DE112014001447T5 - Verfahren zum Entwickeln von Aluminiumoxid auf Substraten unter Verwendung einer Aluminiumquelle ineiner Sauerstoffumgebung, um transparente, kratzfeste Fenster zu erzeugen - Google Patents
Verfahren zum Entwickeln von Aluminiumoxid auf Substraten unter Verwendung einer Aluminiumquelle ineiner Sauerstoffumgebung, um transparente, kratzfeste Fenster zu erzeugen Download PDFInfo
- Publication number
- DE112014001447T5 DE112014001447T5 DE112014001447.8T DE112014001447T DE112014001447T5 DE 112014001447 T5 DE112014001447 T5 DE 112014001447T5 DE 112014001447 T DE112014001447 T DE 112014001447T DE 112014001447 T5 DE112014001447 T5 DE 112014001447T5
- Authority
- DE
- Germany
- Prior art keywords
- substrate
- transparent
- resistant
- alumina
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 140
- 238000000034 method Methods 0.000 title claims abstract description 81
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 title claims abstract description 62
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 34
- 239000001301 oxygen Substances 0.000 title claims abstract description 33
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 33
- 230000003678 scratch resistant effect Effects 0.000 title claims abstract description 27
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims description 36
- 229910052782 aluminium Inorganic materials 0.000 title claims description 34
- 230000008569 process Effects 0.000 claims abstract description 35
- 239000011521 glass Substances 0.000 claims abstract description 30
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000011159 matrix material Substances 0.000 claims abstract description 21
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims description 39
- 230000036961 partial effect Effects 0.000 claims description 18
- 230000008021 deposition Effects 0.000 claims description 15
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 claims description 15
- 238000005342 ion exchange Methods 0.000 claims description 13
- 229920003023 plastic Polymers 0.000 claims description 12
- 238000006748 scratching Methods 0.000 claims description 12
- 230000002393 scratching effect Effects 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 11
- 239000010980 sapphire Substances 0.000 claims description 11
- 239000005388 borosilicate glass Substances 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 7
- 239000005354 aluminosilicate glass Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 claims description 4
- 239000005368 silicate glass Substances 0.000 claims description 4
- 238000013517 stratification Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 3
- 230000003763 resistance to breakage Effects 0.000 claims description 2
- 229910002076 stabilized zirconia Inorganic materials 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 2
- 238000002207 thermal evaporation Methods 0.000 abstract description 16
- 230000008901 benefit Effects 0.000 abstract description 9
- 238000011161 development Methods 0.000 abstract description 9
- 239000011248 coating agent Substances 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 230000005684 electric field Effects 0.000 abstract description 5
- 238000005546 reactive sputtering Methods 0.000 abstract description 5
- -1 mobile phones Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 description 27
- 239000007789 gas Substances 0.000 description 13
- 238000000151 deposition Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 239000010410 layer Substances 0.000 description 9
- 238000005192 partition Methods 0.000 description 8
- 238000005336 cracking Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000004422 calculation algorithm Methods 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 230000029305 taxis Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 239000005341 toughened glass Substances 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000135 prohibitive effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/081—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3457—Sputtering using other particles than noble gas ions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/214—Al2O3
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/155—Deposition methods from the vapour phase by sputtering by reactive sputtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361790786P | 2013-03-15 | 2013-03-15 | |
| US61/790,786 | 2013-03-15 | ||
| US14/101,980 US20140272346A1 (en) | 2013-03-15 | 2013-12-10 | Method of growing aluminum oxide onto substrates by use of an aluminum source in an oxygen environment to create transparent, scratch resistant windows |
| US14/101,980 | 2013-12-10 | ||
| PCT/US2014/013918 WO2014149194A1 (en) | 2013-03-15 | 2014-01-30 | Method of growing aluminum oxide onto substrates by use of an aluminum source in an oxygen environment to create transparent, scratch resistant windows |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE112014001447T5 true DE112014001447T5 (de) | 2016-01-14 |
Family
ID=51528352
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112014001447.8T Withdrawn DE112014001447T5 (de) | 2013-03-15 | 2014-01-30 | Verfahren zum Entwickeln von Aluminiumoxid auf Substraten unter Verwendung einer Aluminiumquelle ineiner Sauerstoffumgebung, um transparente, kratzfeste Fenster zu erzeugen |
| DE112014001454.0T Withdrawn DE112014001454T5 (de) | 2013-03-15 | 2014-01-30 | Verfahren zum Entwickeln von Aluminiumoxid auf Substraten unter Verwendung einer Aluminiumquelle in einer Umgebung, die einen Partialdruck von Sauerstoff enthält, um transparente, kratzfeste Fenster zuerzeugen |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE112014001454.0T Withdrawn DE112014001454T5 (de) | 2013-03-15 | 2014-01-30 | Verfahren zum Entwickeln von Aluminiumoxid auf Substraten unter Verwendung einer Aluminiumquelle in einer Umgebung, die einen Partialdruck von Sauerstoff enthält, um transparente, kratzfeste Fenster zuerzeugen |
Country Status (7)
| Country | Link |
|---|---|
| US (4) | US20140272346A1 (enExample) |
| JP (2) | JP2016516133A (enExample) |
| KR (2) | KR20150129703A (enExample) |
| CN (2) | CN105209659A (enExample) |
| DE (2) | DE112014001447T5 (enExample) |
| TW (2) | TW201437403A (enExample) |
| WO (2) | WO2014149193A2 (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8053191B2 (en) | 2006-08-31 | 2011-11-08 | Westend Asset Clearinghouse Company, Llc | Iterative nucleic acid assembly using activation of vector-encoded traits |
| US9217144B2 (en) | 2010-01-07 | 2015-12-22 | Gen9, Inc. | Assembly of high fidelity polynucleotides |
| EP2637780B1 (en) | 2010-11-12 | 2022-02-09 | Gen9, Inc. | Protein arrays and methods of using and making the same |
| WO2012078312A2 (en) | 2010-11-12 | 2012-06-14 | Gen9, Inc. | Methods and devices for nucleic acids synthesis |
| IL302248A (en) | 2011-08-26 | 2023-06-01 | Gen9 Inc | Compositions and methods for high fidelity assembly of nucleic acids |
| US9150853B2 (en) | 2012-03-21 | 2015-10-06 | Gen9, Inc. | Methods for screening proteins using DNA encoded chemical libraries as templates for enzyme catalysis |
