JP2016516133A - 酸素環境内でアルミニウム源を使用することによって酸化アルミニウムを基板上に成長させ、透光性・耐スクラッチ性の窓部材を形成する方法。 - Google Patents
酸素環境内でアルミニウム源を使用することによって酸化アルミニウムを基板上に成長させ、透光性・耐スクラッチ性の窓部材を形成する方法。 Download PDFInfo
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- JP2016516133A JP2016516133A JP2016500192A JP2016500192A JP2016516133A JP 2016516133 A JP2016516133 A JP 2016516133A JP 2016500192 A JP2016500192 A JP 2016500192A JP 2016500192 A JP2016500192 A JP 2016500192A JP 2016516133 A JP2016516133 A JP 2016516133A
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- aluminum oxide
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- aluminum
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- 239000000758 substrate Substances 0.000 title claims abstract description 143
- 238000000034 method Methods 0.000 title claims abstract description 94
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 title claims abstract description 91
- 239000001301 oxygen Substances 0.000 title claims abstract description 33
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 33
- 230000003678 scratch resistant effect Effects 0.000 title claims abstract description 18
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 35
- 229910052782 aluminium Inorganic materials 0.000 title claims description 34
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 32
- 230000008569 process Effects 0.000 claims abstract description 71
- 239000011521 glass Substances 0.000 claims abstract description 28
- 239000011159 matrix material Substances 0.000 claims abstract description 23
- 230000008021 deposition Effects 0.000 claims abstract description 14
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 40
- 230000036961 partial effect Effects 0.000 claims description 18
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 claims description 17
- 238000005342 ion exchange Methods 0.000 claims description 13
- 239000004033 plastic Substances 0.000 claims description 12
- 229920003023 plastic Polymers 0.000 claims description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000005354 aluminosilicate glass Substances 0.000 claims description 10
- 239000005388 borosilicate glass Substances 0.000 claims description 10
- 229910052594 sapphire Inorganic materials 0.000 claims description 10
- 239000010980 sapphire Substances 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 5
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 5
- 239000011707 mineral Substances 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 235000012239 silicon dioxide Nutrition 0.000 claims description 5
- 238000002207 thermal evaporation Methods 0.000 abstract description 14
- 238000000151 deposition Methods 0.000 abstract description 11
- 230000008901 benefit Effects 0.000 abstract description 8
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- 238000005546 reactive sputtering Methods 0.000 abstract description 4
- -1 cell phones Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 28
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- 238000005192 partition Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000000670 limiting effect Effects 0.000 description 4
- 238000004422 calculation algorithm Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000005341 toughened glass Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
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- 238000006748 scratching Methods 0.000 description 2
- 230000002393 scratching effect Effects 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
