JP2017199896A - 電子回路パッケージ - Google Patents
電子回路パッケージ Download PDFInfo
- Publication number
- JP2017199896A JP2017199896A JP2017036497A JP2017036497A JP2017199896A JP 2017199896 A JP2017199896 A JP 2017199896A JP 2017036497 A JP2017036497 A JP 2017036497A JP 2017036497 A JP2017036497 A JP 2017036497A JP 2017199896 A JP2017199896 A JP 2017199896A
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- JP
- Japan
- Prior art keywords
- magnetic
- mold resin
- electronic circuit
- circuit package
- metal film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
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- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
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- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/0302—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity characterised by unspecified or heterogeneous hardness or specially adapted for magnetic hardness transitions
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
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- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0007—Casings
- H05K9/002—Casings with localised screening
- H05K9/0022—Casings with localised screening of components mounted on printed circuit boards [PCB]
- H05K9/0024—Shield cases mounted on a PCB, e.g. cans or caps or conformal shields
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0007—Casings
- H05K9/002—Casings with localised screening
- H05K9/0022—Casings with localised screening of components mounted on printed circuit boards [PCB]
- H05K9/0024—Shield cases mounted on a PCB, e.g. cans or caps or conformal shields
- H05K9/003—Shield cases mounted on a PCB, e.g. cans or caps or conformal shields made from non-conductive materials comprising an electro-conductive coating
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- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/20—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder
- H01F1/22—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together
- H01F1/24—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated
- H01F1/26—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys in the form of particles, e.g. powder pressed, sintered, or bound together the particles being insulated by macromolecular organic substances
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
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- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
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- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
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- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
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- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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Abstract
Description
図1は、本発明の第1の実施形態による電子回路パッケージ11Aの構成を示す断面図である。
図7は、本発明の第2の実施形態による電子回路パッケージ12Aの構成を示す断面図である。
図11は、本発明の第3の実施形態による電子回路パッケージ13Aの構成を示す断面図である。
図16は、本発明の第4の実施形態による電子回路パッケージ14の構成を示す断面図である。
まず、三菱製鋼株式会社製AKT4.5Si−5.0Cr(D50=30μm)及びBASF社製カルボニル鉄粉(D50=6μm)を用意し、金属アルコキシドの加水分解により表面にSiO2被膜を形成した。SiO2被膜の膜厚は、0nm(SiO2被膜なし)、5nm、10nm、30nm及び40nmの5種類とした。膜厚は、FE−SEMによって確認した。
次に、AKT4.5Si−5.0Crと製カルボニル鉄粉を重量比で8:2となるよう計量し、熱硬化性樹脂に対して90wt%添加した。使用した熱硬化性樹脂及び溶剤は、主剤としてDIC社製HP−7200H(ジシクロペンタジエン型エポキシ樹脂)、硬化剤としてDIC社製TD2231(フェノールノボラック)、硬化促進剤として主剤に対し2wt%のサンアプロ社製U−CAT SA841(DBUのフェノールノボラック樹脂塩)をそれぞれ使用した。そして、これらを配合後、ニーダーにて加熱混錬し、複合磁性材料を得た。
