KR20160005349A - 비대칭적 관통 유리 비아들을 가진 전자 디바이스 - Google Patents
비대칭적 관통 유리 비아들을 가진 전자 디바이스 Download PDFInfo
- Publication number
- KR20160005349A KR20160005349A KR1020157034123A KR20157034123A KR20160005349A KR 20160005349 A KR20160005349 A KR 20160005349A KR 1020157034123 A KR1020157034123 A KR 1020157034123A KR 20157034123 A KR20157034123 A KR 20157034123A KR 20160005349 A KR20160005349 A KR 20160005349A
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- South Korea
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- tgv
- tgvs
- electronic device
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011521 glass Substances 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 34
- 238000013461 design Methods 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 17
- 238000003860 storage Methods 0.000 claims description 16
- 238000004891 communication Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 8
- 238000000059 patterning Methods 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 17
- 230000008569 process Effects 0.000 description 13
- 238000005516 engineering process Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000004590 computer program Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- 238000011160 research Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000001413 cellular effect Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 2
- 230000006855 networking Effects 0.000 description 2
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- 235000012431 wafers Nutrition 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
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- 239000005022 packaging material Substances 0.000 description 1
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- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000005389 semiconductor device fabrication Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
- H01F27/36—Electric or magnetic shields or screens
- H01F27/363—Electric or magnetic shields or screens made of electrically conductive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- H01F27/362—
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/11—Printed elements for providing electric connections to or between printed circuits
- H05K1/115—Via connections; Lands around holes or via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/107—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by filling grooves in the support with conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0007—Casings
- H05K9/002—Casings with localised screening
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
- H01F2017/002—Details of via holes for interconnecting the layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
- H01F27/36—Electric or magnetic shields or screens
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Integrated Circuits (AREA)
- Coils Or Transformers For Communication (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/887,788 US20140327510A1 (en) | 2013-05-06 | 2013-05-06 | Electronic device having asymmetrical through glass vias |
| US13/887,788 | 2013-05-06 | ||
| PCT/US2014/035041 WO2014182445A1 (en) | 2013-05-06 | 2014-04-22 | Electronic device having asymmetrical through glass vias |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20160005349A true KR20160005349A (ko) | 2016-01-14 |
Family
ID=50841965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020157034123A Withdrawn KR20160005349A (ko) | 2013-05-06 | 2014-04-22 | 비대칭적 관통 유리 비아들을 가진 전자 디바이스 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20140327510A1 (enExample) |
| EP (1) | EP2994925A1 (enExample) |
| JP (1) | JP2016526284A (enExample) |
| KR (1) | KR20160005349A (enExample) |
| CN (1) | CN105190799A (enExample) |
| WO (1) | WO2014182445A1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9431473B2 (en) | 2012-11-21 | 2016-08-30 | Qualcomm Incorporated | Hybrid transformer structure on semiconductor devices |
| US10002700B2 (en) | 2013-02-27 | 2018-06-19 | Qualcomm Incorporated | Vertical-coupling transformer with an air-gap structure |
| US9634645B2 (en) | 2013-03-14 | 2017-04-25 | Qualcomm Incorporated | Integration of a replica circuit and a transformer above a dielectric substrate |
| US9449753B2 (en) | 2013-08-30 | 2016-09-20 | Qualcomm Incorporated | Varying thickness inductor |
| US9906318B2 (en) | 2014-04-18 | 2018-02-27 | Qualcomm Incorporated | Frequency multiplexer |
| US11024454B2 (en) * | 2015-10-16 | 2021-06-01 | Qualcomm Incorporated | High performance inductors |
| JP6838328B2 (ja) * | 2016-09-15 | 2021-03-03 | 大日本印刷株式会社 | インダクタおよびインダクタの製造方法 |
| US20180286556A1 (en) * | 2017-04-01 | 2018-10-04 | Intel Corporation | Integrated circuit implemented inductors and methods of manufacture |
| JP6781145B2 (ja) * | 2017-12-28 | 2020-11-04 | 日本発條株式会社 | 携帯型無線通信装置、および携帯型無線通信装置を用いた情報識別装置 |
| TWI723343B (zh) * | 2019-02-19 | 2021-04-01 | 頎邦科技股份有限公司 | 具立體電感之半導體結構及其製造方法 |
| WO2024118422A1 (en) * | 2022-11-30 | 2024-06-06 | Corning Incorporated | Through glass vias having adjustable arc shape and orientation and methods for forming the same via partitioned vortex laser beam |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3571247B2 (ja) * | 1999-03-31 | 2004-09-29 | 太陽誘電株式会社 | 積層電子部品 |
| US20030151485A1 (en) * | 2002-02-08 | 2003-08-14 | Charles Lewis | Surface mounted inductance element |
| US6990729B2 (en) * | 2003-09-05 | 2006-01-31 | Harris Corporation | Method for forming an inductor |
| JP4764668B2 (ja) * | 2005-07-05 | 2011-09-07 | セイコーエプソン株式会社 | 電子基板の製造方法および電子基板 |
| JP2007150022A (ja) * | 2005-11-29 | 2007-06-14 | Seiko Epson Corp | 電子基板、その製造方法および電子機器 |
| JP2009038297A (ja) * | 2007-08-03 | 2009-02-19 | Asahi Kasei Electronics Co Ltd | 半導体装置 |
| JP2009246159A (ja) * | 2008-03-31 | 2009-10-22 | Fuji Electric Device Technology Co Ltd | 多出力磁気誘導素子およびそれを備えた多出力超小型電力変換装置 |
| US20110217657A1 (en) * | 2010-02-10 | 2011-09-08 | Life Bioscience, Inc. | Methods to fabricate a photoactive substrate suitable for microfabrication |
| US20110229687A1 (en) * | 2010-03-19 | 2011-09-22 | Qualcomm Incorporated | Through Glass Via Manufacturing Process |
| US8384507B2 (en) * | 2010-06-01 | 2013-02-26 | Qualcomm Incorporated | Through via inductor or transformer in a high-resistance substrate with programmability |
| US8591262B2 (en) * | 2010-09-03 | 2013-11-26 | Pulse Electronics, Inc. | Substrate inductive devices and methods |
| EP2650915B1 (en) * | 2010-12-10 | 2017-07-26 | Panasonic Intellectual Property Management Co., Ltd. | Conducting path and semiconductor device |
| US20120235969A1 (en) * | 2011-03-15 | 2012-09-20 | Qualcomm Mems Technologies, Inc. | Thin film through-glass via and methods for forming same |
| US20130050226A1 (en) * | 2011-08-30 | 2013-02-28 | Qualcomm Mems Technologies, Inc. | Die-cut through-glass via and methods for forming same |
| US8716871B2 (en) * | 2012-02-15 | 2014-05-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Big via structure |
-
2013
- 2013-05-06 US US13/887,788 patent/US20140327510A1/en not_active Abandoned
-
2014
- 2014-04-22 WO PCT/US2014/035041 patent/WO2014182445A1/en not_active Ceased
- 2014-04-22 KR KR1020157034123A patent/KR20160005349A/ko not_active Withdrawn
- 2014-04-22 CN CN201480025531.4A patent/CN105190799A/zh active Pending
- 2014-04-22 JP JP2016512916A patent/JP2016526284A/ja active Pending
- 2014-04-22 EP EP14727127.4A patent/EP2994925A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016526284A (ja) | 2016-09-01 |
| US20140327510A1 (en) | 2014-11-06 |
| CN105190799A (zh) | 2015-12-23 |
| EP2994925A1 (en) | 2016-03-16 |
| WO2014182445A1 (en) | 2014-11-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20151130 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |