JP2016513753A5 - - Google Patents
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- Publication number
- JP2016513753A5 JP2016513753A5 JP2016500191A JP2016500191A JP2016513753A5 JP 2016513753 A5 JP2016513753 A5 JP 2016513753A5 JP 2016500191 A JP2016500191 A JP 2016500191A JP 2016500191 A JP2016500191 A JP 2016500191A JP 2016513753 A5 JP2016513753 A5 JP 2016513753A5
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- substrate
- aluminum oxide
- atoms
- oxygen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 238000004544 sputter deposition Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims 21
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 10
- 229910052782 aluminium Inorganic materials 0.000 claims 10
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 claims 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 6
- 229910052760 oxygen Inorganic materials 0.000 claims 6
- 239000001301 oxygen Substances 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 5
- 238000010438 heat treatment Methods 0.000 claims 5
- 230000008021 deposition Effects 0.000 claims 2
- 239000011521 glass Substances 0.000 claims 2
- 238000005342 ion exchange Methods 0.000 claims 2
- 239000005368 silicate glass Substances 0.000 claims 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- YKTSYUJCYHOUJP-UHFFFAOYSA-N [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] Chemical compound [O--].[Al+3].[Al+3].[O-][Si]([O-])([O-])[O-] YKTSYUJCYHOUJP-UHFFFAOYSA-N 0.000 claims 1
- 238000005240 physical vapour deposition Methods 0.000 claims 1
- 229910052594 sapphire Inorganic materials 0.000 claims 1
- 239000010980 sapphire Substances 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 claims 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361790786P | 2013-03-15 | 2013-03-15 | |
| US61/790,786 | 2013-03-15 | ||
| US14/101,957 | 2013-12-10 | ||
| US14/101,957 US20140272345A1 (en) | 2013-03-15 | 2013-12-10 | Method of growing aluminum oxide onto substrates by use of an aluminum source in an environment containing partial pressure of oxygen to create transparent, scratch-resistant windows |
| PCT/US2014/013916 WO2014149193A2 (en) | 2013-03-15 | 2014-01-30 | Method of growing aluminum oxide onto substrates by use of an aluminum source in an environment containing partial pressure of oxygen to create transparent, scratch-resistant windows |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016513753A JP2016513753A (ja) | 2016-05-16 |
| JP2016513753A5 true JP2016513753A5 (enExample) | 2017-03-02 |
Family
ID=51528352
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016500191A Pending JP2016513753A (ja) | 2013-03-15 | 2014-01-30 | 酸素分圧を有する環境内におけるアルミニウム源の使用によって酸化アルミニウムを基板上に成長させ、透光性、耐スクラッチ性の窓部材を形成する方法。 |
| JP2016500192A Pending JP2016516133A (ja) | 2013-03-15 | 2014-01-30 | 酸素環境内でアルミニウム源を使用することによって酸化アルミニウムを基板上に成長させ、透光性・耐スクラッチ性の窓部材を形成する方法。 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016500192A Pending JP2016516133A (ja) | 2013-03-15 | 2014-01-30 | 酸素環境内でアルミニウム源を使用することによって酸化アルミニウムを基板上に成長させ、透光性・耐スクラッチ性の窓部材を形成する方法。 |
Country Status (7)
| Country | Link |
|---|---|
| US (4) | US20140272345A1 (enExample) |
| JP (2) | JP2016513753A (enExample) |
| KR (2) | KR20150129703A (enExample) |
| CN (2) | CN105247096A (enExample) |
| DE (2) | DE112014001454T5 (enExample) |
| TW (2) | TW201437403A (enExample) |
| WO (2) | WO2014149193A2 (enExample) |
Families Citing this family (28)
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| WO2008027558A2 (en) | 2006-08-31 | 2008-03-06 | Codon Devices, Inc. | Iterative nucleic acid assembly using activation of vector-encoded traits |
| US9217144B2 (en) | 2010-01-07 | 2015-12-22 | Gen9, Inc. | Assembly of high fidelity polynucleotides |
| EP2637780B1 (en) | 2010-11-12 | 2022-02-09 | Gen9, Inc. | Protein arrays and methods of using and making the same |
| AU2011338841B2 (en) | 2010-11-12 | 2017-02-16 | Gen9, Inc. | Methods and devices for nucleic acids synthesis |
| AU2012300401B2 (en) | 2011-08-26 | 2018-02-08 | Ginkgo Bioworks, Inc. | Compositions and methods for high fidelity assembly of nucleic acids |
| US9150853B2 (en) | 2012-03-21 | 2015-10-06 | Gen9, Inc. | Methods for screening proteins using DNA encoded chemical libraries as templates for enzyme catalysis |
| EP2841601B1 (en) | 2012-04-24 | 2019-03-06 | Gen9, Inc. | Methods for sorting nucleic acids and multiplexed preparative in vitro cloning |
| US20150191719A1 (en) | 2012-06-25 | 2015-07-09 | Gen9, Inc. | Methods for Nucleic Acid Assembly and High Throughput Sequencing |
| US11097974B2 (en) | 2014-07-31 | 2021-08-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US9359686B1 (en) | 2015-01-09 | 2016-06-07 | Apple Inc. | Processes to reduce interfacial enrichment of alloying elements under anodic oxide films and improve anodized appearance of heat treatable alloys |
| US20180009931A1 (en) * | 2015-01-14 | 2018-01-11 | Covestro Deutschland Ag | Composition for transparent shaped bodies based on polyurethane |
| CN105039917B (zh) * | 2015-06-05 | 2018-12-25 | 河源市璐悦自动化设备有限公司 | 一种具有蓝宝石表层的玻璃镜片及其制备方法 |
| US20170009334A1 (en) * | 2015-07-09 | 2017-01-12 | Rubicon Technology, Inc. | Hard aluminum oxide coating for various applications |
| US12338159B2 (en) | 2015-07-30 | 2025-06-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
| US9970080B2 (en) | 2015-09-24 | 2018-05-15 | Apple Inc. | Micro-alloying to mitigate the slight discoloration resulting from entrained metal in anodized aluminum surface finishes |
| JP6923555B2 (ja) | 2016-01-12 | 2021-08-18 | コーニング インコーポレイテッド | 薄厚熱強化及び化学強化ガラス系物品 |
| US10174436B2 (en) | 2016-04-06 | 2019-01-08 | Apple Inc. | Process for enhanced corrosion protection of anodized aluminum |
| CN107263939A (zh) * | 2016-04-08 | 2017-10-20 | 优尔材料工业（深圳）有限公司 | 复合体及其制备方法 |
| US11352708B2 (en) | 2016-08-10 | 2022-06-07 | Apple Inc. | Colored multilayer oxide coatings |
| US11242614B2 (en) | 2017-02-17 | 2022-02-08 | Apple Inc. | Oxide coatings for providing corrosion resistance on parts with edges and convex features |
| TWI785156B (zh) | 2017-11-30 | 2022-12-01 | 美商康寧公司 | 具有高熱膨脹係數及對於熱回火之優先破裂行為的非離子交換玻璃 |
| US11549191B2 (en) | 2018-09-10 | 2023-01-10 | Apple Inc. | Corrosion resistance for anodized parts having convex surface features |
| CN109763116B (zh) * | 2019-01-30 | 2020-11-06 | 西北工业大学 | 用于cvd设备的双轴正交旋转系统及方法 |
| KR20210154825A (ko) | 2019-04-23 | 2021-12-21 | 코닝 인코포레이티드 | 확정 응력 프로파일을 갖는 유리 라미네이트 및 그 제조방법 |
| US11697617B2 (en) | 2019-08-06 | 2023-07-11 | Corning Incorporated | Glass laminate with buried stress spikes to arrest cracks and methods of making the same |
| KR102751151B1 (ko) | 2019-12-20 | 2025-01-07 | 삼성디스플레이 주식회사 | 유리 제품 및 이를 포함하는 디스플레이 장치 |
| KR102244873B1 (ko) * | 2019-12-31 | 2021-04-27 | 주식회사 이노션테크 | 디스플레이 기판용 기능성 코팅막 및 그 제조방법 |
| KR102562270B1 (ko) | 2021-12-09 | 2023-08-01 | 삼성디스플레이 주식회사 | 유리 강도 평가 장치 및 평가 방법 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63501223A (ja) * | 1985-10-31 | 1988-05-12 | エヌ・シ−・ア−ル・コ−ポレ−シヨン | 透明基板上に耐摩傷コ−テイングを形成する方法 |
| US5350607A (en) * | 1992-10-02 | 1994-09-27 | United Technologies Corporation | Ionized cluster beam deposition of sapphire |
| JP3478561B2 (ja) * | 1993-05-26 | 2003-12-15 | キヤノン株式会社 | スパッタ成膜方法 |
| EP0633331B1 (en) * | 1993-07-02 | 2000-01-19 | Sumitomo Electric Industries, Limited | Process for preparing high crystallinity SrTiO3 oxide thin film |
