JP2017224711A - 半導体装置およびその製造方法並びに半導体モジュールおよび電力変換装置 - Google Patents
半導体装置およびその製造方法並びに半導体モジュールおよび電力変換装置 Download PDFInfo
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- JP2017224711A JP2017224711A JP2016118868A JP2016118868A JP2017224711A JP 2017224711 A JP2017224711 A JP 2017224711A JP 2016118868 A JP2016118868 A JP 2016118868A JP 2016118868 A JP2016118868 A JP 2016118868A JP 2017224711 A JP2017224711 A JP 2017224711A
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Abstract
【解決手段】半導体チップCHP1aの側面は、第1角を含む領域R1と、第2角を含む領域R2と、領域R1と領域R2とに挟まれた領域R3から構成されている。このとき、領域R3における耐高電界封止部材MRの最小膜厚をt1とし、領域R1における耐高電界封止部材MRの最大膜厚をt2とする場合、t2≦1.5×t1の関係が成立する。
【選択図】図25
Description
図1は、例えば、鉄道車両に適用される3相モータシステム(電力変換装置)の一例を示すブロック図である。図1に示すように、鉄道車両には、架線RTからパンタグラフPGを介して電力が供給される。このとき、架線RTから供給される高圧交流電圧は、例えば、25kVまたは15kVである。架線RTからパンタグラフPGを介して鉄道車両に供給される高圧交流電圧は、絶縁型の主変圧器MTRによって、例えば、3.3kVの交流電圧に降圧される。この降圧された交流電圧は、コンバータCONによって直流電圧(3.3kV)に順変換される。その後、コンバータCONによって変換された直流電圧は、キャパシタCLを介してインバータINVによって、それぞれ位相が120度ずれた3相交流電圧に変換される。そして、インバータINVで変換された3相交流電圧は、3相モータMTに供給される。この結果、3相モータMTが駆動することにより、車輪WHLを回転させることができ、これによって、鉄道車両を走行させることができる。
以上のように、SiCを基板材料に使用したパワー半導体素子(以下、SiCデバイスという)では、SiCの絶縁破壊電界強度が高いことに起因して、SiCデバイスが形成された半導体チップの内部の電界強度を高めた設計が可能となる。つまり、SiCデバイスでは、半導体チップの内部の電界強度を高めた設計を実現するために、SiCデバイスに特有の構造を有している。以下に、このSiCデバイスに特有の構造を説明する。
以下では、SiCデバイスの一例としてダイオードを取り挙げて改善の検討を行なう。図3は、関連技術において、ダイオードが形成された半導体チップCHPの模式的な構成を示す平面図である。図3に示すように、矩形形状をした半導体チップCHPの中央部には、アノード電極(アノード電極パッド)ADEが形成され、このアノード電極ADEを平面的に囲むように、電界緩和部として機能するターミネーション部TMRが形成されている。そして、このターミネーション部TMRを覆うように耐高電界封止部材MRが形成されている。なお、本明細書でいう「関連技術」は、新規に発明者が見出した課題を有する技術であって、公知である従来技術ではないが、新規な技術的思想の前提技術(未公知技術)を意図して記載された技術である。
図7は、本実施の形態における半導体装置SA1を模式的に示す断面図である。図7に示すように、絶縁基板SUB上に半田材ADHを介して半導体チップCHP1が搭載されている。この半導体チップCHP1には、SiCデバイスが形成されており、特に、本実施の形態では、SiCデバイスとして、ダイオードを取り挙げている。
本実施の形態における半導体装置SA1は、上記のように構成されており、以下に、その製造方法について、図面を参照しながら説明する。まず、フローチャートを参照しながら、本実施の形態における半導体装置SA1の製造工程の流れについて説明した後、製造工程の詳細について説明することにする。
図15は、本実施の形態における半導体チップCHP1の端部近傍を拡大して示す断面図である。図15に示すように、本実施の形態における半導体チップCHP1は、半導体チップCHP1の裏面にダイオードのカソード電極として機能する裏面電極BEが形成されている。一方、半導体チップCHP1の表面には、ダイオードのアノード電極ADEと、アノード電極ADEの外側領域に形成されたターミネーション部TMRとが形成されている。このターミネーション部TMRは、半導体チップCHP1内に形成されたp型半導体領域PR1と、このp型半導体領域PR1を内包し、かつ、p型半導体領域PR1よりも不純物濃度の低いp型半導体領域PR2とを有している。また、ターミネーション部TMRは、p型半導体領域PR2から半導体チップCHP1の端面側に離間して形成されたn型半導体領域NRと、n型半導体領域NR上に形成されたチャネルストップ層CSとを有している。さらに、ターミネーション部TMRは、p型半導体領域PR1およびp型半導体領域PR2上からチャネルストップ層CSに達するように延在する酸化シリコン膜OXFと、この酸化シリコン膜OXFと、酸化シリコン膜OXFから突出しているチャネルストップ層CSを覆うポリイミド樹脂膜PIFとを有している。このポリイミド樹脂膜PIFは、保護膜として機能し、例えば、4μm〜9μmの膜厚を有している。
