06 2021-03-08 (주)하이비젼시스템 결함 검사 분야에 적용 가능한 광학 프리즘 및 이를 이용한 암시야 조명계
CN113532800B (zh) * 2021-05-21 2024-08-16 杭州涂鸦信息技术有限公司 透光区域的分析方法以及相关设备、装置

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JPS54103362A (en) * 1978-01-31 1979-08-14 Matsushita Electric Ind Co Ltd Optical observation apparatus
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IL94368A (en) * 1990-05-11 1993-07-08 Orbot Systems Ltd Optic inspection apparatus and illumination system particularly useful therein
JP3386269B2 (ja) * 1995-01-25 2003-03-17 株式会社ニュークリエイション 光学検査装置
JPH09288237A (ja) * 1996-02-20 1997-11-04 Bunshi Bio Photonics Kenkyusho:Kk 暗視野落射顕微鏡
JPH09171150A (ja) * 1997-01-22 1997-06-30 Matsushita Electric Ind Co Ltd 照明光学装置とそれを用いた投写型表示装置
DE19903486C2 (de) * 1999-01-29 2003-03-06 Leica Microsystems Verfahren und Vorrichtung zur optischen Untersuchung von strukturierten Oberflächen von Objekten
JP2001154103A (ja) * 1999-11-30 2001-06-08 Mitsutoyo Corp 光学器械の照明装置
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US7300177B2 (en) * 2004-02-11 2007-11-27 3M Innovative Properties Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture
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