| AU2013251701A1 (en) | 2012-04-24 | 2014-10-30 | Gen9, Inc. | Methods for sorting nucleic acids and multiplexed preparative in vitro cloning |
| EP2864531B2 (en) | 2012-06-25 | 2022-08-03 | Gen9, Inc. | Methods for nucleic acid assembly and high throughput sequencing |
| US11097974B2 (en) | 2014-07-31 | 2021-08-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US9359686B1 (en) | 2015-01-09 | 2016-06-07 | Apple Inc. | Processes to reduce interfacial enrichment of alloying elements under anodic oxide films and improve anodized appearance of heat treatable alloys |
| CN107108841A (zh) * | 2015-01-14 | 2017-08-29 | 科思创德国股份有限公司 | 用于聚氨酯基透明成型体的组合物 |
| CN105039917B (zh) * | 2015-06-05 | 2018-12-25 | 河源市璐悦自动化设备有限公司 | 一种具有蓝宝石表层的玻璃镜片及其制备方法 |
| US20170009334A1 (en) * | 2015-07-09 | 2017-01-12 | Rubicon Technology, Inc. | Hard aluminum oxide coating for various applications |
| US12338159B2 (en) | 2015-07-30 | 2025-06-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US9970080B2 (en) | 2015-09-24 | 2018-05-15 | Apple Inc. | Micro-alloying to mitigate the slight discoloration resulting from entrained metal in anodized aluminum surface finishes |
| KR102492060B1 (ko) | 2016-01-12 | 2023-01-26 | 코닝 인코포레이티드 | 얇은, 열적 및 화학적으로 강화된 유리-계 제품 |
| US10174436B2 (en) | 2016-04-06 | 2019-01-08 | Apple Inc. | Process for enhanced corrosion protection of anodized aluminum |
| CN107263939A (zh) * | 2016-04-08 | 2017-10-20 | 优尔材料工业（深圳）有限公司 | 复合体及其制备方法 |
| US11352708B2 (en) | 2016-08-10 | 2022-06-07 | Apple Inc. | Colored multilayer oxide coatings |
| US11242614B2 (en) | 2017-02-17 | 2022-02-08 | Apple Inc. | Oxide coatings for providing corrosion resistance on parts with edges and convex features |
| TWI785156B (zh) | 2017-11-30 | 2022-12-01 | 美商康寧公司 | 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃 |
| US11549191B2 (en) | 2018-09-10 | 2023-01-10 | Apple Inc. | Corrosion resistance for anodized parts having convex surface features |
| CN109763116B (zh) * | 2019-01-30 | 2020-11-06 | 西北工业大学 | 用于cvd设备的双轴正交旋转系统及方法 |
| WO2020219290A1 (en) | 2019-04-23 | 2020-10-29 | Corning Incorporated | Glass laminates having determined stress profiles and methods of making the same |
| CN116811379A (zh) | 2019-08-06 | 2023-09-29 | 康宁股份有限公司 | 具有用于阻止裂纹的埋入式应力尖峰的玻璃层压体及其制造方法 |
| KR102751151B1 (ko) | 2019-12-20 | 2025-01-07 | 삼성디스플레이 주식회사 | 유리 제품 및 이를 포함하는 디스플레이 장치 |
| KR102244873B1 (ko) * | 2019-12-31 | 2021-04-27 | 주식회사 이노션테크 | 디스플레이 기판용 기능성 코팅막 및 그 제조방법 |
| KR102562270B1 (ko) | 2021-12-09 | 2023-08-01 | 삼성디스플레이 주식회사 | 유리 강도 평가 장치 및 평가 방법 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63501223A (ja) * | 1985-10-31 | 1988-05-12 | エヌ・シ−・ア−ル・コ−ポレ−シヨン | 透明基板上に耐摩傷コ−テイングを形成する方法 |
| US5350607A (en) * | 1992-10-02 | 1994-09-27 | United Technologies Corporation | Ionized cluster beam deposition of sapphire |
| JP3478561B2 (ja) * | 1993-05-26 | 2003-12-15 | キヤノン株式会社 | スパッタ成膜方法 |
| DE69422666T2 (de) * | 1993-07-02 | 2000-07-27 | Sumitomo Electric Industries, Ltd. | Verfahren zur Herstellung eines hochkristallinen, dünnen SrTiO3 Oxidfilms |
| US5911856A (en) * | 1993-09-03 | 1999-06-15 | Canon Kabushiki Kaisha | Method for forming thin film |
| US5472795A (en) * | 1994-06-27 | 1995-12-05 | Board Of Regents Of The University Of The University Of Wisconsin System, On Behalf Of The University Of Wisconsin-Milwaukee | Multilayer nanolaminates containing polycrystalline zirconia |
| JP3689524B2 (ja) * | 1996-03-22 | 2005-08-31 | キヤノン株式会社 | 酸化アルミニウム膜及びその形成方法 |