上記の複合磁性材料を用いて、外径φ=8mm、内径φ=3.1mm、厚み2mmのリング形状のサンプルを作製し、アジレント社製インピーダンスアナライザーE4991のマテリアルアナライザー機能を用いて10MHzでの透磁率μ'を測定した。測定の結果、SiO2被膜の膜厚にかかわらず、透磁率はμ'=13.8〜14.5であり、有意の差は認められなかった(図17参照)。
次に、JIS K6911に準拠して、上記の複合磁性材料を用いて外径φ=100mm、厚み2mmの円盤状のサンプルを作製し、その表面に電極を形成した後、電極間に500Vの電圧を1分間印加することによって体積抵抗値と表面抵抗値を測定した。結果を図17に示す。
[サンプルA1の作成]
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて上述した複合磁性材料をモールド形成した。使用した複合磁性材料は、磁性フィラーの表面に形成されたSiO2被膜の膜厚が30nmのものを使用した。これにより、サンプルA1が完成した。尚、サンプルA1には、電磁気シールドである金属膜を形成していない。
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて非磁性材料をモールド形成した。非磁性材料としては、一般的な半導体封止材料である住友ベークライト社製G−770Hを用い、推奨成形条件にて封止成形した。その後、ダイサーにより個品化切断を行い、基板の側面にグランドパターンを露出させた。そして、無電解メッキを施すことにより、グランドパターンと接するよう、モールド樹脂の上面及び側面、並びに、基板の側面にCu(膜厚1μm)とNi(膜厚2μm)の積層膜からなる金属膜を形成し、サンプルA2を得た。したがって、サンプルA2は、磁気シールドを有していない。
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて複合磁性材料をモールド形成した。使用した複合磁性材料は、磁性フィラーの表面にSiO2被膜が施されていない(膜厚=0nm)ものを使用した。その後は、サンプルA2と同様に、個品化切断及び金属膜の形成を行い、サンプルA3を得た。
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて複合磁性材料をモールド形成した。使用した複合磁性材料は、磁性フィラーの表面に形成されたSiO2被膜の膜厚が5nmのものを使用した。その後は、サンプルA2と同様に、個品化切断及び金属膜の形成を行い、サンプルA3を得た。
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて複合磁性材料をモールド形成した。使用した複合磁性材料は、磁性フィラーの表面に形成されたSiO2被膜の膜厚が10nmのものを使用した。その後は、サンプルA2と同様に、個品化切断及び金属膜の形成を行い、サンプルB1を得た。
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて複合磁性材料をモールド形成した。使用した複合磁性材料は、磁性フィラーの表面に形成されたSiO2被膜の膜厚が30nmのものを使用した。その後は、サンプルA2と同様に、個品化切断及び金属膜の形成を行い、サンプルB2を得た。
基板に50Ωの抵抗が実装されたシールド評価用基板上に、コンプレッションモールド法にて複合磁性材料をモールド形成した。使用した複合磁性材料は、磁性フィラーの表面に形成されたSiO2被膜の膜厚が40nmのものを使用した。その後は、サンプルA2と同様に、個品化切断及び金属膜の形成を行い、サンプルB3を得た。
サンプルA1〜A4,B1〜B3をシグナルジェネレータに接続して所定周波数(20MHz、50MHz、100MHz)の信号を50Ωの抵抗に送信し、各サンプルから放射されるノイズ量を近傍磁界測定装置によって測定した。この際、事前に磁性モールド樹脂及び金属膜をもたない基準サンプルを作製し、基準サンプルから放射されるノイズ量を測定しておくことで、基準サンプルにおけるノイズ量と測定用サンプルA1〜A4,B1〜B3におけるノイズ量の差を算出し、得られた値をノイズ減衰量とした。結果を図17に示す。
20 基板
20A 集合基板
21 表面
22 裏面
23 ランドパターン
24 ハンダ
25 内部配線
25G 電源パターン
26 外部端子
27 側面
27a 側面上部
27b 側面下部
27c 段差部分
28G 電源パターン
31,32 電子部品
40 磁性モールド樹脂
41 上面
42 側面
43 溝
50 非磁性部材
60 金属膜
70 絶縁膜
80 金型
81 流路
Claims (13)
- 電源パターンを有する基板と、
前記基板の表面に搭載された電子部品と、
前記電子部品を埋め込むよう前記基板の前記表面を覆い、熱硬化性樹脂材料及び磁性フィラーを含む複合磁性材料からなる磁性モールド樹脂と、
前記電源パターンに接続されるとともに、前記磁性モールド樹脂の少なくとも上面を覆う金属膜と、を備え、
前記磁性モールド樹脂の体積抵抗値が1010Ω以上であり、前記磁性モールド樹脂の前記上面と前記金属膜の界面における抵抗値が106Ω以上である電子回路パッケージ。 - 前記金属膜は、前記磁性モールド樹脂の側面をさらに覆い、
前記磁性モールド樹脂の前記側面と前記金属膜の界面における抵抗値が106Ω以上である、請求項1に記載の電子回路パッケージ。 - 前記磁性モールド樹脂と前記金属膜との間に設けられた絶縁材料をさらに備える、請求項1又は2に記載の電子回路パッケージ。
- 前記磁性フィラーは、軟磁性金属を含む、請求項1乃至3のいずれか一項に記載の電子回路パッケージ。
- 前記磁性フィラーの表面が絶縁コートされている、請求項4に記載の電子回路パッケージ。
- 前記絶縁コートの膜厚が10nm以上である、請求項5に記載の電子回路パッケージ。
- 前記磁性フィラーの形状が略球状である、請求項4乃至6のいずれか一項に記載の電子回路パッケージ。
- 前記磁性フィラーは、Fe、Fe−Co、Fe−Ni、Fe−Al及びFe−Siからなる群より選ばれた少なくとも1つの磁性材料を主成分とする、請求項4乃至7のいずれか一項に記載の電子回路パッケージ。
- 前記磁性モールド樹脂は非磁性フィラーをさらに含む、請求項1乃至8のいずれか一項に記載の電子回路パッケージ。
- 前記金属膜は、Au、Ag、Cu及びAlからなる群から選ばれた少なくとも1つの金属を主成分とする、請求項1乃至9のいずれか一項に記載の電子回路パッケージ。
- 前記金属膜の表面が酸化防止被覆で覆われている、請求項10に記載の電子回路パッケージ。
- 前記電源パターンは前記基板の側面に露出しており、前記金属膜は前記基板の前記側面に露出した前記電源パターンと接している、請求項1乃至11のいずれか一項に記載の電子回路パッケージ。
- 前記電子部品と前記磁性モールド樹脂との間に設けられた非磁性部材をさらに備える、請求項1乃至12のいずれか一項に記載の電子回路パッケージ。
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US9907179B2 (en) | 2018-02-27 |
TW201739016A (zh) | 2017-11-01 |
CN107452691A (zh) | 2017-12-08 |
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CN107452691B (zh) | 2019-12-17 |
US20170311448A1 (en) | 2017-10-26 |
JP6394719B2 (ja) | 2018-09-26 |
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