JP2016508620A5 - - Google Patents

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JP2016508620A5
JP2016508620A5 JP2015555299A JP2015555299A JP2016508620A5 JP 2016508620 A5 JP2016508620 A5 JP 2016508620A5 JP 2015555299 A JP2015555299 A JP 2015555299A JP 2015555299 A JP2015555299 A JP 2015555299A JP 2016508620 A5 JP2016508620 A5 JP 2016508620A5
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laser
wavelength
frequency
harmonic
fundamental
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JP2015555299A 2013-01-24 2014-01-24 １９３ｎｍのレーザー検査システム Active JP6479683B2 (ja)

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US201361756209P 2013-01-24 2013-01-24
US61/756,209 2013-01-24
US14/158,615 US8929406B2 (en) 2013-01-24 2014-01-17 193NM laser and inspection system
US14/158,615 2014-01-17
PCT/US2014/012902 WO2014116922A1 (en) 2013-01-24 2014-01-24 193nm laser and inspection system

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JP2016508620A JP2016508620A (ja) 2016-03-22
JP2016508620A5 true JP2016508620A5 (enExample) 2017-02-23
JP6479683B2 JP6479683B2 (ja) 2019-03-06

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US (2) US8929406B2 (enExample)
EP (1) EP2949015B1 (enExample)
JP (2) JP6479683B2 (enExample)
KR (1) KR102169060B1 (enExample)
CN (1) CN105191026B (enExample)
IL (1) IL240009B (enExample)
TW (1) TWI590549B (enExample)
WO (1) WO2014116922A1 (enExample)

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