| US6576093B1 (en) * | 1998-12-17 | 2003-06-10 | Cambridge Display Technology, Ltd. | Method of producing organic light-emitting devices |
| WO2001044550A1 (en) * | 1999-12-16 | 2001-06-21 | Kolon Industries, Inc. | A warp knit having an excellent touch, and a process of preparing the same |
| US6869644B2 (en) * | 2000-10-24 | 2005-03-22 | Ppg Industries Ohio, Inc. | Method of making coated articles and coated articles made thereby |
| US6858865B2 (en) * | 2001-02-23 | 2005-02-22 | Micron Technology, Inc. | Doped aluminum oxide dielectrics |
| DE10219812A1 (de) * | 2002-05-02 | 2003-11-13 | Univ Dresden Tech | Bauteile mit kristallinen Beschichtungen des Systems Aluminiumoxid/Siliziumoxid und Verfahren zu deren Herstellung |
| US7339139B2 (en) * | 2003-10-03 | 2008-03-04 | Darly Custom Technology, Inc. | Multi-layered radiant thermal evaporator and method of use |
| US7229669B2 (en) * | 2003-11-13 | 2007-06-12 | Honeywell International Inc. | Thin-film deposition methods and apparatuses |
| US7160578B2 (en) * | 2004-03-10 | 2007-01-09 | Pilkington North America | Method for depositing aluminum oxide coatings on flat glass |
| KR100671422B1 (ko) * | 2004-12-21 | 2007-01-19 | 재단법인 포항산업과학연구원 | 스퍼터링에 의한 알루미늄 피막 형성방법 |
| US8460522B2 (en) * | 2006-10-24 | 2013-06-11 | Ulvac, Inc. | Method of forming thin film and apparatus for forming thin film |
| EP2321230A4 (en) * | 2008-07-29 | 2012-10-10 | Corning Inc | TWO-STAGE ION EXCHANGE FOR GLASS CHEMICAL REINFORCEMENT |
| DE102009034532A1 (de) * | 2009-07-23 | 2011-02-03 | Msg Lithoglas Ag | Verfahren zum Herstellen einer strukturierten Beschichtung auf einem Substrat, beschichtetes Substrat sowie Halbzeug mit einem beschichteten Substrat |
| US9732412B2 (en) * | 2011-04-29 | 2017-08-15 | Applied Materials, Inc. | Gas system for reactive deposition process |
| JP2013028018A (ja) * | 2011-07-27 | 2013-02-07 | Daicel Corp | ガスバリアフィルム及びデバイス |
| US9127344B2 (en) * | 2011-11-08 | 2015-09-08 | Sakti3, Inc. | Thermal evaporation process for manufacture of solid state battery devices |
| US9701580B2 (en) * | 2012-02-29 | 2017-07-11 | Corning Incorporated | Aluminosilicate glasses for ion exchange |
| EP2903823B1 (en) * | 2012-10-03 | 2021-09-22 | Corning Incorporated | Surface-modified glass substrate |
-
2013
- 2013-12-10 US US14/101,980 patent/US20140272346A1/en not_active Abandoned
- 2013-12-10 US US14/101,957 patent/US20140272345A1/en not_active Abandoned
-
2014
- 2014-01-30 KR KR1020157024100A patent/KR20150129703A/ko not_active Withdrawn
- 2014-01-30 JP JP2016500192A patent/JP2016516133A/ja active Pending
- 2014-01-30 DE DE112014001447.8T patent/DE112014001447T5/de not_active Withdrawn
- 2014-01-30 JP JP2016500191A patent/JP2016513753A/ja active Pending
- 2014-01-30 DE DE112014001454.0T patent/DE112014001454T5/de not_active Withdrawn
- 2014-01-30 CN CN201480014889.7A patent/CN105209659A/zh active Pending
- 2014-01-30 CN CN201480015214.4A patent/CN105247096A/zh active Pending
- 2014-01-30 WO PCT/US2014/013916 patent/WO2014149193A2/en not_active Ceased
- 2014-01-30 KR KR1020157024881A patent/KR20150129732A/ko not_active Withdrawn
- 2014-01-30 WO PCT/US2014/013918 patent/WO2014149194A1/en not_active Ceased
- 2014-02-17 TW TW103105074A patent/TW201437403A/zh unknown
- 2014-02-17 TW TW103105075A patent/TW201500573A/zh unknown
-
2016
- 2016-03-30 US US15/085,075 patent/US20160215381A1/en not_active Abandoned
- 2016-06-28 US US15/195,630 patent/US20160369387A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| TW201437403A (zh) | 2014-10-01 |
| WO2014149193A3 (en) | 2015-01-15 |
