JP2017522613A5 - - Google Patents
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- JP2017522613A5 JP2017522613A5 JP2017520761A JP2017520761A JP2017522613A5 JP 2017522613 A5 JP2017522613 A5 JP 2017522613A5 JP 2017520761 A JP2017520761 A JP 2017520761A JP 2017520761 A JP2017520761 A JP 2017520761A JP 2017522613 A5 JP2017522613 A5 JP 2017522613A5
- Authority
- JP
- Japan
- Prior art keywords
- group
- optionally substituted
- thin film
- vinylidene fluoride
- independently
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010409 thin film Substances 0.000 claims 20
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 claims 14
- 238000000034 method Methods 0.000 claims 11
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims 10
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims 9
- 229920000642 polymer Polymers 0.000 claims 9
- 125000006708 (C5-C14) heteroaryl group Chemical group 0.000 claims 8
- 229910052799 carbon Inorganic materials 0.000 claims 8
- 230000000269 nucleophilic effect Effects 0.000 claims 7
- 125000004191 (C1-C6) alkoxy group Chemical group 0.000 claims 6
- 125000000171 (C1-C6) haloalkyl group Chemical group 0.000 claims 6
- 125000005915 C6-C14 aryl group Chemical group 0.000 claims 6
- 125000004432 carbon atom Chemical group C* 0.000 claims 6
- 239000003431 cross linking reagent Substances 0.000 claims 6
- 125000004093 cyano group Chemical group *C#N 0.000 claims 6
- 125000005843 halogen group Chemical group 0.000 claims 6
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 claims 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 6
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical compound FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 claims 5
- HCDGVLDPFQMKDK-UHFFFAOYSA-N hexafluoropropylene Chemical group FC(F)=C(F)C(F)(F)F HCDGVLDPFQMKDK-UHFFFAOYSA-N 0.000 claims 5
- 229920000131 polyvinylidene Polymers 0.000 claims 5
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims 4
- 229920001577 copolymer Polymers 0.000 claims 4
- 239000010408 film Substances 0.000 claims 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims 3
- 229940114081 cinnamate Drugs 0.000 claims 3
- 229910052739 hydrogen Inorganic materials 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 150000003573 thiols Chemical group 0.000 claims 3
- WBYWAXJHAXSJNI-VOTSOKGWSA-M trans-cinnamate Chemical group [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 claims 3
- IGGIJCNKMQLGGS-UHFFFAOYSA-N 1,1,2,6,6-pentachloro-3,3,4,4-tetrafluorohex-1-ene Chemical compound ClC(CC(C(C(=C(Cl)Cl)Cl)(F)F)(F)F)Cl IGGIJCNKMQLGGS-UHFFFAOYSA-N 0.000 claims 2
- UQAPTQUAUFMAQY-UHFFFAOYSA-N 1,1,2,6,8-pentachloro-3,3,4,4,5,5,6-heptafluorooct-1-ene Chemical compound FC(C(CCCl)(Cl)F)(C(C(C(=C(Cl)Cl)Cl)(F)F)(F)F)F UQAPTQUAUFMAQY-UHFFFAOYSA-N 0.000 claims 2
- FZXRXKLUIMKDEL-UHFFFAOYSA-N 2-Methylpropyl propanoate Chemical compound CCC(=O)OCC(C)C FZXRXKLUIMKDEL-UHFFFAOYSA-N 0.000 claims 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims 2
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims 2
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 150000001412 amines Chemical group 0.000 claims 2
- 125000003118 aryl group Chemical group 0.000 claims 2
- 238000004132 cross linking Methods 0.000 claims 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 claims 2
- FKRCODPIKNYEAC-UHFFFAOYSA-N ethyl propionate Chemical compound CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 claims 2
- -1 guanidinyl Chemical group 0.000 claims 2
- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 claims 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 claims 2