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- 238000013021 overheating Methods 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000003763 resistance to breakage Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3457—Sputtering using other particles than noble gas ions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/214—Al2O3
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361790786P | 2013-03-15 | 2013-03-15 | |
| US61/790,786 | 2013-03-15 | ||
| US14/101,980 US20140272346A1 (en) | 2013-03-15 | 2013-12-10 | Method of growing aluminum oxide onto substrates by use of an aluminum source in an oxygen environment to create transparent, scratch resistant windows |
| US14/101,980 | 2013-12-10 | ||
| PCT/US2014/013918 WO2014149194A1 (en) | 2013-03-15 | 2014-01-30 | Method of growing aluminum oxide onto substrates by use of an aluminum source in an oxygen environment to create transparent, scratch resistant windows |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2016516133A true JP2016516133A (ja) | 2016-06-02 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
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| JP2016500192A Pending JP2016516133A (ja) | 2013-03-15 | 2014-01-30 | 酸素環境内でアルミニウム源を使用することによって酸化アルミニウムを基板上に成長させ、透光性・耐スクラッチ性の窓部材を形成する方法。 |
| JP2016500191A Pending JP2016513753A (ja) | 2013-03-15 | 2014-01-30 | 酸素分圧を有する環境内におけるアルミニウム源の使用によって酸化アルミニウムを基板上に成長させ、透光性、耐スクラッチ性の窓部材を形成する方法。 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
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| JP2016500191A Pending JP2016513753A (ja) | 2013-03-15 | 2014-01-30 | 酸素分圧を有する環境内におけるアルミニウム源の使用によって酸化アルミニウムを基板上に成長させ、透光性、耐スクラッチ性の窓部材を形成する方法。 |
Country Status (7)
| Country | Link |
|---|---|
| US (4) | US20140272346A1 (enExample) |
| JP (2) | JP2016516133A (enExample) |
| KR (2) | KR20150129703A (enExample) |
| CN (2) | CN105209659A (enExample) |
| DE (2) | DE112014001447T5 (enExample) |
| TW (2) | TW201437403A (enExample) |
| WO (2) | WO2014149193A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8053191B2 (en) | 2006-08-31 | 2011-11-08 | Westend Asset Clearinghouse Company, Llc | Iterative nucleic acid assembly using activation of vector-encoded traits |
| US9217144B2 (en) | 2010-01-07 | 2015-12-22 | Gen9, Inc. | Assembly of high fidelity polynucleotides |
| EP2637780B1 (en) | 2010-11-12 | 2022-02-09 | Gen9, Inc. | Protein arrays and methods of using and making the same |
| WO2012078312A2 (en) | 2010-11-12 | 2012-06-14 | Gen9, Inc. | Methods and devices for nucleic acids synthesis |
| IL302248A (en) | 2011-08-26 | 2023-06-01 | Gen9 Inc | Compositions and methods for high fidelity assembly of nucleic acids |
| US9150853B2 (en) | 2012-03-21 | 2015-10-06 | Gen9, Inc. | Methods for screening proteins using DNA encoded chemical libraries as templates for enzyme catalysis |
| AU2013251701A1 (en) | 2012-04-24 | 2014-10-30 | Gen9, Inc. | Methods for sorting nucleic acids and multiplexed preparative in vitro cloning |
| EP2864531B2 (en) | 2012-06-25 | 2022-08-03 | Gen9, Inc. | Methods for nucleic acid assembly and high throughput sequencing |
| US11097974B2 (en) | 2014-07-31 | 2021-08-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US9359686B1 (en) | 2015-01-09 | 2016-06-07 | Apple Inc. | Processes to reduce interfacial enrichment of alloying elements under anodic oxide films and improve anodized appearance of heat treatable alloys |
| CN107108841A (zh) * | 2015-01-14 | 2017-08-29 | 科思创德国股份有限公司 | 用于聚氨酯基透明成型体的组合物 |