| JP2016516133A (ja) | 2016-06-02 |
| US20140272345A1 (en) | 2014-09-18 |
| WO2014149193A2 (en) | 2014-09-25 |
| US20140272346A1 (en) | 2014-09-18 |
| WO2014149194A1 (en) | 2014-09-25 |
| US20160215381A1 (en) | 2016-07-28 |
| DE112014001454T5 (de) | 2015-12-03 |
| JP2016513753A (ja) | 2016-05-16 |
| KR20150129732A (ko) | 2015-11-20 |
| US20160369387A1 (en) | 2016-12-22 |
| TW201500573A (zh) | 2015-01-01 |
| CN105247096A (zh) | 2016-01-13 |
| KR20150129703A (ko) | 2015-11-20 |
| CN105209659A (zh) | 2015-12-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE112014001447T5 (de) | Verfahren zum Entwickeln von Aluminiumoxid auf Substraten unter Verwendung einer Aluminiumquelle ineiner Sauerstoffumgebung, um transparente, kratzfeste Fenster zu erzeugen | |
| DE3626876C2 (enExample) | ||
| EP0529268B1 (de) | Harte Entspiegelungsschicht für Kunststofflinsen | |
| DE69530758T2 (de) | Ionenstrahlverfahren zur herstellung hochabriebfester beschichtungen | |
| DE69633369T2 (de) | Verfahren zur Herstellung einer Dünnschicht, und eine durch das Verfahren hergestellte Dünnschicht | |
| DE2614951B2 (de) | Verfahren zur Herstellung einer Flüssigkristall-Zelle | |
| DE10139305A1 (de) | Verbundmaterial aus einem Substratmaterial und einem Barriereschichtmaterial | |
| EP1358667A1 (en) | Method of obtaining anisotropic crystalline films and devices for implementation of the method | |
| DE102013221029A1 (de) | Verfahren und Vorrichtung zur Herstellung uniformer Schichten auf bewegten Substraten und derart hergestellte Schichten | |
| EP1648034B1 (de) | Aufdampfmaterial, enthaltend Ta2Ox mit x = 4.81 bis 4.88, zur Herstellung hochbrechender Schichten | |
| DE19654554A1 (de) | Verfahren und Vorrichtung zum Herstellen eines Dünnfilms aus ultrafeinen Teilchen | |
| WO2004074200A1 (de) | Aufdampfmaterial zur herstellung hochbrechender optischer schichten | |
| JPH07252671A (ja) | 複合型光学薄膜の製造方法とその製造装置 | |
| DE4413423A1 (de) | Vorrichtung zum Aufschluß von Substanzen | |
| EP1595002B1 (de) | Aufdampfmaterial zur herstellung hochbrechender optischer schichten | |
| Atkarskaya | Structural and phase transformations and properties of thin films of the Bi2O3-Fe2O3-TiO2 system | |
| Zhang et al. | Effects of annealing time on the structure, morphology, and stress of gold–chromium bilayer film | |
| Xiao et al. | Growth and optical properties of FePt: BaTiO3 nanocomposite films | |
| Egorova et al. | On the relation between plasma power and aging treatment in the production of thin aluminum zirconium foils by magnetron sputtering: Einfluss von Plasmaleistung und Alterung auf die Fertigung dünner Aluminium‐Zirkonium‐Folien durch Magnetron‐Sputtern | |
| DE102005035673A1 (de) | Photokatalytisches Schichtsystem mit hohem Schalthub | |
| RU2562619C1 (ru) | Способ получения структурированных сплошных и островковых пленок на поверхности стекла | |
| DE102004051496A1 (de) | Verfahren und eine Vorrichtung zur Herstellung einer Topcoatschicht | |
| US20170369366A1 (en) | Scratch-resistant windows with small polycrystals | |
| DE102008010674A1 (de) | Lichtschutzbeschichtung und Verfahren zur Herstellung derselben | |
| DE102014117766A1 (de) | Substratkühlvorrichtung und Bandsubstratbehandlungsvorrichtung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R082 | Change of representative |
Representative=s name: KAMINSKI HARMANN PATENTANWAELTE AG, LI |
|
| R082 | Change of representative |
Representative=s name: KAMINSKI HARMANN PATENTANWAELTE AG, LI |
|
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |