JP2012517529A5 - - Google Patents

Download PDF

Info

Publication number
JP2012517529A5
JP2012517529A5 JP2011549669A JP2011549669A JP2012517529A5 JP 2012517529 A5 JP2012517529 A5 JP 2012517529A5 JP 2011549669 A JP2011549669 A JP 2011549669A JP 2011549669 A JP2011549669 A JP 2011549669A JP 2012517529 A5 JP2012517529 A5 JP 2012517529A5
Authority
JP
Japan
Prior art keywords
layer
less
energy
oxygen
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011549669A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012517529A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/GB2010/050207 external-priority patent/WO2010092383A1/en
Publication of JP2012517529A publication Critical patent/JP2012517529A/ja
Publication of JP2012517529A5 publication Critical patent/JP2012517529A5/ja
Pending legal-status Critical Current

Links

JP2011549669A 2009-02-12 2010-02-10 ポリマー基材上の２層バリヤー Pending JP2012517529A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP09152674 2009-02-12
EP09152674.9 2009-02-12
PCT/GB2010/050207 WO2010092383A1 (en) 2009-02-12 2010-02-10 Two layer barrier on polymeric substrate

Publications (2)

Publication Number Publication Date
JP2012517529A JP2012517529A (ja) 2012-08-02
JP2012517529A5 true JP2012517529A5 (enExample) 2013-03-21

Family

ID=40821829

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2011549670A Pending JP2012517530A (ja) 2009-02-12 2010-02-10 ポリマー基材上の２層バリヤー
JP2011549669A Pending JP2012517529A (ja) 2009-02-12 2010-02-10 ポリマー基材上の２層バリヤー

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2011549670A Pending JP2012517530A (ja) 2009-02-12 2010-02-10 ポリマー基材上の２層バリヤー

Country Status (4)

Country Link
US (2) US20110311734A1 (enExample)
EP (2) EP2396452A1 (enExample)
JP (2) JP2012517530A (enExample)
WO (2) WO2010092383A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009538989A (ja) * 2006-05-30 2009-11-12 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． パルス化大気圧グロー放電を使用する堆積の方法及び装置
US8338307B2 (en) 2007-02-13 2012-12-25 Fujifilm Manufacturing Europe B.V. Substrate plasma treatment using magnetic mask device
JP5597551B2 (ja) 2008-02-01 2014-10-01 フジフィルム マニュファクチュアリング ヨーロッパ ビー．ヴィ． 移動基材のプラズマ表面処理の装置、方法および当該方法の使用
ATE523067T1 (de) 2008-02-08 2011-09-15 Fujifilm Mfg Europe Bv Verfahren zur herstellung einer mehrschichtigen stapelstruktur mit verbesserter wvtr- grenzeigenschaft
US20110311734A1 (en) * 2009-02-12 2011-12-22 Fujifilm Manufacturing Europe B.V. Two Layer Barrier on Polymeric Substrate
GB201210836D0 (en) * 2012-06-19 2012-08-01 Fujifilm Mfg Europe Bv Method and device for manufacturing a barrier layer on a flexible substrate
GB201215098D0 (en) * 2012-08-24 2012-10-10 Fujifilm Mfg Europe Bv Method of treating a porous substrate and manufacture of a membrane
US9339770B2 (en) 2013-11-19 2016-05-17 Applied Membrane Technologies, Inc. Organosiloxane films for gas separations

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2704558B1 (fr) * 1993-04-29 1995-06-23 Air Liquide Procede et dispositif pour creer un depot d'oxyde de silicium sur un substrat solide en defilement.
JP3148910B2 (ja) 1993-09-01 2001-03-26 日本真空技術株式会社 プラズマｃｖｄ成膜方法
JPH1158587A (ja) * 1997-08-12 1999-03-02 Mitsui Chem Inc 酸化防止用包装フィルム
US6815014B2 (en) * 2002-02-05 2004-11-09 Dow Global Technologies Inc. Corona-generated chemical vapor deposition on a substrate
EP1351321B1 (en) 2002-04-01 2013-12-25 Konica Corporation Support and organic electroluminescence element comprising the support
US6759100B2 (en) 2002-06-10 2004-07-06 Konica Corporation Layer formation method, and substrate with a layer formed by the method
US6774569B2 (en) 2002-07-11 2004-08-10 Fuji Photo Film B.V. Apparatus for producing and sustaining a glow discharge plasma under atmospheric conditions
US7288204B2 (en) 2002-07-19 2007-10-30 Fuji Photo Film B.V. Method and arrangement for treating a substrate with an atmospheric pressure glow plasma (APG)
EP1403902A1 (en) 2002-09-30 2004-03-31 Fuji Photo Film B.V. Method and arrangement for generating an atmospheric pressure glow discharge plasma (APG)
KR101162377B1 (ko) * 2003-03-28 2012-07-09 도요 세이칸 가부시키가이샤 플라즈마 ｃｖｄ법에 의한 화학 증착막 및 그 형성 방법
JP2007505219A (ja) 2003-09-09 2007-03-08 ダウ グローバル テクノロジーズ インコーポレイティド グロー放電発生化学蒸着
ATE348497T1 (de) 2004-08-13 2007-01-15 Fuji Photo Film Bv Verfahren und vorrichtung zur steuerung eines glühentladungsplasmas unter atmosphärischem druck
RU2007115923A (ru) * 2004-09-27 2008-11-10 Дау Глобал Текнолоджиз Инк. (Us) Многослойные покрытия, полученные химическим осаждением из паров, усиленным плазмой
GB0505517D0 (en) 2005-03-17 2005-04-27 Dupont Teijin Films Us Ltd Coated polymeric substrates
JP2007190844A (ja) * 2006-01-20 2007-08-02 Konica Minolta Holdings Inc ガスバリア性樹脂基材および有機エレクトロルミネッセンスデバイス
WO2007138837A1 (ja) * 2006-05-25 2007-12-06 Konica Minolta Holdings, Inc. ガスバリア性樹脂基材の製造方法及びガスバリア性樹脂基材の製造装置
JP2009538989A (ja) 2006-05-30 2009-11-12 フジフィルム マニュファクチャリング ユーロプ ビー．ブイ． パルス化大気圧グロー放電を使用する堆積の方法及び装置
WO2008147184A2 (en) 2007-05-25 2008-12-04 Fujifilm Manufacturing Europe B.V. Atmospheric pressure glow discharge plasma method and system using heated substrate
FR2918301B1 (fr) * 2007-07-06 2011-06-24 Sidel Participations Revetement barriere depose par plasma comprenant au moins trois couches, procede d'obtention d'un tel revetement et recipient revetu d'un tel revetement
US20110311734A1 (en) * 2009-02-12 2011-12-22 Fujifilm Manufacturing Europe B.V. Two Layer Barrier on Polymeric Substrate

Similar Documents

Publication Publication Date Title
JP2012517529A5 (enExample)
JP2010537867A5 (enExample)
JP2012517530A5 (enExample)
WO2011028527A3 (en) In-situ deposition of battery active lithium materials by plasma spraying
JP2011249788A5 (ja) 半導体装置の作製方法、及び酸化物半導体層
JP2011238912A5 (ja) 半導体装置の作製方法
JP2011205089A5 (ja) 半導体膜の作製方法
JP2011507712A5 (enExample)
JP2011233545A5 (enExample)
PH12015502250A1 (en) Release film for green sheet production
JP2010050087A5 (enExample)
GB2496956B (en) Transparent conductor
JP2010045353A5 (enExample)
JP2010034523A5 (enExample)
JP2012182447A5 (ja) 半導体膜の作製方法
JP2018056119A5 (ja) 電気接点の製造方法
GB201215891D0 (en) Composite material comprising a layer of polymeric piezoelectic material matched with a textile substrate and method for making such a composite material
JP2010219515A5 (enExample)
JP2014534336A5 (enExample)
CN103781013A (zh) 一种振动膜的生产方法及其应用
JP2011119246A5 (ja) 発光装置の作製方法、および発光装置
EP2133922A3 (en) Insulating coating, methods of manufacture thereof and articles comprising the same
WO2009094176A3 (en) Layer transfer for large area inorganic foils
JP2015507560A5 (enExample)
CN103266306A (zh) 一种用pvd技术制备石墨烯或超薄碳膜的方法