WO2001020733A1

WO2001020733A1 - Light source and wavelength stabilization control method, exposure apparatus and exposure method, method for producing exposure apparatus, and device manufacturing method and device

Info

Publication number: WO2001020733A1
Application number: PCT/JP2000/005875
Authority: WO
Inventors: Tomoko Ohtsuki; Soichi Owa; Niichi Atsumi; Masaaki Doi
Original assignee: Nikon Corporation
Priority date: 1999-09-10
Filing date: 2000-08-30
Publication date: 2001-03-22
Also published as: US20040012844A1; US7098992B2; EP1139521A4; EP1139521A1; AU6865300A

Abstract

A light source (16) comprises a light producing unit (160) having a single wavelength producing light source (160A) and a light modulator (160c) for converting light from the light source to an optical pulse and outputting the optical pulse, an optical amplifying unit (161) having a group of optical fibers each provided with a fiber amplifier for amplifying the optical pulse from the light modulator, and a light intensity control unit (16c). The light intensity control unit (16c) controls stepwise the intensity of light outputted from each optical fiber by turning on/off the output separately and controls the intensity of light such as at least either the control of frequency of the optical pulse from the light modulator or the peak power thereof. Therefore it is possible to adjust minutely the intensity of light at each stage, in addition to the stepwise control of intensity of light, by controlling at least either the frequency of the optical pulse or the peak power thereof, thereby enabling the intensity of light to be controlled to any preset intensity if the intensity of light is in a predetermined range.

Description

Specification

TECHNICAL FIELD The present invention relates to a light source device and a wavelength stabilization control method, an exposure apparatus and an exposure method, a manufacturing method and an exposure apparatus, and a device manufacturing method and a device.

The present invention relates to a light source device and a wavelength stabilization control method, an exposure device and an exposure method, a manufacturing method of an exposure device, a device manufacturing method and a device, and more particularly, when manufacturing a semiconductor device, a liquid crystal display device, and the like. A light source device suitable as an exposure light source for an exposure device used in a lithography process, a wavelength stabilization control method that can be suitably applied to the light source device, an exposure device including the light source device as an exposure light source, The present invention relates to an exposure method using an exposure apparatus, a method for manufacturing the exposure apparatus, a method for manufacturing a device using the exposure apparatus or the exposure method, and a device manufactured by the device manufacturing method. Background art

Conventionally, various exposure apparatuses have been used in the lithography process for manufacturing semiconductor devices (integrated circuits), liquid crystal display devices, and the like. In recent years, as this type of exposure apparatus, a fine circuit pattern formed on a mask or a reticle is projected onto a substrate such as a wafer or a glass plate having a surface coated with a photoresist. A reduction projection exposure apparatus such as a so-called stepper or a so-called scanning stepper, which performs reduction projection and transfer via an optical system, has become mainstream because of its high throughput.

However, an exposure apparatus such as a projection exposure apparatus requires a high throughput and a high resolution. The resolving power R and depth of focus DOF of the projection exposure apparatus are expressed by the following equations (1) and (2) using the wavelength λ of the exposure illumination light and the numerical aperture of the projection optical system Ν. Respectively represented by

R = K-λ / Ν. A. …… (1)

DOF = A / (N. A.) 2 …… (2)

As is clear from the above equation (1), in order to reduce the resolution R, that is, the minimum pattern line width that can be resolved, 1) decrease the proportionality constant K, 2) increase NA, and 3) illuminating light for exposure. There are three ways to reduce the wavelength λ of. Here, the proportionality constant Κ is a constant determined by the projection optical system and the process, and usually takes a value of about 0.5 to 0.8. This method of reducing the constant Κ is called super-resolution in a broad sense. Until now, improvements and improvements in projection optics, modified illumination, and phase shift reticles have been proposed and studied. However, there were drawbacks, such as limitations on applicable patterns.

On the other hand, for the numerical aperture Ν., From equation (1), the larger the value is, the smaller the resolution R can be. However, this also means that the depth of focus DO F becomes shallower as is clear from equation (2). means. For this reason, there is a limit to increasing the value of N. Usually, about 0.5 to 0.6 is considered appropriate.

Therefore, the simplest and most effective way to reduce the resolution R is to reduce the wavelength λ of the exposure illumination light.

For this reason, g-line and x-ray steppers, which use an ultra-high pressure mercury lamp that emits ultraviolet bright lines (g-line, i-line, etc.) as a light source for exposure, have been mainly used as steppers. In recent years, a KrF excimer laser / stepper using a KrF excimer laser as a light source that outputs a shorter wavelength KrF excimer laser light (wavelength: 248 nm) is becoming mainstream. At present, the development of exposure equipment that uses an ArF excimer laser (wavelength 193 nm) as a shorter wavelength light source is underway.

However, excimer lasers are large, have high energy per pulse, and are liable to damage optical components, and emit toxic fluorine gas. There are disadvantages as a light source of an exposure device, such as complicated laser maintenance and high cost for use.

Therefore, using the nonlinear optical effect of the nonlinear optical crystal, long-wavelength light (infrared light and visible light) is converted to shorter-wavelength ultraviolet light, and the resulting ultraviolet light is used as exposure light. The way to do it is attracting attention. As a light source for exposure employing such a method, for example, a light from a laser light generating section provided with a semiconductor laser, as disclosed in Japanese Patent Application Laid-Open No. 8-334483, is used. An array laser, which combines a single laser element that generates wavelengths by converting the wavelength with a nonlinear optical crystal provided in the Which is known.

In this array laser, by bundling a plurality of independent laser elements, the optical output of the entire apparatus can be increased while the optical output of each laser element is kept low. However, since the individual laser elements are independent, it is necessary to make fine adjustments and to adopt a very complicated configuration in order to match the oscillation spectrum of each laser element. Met.

Therefore, a method is conceivable in which one laser oscillation source is used, the laser light emitted from this laser oscillation source is branched, and each branched light is amplified and then wavelength-converted by a common nonlinear optical crystal. When this method is adopted, it is convenient to use an optical fiber to route the laser light, and a configuration is used in which a plurality of light beams emitted from a plurality of bundled optical fibers are incident on the nonlinear optical crystal. Optimum from the viewpoint of simplicity of structure, miniaturization of output beam diameter, and maintainability.

Also, in order to use the nonlinear optical crystal to efficiently generate second harmonics and the like by the nonlinear optical effect, it is necessary to convert the linearly polarized light in a specific direction according to the crystal direction of the nonlinear optical crystal to the nonlinear optical crystal. It is necessary to make the incident light. However, it is generally difficult to align the directions of linearly polarized light emitted from a plurality of optical fibers. This is the case when a polarization maintaining fiber is used and linearly polarized light is guided. Also, since the optical fiber has a substantially circular cross-sectional shape, the direction of linearly polarized light cannot be specified from the external shape of the optical fiber.

Also, as is well known, when excimer laser light in the short wavelength region as described above is used, the material that can be used for the lens of the projection optical system is currently synthetic quartz, fluorite, Alternatively, it is limited to materials such as fluoride crystals such as lithium fluoride.

However, when such a lens made of quartz or fluorite is used for the projection optical system, it is practically difficult to correct the chromatic aberration. Therefore, in order to prevent the deterioration of the imaging performance due to the occurrence of the chromatic aberration, the excimer laser beam is used. Therefore, it is necessary to narrow the oscillation spectrum width, that is, to narrow the bandwidth of the wavelength. The narrowing of the wavelength can be achieved, for example, by using a narrowing module (for example, a combination of a prism and a grating (diffraction grating) or an optical element such as an etalon) provided in a laser resonator. The so-called wavelength is used to keep the spectral width of the wavelength of the excimer laser light supplied to the projection optical system during exposure to a predetermined wavelength width, and to maintain the center wavelength at the predetermined wavelength at the same time. Stabilization control is required.

In order to realize the above-mentioned control of wavelength stabilization, it is necessary to monitor the optical characteristics of the excimer laser light (center wavelength, spectral half width, etc.). The wavelength monitor section of an excimer laser device is generally configured around a Fabry-Perot etalon (hereinafter, also referred to as an “etalon element”), which is a Fabry-Perot spectrometer.

In addition, the pattern line width is becoming increasingly finer as semiconductor devices become more highly integrated. It has become. The overlay accuracy depends on how to suppress aberrations such as distortion components of the projection optical system. For this reason, the exposure apparatus has been required to have stability in the center wavelength of the illumination light for exposure and an increasingly narrower band. Among them, as a method to cope with the narrow band, It is conceivable to adopt a single-wavelength light source as the light source itself.

On the other hand, since the projection optical system is adjusted only to the predetermined exposure wavelength, if the center wavelength cannot be stably maintained, chromatic aberration of the projection optical system will result, Maintaining the stability of the center wavelength is indispensable because the imaging characteristics such as distortion and focus fluctuate.

However, the influence of the temperature and atmospheric pressure fluctuations in the atmosphere of the ethanol cannot be ignored since the element of the atmosphere is affected by the temperature and pressure of the atmosphere in the atmosphere. In addition, device rules (practical minimum line width) will surely become even finer in the future, and next-generation lithography equipment will require even higher overlay accuracy. The overlay accuracy depends on, for example, how to suppress distortion components. Also, in order to increase the depth of focus, it is necessary to increase U D OF (usable D OF) and stabilize the focus. In each case, high stability of the central wavelength and controllability of the spectrum half width are required.

In addition, an exposure apparatus is required to realize an exposure amount control performance adapted to a difference in a resist sensitivity or the like for each wafer, and a wide dynamic range, typically about 1 to 1/7 is required. In a conventional exposure apparatus using an excimer laser as a light source, an energy rough adjuster such as an ND filter is used for controlling the exposure amount according to the above-described difference in resist sensitivity or the like for each wafer.

However, in the case of using such a method, an ND filter whose transmittance is calibrated is required, and the durability of the ND filter and the change with time of the transmittance also become problems. Furthermore, even when only the maximum light exposure of 1Z7 is required, the excimer laser operates at the maximum output intensity, and the output light 6Z7 is not used for exposure and is wasted. There were also disadvantages in terms of optical component consumption and power consumption.

The current exposure apparatus has a light amount control performance (hereinafter, appropriately referred to as a “first exposure amount control performance”) according to the above-described differences in the resist sensitivity for each wafer, as well as a shot area within the same wafer. (Exposure amount system) to correct process variation for each (chip) Control performance (hereinafter referred to as “second exposure control performance” as appropriate). Further, in the case of the scanning step, an exposure amount control performance (hereinafter, appropriately referred to as “third exposure amount control performance”) for realizing line width uniformity in the shot area is further required.

In the current exposure system, the dynamic range is controlled to the set value within about ± 10% of the set exposure amount and the shot-to-shot stepping time of about 100 ms as the second exposure amount control performance described above. The required control accuracy is about 1% of the set exposure.

As the third exposure amount control performance, the control accuracy is typically set to ± 0.2% of the set exposure amount within a time period of 20 msec, which is an exposure time of 1 shot. A control speed of about 1 ms is required.

Therefore, in order to realize the above-described first to third exposure amount control performances, a light source device capable of performing control according to a request required for control is expected as a light source of an exposure device. I have. Here, the requirements required for control include (a) dynamic range of control, (b) control accuracy, (c) control speed, (d) degree of linearity between detected light intensity and control amount, and (e) This is an energy save function for power saving. The present invention has been made under such circumstances, and a first object of the present invention is to provide a light source device that can perform light amount control according to a request necessary for the above control.

A second object of the present invention is to provide a light source device that can reliably maintain the center wavelength of laser light at a predetermined set wavelength.

A third object of the present invention is to provide a light source device capable of generating predetermined light while controlling the polarization state with a simple configuration.

A fourth object of the present invention is to provide a wavelength stabilization control method that can reliably maintain the center wavelength of laser light at a predetermined set wavelength.

The fifth object of the present invention is to easily realize required exposure amount control. An exposure apparatus is provided.

A sixth object of the present invention is to provide an exposure apparatus that can perform high-precision exposure without being affected by a change in the temperature of the atmosphere.