上述したように本実施の形態における半導体装置の製造方法では、個片化された半導体チップCHP1ごとに耐高電界封止部材MRを形成するのではなく、半導体チップCHP1に個片化する前の半導体ウェハの状態で一括して耐高電界封止部材MRを形成している。この半導体装置の製造方法に関し、本発明者は、半導体装置の信頼性向上を図る観点から、さらなる改善の検討を行なった結果、以下に示す改善の余地を見出したので、この改善の余地について説明する。
<<構造上の特徴>>
図25は、本実施の形態における半導体装置SA1の模式的な構成を示す図である。図25に示すように、本実施の形態における半導体装置SA1は、絶縁基板SUB上に半田材ADHを介して半導体チップCHP1aが搭載されている。
次に、上述した本実施の形態における第4特徴点を有する半導体装置の製造方法について、図面を参照しながら説明する。
<<構造上の特徴>>
次に、本変形例1における技術的思想について説明する。図28は、本変形例1における半導体装置SA1の模式的な構成を示す図である。図28において、本変形例1における構造上の特徴点は、図28に示す半導体チップCHP1aの側面視において、半導体基板1S上に形成されている耐高電界封止部材MRが均一の厚さで形成されている点にある。具体的には、図28に示すように、領域R3における耐高電界封止部材MRの最小膜厚を「t1」とし、領域R1における耐高電界封止部材MRの最大膜厚を「t2」とするとき、ほぼt2=t1の関係が成立する。
図29(a)は、半導体ウェハWFのx方向へペースト状態の耐高電界封止材料MR1を塗布する様子を示す模式図である。例えば、図29(a)に示すように、本変形例1における半導体装置の製造方法では、ディスペンサを使用することにより、ペースト状態の耐高電界封止材料MR1をx方向に沿って塗布する。これにより、図29(a)に示すように、x方向に延在する耐高電界封止部材MRからなる3本のラインL1〜L3が形成される。
<<構造上の特徴>>
次に、本変形例2における技術的思想について説明する。図31は、本変形例2における半導体装置SA1の模式的な構成を示す図である。図31において、本変形例2における構造上の特徴点は、図31に示す半導体チップCHP1aの側面視において、領域R3における耐高電界封止部材MRの最小膜厚を「t1」とし、領域R1における耐高電界封止部材MRの最大膜厚を「t2」とするとき、t2<t1の関係が成立する。
図32(a)は、半導体ウェハWFのx方向へペースト状態の耐高電界封止材料MR1を塗布する様子を示す模式図である。例えば、図32(a)に示すように、本変形例2における半導体装置の製造方法では、ディスペンサを使用することにより、ペースト状態の耐高電界封止材料MR1をx方向に沿って塗布する。これにより、図32(a)に示すように、x方向に延在する耐高電界封止部材MRからなる3本のラインL1〜L3が形成される。
次に、本変形例2における別の製造方法について説明する。
次に、本実施の形態(変形例を含む)における効果の検証結果について説明する。
続いて、本実施の形態における半導体モジュールの構成について説明する。図37および図38は、本実施の形態における半導体モジュールMJの構成を示す模式図である。図37および図38に示すように、絶縁基板SUBには、例えば、ダイオードが形成された本実施の形態における複数の半導体チップCHP1aと、スイッチング素子として機能するSi−IGBTが形成された複数の半導体チップCHP2とが搭載されている。
GL シリコーンゲル
MR 耐高電界封止部材
R1 領域
R2 領域
R3 領域
Claims (15)
- シリコンよりもバンドギャップの大きな半導体材料を含む半導体チップと、
前記半導体チップを封止する封止部材と、
を備える、半導体装置であって、
前記半導体チップは、側面視において、半導体基板の表面上に形成され、かつ、前記封止部材よりも絶縁破壊電界強度の大きな絶縁部材を有し、
前記半導体チップの側面は、
第1角を含む第1領域と、
第2角を含む第2領域と、
前記第1領域と前記第2領域とに挟まれた第3領域と、
から構成され、
前記第3領域における前記絶縁部材の最小膜厚をt1とし、
前記第1領域における前記絶縁部材の最大膜厚をt2とする場合、
t2≦1.5×t1の関係が成立する、半導体装置。 - 請求項1に記載の半導体装置において、
t2<t1の関係が成立する、半導体装置。 - 請求項1に記載の半導体装置において、
0.5×t1≦t2≦1.2×t1の関係が成立する、半導体装置。 - 請求項1に記載の半導体装置において、
t2≦120μmの関係が成立する、半導体装置。 - 請求項1に記載の半導体装置において、
前記絶縁部材は、ポリイミド樹脂、ポリアミドイミド樹脂、ポリエーテルアミドイミド樹脂、ポリエーテルアミド樹脂のいずれかを含み、
前記封止部材は、シリコーンゲルからなる、半導体装置。 - 請求項1に記載の半導体装置において、
前記半導体材料は、炭化シリコン、窒化ガリウム、ダイヤモンドのいずれかである、半導体装置。 - 請求項1に記載の半導体チップを複数備える、半導体モジュール。
- 請求項7に記載の半導体モジュールを複数備える、電力変換装置。
- (a)シリコンよりもバンドギャップの大きな半導体材料を含み、かつ、表面を有する半導体ウェハを準備する工程、
(b)前記表面の第1方向に沿ってペースト状態の絶縁材料を第1塗布領域および第2塗布領域に塗布する工程、
(c)前記表面において、前記第1方向と交差する第2方向に沿ってペースト状態の前記絶縁材料を前記第1塗布領域および第3塗布領域に塗布する工程、
を備える、半導体装置の製造方法であって、
前記(b)工程では、前記第1塗布領域における前記絶縁材料の塗布量を、前記第2塗布領域における前記絶縁材料の塗布量よりも少なくする、半導体装置の製造方法。 - 請求項9に記載の半導体装置の製造方法において、
前記(c)工程では、前記第1塗布領域における前記絶縁材料の塗布量を、前記第3塗布領域における前記絶縁材料の塗布量よりも少なくする、半導体装置の製造方法。 - 請求項9に記載の半導体装置の製造方法において、
前記(b)工程では、ディスペンサを使用して、前記絶縁材料を塗布し、
前記(b)工程では、前記第1塗布領域おける前記ディスペンサの移動速度を、前記第2塗布領域における前記ディスペンサの移動速度よりも速くする、半導体装置の製造方法。 - 請求項9に記載の半導体装置の製造方法において、
前記(b)工程では、ディスペンサを使用して、前記絶縁材料を塗布し、
前記(b)工程では、前記第2塗布領域おいて、前記ディスペンサから前記絶縁材料を吐出するための圧力を第1圧力にする一方、前記第1塗布領域において、前記ディスペンサから前記絶縁材料を吐出するための圧力を前記第1圧力よりも低い第2圧力にする、半導体装置の製造方法。 - 請求項9に記載の半導体装置の製造方法において、
(d)前記(c)工程の後、前記半導体ウェハをダイシングして半導体チップを取得する工程を有する、半導体装置の製造方法。 - 請求項13に記載の半導体装置の製造方法において、
(e)前記(d)工程の後、前記半導体チップを封止部材で封止する工程を有する、半導体装置の製造方法。 - (a)シリコンよりもバンドギャップの大きな半導体材料を含み、かつ、表面を有する半導体ウェハを準備する工程、
(b)前記表面の第1方向に沿ってペースト状態の絶縁材料を、第1塗布領域を跨いで第2塗布領域に塗布する工程、
(c)前記表面において、前記第1方向と交差する第2方向に沿ってペースト状態の前記絶縁材料を前記第1塗布領域および第3塗布領域に塗布する工程、
を備え、
前記(b)工程では、前記第1塗布領域には、ペースト状態の前記絶縁材料を塗布しない、半導体装置の製造方法。
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007201247A (ja) * | 2006-01-27 | 2007-08-09 | Mitsubishi Electric Corp | 高耐圧半導体装置 |
JP2012156153A (ja) * | 2011-01-21 | 2012-08-16 | Kansai Electric Power Co Inc:The | 半導体装置 |
JP2013191716A (ja) * | 2012-03-14 | 2013-09-26 | Hitachi Ltd | SiC素子搭載パワー半導体モジュール |
JP2013239607A (ja) * | 2012-05-16 | 2013-11-28 | Mitsubishi Electric Corp | 半導体装置 |
JP2014110277A (ja) * | 2012-11-30 | 2014-06-12 | Mitsubishi Electric Corp | 半導体素子、半導体装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4963148B2 (ja) * | 2001-09-18 | 2012-06-27 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2014236166A (ja) | 2013-06-04 | 2014-12-15 | 株式会社 日立パワーデバイス | 半導体装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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JP2012156153A (ja) * | 2011-01-21 | 2012-08-16 | Kansai Electric Power Co Inc:The | 半導体装置 |
JP2013191716A (ja) * | 2012-03-14 | 2013-09-26 | Hitachi Ltd | SiC素子搭載パワー半導体モジュール |
JP2013239607A (ja) * | 2012-05-16 | 2013-11-28 | Mitsubishi Electric Corp | 半導体装置 |
JP2014110277A (ja) * | 2012-11-30 | 2014-06-12 | Mitsubishi Electric Corp | 半導体素子、半導体装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020170813A1 (ja) * | 2019-02-18 | 2020-08-27 | 三菱電機株式会社 | 電力用半導体装置および電力変換装置 |
JPWO2020170813A1 (ja) * | 2019-02-18 | 2021-09-13 | 三菱電機株式会社 | 電力用半導体装置および電力変換装置 |
CN113424313A (zh) * | 2019-02-18 | 2021-09-21 | 三菱电机株式会社 | 电力用半导体装置和电力变换装置 |
JP7109650B2 (ja) | 2019-02-18 | 2022-07-29 | 三菱電機株式会社 | 電力用半導体装置および電力変換装置 |
CN113424313B (zh) * | 2019-02-18 | 2024-05-07 | 三菱电机株式会社 | 电力用半导体装置和电力变换装置 |
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