JP2016526284A5 - - Google Patents
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- Publication number
- JP2016526284A5 JP2016526284A5 JP2016512916A JP2016512916A JP2016526284A5 JP 2016526284 A5 JP2016526284 A5 JP 2016526284A5 JP 2016512916 A JP2016512916 A JP 2016512916A JP 2016512916 A JP2016512916 A JP 2016512916A JP 2016526284 A5 JP2016526284 A5 JP 2016526284A5
- Authority
- JP
- Japan
- Prior art keywords
- glass
- vias
- cross
- inductor structure
- sectional shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims 38
- 239000002184 metal Substances 0.000 claims 11
- 238000000034 method Methods 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 239000004020 conductor Substances 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000000059 patterning Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/887,788 US20140327510A1 (en) | 2013-05-06 | 2013-05-06 | Electronic device having asymmetrical through glass vias |
| US13/887,788 | 2013-05-06 | ||
| PCT/US2014/035041 WO2014182445A1 (en) | 2013-05-06 | 2014-04-22 | Electronic device having asymmetrical through glass vias |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016526284A JP2016526284A (ja) | 2016-09-01 |
| JP2016526284A5 true JP2016526284A5 (enExample) | 2017-05-25 |
Family
ID=50841965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016512916A Pending JP2016526284A (ja) | 2013-05-06 | 2014-04-22 | 非対称ガラス貫通ビアを有する電子デバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20140327510A1 (enExample) |
| EP (1) | EP2994925A1 (enExample) |
| JP (1) | JP2016526284A (enExample) |
| KR (1) | KR20160005349A (enExample) |
| CN (1) | CN105190799A (enExample) |
| WO (1) | WO2014182445A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9431473B2 (en) | 2012-11-21 | 2016-08-30 | Qualcomm Incorporated | Hybrid transformer structure on semiconductor devices |
| US10002700B2 (en) | 2013-02-27 | 2018-06-19 | Qualcomm Incorporated | Vertical-coupling transformer with an air-gap structure |
| US9634645B2 (en) | 2013-03-14 | 2017-04-25 | Qualcomm Incorporated | Integration of a replica circuit and a transformer above a dielectric substrate |
| US9449753B2 (en) | 2013-08-30 | 2016-09-20 | Qualcomm Incorporated | Varying thickness inductor |
| US9906318B2 (en) | 2014-04-18 | 2018-02-27 | Qualcomm Incorporated | Frequency multiplexer |
| US11024454B2 (en) * | 2015-10-16 | 2021-06-01 | Qualcomm Incorporated | High performance inductors |
| JP6838328B2 (ja) * | 2016-09-15 | 2021-03-03 | 大日本印刷株式会社 | インダクタおよびインダクタの製造方法 |
| US20180286556A1 (en) * | 2017-04-01 | 2018-10-04 | Intel Corporation | Integrated circuit implemented inductors and methods of manufacture |
| JP6781145B2 (ja) * | 2017-12-28 | 2020-11-04 | 日本発條株式会社 | 携帯型無線通信装置、および携帯型無線通信装置を用いた情報識別装置 |
| TWI723343B (zh) * | 2019-02-19 | 2021-04-01 | 頎邦科技股份有限公司 | 具立體電感之半導體結構及其製造方法 |
| WO2024118422A1 (en) * | 2022-11-30 | 2024-06-06 | Corning Incorporated | Through glass vias having adjustable arc shape and orientation and methods for forming the same via partitioned vortex laser beam |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3571247B2 (ja) * | 1999-03-31 | 2004-09-29 | 太陽誘電株式会社 | 積層電子部品 |
| US20030151485A1 (en) * | 2002-02-08 | 2003-08-14 | Charles Lewis | Surface mounted inductance element |
| US6990729B2 (en) * | 2003-09-05 | 2006-01-31 | Harris Corporation | Method for forming an inductor |
| JP4764668B2 (ja) * | 2005-07-05 | 2011-09-07 | セイコーエプソン株式会社 | 電子基板の製造方法および電子基板 |
| JP2007150022A (ja) * | 2005-11-29 | 2007-06-14 | Seiko Epson Corp | 電子基板、その製造方法および電子機器 |
| JP2009038297A (ja) * | 2007-08-03 | 2009-02-19 | Asahi Kasei Electronics Co Ltd | 半導体装置 |
| JP2009246159A (ja) * | 2008-03-31 | 2009-10-22 | Fuji Electric Device Technology Co Ltd | 多出力磁気誘導素子およびそれを備えた多出力超小型電力変換装置 |
| US20110217657A1 (en) * | 2010-02-10 | 2011-09-08 | Life Bioscience, Inc. | Methods to fabricate a photoactive substrate suitable for microfabrication |
| US20110229687A1 (en) * | 2010-03-19 | 2011-09-22 | Qualcomm Incorporated | Through Glass Via Manufacturing Process |
| US8384507B2 (en) * | 2010-06-01 | 2013-02-26 | Qualcomm Incorporated | Through via inductor or transformer in a high-resistance substrate with programmability |
| US8591262B2 (en) * | 2010-09-03 | 2013-11-26 | Pulse Electronics, Inc. | Substrate inductive devices and methods |
| EP2650915B1 (en) * | 2010-12-10 | 2017-07-26 | Panasonic Intellectual Property Management Co., Ltd. | Conducting path and semiconductor device |
| US20120235969A1 (en) * | 2011-03-15 | 2012-09-20 | Qualcomm Mems Technologies, Inc. | Thin film through-glass via and methods for forming same |
| US20130050226A1 (en) * | 2011-08-30 | 2013-02-28 | Qualcomm Mems Technologies, Inc. | Die-cut through-glass via and methods for forming same |
| US8716871B2 (en) * | 2012-02-15 | 2014-05-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Big via structure |
-
2013
- 2013-05-06 US US13/887,788 patent/US20140327510A1/en not_active Abandoned
-
2014
- 2014-04-22 WO PCT/US2014/035041 patent/WO2014182445A1/en not_active Ceased
- 2014-04-22 KR KR1020157034123A patent/KR20160005349A/ko not_active Withdrawn
- 2014-04-22 CN CN201480025531.4A patent/CN105190799A/zh active Pending
- 2014-04-22 JP JP2016512916A patent/JP2016526284A/ja active Pending
- 2014-04-22 EP EP14727127.4A patent/EP2994925A1/en not_active Withdrawn
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