JP2009203551A - 蒸着装置及び薄膜製造方法 - Google Patents
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Abstract
【解決手段】大型基板の場合にも、均一な薄膜を形成し、基板のサイズが変更される場合にも、装備の変更なしに容易に適用するためのものであって、直線動するように備えられた第1蒸着源と、第1蒸着源から離隔され、第1蒸着源と同時及び同一方向に直線動するように備えられた第2蒸着源と、第1蒸着源及び第2蒸着源と被蒸着体との間に位置し、第1蒸着源及び第2蒸着源と同時及び同一方向に直線動するように備えられた補正部材とを含み、補正部材は、第1蒸着源に対応する位置に備えられた第1補正板及び第2蒸着源に対応する位置に備えられた第2補正板を備える蒸着装置である。
【選択図】図1
Description
11 ガイドレール
12 基板
20 蒸着源
21 坩堝
22 第1蒸着源
23 第2蒸着源
30 第1補正部材
31 第1遮蔽壁
32、42 第1補正板
33、43 第2補正板
34、44 支持部
40 第2補正部材
41 第2遮蔽壁
Claims (11)
- 直線動するように備えられた第1蒸着源と、
前記第1蒸着源から離隔され、前記第1蒸着源と同時及び同一方向に直線動するように備えられた第2蒸着源と、
前記第1蒸着源及び第2蒸着源と被蒸着体との間に位置し、前記第1蒸着源及び第2蒸着源と同時及び同一方向に直線動するように備えられた補正部材と、を含み、
前記補正部材は、
前記第1蒸着源に対応する位置に備えられた第1補正板と、
前記第2蒸着源に対応する位置に備えられた第2補正板と、を備える蒸着装置。 - 前記補正部材は、前記第1補正板と前記第2補正板とを連結する支持部をさらに備えることを特徴とする請求項1に記載の蒸着装置。
- 前記第1補正板及び前記第2補正板は、前記支持部から前記第1蒸着源及び第2蒸着源の方向に突出していることを特徴とする請求項2に記載の蒸着装置。
- 前記第1補正板及び前記第2補正板は、前記支持部から前記第1蒸着源及び第2蒸着源にそれぞれ平行に突出していることを特徴とする請求項2又は3に記載の蒸着装置。
- 前記補正部材は、少なくとも、前記第1蒸着源及び前記第2蒸着源の進行方向の前方に配置されることを特徴とする請求項1〜4のいずれかに記載の蒸着装置。
- 前記第1蒸着源及び前記第2蒸着源は、往復直線動することを特徴とする請求項1〜5のいずれかに記載の蒸着装置。
- 前記補正部材は、少なくとも、前記第1蒸着源及び前記第2蒸着源の進行方向の後方に配置されることを特徴とする請求項1〜6のいずれかに記載の蒸着装置。
- 相互離隔されて直線動する少なくとも二つの蒸着源を準備するステップと、
前記蒸着源に対向して被蒸着体を配置するステップと、
前記蒸着源を一方向に同時に移動させつつ、前記被蒸着体に薄膜を形成するステップと、
前記蒸着源の進行方向の前方及び後方のうち、少なくとも一方の前記蒸着源と被蒸着体との間の空間を遮蔽することによって前記各蒸着源の位置にそれぞれ対応する位置の空間を遮蔽するステップと、を含む薄膜製造方法。 - 前記各蒸着源に対応する位置での遮蔽量は、前記各蒸着源の間隔に対応する位置での遮蔽量より多いことを特徴とする請求項8に記載の薄膜製造方法。
- 前記蒸着源及び補正部材を往復動させつつ、前記被蒸着体に薄膜を形成するステップを含むことを特徴とする請求項8又は9に記載の薄膜製造方法。
- 互いに離隔して配置され、同一方向に同時に移動することができる蒸着源群と、
前記蒸着源群と被蒸着体との間に位置し、前記蒸着源群と同一方向に同時に移動することができる補正部材と、を含み、
前記補正部材は、前記蒸着源群のそれぞれに対応する位置に配置された補正板を備える蒸着装置。
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WO2012029545A1 (ja) * | 2010-08-30 | 2012-03-08 | シャープ株式会社 | 蒸着方法、蒸着装置、及び有機el表示装置 |
CN108677147A (zh) * | 2018-06-13 | 2018-10-19 | 京东方科技集团股份有限公司 | 蒸镀装置及蒸镀方法 |
CN108823538A (zh) * | 2018-08-22 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | 蒸镀设备及蒸镀方法 |
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US20090220691A1 (en) | 2009-09-03 |
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US8186299B2 (en) | 2012-05-29 |
JP5459739B2 (ja) | 2014-04-02 |
JP2013053374A (ja) | 2013-03-21 |
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