| US5911856A (en) * | 1993-09-03 | 1999-06-15 | Canon Kabushiki Kaisha | Method for forming thin film |
| US5472795A (en) * | 1994-06-27 | 1995-12-05 | Board Of Regents Of The University Of The University Of Wisconsin System, On Behalf Of The University Of Wisconsin-Milwaukee | Multilayer nanolaminates containing polycrystalline zirconia |
| JP3689524B2 (ja) * | 1996-03-22 | 2005-08-31 | キヤノン株式会社 | 酸化アルミニウム膜及びその形成方法 |
| CN100420058C (zh) * | 1998-12-17 | 2008-09-17 | 剑桥显示技术有限公司 | 制作有机光发射装置的方法 |
| JP2003517111A (ja) * | 1999-12-16 | 2003-05-20 | コーロン インダストリーズ インク | 触感に優れる経編地及びその製造方法 |
| US6869644B2 (en) * | 2000-10-24 | 2005-03-22 | Ppg Industries Ohio, Inc. | Method of making coated articles and coated articles made thereby |
| US6858865B2 (en) * | 2001-02-23 | 2005-02-22 | Micron Technology, Inc. | Doped aluminum oxide dielectrics |
| DE10219812A1 (de) * | 2002-05-02 | 2003-11-13 | Univ Dresden Tech | Bauteile mit kristallinen Beschichtungen des Systems Aluminiumoxid/Siliziumoxid und Verfahren zu deren Herstellung |
| US7339139B2 (en) * | 2003-10-03 | 2008-03-04 | Darly Custom Technology, Inc. | Multi-layered radiant thermal evaporator and method of use |
| US7229669B2 (en) * | 2003-11-13 | 2007-06-12 | Honeywell International Inc. | Thin-film deposition methods and apparatuses |
| US7160578B2 (en) * | 2004-03-10 | 2007-01-09 | Pilkington North America | Method for depositing aluminum oxide coatings on flat glass |
| KR100671422B1 (ko) * | 2004-12-21 | 2007-01-19 | 재단법인 포항산업과학연구원 | 스퍼터링에 의한 알루미늄 피막 형성방법 |
| US8460522B2 (en) * | 2006-10-24 | 2013-06-11 | Ulvac, Inc. | Method of forming thin film and apparatus for forming thin film |
| CN102137822B (zh) * | 2008-07-29 | 2015-12-09 | 康宁股份有限公司 | 用于化学强化玻璃的双阶段离子交换 |
| DE102009034532A1 (de) * | 2009-07-23 | 2011-02-03 | Msg Lithoglas Ag | Verfahren zum Herstellen einer strukturierten Beschichtung auf einem Substrat, beschichtetes Substrat sowie Halbzeug mit einem beschichteten Substrat |
| KR101638765B1 (ko) * | 2011-04-29 | 2016-07-13 | 어플라이드 머티어리얼스, 인코포레이티드 | 반응성 증착 프로세스를 위한 가스 시스템 |
| JP2013028018A (ja) * | 2011-07-27 | 2013-02-07 | Daicel Corp | ガスバリアフィルム及びデバイス |
| US9127344B2 (en) * | 2011-11-08 | 2015-09-08 | Sakti3, Inc. | Thermal evaporation process for manufacture of solid state battery devices |
| US9701580B2 (en) * | 2012-02-29 | 2017-07-11 | Corning Incorporated | Aluminosilicate glasses for ion exchange |
| CN104718071B (zh) * | 2012-10-03 | 2018-09-04 | 康宁股份有限公司 | 表面改进的玻璃基材 |
-
2013
- 2013-12-10 US US14/101,957 patent/US20140272345A1/en not_active Abandoned
- 2013-12-10 US US14/101,980 patent/US20140272346A1/en not_active Abandoned
-
2014
- 2014-01-30 DE DE112014001454.0T patent/DE112014001454T5/de not_active Withdrawn
- 2014-01-30 JP JP2016500191A patent/JP2016513753A/ja active Pending
- 2014-01-30 CN CN201480015214.4A patent/CN105247096A/zh active Pending
- 2014-01-30 CN CN201480014889.7A patent/CN105209659A/zh active Pending
- 2014-01-30 WO PCT/US2014/013916 patent/WO2014149193A2/en not_active Ceased
- 2014-01-30 JP JP2016500192A patent/JP2016516133A/ja active Pending
- 2014-01-30 KR KR1020157024100A patent/KR20150129703A/ko not_active Withdrawn
- 2014-01-30 KR KR1020157024881A patent/KR20150129732A/ko not_active Withdrawn
- 2014-01-30 DE DE112014001447.8T patent/DE112014001447T5/de not_active Withdrawn
- 2014-01-30 WO PCT/US2014/013918 patent/WO2014149194A1/en not_active Ceased
- 2014-02-17 TW TW103105074A patent/TW201437403A/zh unknown
- 2014-02-17 TW TW103105075A patent/TW201500573A/zh unknown
-
2016
- 2016-03-30 US US15/085,075 patent/US20160215381A1/en not_active Abandoned
- 2016-06-28 US US15/195,630 patent/US20160369387A1/en not_active Abandoned
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