- 125000005439 maleimidyl group Chemical group C1(C=CC(N1*)=O)=O 0.000 claims 2
- 229910052757 nitrogen Inorganic materials 0.000 claims 2
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- XNLICIUVMPYHGG-UHFFFAOYSA-N pentan-2-one Chemical compound CCCC(C)=O XNLICIUVMPYHGG-UHFFFAOYSA-N 0.000 claims 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 claims 2
- PGMYKACGEOXYJE-UHFFFAOYSA-N pentyl acetate Chemical compound CCCCCOC(C)=O PGMYKACGEOXYJE-UHFFFAOYSA-N 0.000 claims 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims 2
- 125000004076 pyridyl group Chemical group 0.000 claims 2
- 229910052711 selenium Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910052717 sulfur Inorganic materials 0.000 claims 2
- MIZLGWKEZAPEFJ-UHFFFAOYSA-N 1,1,2-trifluoroethene Chemical group FC=C(F)F MIZLGWKEZAPEFJ-UHFFFAOYSA-N 0.000 claims 1
- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 claims 1
- HFZLSTDPRQSZCQ-UHFFFAOYSA-N 1-pyrrolidin-3-ylpyrrolidine Chemical compound C1CCCN1C1CNCC1 HFZLSTDPRQSZCQ-UHFFFAOYSA-N 0.000 claims 1
- UHOPWFKONJYLCF-UHFFFAOYSA-N 2-(2-sulfanylethyl)isoindole-1,3-dione Chemical compound C1=CC=C2C(=O)N(CCS)C(=O)C2=C1 UHOPWFKONJYLCF-UHFFFAOYSA-N 0.000 claims 1
- LPEKGGXMPWTOCB-UHFFFAOYSA-N 8beta-(2,3-epoxy-2-methylbutyryloxy)-14-acetoxytithifolin Natural products COC(=O)C(C)O LPEKGGXMPWTOCB-UHFFFAOYSA-N 0.000 claims 1
- 229930185605 Bisphenol Natural products 0.000 claims 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims 1
- YYLLIJHXUHJATK-UHFFFAOYSA-N Cyclohexyl acetate Chemical compound CC(=O)OC1CCCCC1 YYLLIJHXUHJATK-UHFFFAOYSA-N 0.000 claims 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 claims 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 claims 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical group OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims 1
- ZCZSIDMEHXZRLG-UHFFFAOYSA-N acetic acid heptyl ester Natural products CCCCCCCOC(C)=O ZCZSIDMEHXZRLG-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 claims 1
- 125000000332 coumarinyl group Chemical group O1C(=O)C(=CC2=CC=CC=C12)* 0.000 claims 1
- 150000004985 diamines Chemical class 0.000 claims 1
- ODQWQRRAPPTVAG-GZTJUZNOSA-N doxepin Chemical compound C1OC2=CC=CC=C2C(=C/CCN(C)C)/C2=CC=CC=C21 ODQWQRRAPPTVAG-GZTJUZNOSA-N 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 229940116333 ethyl lactate Drugs 0.000 claims 1
- 229920002313 fluoropolymer Polymers 0.000 claims 1
- JPXGPRBLTIYFQG-UHFFFAOYSA-N heptan-4-yl acetate Chemical compound CCCC(CCC)OC(C)=O JPXGPRBLTIYFQG-UHFFFAOYSA-N 0.000 claims 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims 1
- GJRQTCIYDGXPES-UHFFFAOYSA-N iso-butyl acetate Natural products CC(C)COC(C)=O GJRQTCIYDGXPES-UHFFFAOYSA-N 0.000 claims 1
- FGKJLKRYENPLQH-UHFFFAOYSA-M isocaproate Chemical compound CC(C)CCC([O-])=O FGKJLKRYENPLQH-UHFFFAOYSA-M 0.000 claims 1
- OQAGVSWESNCJJT-UHFFFAOYSA-N isovaleric acid methyl ester Natural products COC(=O)CC(C)C OQAGVSWESNCJJT-UHFFFAOYSA-N 0.000 claims 1
- 229940057867 methyl lactate Drugs 0.000 claims 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 claims 1
- 239000003960 organic solvent Substances 0.000 claims 1
- 150000002978 peroxides Chemical class 0.000 claims 1
- 229960003742 phenol Drugs 0.000 claims 1
- 150000002989 phenols Chemical class 0.000 claims 1
- 229920003192 poly(bis maleimide) Polymers 0.000 claims 1
- 229940090181 propyl acetate Drugs 0.000 claims 1
- 230000005855 radiation Effects 0.000 claims 1
- 229920001897 terpolymer Polymers 0.000 claims 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 claims 1
- 0 *c1c(c(*)ccc2)c2ccc1 Chemical compound *c1c(c(*)ccc2)c2ccc1 0.000 description 7
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462017262P | 2014-06-26 | 2014-06-26 | |
| EP14425084.2A EP2960280A1 (en) | 2014-06-26 | 2014-06-26 | Photocrosslinkable compositions, patterned high k thin film dielectrics and related devices |
| EP14425084.2 | 2014-06-26 | ||
| US62/017,262 | 2014-06-26 | ||
| PCT/US2015/038146 WO2015200872A1 (en) | 2014-06-26 | 2015-06-26 | Photopatternable compositions, patterned high k thin film dielectrics and related devices |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017522613A JP2017522613A (ja) | 2017-08-10 |
| JP2017522613A5 true JP2017522613A5 (OSRAM) | 2018-07-19 |
| JP6608922B2 JP6608922B2 (ja) | 2019-11-20 |
Family
ID=51302686
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017520761A Active JP6608922B2 (ja) | 2014-06-26 | 2015-06-26 | 光パターン化可能な組成物、パターン化高ｋ薄膜誘電体及び関連デバイス |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10409159B2 (OSRAM) |
| EP (2) | EP2960280A1 (OSRAM) |
| JP (1) | JP6608922B2 (OSRAM) |
| KR (1) | KR102283518B1 (OSRAM) |
| CN (1) | CN106663736B (OSRAM) |
| TW (1) | TWI668516B (OSRAM) |
| WO (1) | WO2015200872A1 (OSRAM) |
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| KR102035434B1 (ko) * | 2015-07-09 | 2019-10-22 | 도쿄 오카 고교 가부시키가이샤 | 규소 함유 수지 조성물 |
| JP2019521505A (ja) * | 2016-05-03 | 2019-07-25 | ハネウェル・インターナショナル・インコーポレーテッドＨｏｎｅｙｗｅｌｌ Ｉｎｔｅｒｎａｔｉｏｎａｌ Ｉｎｃ． | 改善された化学物質性を有する発光装置及び構成要素並びに関連する方法 |
| WO2018118881A1 (en) * | 2016-12-19 | 2018-06-28 | Corning Incorporated | A substrate with a polar elastomer dielectric and a method of coating a substrate with a polar elastomer dielectric |
| US11329228B2 (en) | 2016-12-19 | 2022-05-10 | Corning Incorporated | Polar elastomer microstructures and methods for fabricating same |
| FR3065217B1 (fr) * | 2017-04-14 | 2020-02-28 | Arkema France | Compositions reticulables a base de copolymeres fluores electroactifs |
| FR3068976B1 (fr) * | 2017-07-17 | 2020-05-29 | Arkema France | Fabrication de films par reticulation de polymeres fluores electroactifs |
| FR3069544B1 (fr) | 2017-07-28 | 2020-05-15 | Arkema France | Procede de preparation d'un film de polymere fluore reticule |
| CN110997832B (zh) * | 2017-07-31 | 2023-05-05 | 康宁股份有限公司 | 经由添加有机碱的pvdf-hfp的加速热交联以及使用交联的pvdf-hfp作为otft装置的栅极介电材料 |
| FR3070042B1 (fr) | 2017-08-09 | 2020-08-21 | Arkema France | Transistor organique a effet de champ contenant une couche dielectrique a haute permittivite dielectrique et stable en temperature |
| FR3070041B1 (fr) | 2017-08-09 | 2019-08-30 | Arkema France | Formulations a base de fluoropolymeres electroactifs et leurs applications |
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| US20200013991A1 (en) * | 2018-07-06 | 2020-01-09 | University Of Maryland, College Park | Electrically-driven organic color-center-based single-photon sources and sensors |
| CN110838546A (zh) * | 2018-08-17 | 2020-02-25 | 康宁股份有限公司 | 用于有机薄膜晶体管的栅极电介质绝缘体的基于pvdf的聚合物的uv交联 |
| FR3086666B1 (fr) * | 2018-10-02 | 2021-06-25 | Arkema France | Encre de polymere fluore a vehicule cetonique et a comportement rheologique de fluide a seuil de contrainte |
| FR3089978B1 (fr) | 2018-12-17 | 2021-09-10 | Arkema France | Polymères fluorés électroactifs réticulables comprenant des groupements photoactifs |
| FR3089977B1 (fr) * | 2018-12-17 | 2021-09-10 | Arkema France | Polymères fluorés électroactifs réticulables comprenant des groupements photoactifs |
| CN109698276A (zh) * | 2018-12-27 | 2019-04-30 | 广州天极电子科技有限公司 | 一种薄膜晶体管器件及其制备方法 |
| KR102839408B1 (ko) * | 2019-01-17 | 2025-07-28 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
| JP7628510B2 (ja) * | 2020-01-30 | 2025-02-10 | 株式会社ダイセル | 成形体ならびにその前駆体、製造方法および用途 |
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| CN113314532B (zh) * | 2020-02-27 | 2022-11-04 | 长鑫存储技术有限公司 | 半导体结构及其形成方法 |
| CN111736428B (zh) * | 2020-04-24 | 2021-09-21 | 康宁股份有限公司 | 用于有机薄膜晶体管的可光图案化的有机半导体（osc）聚合物 |
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| US12344571B1 (en) | 2020-07-01 | 2025-07-01 | University Of Maryland, College Park | Organic color center-tailored, semiconducting carbon nanotubes and their method of manufacture |
| TWI753662B (zh) * | 2020-11-19 | 2022-01-21 | 國立成功大學 | 自含多重邏輯閘功能之有機薄膜電晶體及其製造方法 |
| KR102788810B1 (ko) * | 2021-09-17 | 2025-03-28 | 코오롱인더스트리 주식회사 | 봉지재 조성물 및 발광 소자 |
| WO2023101544A1 (ko) * | 2021-12-03 | 2023-06-08 | 서울대학교산학협력단 | 패턴 형성 제어 물질을 활용한 메탈 전극 패터닝 방법 및 메탈 전극 패턴을 갖는 기판, 전자 장치 및 디스플레이 |
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| US8927971B2 (en) | 2009-04-06 | 2015-01-06 | University Of Kentucky Research Foundation | Semiconducting compounds and devices incorporating same |
| EP2450395B1 (en) * | 2009-07-03 | 2014-06-11 | Daikin Industries, Ltd. | Crosslinkable fluorine rubber composition, fluorine rubber molded article, and method for producing the same |
| CN101957560B (zh) * | 2009-07-15 | 2012-11-21 | 台湾薄膜电晶体液晶显示器产业协会 | 图案化的方法以及用于图案化的堆叠结构 |
| JP2013515785A (ja) | 2009-12-29 | 2013-05-09 | ポリエラ コーポレイション | 有機半導体としてのチオン酸化芳香族ビスイミドおよびそれを組み込む装置 |
| GB2479150B (en) * | 2010-03-30 | 2013-05-15 | Pragmatic Printing Ltd | Transistor and its method of manufacture |
| EP2612376B1 (en) | 2010-08-29 | 2018-11-21 | Flexterra, Inc. | Semiconducting compounds and related compositions and devices |
| WO2012143077A1 (en) * | 2011-04-21 | 2012-10-26 | Merck Patent Gmbh | Conjugated polymers |
| ITMI20110881A1 (it) | 2011-05-18 | 2012-11-19 | E T C Srl | Materiale semiconduttore organico |
| ITMI20111447A1 (it) | 2011-07-29 | 2013-01-30 | E T C Srl | Transistor organico elettroluminescente |
| ITMI20111446A1 (it) | 2011-07-29 | 2013-01-30 | E T C Srl | Transistor organico elettroluminescente |
| ITMI20111445A1 (it) | 2011-07-29 | 2013-01-30 | E T C Srl | Transistor organico elettroluminescente a doppio gate |
| CN103764787A (zh) * | 2011-08-12 | 2014-04-30 | 巴斯夫欧洲公司 | 氟化苝基半导体材料 |
| WO2013087500A1 (en) | 2011-12-16 | 2013-06-20 | Solvay Specialty Polymers Italy S.P.A. | Crosslinkable vinylidene fluoride and trifluoroethylene polymers |
| RU2014129218A (ru) | 2011-12-16 | 2016-02-10 | Солвей Спешиалти Полимерс Итали С.П.А. | Поперечно-связываемые композиции на основе полимеров винилиденфторида-трифторэтилена |
| ITMI20120284A1 (it) | 2012-02-27 | 2013-08-28 | E T C Srl | Transistor ambipolare elettroluminescente organico ad effetto di campo ad emissione luminosa distribuita |
| US8901547B2 (en) | 2012-08-25 | 2014-12-02 | Polyera Corporation | Stacked structure organic light-emitting transistors |
| US11274075B2 (en) * | 2016-09-28 | 2022-03-15 | Conopco, Inc. | DEFI and taurate amide mixtures and processes thereof |
-
2014
- 2014-06-26 EP EP14425084.2A patent/EP2960280A1/en not_active Withdrawn
-
2015
- 2015-06-26 EP EP15744749.1A patent/EP3161061B1/en active Active
- 2015-06-26 KR KR1020177001963A patent/KR102283518B1/ko active Active
- 2015-06-26 WO PCT/US2015/038146 patent/WO2015200872A1/en not_active Ceased
- 2015-06-26 JP JP2017520761A patent/JP6608922B2/ja active Active
- 2015-06-26 TW TW104120788A patent/TWI668516B/zh active
- 2015-06-26 CN CN201580042359.8A patent/CN106663736B/zh active Active
-
2016
- 2016-12-26 US US15/390,708 patent/US10409159B2/en active Active
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