| CN105039917B (zh) * | 2015-06-05 | 2018-12-25 | 河源市璐悦自动化设备有限公司 | 一种具有蓝宝石表层的玻璃镜片及其制备方法 |
| US20170009334A1 (en) * | 2015-07-09 | 2017-01-12 | Rubicon Technology, Inc. | Hard aluminum oxide coating for various applications |
| US12338159B2 (en) | 2015-07-30 | 2025-06-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US9970080B2 (en) | 2015-09-24 | 2018-05-15 | Apple Inc. | Micro-alloying to mitigate the slight discoloration resulting from entrained metal in anodized aluminum surface finishes |
| KR102492060B1 (ko) | 2016-01-12 | 2023-01-26 | 코닝 인코포레이티드 | 얇은, 열적 및 화학적으로 강화된 유리-계 제품 |
| US10174436B2 (en) | 2016-04-06 | 2019-01-08 | Apple Inc. | Process for enhanced corrosion protection of anodized aluminum |
| CN107263939A (zh) * | 2016-04-08 | 2017-10-20 | 优尔材料工业（深圳）有限公司 | 复合体及其制备方法 |
| US11352708B2 (en) | 2016-08-10 | 2022-06-07 | Apple Inc. | Colored multilayer oxide coatings |
| US11242614B2 (en) | 2017-02-17 | 2022-02-08 | Apple Inc. | Oxide coatings for providing corrosion resistance on parts with edges and convex features |
| TWI785156B (zh) | 2017-11-30 | 2022-12-01 | 美商康寧公司 | 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃 |
| US11549191B2 (en) | 2018-09-10 | 2023-01-10 | Apple Inc. | Corrosion resistance for anodized parts having convex surface features |
| CN109763116B (zh) * | 2019-01-30 | 2020-11-06 | 西北工业大学 | 用于cvd设备的双轴正交旋转系统及方法 |
| WO2020219290A1 (en) | 2019-04-23 | 2020-10-29 | Corning Incorporated | Glass laminates having determined stress profiles and methods of making the same |
| CN116811379A (zh) | 2019-08-06 | 2023-09-29 | 康宁股份有限公司 | 具有用于阻止裂纹的埋入式应力尖峰的玻璃层压体及其制造方法 |
| KR102751151B1 (ko) | 2019-12-20 | 2025-01-07 | 삼성디스플레이 주식회사 | 유리 제품 및 이를 포함하는 디스플레이 장치 |
| KR102244873B1 (ko) * | 2019-12-31 | 2021-04-27 | 주식회사 이노션테크 | 디스플레이 기판용 기능성 코팅막 및 그 제조방법 |
| KR102562270B1 (ko) | 2021-12-09 | 2023-08-01 | 삼성디스플레이 주식회사 | 유리 강도 평가 장치 및 평가 방법 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63501223A (ja) * | 1985-10-31 | 1988-05-12 | エヌ・シ−・ア−ル・コ−ポレ−シヨン | 透明基板上に耐摩傷コ−テイングを形成する方法 |
| US5350607A (en) * | 1992-10-02 | 1994-09-27 | United Technologies Corporation | Ionized cluster beam deposition of sapphire |
| JP3478561B2 (ja) * | 1993-05-26 | 2003-12-15 | キヤノン株式会社 | スパッタ成膜方法 |
| DE69422666T2 (de) * | 1993-07-02 | 2000-07-27 | Sumitomo Electric Industries, Ltd. | Verfahren zur Herstellung eines hochkristallinen, dünnen SrTiO3 Oxidfilms |
| US5911856A (en) * | 1993-09-03 | 1999-06-15 | Canon Kabushiki Kaisha | Method for forming thin film |
| US5472795A (en) * | 1994-06-27 | 1995-12-05 | Board Of Regents Of The University Of The University Of Wisconsin System, On Behalf Of The University Of Wisconsin-Milwaukee | Multilayer nanolaminates containing polycrystalline zirconia |
| JP3689524B2 (ja) * | 1996-03-22 | 2005-08-31 | キヤノン株式会社 | 酸化アルミニウム膜及びその形成方法 |
| US6576093B1 (en) * | 1998-12-17 | 2003-06-10 | Cambridge Display Technology, Ltd. | Method of producing organic light-emitting devices |
| WO2001044550A1 (en) * | 1999-12-16 | 2001-06-21 | Kolon Industries, Inc. | A warp knit having an excellent touch, and a process of preparing the same |
| US6869644B2 (en) * | 2000-10-24 | 2005-03-22 | Ppg Industries Ohio, Inc. | Method of making coated articles and coated articles made thereby |
| US6858865B2 (en) * | 2001-02-23 | 2005-02-22 | Micron Technology, Inc. | Doped aluminum oxide dielectrics |
| DE10219812A1 (de) * | 2002-05-02 | 2003-11-13 | Univ Dresden Tech | Bauteile mit kristallinen Beschichtungen des Systems Aluminiumoxid/Siliziumoxid und Verfahren zu deren Herstellung |
