JP2017512252A5 - - Google Patents
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- Publication number
- JP2017512252A5 JP2017512252A5 JP2016552500A JP2016552500A JP2017512252A5 JP 2017512252 A5 JP2017512252 A5 JP 2017512252A5 JP 2016552500 A JP2016552500 A JP 2016552500A JP 2016552500 A JP2016552500 A JP 2016552500A JP 2017512252 A5 JP2017512252 A5 JP 2017512252A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- target
- laser
- incident position
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 23
- 238000000151 deposition Methods 0.000 claims 6
- 239000000463 material Substances 0.000 claims 6
- 230000008021 deposition Effects 0.000 claims 4
- 238000004549 pulsed laser deposition Methods 0.000 claims 4
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14156256.1A EP2910664B1 (en) | 2014-02-21 | 2014-02-21 | Device for depositing a material by pulsed laser deposition and a method for depositing a material with the device |
| EP14156256.1 | 2014-02-21 | ||
| PCT/EP2015/053356 WO2015124589A1 (en) | 2014-02-21 | 2015-02-18 | Device for depositing a material by pulsed laser deposition and a method for depositing a material with the device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017512252A JP2017512252A (ja) | 2017-05-18 |
| JP2017512252A5 true JP2017512252A5 (enExample) | 2018-03-29 |
| JP6674898B2 JP6674898B2 (ja) | 2020-04-01 |
Family
ID=50159093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016552500A Active JP6674898B2 (ja) | 2014-02-21 | 2015-02-18 | パルスレーザ堆積による材料堆積装置及びその装置を用いた材料堆積方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2910664B1 (enExample) |
| JP (1) | JP6674898B2 (enExample) |
| KR (1) | KR102321884B1 (enExample) |
| CN (1) | CN106029942B (enExample) |
| TW (1) | TWI696717B (enExample) |
| WO (1) | WO2015124589A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105803404A (zh) * | 2016-03-25 | 2016-07-27 | 武汉华星光电技术有限公司 | 薄膜沉积组件及薄膜沉积装置 |
| EP3540090A1 (en) * | 2018-03-12 | 2019-09-18 | Solmates B.V. | Method for pulsed laser deposition |
| WO2019185187A1 (en) * | 2018-03-28 | 2019-10-03 | Applied Materials, Inc. | Method for vacuum processing of a substrate, and apparatus for vacuum processing of a substrate |
| EP3916122A1 (en) * | 2020-05-28 | 2021-12-01 | Solmates B.V. | Method for controlling stress in a substrate during laser deposition |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3914476C1 (enExample) * | 1989-05-02 | 1990-06-21 | Forschungszentrum Juelich Gmbh, 5170 Juelich, De | |
| KR100222580B1 (ko) * | 1995-12-28 | 1999-10-01 | 김덕중 | 대면적 다이아몬드 박막의 고속증착 제조장치 및 그 제조방법 |
| CN1134555C (zh) * | 1995-10-09 | 2004-01-14 | 社团法人高等技术研究院研究组合 | 大面积金钢石薄膜的制造装置及制造方法 |
| US6090207A (en) * | 1998-04-02 | 2000-07-18 | Neocera, Inc. | Translational target assembly for thin film deposition system |
| AUPR026100A0 (en) * | 2000-09-20 | 2000-10-12 | Tamanyan, Astghik | Deposition of thin films by laser ablation |
| US7879410B2 (en) * | 2004-06-09 | 2011-02-01 | Imra America, Inc. | Method of fabricating an electrochemical device using ultrafast pulsed laser deposition |
| FI20050216A0 (fi) * | 2005-02-23 | 2005-02-23 | Ruuttu Jari | Menetelmä valmistaa timanttia, muita jalokiviä, kuten safiiria, rubiinia jne. ja suorittaa näillä pinnoituksia sekä suorittaa pinnoituksia muilla aineilla, kuten boriideillä, oksideillä, nitrideillä jne. |
| WO2007096487A1 (en) * | 2006-02-23 | 2007-08-30 | Picodeon Ltd Oy | Semiconductor and an arrangement and a method for producing a semiconductor |
| SI2159300T1 (sl) * | 2008-08-25 | 2012-05-31 | Solmates Bv | Postopek za odlaganje materiala |
| KR101219225B1 (ko) * | 2010-07-15 | 2013-01-18 | 국립대학법인 울산과학기술대학교 산학협력단 | 펄스 레이저 증착장치 |
| TWI433948B (zh) * | 2012-01-31 | 2014-04-11 | Univ Nat Chi Nan | A radio frequency plasma assisted pulsed laser deposition system and a method for preparing a thin film from its system |
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2014
- 2014-02-21 EP EP14156256.1A patent/EP2910664B1/en active Active
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2015
- 2015-02-18 CN CN201580009380.8A patent/CN106029942B/zh active Active
- 2015-02-18 KR KR1020167022366A patent/KR102321884B1/ko active Active
- 2015-02-18 WO PCT/EP2015/053356 patent/WO2015124589A1/en not_active Ceased
- 2015-02-18 JP JP2016552500A patent/JP6674898B2/ja active Active
- 2015-02-24 TW TW104105898A patent/TWI696717B/zh active