JP2017186185A5 - - Google Patents

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Publication number
JP2017186185A5
JP2017186185A5 JP2016074610A JP2016074610A JP2017186185A5 JP 2017186185 A5 JP2017186185 A5 JP 2017186185A5 JP 2016074610 A JP2016074610 A JP 2016074610A JP 2016074610 A JP2016074610 A JP 2016074610A JP 2017186185 A5 JP2017186185 A5 JP 2017186185A5
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JP
Japan
Prior art keywords
laser
glass substrate
hole
processed
protective material
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JP2016074610A
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English (en)
Japanese (ja)
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JP2017186185A (ja
JP6590749B2 (ja
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Publication of JP2017186185A5 publication Critical patent/JP2017186185A5/ja
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JP2016074610A 2016-04-01 2016-04-01 レーザ加工装置およびレーザ加工方法 Active JP6590749B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016074610A JP6590749B2 (ja) 2016-04-01 2016-04-01 レーザ加工装置およびレーザ加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016074610A JP6590749B2 (ja) 2016-04-01 2016-04-01 レーザ加工装置およびレーザ加工方法

Publications (3)

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JP2017186185A JP2017186185A (ja) 2017-10-12
JP2017186185A5 true JP2017186185A5 (enExample) 2018-12-06
JP6590749B2 JP6590749B2 (ja) 2019-10-16

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JP2016074610A Active JP6590749B2 (ja) 2016-04-01 2016-04-01 レーザ加工装置およびレーザ加工方法

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102030521B1 (ko) * 2017-11-30 2019-10-10 (주)에스엠텍 레이저를 이용한 태양전지 모듈용 유리표면 가공 장치
CN113828943B (zh) * 2021-09-18 2023-10-03 湖北优尼科光电技术股份有限公司 一种玻璃基板的加工方法
CN114933407B (zh) * 2022-05-18 2023-07-14 常州亚玛顿股份有限公司 一种mini LED背光结构用通孔玻璃基板的制备方法及背光结构

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4441008A (en) * 1981-09-14 1984-04-03 Ford Motor Company Method of drilling ultrafine channels through glass
JPH0679486A (ja) * 1992-08-25 1994-03-22 Rohm Co Ltd インクジェットヘッドの加工方法
JP2001354439A (ja) * 2000-06-12 2001-12-25 Matsushita Electric Ind Co Ltd ガラス基板の加工方法および高周波回路の製作方法
US8584354B2 (en) * 2010-08-26 2013-11-19 Corning Incorporated Method for making glass interposer panels
JP2014214036A (ja) * 2013-04-24 2014-11-17 旭硝子株式会社 レーザを用いてガラス基板に貫通孔を形成する方法
WO2015072259A1 (ja) * 2013-11-14 2015-05-21 三菱電機株式会社 レーザ加工方法およびレーザ加工装置
JP2015213949A (ja) * 2014-05-09 2015-12-03 ビアメカニクス株式会社 レーザ加工方法
JP2015229167A (ja) * 2014-06-04 2015-12-21 ビアメカニクス株式会社 レーザ加工方法

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