| US7339139B2 (en) * | 2003-10-03 | 2008-03-04 | Darly Custom Technology, Inc. | Multi-layered radiant thermal evaporator and method of use |
| US7229669B2 (en) * | 2003-11-13 | 2007-06-12 | Honeywell International Inc. | Thin-film deposition methods and apparatuses |
| US7160578B2 (en) * | 2004-03-10 | 2007-01-09 | Pilkington North America | Method for depositing aluminum oxide coatings on flat glass |
| KR100671422B1 (ko) * | 2004-12-21 | 2007-01-19 | 재단법인 포항산업과학연구원 | 스퍼터링에 의한 알루미늄 피막 형성방법 |
| US8460522B2 (en) * | 2006-10-24 | 2013-06-11 | Ulvac, Inc. | Method of forming thin film and apparatus for forming thin film |
| EP2321230A4 (en) * | 2008-07-29 | 2012-10-10 | Corning Inc | TWO-STAGE ION EXCHANGE FOR GLASS CHEMICAL REINFORCEMENT |
| DE102009034532A1 (de) * | 2009-07-23 | 2011-02-03 | Msg Lithoglas Ag | Verfahren zum Herstellen einer strukturierten Beschichtung auf einem Substrat, beschichtetes Substrat sowie Halbzeug mit einem beschichteten Substrat |
| US9732412B2 (en) * | 2011-04-29 | 2017-08-15 | Applied Materials, Inc. | Gas system for reactive deposition process |
| JP2013028018A (ja) * | 2011-07-27 | 2013-02-07 | Daicel Corp | ガスバリアフィルム及びデバイス |
| US9127344B2 (en) * | 2011-11-08 | 2015-09-08 | Sakti3, Inc. | Thermal evaporation process for manufacture of solid state battery devices |
| US9701580B2 (en) * | 2012-02-29 | 2017-07-11 | Corning Incorporated | Aluminosilicate glasses for ion exchange |
| EP2903823B1 (en) * | 2012-10-03 | 2021-09-22 | Corning Incorporated | Surface-modified glass substrate |
-
2013
- 2013-12-10 US US14/101,980 patent/US20140272346A1/en not_active Abandoned
- 2013-12-10 US US14/101,957 patent/US20140272345A1/en not_active Abandoned
-
2014
- 2014-01-30 KR KR1020157024100A patent/KR20150129703A/ko not_active Withdrawn
- 2014-01-30 JP JP2016500192A patent/JP2016516133A/ja active Pending
- 2014-01-30 DE DE112014001447.8T patent/DE112014001447T5/de not_active Withdrawn
- 2014-01-30 JP JP2016500191A patent/JP2016513753A/ja active Pending
- 2014-01-30 DE DE112014001454.0T patent/DE112014001454T5/de not_active Withdrawn
- 2014-01-30 CN CN201480014889.7A patent/CN105209659A/zh active Pending
- 2014-01-30 CN CN201480015214.4A patent/CN105247096A/zh active Pending
- 2014-01-30 WO PCT/US2014/013916 patent/WO2014149193A2/en not_active Ceased
- 2014-01-30 KR KR1020157024881A patent/KR20150129732A/ko not_active Withdrawn
- 2014-01-30 WO PCT/US2014/013918 patent/WO2014149194A1/en not_active Ceased
- 2014-02-17 TW TW103105074A patent/TW201437403A/zh unknown
- 2014-02-17 TW TW103105075A patent/TW201500573A/zh unknown
-
2016
- 2016-03-30 US US15/085,075 patent/US20160215381A1/en not_active Abandoned
- 2016-06-28 US US15/195,630 patent/US20160369387A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TW201437403A (zh) | 2014-10-01 |
| WO2014149193A3 (en) | 2015-01-15 |
| US20140272345A1 (en) | 2014-09-18 |
| WO2014149193A2 (en) | 2014-09-25 |
| US20140272346A1 (en) | 2014-09-18 |
| WO2014149194A1 (en) | 2014-09-25 |
| US20160215381A1 (en) | 2016-07-28 |
| DE112014001454T5 (de) | 2015-12-03 |
| JP2016513753A (ja) | 2016-05-16 |
| KR20150129732A (ko) | 2015-11-20 |
| US20160369387A1 (en) | 2016-12-22 |
| TW201500573A (zh) | 2015-01-01 |
| CN105247096A (zh) | 2016-01-13 |
| KR20150129703A (ko) | 2015-11-20 |
| DE112014001447T5 (de) | 2016-01-14 |
| CN105209659A (zh) | 2015-12-30 |
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