JP2010047449A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2010047449A5 JP2010047449A5 JP2008213596A JP2008213596A JP2010047449A5 JP 2010047449 A5 JP2010047449 A5 JP 2010047449A5 JP 2008213596 A JP2008213596 A JP 2008213596A JP 2008213596 A JP2008213596 A JP 2008213596A JP 2010047449 A5 JP2010047449 A5 JP 2010047449A5
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- present
- glass material
- heated
- coating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008213596A JP5053206B2 (ja) | 2008-08-22 | 2008-08-22 | 型材を用いた石英ガラス材料の成形方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008213596A JP5053206B2 (ja) | 2008-08-22 | 2008-08-22 | 型材を用いた石英ガラス材料の成形方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010047449A JP2010047449A (ja) | 2010-03-04 |
| JP2010047449A5 true JP2010047449A5 (enExample) | 2011-08-18 |
| JP5053206B2 JP5053206B2 (ja) | 2012-10-17 |
Family
ID=42064876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008213596A Active JP5053206B2 (ja) | 2008-08-22 | 2008-08-22 | 型材を用いた石英ガラス材料の成形方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5053206B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012153586A (ja) * | 2011-01-27 | 2012-08-16 | Tosoh Quartz Corp | 石英ガラス成形体の製造装置 |
| CN111108070A (zh) * | 2017-09-21 | 2020-05-05 | 恩特格里斯公司 | 用于玻璃成型模具的涂层及包括涂层的模具 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935037A (ja) * | 1982-08-20 | 1984-02-25 | Shin Etsu Chem Co Ltd | 石英ガラスの成形方法 |
| JPS62148331A (ja) * | 1985-12-20 | 1987-07-02 | Asahi Glass Co Ltd | 石英ガラス成形容器の前処理方法 |
| JP4198901B2 (ja) * | 1997-07-31 | 2008-12-17 | コバレントマテリアル株式会社 | カーボンヒータ |
| JP2004043235A (ja) * | 2002-07-11 | 2004-02-12 | Wicera Co Ltd | 軽量セラミックスの製造方法 |
| JP2004203656A (ja) * | 2002-12-25 | 2004-07-22 | Nippon Electric Glass Co Ltd | 建築用ガラス物品およびその製造方法 |
| JP4415367B2 (ja) * | 2003-04-07 | 2010-02-17 | 株式会社ニコン | 石英ガラスの成形方法 |
| JP4997953B2 (ja) * | 2006-12-15 | 2012-08-15 | 日本軽金属株式会社 | 高純度α−アルミナの製造方法 |
-
2008
- 2008-08-22 JP JP2008213596A patent/JP5053206B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2011192693A5 (ja) | 多層反射膜付基板の製造方法および反射型マスクブランクの製造方法 | |
| JP2014187376A5 (ja) | 熱ナノインプリント装置及び積層体 | |
| JP2013508254A5 (enExample) | ||
| JP2008517743A5 (enExample) | ||
| JP2015530284A5 (enExample) | ||
| JP2011205089A5 (ja) | 半導体膜の作製方法 | |
| CN119099177A (zh) | 用于片材结合的硅氧烷等离子体聚合物 | |
| JP2011507712A5 (enExample) | ||
| RU2009135805A (ru) | Способ изготовления микрофлюидных устройств | |
| JP2013016862A5 (enExample) | ||
| JP2009135465A5 (enExample) | ||
| JP2015501356A5 (enExample) | ||
| JP2009111375A5 (enExample) | ||
| WO2016173568A3 (zh) | 一种电子雾化器用曲形透明玻璃加热体及其制作方法 | |
| JP2011505973A5 (enExample) | ||
| EA200801383A1 (ru) | Получение наноразмерных материалов | |
| JP2008172266A5 (enExample) | ||
| JP2006080314A5 (enExample) | ||
| WO2009044938A3 (en) | Method of forming a ceramic silicon oxide type coating, method of producing an inorganic base material, agent for forming a ceramic silicon oxide type coating, and semiconductor device | |
| WO2014064057A3 (en) | Method for preparing a substantially clean monolayer of a two-dimensional material | |
| JP2017524045A5 (enExample) | ||
| JP2009138229A5 (enExample) | ||
| JP2011119246A5 (ja) | 発光装置の作製方法、および発光装置 | |
| WO2011016651A3 (ko) | 임프린트 리소그래피용 광경화형 수지 조성물 및 이를 이용한 임프린트 몰드의 제조 방법 | |
| JP2010024084A5 (enExample) |