JP2017126703A - 積層半導体及び積層半導体の製造方法 - Google Patents
積層半導体及び積層半導体の製造方法 Download PDFInfo
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- JP2017126703A JP2017126703A JP2016006203A JP2016006203A JP2017126703A JP 2017126703 A JP2017126703 A JP 2017126703A JP 2016006203 A JP2016006203 A JP 2016006203A JP 2016006203 A JP2016006203 A JP 2016006203A JP 2017126703 A JP2017126703 A JP 2017126703A
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- reinforcing resin
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- 229910002482 Cu–Ni Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
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- 229920001187 thermosetting polymer Polymers 0.000 description 1
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Abstract
Description
が短いほど、サーバーにおける信号伝送が高速化され、サーバーの性能が向上する。複数の半導体チップを積層した積層半導体を用いることにより、CPUの近傍に複数のメモリを配置して、サーバーの性能を向上させている。
01上にNCF102を貼り付けた後、ダイシングブレード103を用いてダイシングを行う。ウェハ101を個片化することにより、NCF102が形成された半導体チップ104を製造することが行われている。
(1)実装タクト=(チップ搬送時間+アライメント時間+はんだ接合時間)×層数
実装タクトが大きくなると、製造コストが高くなる問題がある。実装タクトを抑えるため、NCFのタッキング性(粘着性)を利用して、図25に示すように、半導体チップ104A〜104Fを仮搭載で積層し、図26に示すように、はんだ接合を一括で行う方式(一括接合方式)がある。一括接合方式の実装タクトは、下記(2)によって算出される。
(2)実装タクト=(チップ搬送時間+アライメント時間)×層数+はんだ接合時間
図1は、第1実施形態に係る積層半導体(積層チップ)1の断面図である。積層半導体1は、例えば、積層メモリである。積層半導体1は、複数の半導体チップ2(2A〜2D)が積層されている。半導体チップ2Aは、複数の端子11A、複数の端子12A、複数のビア13A及び複数のはんだ14Aを有する。端子11Aと端子12Aとは、半導体チップ2Aを貫通するビア13Aを介して電気的に接続されている。半導体チップ2Bは、複数の端子11B、複数の端子12B、複数のビア13B及び複数のはんだ14Bを有する。端子11Bと端子12Bとは、半導体チップ2Bを貫通するビア13Bを介して電気的に接続されている。半導体チップ2Aの端子12Aと半導体チップ2Bの端子11Bとは、はんだ14Aを介して接合されている。
樹脂の一例である。
ヒーター(加熱機構)を有する。半導体チップ2Aに対する加熱及び加圧を同時に開始してもよいし、半導体チップ2Aに対する加熱を開始した後、半導体チップ2Aに対する加圧を開始してもよい。ヘッド31から半導体チップ2Aに対して熱が加えられる。半導体チップ2Aから半導体チップ2Bに熱が伝わり、半導体チップ2Bから半導体チップ2Cに熱が伝わり、半導体チップ2Cから半導体チップ2Dに熱が伝わる。
スタンドオフ22Bの温度が所定温度に達する。図5に示すように、スタンドオフ22Bの温度が所定温度に達すると、半導体チップ2Aに対して加えられた圧力が、半導体チップ2A、2Bを介してスタンドオフ22Bに伝わることにより、スタンドオフ22Bが変形する。スタンドオフ22Bが変形し、スタンドオフ22Bの高さが低くなることにより、半導体チップ2A、2Bが下降し、補強樹脂21Bが加圧される。スタンドオフ22Bの温度が所定温度に達する場合、補強樹脂21Bは十分に加熱されているため、補強樹脂21Bの粘度は低下し、補強樹脂21Bは軟化している。したがって、スタンドオフ22Bが変形し、補強樹脂21Bが加圧される際、補強樹脂21Bは軟化している。
は、積層半導体200に対して加熱を開始してからの経過時間を示している。図11の実線は、補強樹脂211Aの温度の変化を示しており、図11の点線は、補強樹脂211Aの加圧力の変化を示している。比較例では、積層半導体200上にヘッド31を配置した後、積層半導体200に加熱を開始してから一定時間が経過した後、積層半導体200に対して加圧を開始している。そのため、補強樹脂211Aの温度が加圧開始目標温度(D3)に達してから、補強樹脂211Aの加圧力が上昇している。加圧開始目標温度(D3)は、補強樹脂211Aが軟化したときの補強樹脂211Aの温度である。
第2実施形態に係る積層半導体1について説明する。第2実施形態に係る積層半導体1について、第1実施形態と同一の構成要素については、第1実施形態と同一の符号を付し、その説明を省略する。
〜51C、52A〜52Cは、図13に示すはんだ41であってもよい。例えば、スタンドオフ51A〜51Cの材料をSn48−In52(融点119℃)とし、スタンドオフ52A〜52Cの材料をSn−58Bi(融点139℃)としてもよい。また、スタンドオフ51A〜51C、52A〜52Cは、図14に示す弾性体42であってもよい。
2A〜2D 半導体チップ
3 半導体ウェハ
11A〜11D、12B〜12D 端子
13B〜13D ビア
14B〜14D はんだ
21B〜21D 補強樹脂
22B〜22D、51B〜51D、52B〜52D スタンドオフ
31 ヘッド
41 はんだ
42 弾性体
Claims (7)
- 積層された3層以上の半導体チップと、
前記各半導体チップの間に配置され、加熱により軟化する樹脂と、
前記各半導体チップの間に配置され、かつ、隣接する前記半導体チップに接しており、所定温度に達すると外力により変形する支持部と、
を備えることを特徴とする積層半導体。 - 前記支持部は、前記所定温度に達すると溶融するはんだであることを特徴とする請求項1に記載の積層半導体。
- 前記支持部は、加熱により弾性率が低下する弾性体であることを特徴とする請求項1に記載の積層半導体。
- 前記所定温度は、前記樹脂の軟化温度よりも高いことを特徴とする請求項1から3の何れか一項に記載の積層半導体。
- 前記支持部は、
第1所定温度に達すると外力により変形する第1支持部と、
前記第1所定温度と異なる第2所定温度に達すると外力により変形する第2支持部と、
を含むことを特徴とする請求項1から3の何れか一項に記載の積層半導体。 - 前記第1所定温度及び前記第2所定温度は、前記樹脂の軟化温度よりも高いことを特徴とする請求項5に記載の積層半導体。
- 少なくとも3つの半導体チップを積層する工程と、
少なくとも1つの前記半導体チップを加熱及び加圧する工程と、
を備え、
前記各半導体チップの間に、加熱により軟化する樹脂と、所定温度に達すると外力により変形する支持部とが配置されていることを特徴とする積層半導体の製造方法。
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