A seventh object of the present invention is to provide an exposure apparatus capable of performing exposure with high accuracy regardless of a change in sensitivity characteristics of a photosensitive agent.

An eighth object of the present invention is to provide an exposure apparatus capable of efficiently transferring a predetermined pattern onto a substrate.

A ninth object of the present invention is to provide an exposure method capable of easily achieving required exposure amount control.

A tenth object of the present invention is to provide an exposure method capable of performing high-precision exposure without being affected by temperature fluctuations of the atmosphere.

A first object of the present invention is to provide a device manufacturing method capable of improving the productivity of a highly integrated microdevice. Disclosure of the invention

According to a first aspect of the present invention, there is provided a light source device for generating light of a single wavelength, comprising: a light generating unit for generating light of a single wavelength; and a light source unit arranged in parallel at an output stage of the light generating unit. A fiber group consisting of a plurality of optical fibers; and a light amount control device for controlling the light amount of light output from the fiber group by individually turning on and off the light output from each of the optical fibers. 1 is a light source device.

According to this, light of a single wavelength generated by the light generation unit travels toward each of a plurality of optical fibers constituting a group of fibers arranged in parallel at its output stage. By individually turning on and off the optical output from the optical fiber, the amount of light output from the group of optical fibers is controlled. As described above, according to the present invention, it is possible to realize the light amount control of the light output from the fiber group by a simple method of individually turning on and off the optical output of each optical fiber constituting the fiber group. At the same time, a plurality of levels of light quantity control in proportion to the number of optical fibers can be performed, so that a wide dynamic range can be easily realized. In this case, the performances (including the fiber diameter etc.) of each optical fiber may be different, but if the performances of each optical fiber are almost the same, the same amount of light from each of the optical fibers As a result of being able to output light, N-level light quantity control according to the number N of optical fibers can be executed accurately and reliably. Therefore, for example, if N≥100, the light amount can be controlled with an accuracy of 1% or less. In this case, the degree of linearity between the control amount and the light amount is good. Of course, in this case, since an energy coarse adjuster such as an ND filter is not required, various problems such as deterioration of the light quantity control performance due to durability of the filter, a change with time in transmittance, and the like can be improved.

In this case, the plurality of optical fibers constituting the fiber group may be bundled at least at their output ends to form a bundle-fiber. In general, the diameter of an optical fiber is small, so that even if 100 or more fibers are bundled, the diameter can be kept within several mm, and some optical element, for example, a quarter When arranging an optical element such as a nonlinear optical crystal constituting a wave plate or a wavelength converter, a small optical element can be arranged.

In the first light source device of the present invention, the method of turning on / off the light output from each optical fiber includes, for example, a mechanical or electrical shirt that blocks incident light to each optical fiber, or There are various possibilities, such as providing a mechanical or electrical shutter that blocks the emission of light.For example, a fiber that can perform optical amplification is provided in a part of each optical path that includes the optical fiber. In the case where at least one amplifier is provided, the light quantity control device controls the on / off of the optical output from each of the optical fibers by changing the intensity of the excitation light from the excitation light source of the fiber amplifier. The switching may be performed.

Here, “at least one stage of fiber amplifier capable of performing optical amplification is provided in a part of each optical path including each optical fiber” means that each optical path When the optical path has an optical amplifier provided at the input stage separately from the optical fiber, this includes any case where a part of the optical fiber constituting each optical path is a fiber amplifier.

In such a case, the light incident on the optical path including each optical fiber can be amplified by the fiber amplifier, and the pumping light for the optical amplifier provided in the optical path including the optical fiber whose optical output is turned off is turned off. Since the intensity level is set low (including zero), energy saving is possible. Further, since the light output is turned on and off by switching the intensity of the pump light from the pump light source of the fiber amplifier, the light output can be turned on and off in a shorter time than when a shutter or the like is used. In the first light source device of the present invention, when the on / off of the optical output from each optical fiber is performed by switching the intensity of the excitation light from the excitation light source of the fiber amplifier, the intensity level of the excitation light is switched. May be performed between two non-fixed levels within a predetermined range, but the light amount control device may selectively set the intensity of the excitation light from the excitation light source to a predetermined level or a zero level. The intensity of the excitation light may be switched by setting to. In such a case, the light quantity control device may set the intensity of the excitation light to one of a predetermined level and a zero level by turning on and off the excitation light source. In the first light source device of the present invention, when the on / off of the optical output from each optical fiber is performed by switching the intensity of the excitation light from the excitation light source of the fiber amplifier, the light amount control device includes: By setting the intensity of the excitation light from the excitation light source to one of a predetermined first level and a second level smaller than the first level, the intensity of the excitation light is switched. Is also good. That is, in a fiber amplifier, if the intensity of the pump light is not more than zero, if the intensity is not more than a predetermined value, light absorption occurs, and the intensity of the light emitted from the fiber amplifier becomes almost zero. By selectively setting the intensity of the optical fiber to one of a predetermined first level and a second level smaller than the first level, the optical output from the optical fiber Can be turned on / off. Also in this case, the first level and the second level may be two non-fixed levels within a predetermined range.

In the first light source device of the present invention, when a plurality of stages of the fiber amplifiers are provided in each of the optical paths, the light amount control device turns on / off the light output from each of the optical fibers in a final stage. This may be performed by switching the intensity of the excitation light from the excitation light source of the fiber amplifier. In such a case, avoid the adverse effect of ASE (Amplified Spontaneous Emission), which is a problem when switching the intensity of the pump light from the pump light source of the fiber amplifier other than the last stage. In addition to the above, the later fiber requires higher pumping light intensity, so that the power saving effect of the pumping light source when the light output from the optical fiber is turned off is further increased.

In this case, it is desirable that the fiber amplifier of the last stage has a larger mode field diameter than the fiber amplifiers of the other stages. In such a case, an increase in the spectrum width of the amplified light due to the non-linear effect in the optical fiber can be avoided.

The first light source device of the present invention further includes a storage device in which an output intensity map corresponding to the on / off status of the optical output from each of the optical fibers is stored in advance, and the light intensity control device includes: The light output from each of the optical fibers may be individually turned on / off based on a map and a predetermined set light amount. In such a case, even if there is a variation in the output of each optical fiber, the optical output of the fiber group can be made substantially equal to the set light amount, and optical fibers having various performances can be used.

In this case, it is preferable that the output intensity map is created based on the dispersion of each fiber output measured in advance. In such a case, since the output intensity map is created based on the dispersion of each fiber output actually measured in advance, the light output of the fiber group can be surely matched with the set light amount. You.

In the first light source device of the present invention, when further including a wavelength conversion unit that converts a wavelength of the light output from each of the optical fibers, the output intensity map is obtained by measuring the fiber output measured in advance. It is desirable that the power supply should be created in further consideration of the output variation caused by the wavelength conversion efficiency variation corresponding to the above. In such a case, even if the wavelength conversion efficiency with respect to the optical output from each optical fiber varies, the amount of output light can be controlled to the set amount.

In this case, the light generation unit generates a single-wavelength laser light within a range from an infrared region to a visible region, and the wavelength conversion unit outputs ultraviolet light that is a harmonic of the laser light. It is good. For example, the light generation unit generates a single-wavelength laser light having a wavelength of about 0.5 m, and the wavelength conversion unit generates an eighth harmonic and a 1st harmonic of the laser light having a wavelength of about 1.5 / m. Either of the 0th harmonic can be generated.

The first light source device of the present invention may further include a wavelength converter for converting a wavelength of the light output from each of the optical fibers. In such a case, the output of the wavelength converter is proportional to the number of fibers whose optical output is on. For this reason, for example, when the performances of the respective optical fibers are substantially the same, the same amount of light can be output from each of the optical fibers. As a result, the amount of light can be controlled with good linearity.

In this case, the light generation unit generates a single-wavelength laser light within a range from an infrared region to a visible region, and the wavelength conversion unit outputs ultraviolet light that is a harmonic of the laser light. It is good. For example, the light generating section generates a single-wavelength laser light having a wavelength of about 1.5 tm, and the wavelength converting section generates an eighth harmonic of the laser light having a wavelength of about 1.5 m and 10 times higher. Any of the harmonics can be generated.

In the light source device according to the first aspect of the present invention, the light generating unit generates light having a single wavelength. A light source, and a light modulator that converts the light from the light source into a pulsed light having a predetermined frequency and outputs the pulsed light. At least one of the peak powers may be further controlled. In such a case, in addition to the stepwise light amount control by individually turning on and off the light output of each fiber constituting the optical fiber group, fine adjustment of the light amount between each step is performed by the pulse light output from the optical modulator. Control is possible by controlling at least one of the frequency and the peak power, and consequently the light amount can be continuously controlled.If the set exposure amount is set to any value within the predetermined range, the output light amount can be reduced. It is possible to match the set light quantity.

The first light source device of the present invention may further include a delay unit that individually delays the optical output from each of the plurality of optical fibers and shifts the optical output in time. In such a case, the lights output from the optical fibers do not overlap with each other in time, so that spatial coherency can be reduced as a result.

In the first light source device of the present invention, when the light generation unit has a laser light source that oscillates laser light, the light generation unit relates to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined set wavelength. A beam monitor mechanism for monitoring the optical characteristics of the laser light, and a wavelength calibration control device for performing wavelength calibration based on the temperature dependence data of the detection reference wavelength of the beam monitor mechanism. Can be provided. In such a case, the wavelength calibration controller performs the wavelength calibration based on the data on the temperature dependence of the detection reference wavelength of the beam monitor mechanism, so that the detection reference wavelength of the beam monitor mechanism is set to the set wavelength. It is possible to set the center wavelength of the laser light to a predetermined wavelength using the beam monitor mechanism without being affected by fluctuations in the temperature of the atmosphere of the beam monitor mechanism. Wavelength stabilization control that can be reliably maintained. Therefore, more accurate light quantity control becomes possible. In this case, a polarization adjusting device for aligning the polarization states of a plurality of light beams having the same wavelength through the plurality of optical fibers; and a plurality of linearly polarized lights having the same polarization direction for all the light beams through the plurality of optical fibers. A polarization direction conversion device for converting the light into a light flux.

In this case, when at least one stage of fiber amplifier capable of performing optical amplification is provided in a part of each optical path including the optical fiber, the fiber amplifier is a rare earth element. An optical fiber mainly composed of either a phosphate glass to which an element is added or a bismuth oxide-based glass can be provided as an optical waveguide member.

According to a second aspect of the present invention, there is provided a light source device for generating light of a single wavelength, a light source for generating light of a single wavelength, and converting light from the light source into pulse light of a predetermined frequency. An optical modulator having an optical modulator for outputting the optical signal; an optical amplifier including at least one fiber amplifier for amplifying the pulse light generated by the optical generator; and an optical amplifier output from the optical modulator. A light amount control device that controls the light amount of the output light from the fiber amplifier by controlling the frequency of the pulse light.

According to this, in the light generator, light of a single wavelength is generated from the light source, and the light is converted into pulse light of a predetermined frequency by the optical modulator and output. The pulse light is amplified by the optical amplifier and output as a pulse light having a higher peak power. However, if the peak power of the pulsed light is almost constant, the light amount per unit time (integrated light amount) increases or decreases according to the frequency. By controlling the frequency of the light, the light intensity of the output light from the fiber amplifier can be made to match the set light intensity (target light intensity). In the light amount adjustment by controlling the frequency (the number of pulses per unit time) of the pulse light according to the present invention, it is possible to perform the light amount adjustment at higher speed and more finely as compared with the invention according to claim 1 described above. Tori, set light intensity The light quantity can be made to substantially match no matter what value is set within the fixed range. Also, the linearity between the light output and the control amount is equal to or greater than that of the first light source device.

In this case, when the storage device further includes a storage device that stores an output intensity map of the optical amplification unit according to a frequency of the pulse light input to the optical amplification unit, the light intensity control device includes: The frequency of the pulse light output from the optical modulator may be controlled based on a predetermined light amount. Although the intensity of the input light of the optical amplifier changes according to the frequency of the pulse light from the optical modulator, the gain of the fiber amplifier constituting the optical amplifier has input light intensity dependence. In addition, high-precision light quantity control can be performed without being affected by a change in the peak power of the output pulse from the optical amplifier due to the input light intensity dependency. In the second light source device of the present invention, the light amount control device may further control the peak power of the pulse light output from the optical modulator. In such a case, even if the peak power of the pulsed light fluctuates, accurate light amount control can be performed.

In the second light source device of the present invention, when the optical modulator is an electro-optic modulator, the light amount control device controls the frequency of a voltage pulse applied to the optical modulator, thereby controlling the pulse. The frequency of light may be controlled. The frequency of the output pulse light of the electro-optical modulator matches the frequency of the voltage pulse applied to the optical modulator.

In the second light source device of the present invention, a plurality of the optical amplifiers may be provided in parallel, and an optical output end of each of the optical amplifiers may be configured by an optical fiber. In this case, the plurality of optical fibers constituting the plurality of optical amplifiers may be bundled to form a bundle-fiber. In general, the diameter of an optical fiber is small, so that even if 100 or more fibers are bundled, the diameter can be kept within about several mm, and some kind of optical element is arranged in the output stage of one fiber of the bundle. In this case, a small optical element can be arranged.

The second light source device of the present invention may further include a wavelength converter for converting a wavelength of light output from the optical amplifier. In such a case, the light amount of the output light from the wavelength conversion unit becomes a value corresponding to the output intensity (light amount) of the pulse light from the optical amplifying unit and eventually from the optical modulator. However, the value is not necessarily proportional to the input intensity (light intensity) of the pulsed light. The peak intensity of the output pulse of the optical amplifier is at most a power of the order of the harmonic output from the wavelength converter. It shows a proportional non-linear dependence. On the other hand, when the optical modulator is an electro-optical modulator, the dependence of the pulse peak intensity of the output light on the pulse peak intensity of the voltage pulse applied to the electro-optical modulator is cos (V). Therefore, the above-described nonlinear dependence of the wavelength conversion unit is reduced. Therefore, when a wavelength converter is provided, it is preferable that the optical modulator is an electro-optical modulator.

According to a third aspect of the present invention, there is provided a light source device for generating light of a single wavelength, a light source for generating light of a single wavelength, and converting light from the light source into pulse light of a predetermined frequency. An optical modulator having an optical modulator for outputting the optical signal; an optical amplifier including at least one fiber amplifier for amplifying the pulse light generated by the optical generator; and an optical amplifier output from the optical modulator. A light amount control device that controls the light amount of the output light from the optical amplifier by controlling the peak power of the pulse light.

According to this, in the light generation section, light of a single wavelength is generated from the light source, and the light is emitted. Is converted into pulsed light of a predetermined frequency by the optical modulator and output. The pulse light is amplified by the optical amplifier and output as a pulse light having a higher peak power. The amount of light (integrated light) per unit time of the pulse light output from the optical amplifier naturally increases or decreases according to the peak power of the pulse light from the optical modulator. Therefore, the light amount control device is output from the optical modulator. By controlling the peak power of the pulsed light, the light quantity of the output light from the fiber amplifier can be made to match the set light quantity (target light quantity). In the light amount adjustment by the peak power control of the pulse light according to the present invention, the light amount can be adjusted more quickly and more finely than in the first light source device described above, and the set light amount is within a predetermined range. If there is any value, the light quantity can be made to substantially match.

In this case, in the case where the apparatus further includes a storage device storing an output intensity map of the optical amplification unit according to the intensity of the pulsed light input to the optical amplification unit, the light intensity control device includes the output intensity map. The peak power of the pulse light output from the optical modulator may be controlled based on the predetermined light amount. In such a case, high-precision light quantity control is performed without being affected by the change in the peak power of the output pulse from the optical amplifier due to the input light intensity dependence of the gain of the fiber amplifier constituting the optical amplifier. It becomes possible.

In the third light source device of the present invention, the optical modulator is an electro-optic modulator, and the light amount control device controls the peak level of a voltage pulse applied to the optical modulator, thereby controlling the pulse level. The peak power of light may be controlled. The pulse peak intensity of the output light from the electro-optic modulator depends on the pulse peak intensity of the voltage pulse applied to the electro-optic modulator.

In the third light source device of the present invention, a plurality of the optical amplifiers may be provided in parallel, and an optical output end of each of the optical amplifiers may be constituted by an optical fiber. In this case, the plurality of optical fibers constituting each of the plurality of optical amplifiers may be bundled to form a bundle of fibers. Usually, the optical fiber Since the diameter of the fiber is small, it can be kept within a few millimeters even if 100 or more fibers are bundled. Elements can be arranged.

In the third light source device of the present invention, the plurality of optical amplifiers are provided in parallel, and the optical output terminals of the respective optical amplifiers are each configured by an optical fiber. A delay unit may be further provided for individually delaying the optical output from each of the above, and performing the optical output in a time-shifted manner. In such a case, the lights output from the respective optical fibers do not overlap in time, and as a result, the spatial coherency can be reduced.

The third light source device of the present invention may further include a wavelength conversion unit that converts a wavelength of light output from the optical amplification unit. In such a case, the light quantity of the output light from the wavelength conversion unit is determined by the output of the optical amplification unit, and thus the input intensity of the pulse light from the optical modulator

(Light amount). However, the value is not necessarily proportional to the input intensity (light intensity) of the pulsed light. The peak intensity of the output pulse of the optical amplifier is at most a power of the order of the harmonic output from the wavelength converter. It shows a proportional non-linear dependence. On the other hand, when the optical modulator is an electro-optical modulator, the dependence of the pulse peak intensity of the output light on the pulse peak intensity of the voltage pulse applied to the electro-optical modulator is cos (V). Therefore, the above-described nonlinear dependence of the wavelength conversion unit is reduced. Therefore, when a wavelength converter is provided, it is preferable that the optical modulator is an electro-optical modulator.

In this case, the light generation unit generates a laser beam of a single wavelength within a range from an infrared region to a visible region, and the wavelength conversion unit outputs ultraviolet light that is a harmonic of the laser beam. It is good. For example, the light generation unit generates a single-wavelength laser light having a wavelength of around 1.5 / _t m, and the wavelength conversion unit generates an 8th harmonic of the laser light having a wavelength of around 1.5 m and Either of the tenth harmonic can be generated. In the second and third light source devices of the present invention, when the light generation unit has a laser light source that oscillates laser light as the light source, the center wavelength of the laser light is maintained at a predetermined set wavelength. Beam monitoring mechanism for monitoring the optical characteristics of the laser light related to wavelength stabilization for performing wavelength calibration; and wavelength calibration for performing wavelength calibration based on data on the temperature dependence of the detection reference wavelength of the beam monitoring mechanism. And a control device. In such a case, since the wavelength calibration is performed by the wavelength calibration control device based on the temperature dependence data of the detection reference wavelength of the beam monitor mechanism, the detection reference wavelength of the beam monitor mechanism is set to the set wavelength. It is possible to accurately set the center wavelength of the laser beam to a predetermined set wavelength using the beam monitor mechanism without being affected even if the temperature or the like of the atmosphere of the beam monitor mechanism fluctuates. Wavelength stabilization control that can be maintained becomes possible.

In this case, when the plurality of optical amplifying units are provided in parallel, the polarization for aligning the polarization states of a plurality of light beams of the same wavelength through the plurality of optical fibers constituting the plurality of optical amplifying units. The apparatus may further include an adjustment device; and a polarization direction conversion device that converts all light beams passing through the plurality of optical fibers into a plurality of linearly polarized light beams having the same polarization direction.

In this case, the fiber amplifier may include, as an optical waveguide member, an optical fiber mainly composed of either a phosphate glass to which a rare earth element is added or a bismuth oxide-based glass.

According to a fourth aspect of the present invention, there is provided a laser light source that oscillates laser light; and monitors an optical characteristic of the laser light related to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined set wavelength. A fourth light source device, comprising: a beam monitor mechanism for performing a wavelength calibration based on data on the temperature dependence of a detection reference wavelength of the beam monitor mechanism.

According to this, the first control device sets the detection reference wavelength of the beam monitor mechanism. Wavelength calibration is performed based on the temperature dependence data. For this reason, the detection reference wavelength of the beam monitor mechanism can be accurately set to the set wavelength, so that even if the temperature or the like of the atmosphere of the beam monitor mechanism fluctuates, the beam monitor mechanism is not affected. The wavelength stabilization control that ensures that the center wavelength of the laser light is maintained at a predetermined set wavelength can be performed by using.

In this case, if the apparatus further comprises an absolute wavelength providing source that provides an absolute wavelength close to the set wavelength, the first control device may determine the absolute wavelength provided from the absolute wavelength providing source. Absolute wavelength calibration is performed so that the detection reference wavelength of the beam monitor mechanism substantially matches, and a setting wavelength calibration that matches the detection reference wavelength with the setting wavelength is performed based on the temperature dependency data. Can be. In such a case, the first control device performs absolute wavelength calibration for making the detection reference wavelength of the beam monitor mechanism substantially coincide with the absolute wavelength provided from the absolute wavelength providing source. Based on the temperature dependency data, a set wavelength calibration for matching the detection reference wavelength to the set wavelength is performed. That is, using the known temperature dependence data of the detection reference wavelength of the beam monitor mechanism, the set wavelength calibration is performed to match the detection reference wavelength of the beam monitor mechanism after the absolute wavelength calibration to the set wavelength. . For this reason, the detection reference wavelength of the beam monitor mechanism can always be accurately set to the set wavelength, and therefore, even if the temperature of the atmosphere of the beam monitor mechanism fluctuates, it is affected by the fluctuation. Instead, it is possible to perform wavelength stabilization control by using a beam monitor mechanism to reliably maintain the center wavelength of the laser beam at a predetermined set wavelength.

In the present specification, “absolute wavelength close to the set wavelength” is a concept that includes the same wavelength as the set wavelength.

In this case, the beam monitoring mechanism includes a Fabry-Perot etalon, and the temperature-dependent data includes a resonance wavelength of the Fabry-Perot etalon. When the first control device includes data based on the measurement result of the temperature dependence of the absolute value of the detection reference wavelength, The wavelength calibration and the set wavelength calibration may be performed. In such a case, it is possible to set the detection reference wavelength to the set wavelength by using the temperature dependence of the resonance wavelength, which is the reference for the wavelength detection of Fabry-Perot etalon.

In the fourth exposure apparatus of the present invention, the temperature dependency data further includes temperature dependency data of a center wavelength of the laser light oscillated from the laser light source, and the first control device includes: When performing the absolute wavelength calibration, the wavelength control of the laser light source may be performed together. In such a case, the above-described absolute wavelength calibration can be completed in a shorter time than when the wavelength control of the laser beam is not performed. However, it is not always necessary to control the wavelength of laser light when performing absolute wavelength calibration.

The fourth light source device of the present invention may further include a fiber amplifier for amplifying the laser light from the laser light source. In such a case, the laser light from the laser light source can be amplified by the fiber amplifier. Therefore, even when the required light amount is large, a small laser light source such as a DFB semiconductor laser or a fiber laser can be used. It is possible to use a solid-state laser such as that described above, and it is possible to reduce the size and weight of the device.

In a fourth light source device of the present invention, when a fiber amplifier for amplifying laser light from a laser light source is provided, a wavelength converter including a non-linear optical crystal for converting the wavelength of the amplified laser light May be further provided. In such a case, the wavelength conversion of the laser light amplified by the wavelength converter becomes possible. For example, by converting the wavelength of the laser light by the wavelength converter to generate a harmonic, a short-wavelength high energy It is possible to obtain a small light source device that outputs a beam. In the fourth light source device of the present invention, the absolute wavelength providing source receives the laser light. The first control device, when performing the absolute wavelength calibration, maximizes absorption of an absorption line closest to the set wavelength of the absorption cell, and the Fabry-Perot etalon The maximum transmittance may be set to be maximum.

Here, “the absorption line closest to the set wavelength” includes “the absorption line having the same wavelength as the set wavelength”.

In the fourth light source device of the present invention, after the completion of the setting wavelength calibration, the wavelength of the laser light from the laser light source is determined based on a monitoring result of the beam monitoring mechanism after the completion of the setting wavelength calibration. And a second control device that performs feedback control of the control. In such a case, the wavelength of the laser beam from the laser light source is controlled by the second control device based on the monitoring result of the beam monitor mechanism in which the detection reference wavelength is accurately set to the set wavelength. However, the wavelength of the laser beam can be stably maintained at the set wavelength.

In a fourth light source device according to the present invention, a plurality of optical amplifiers each including a fiber amplifier and arranged in parallel at an output stage of the laser light source; and the plurality of optical amplifiers respectively configuring the plurality of optical amplifiers. A polarization adjusting device for aligning the polarization states of a plurality of light beams of the same wavelength through a fiber; and a polarization direction conversion device for converting all the light beams through the plurality of optical fibers into a plurality of linearly polarized light beams having the same polarization direction. And;

According to a fifth aspect of the present invention, there are provided: a plurality of optical fibers; a polarization adjusting device for aligning a polarization state of a plurality of light beams having the same wavelength via the plurality of optical fibers; All the luminous fluxes into a plurality of linearly polarized light beams having the same polarization direction. A fifth light source device comprising: a polarization direction conversion device that converts the light into a light beam.

According to this, after the polarization adjusting device aligns the polarization states of the plurality of light beams emitted from the plurality of optical fibers, the polarization direction conversion device converts all the light beams passing through the plurality of optical fibers into the same polarization direction. Since the light beam is converted into a plurality of linearly polarized light beams, a plurality of linearly polarized light beams having the same polarization direction can be obtained with a simple configuration. In the fifth light source device of the present invention, when the polarization adjusting device sets the polarization state of each of the plurality of light beams passing through each of the optical fibers to substantially circular polarization, the polarization direction conversion device is configured to be a quarter. A configuration having a single wavelength plate can be employed. In such a case, since the plurality of light beams passing through each optical fiber are substantially circularly polarized by the polarization adjusting device, all of the plurality of light beams are transmitted through the quarter-wave plate of the polarization direction conversion device. By doing so, it can be converted into a plurality of linearly polarized light beams having the same polarization direction. Therefore, it is possible to convert a plurality of light beams into a plurality of linearly polarized light beams having the same polarization direction while having a very simple configuration of the polarization direction conversion device as one quarter-wavelength plate. it can. The polarization direction of the linearly polarized light is determined by the direction of the optical axis of the crystal material or the like forming the quarter-wave plate. Therefore, by adjusting the direction of the optical axis of the crystal material or the like forming the quarter-wave plate, it is possible to obtain a plurality of luminous fluxes having any given linear polarization direction. Here, when the optical fiber has a substantially cylindrically symmetric structure, the polarization adjusting device may be configured to set the polarization state of each of the plurality of light beams incident on each of the optical fibers to substantially circular polarization. it can. This is because when circularly polarized light is incident on an optical fiber having a cylindrically symmetric structure, circularly polarized light is emitted from the optical fiber. Since it is impossible to make the optical fiber completely cylindrically symmetric, it is preferable that the length of the optical fiber is short.

In the fifth light source device of the present invention, in the case where the polarization adjusting device is configured such that each of the plurality of light beams passing through each of the optical fibers is substantially in the same polarization state and has any elliptically polarized light, the polarization direction conversion may be performed. A half-wave plate rotating the plane of polarization; A configuration having a half-wave plate and a quarter-wave plate optically connected in series can be employed. Here, when the half-wave plate and the quarter-wave plate are connected in series, either of them may be arranged on the upstream side in the optical path. For example, when a half-wave plate is arranged on the upstream side, the polarization plane of a plurality of light beams passing through each optical fiber is similarly rotated by passing through a common half-wave plate. By passing through a common quarter-wave plate, all the light beams become linearly polarized light having the same polarization direction. Also, when the quarter-wave plate is arranged on the upstream side, as in the case where the half-wave plate is arranged on the upstream side, all light beams should be linearly polarized light having the same polarization direction. Can be. Therefore, the polarization direction changing device can have a simple configuration of one half-wave plate and one quarter-wave _{plate.c In} this case, the half-wave plate and the quarter-wave plate By adjusting the direction of the optical axis of a crystal material or the like forming a single-wavelength plate, it is possible to obtain a plurality of luminous fluxes having arbitrary identical linear polarization directions.

Further, in the fifth light source device of the present invention, each of the plurality of optical fibers constitutes an optical fiber amplifier in which each of the plurality of light beams incident on the plurality of optical fibers is light to be amplified. The configuration may be an optical fiber through which the target light is guided. In such a case, since the light incident on each optical fiber is amplified from each optical fiber and emitted from each optical fiber, each of them has high intensity and the same polarization as the light emitted from the polarization direction conversion device. A plurality of linearly polarized light beams having directions can be obtained. As a result, it is possible to increase the amount of emitted light as a light source device.

In this case, the optical fiber may be formed mainly of one of a phosphite glass to which a rare earth element is added and a bismuth oxide-based glass.

In the fifth light source device of the present invention, each of the plurality of light beams incident on the plurality of optical fibers may be a pulse light train. In such cases, By adjusting the repetition period and pulse height of the light pulse in each pulse light train, the amount of emitted light as a light source device can be controlled with high accuracy.

In the fifth light source device of the present invention, each of the plurality of light beams incident on the plurality of optical fibers is a light beam amplified by one or more stages of optical fiber amplifiers before being incident on the plurality of optical fibers. It can be. In such a case, the amount of emitted light as a light source device can be increased by one-stage or multi-stage optical amplification by one or more stages of optical fiber amplifiers.

In the fifth light source device of the present invention, the polarization adjusting device adjusts a mechanical stress or the like applied to each of the plurality of optical fibers disposed immediately before the polarization direction changing device, and adjusts the polarization direction changing device. It is also possible to adjust the polarization state of the plurality of incident light beams.However, the polarization adjusting device controls the optical characteristics of optical components disposed upstream of the plurality of optical fibers to adjust the polarization. The configuration can be performed. In such a case, the plurality of optical fibers disposed immediately before the polarization direction conversion device are optical fibers having an optical amplifier and guiding the light to be amplified, and the polarization is adjusted by applying stress or the like. Even if it does not fit well, the polarization adjustment located on the more upstream side controls the optical characteristics of the optical components that are slower, so that the polarization state of multiple light beams incident on the polarization direction conversion device is aligned. be able to.

In the fifth light source device of the present invention, the plurality of optical fibers may be bundled substantially in parallel with each other. In such a case, the section occupied by the plurality of optical fibers can be reduced, and the light receiving area of the polarization direction conversion device can be reduced, so that the light source device can be downsized.

The fifth light source device according to the present invention may further include a wavelength converter that performs wavelength conversion by passing the light beam emitted from the polarization direction conversion device through at least one nonlinear optical crystal. . In such a case, the polarization direction of the light beam emitted from the polarization direction conversion device should be set to the polarization direction of the incident light at which the wavelength conversion (double harmonic generation, sum frequency generation) is performed efficiently by the nonlinear optical crystal. To Thus, the wavelength-converted light can be generated and emitted more efficiently.

Here, the light emitted from the plurality of optical fibers has one of infrared and visible wavelengths, and the light emitted from the wavelength converter has an ultraviolet wavelength. Can be. In such a case, ultraviolet light suitable for transferring a fine pattern can be efficiently generated.

In this case, the light emitted from the plurality of optical fibers has a wavelength of about 147 nm, and the light emitted from the wavelength converter has a wavelength of about 193.4 nm. It can be. In such a case, it is possible to efficiently obtain light having a wavelength obtained when the ArF excimer laser light source is used.

According to a sixth aspect of the present invention, there is provided an optical amplifier that includes an optical waveguide member mainly composed of either a phosphate glass to which a rare earth element is added or a bismuth oxide-based glass, and amplifies incident light; A wavelength converter that converts a wavelength of light emitted from the amplifier.

According to this, instead of a conventional optical waveguide member such as an amplification fiber or the like, which is mainly made of silica glass and to which a rare earth element is added, it is mainly made of phosphate glass or bismuth oxide-based glass. Since an optical waveguide member to which a rare earth element is added is used, incident light can be amplified with a high amplification factor by an optical waveguide member having a short length. For this reason, it is possible to supply high-luminance light to the wavelength converter while reducing the change in the polarization state caused by passing through the optical waveguide member. In addition, since the length of the path through which light passes during amplification is reduced, the spread of the spectrum due to stimulated Raman scattering and self-phase modulation can be suppressed. Therefore, it is possible to efficiently generate narrow-band wavelength converted light with a simple configuration.

In the sixth light source device of the present invention, the optical waveguide member may be configured as an optical fiber having a core for guiding light and a clad provided around the core. This fiber also has a double clad double clad structure. It may be a double fiber structure. In such a case, connection to a propagation fiber used for guiding light becomes easy, and a light source device can be realized more easily.

Here, the optical fiber can be laid in a straight line. In such a case, it is possible to prevent the occurrence of radial stress asymmetry which causes a change in the polarization state, so that it is possible to obtain output light that maintains the polarization state at the time of incidence.

Further, the optical amplifier may further include a container accommodating at least the optical fiber. In such a case, it is possible to prevent a change in the surrounding environment of the amplification fiber, which causes a change in the polarization state, so that stable wavelength conversion can be performed.

In the light source device of the present invention, the wavelength converter may be configured to include at least one nonlinear optical crystal that performs wavelength conversion of incident light. In such a case, high-output wavelength-converted light can be obtained by irradiating the nonlinear optical crystal with high-luminance light emitted from the optical amplifier.

According to a seventh aspect of the present invention, there is provided a wavelength stabilization control method for maintaining a center wavelength of a laser beam oscillated from a laser light source at a predetermined set wavelength, wherein the wavelength of the laser beam is detected. A first step of preliminarily measuring the temperature dependence of the detection reference wavelength of the wavelength detection device; and a method of using the wavelength detection device with respect to an absolute wavelength provided from an absolute wavelength providing source that provides an absolute wavelength close to the set wavelength. A second step of performing an absolute wavelength calibration to make the detection reference wavelengths substantially coincide with each other; and setting the detection reference wavelength of the wavelength detection device to the set wavelength based on the temperature dependency obtained in the first step. This is a wavelength stabilization control method including a third step of setting.

Here, the “absolute wavelength close to the set wavelength” is a concept including the same wavelength as the set wavelength.

According to this, the temperature dependence of the detection reference wavelength of the wavelength detection device that detects the wavelength of the laser light in the first step is measured in advance. Next, in the second step, wavelength detection is performed for the absolute wavelength provided by the absolute wavelength source that provides the absolute wavelength close to the set wavelength. Absolute wavelength calibration is performed so that the detection reference wavelength of the device is almost the same. Then, based on the temperature dependency obtained in the first step in the third step, the detection reference wavelength of the wavelength detector is set to the set wavelength. As described above, according to the present invention, the detection reference wavelength of the wavelength detection device after the absolute wavelength calibration is set to the set wavelength using the temperature dependency of the detection reference wavelength of the wavelength detection device measured in advance. The detection reference wavelength of the wavelength detecting device can always be accurately set to the set wavelength, so that even if the temperature of the atmosphere of the wavelength detecting device fluctuates, the wavelength can be detected without being affected by the fluctuation. Using the device, wavelength stabilization control that ensures that the center wavelength of the laser beam is maintained at a predetermined set wavelength becomes possible.

In this case, when the wavelength detection device is a Fabry-Perot etalon, the temperature dependence of the resonance wavelength of the wavelength detection device is measured in the first step, and the temperature of the wavelength detection device is measured in the second step. The resonance wavelength may be set to substantially coincide with the absolute wavelength by controlling the temperature, and the temperature of the wavelength detection device may be controlled in the third step to set the resonance wavelength to the set wavelength. In such a case, it is possible to set the resonance wavelength (detection reference wavelength) to the set wavelength by utilizing the temperature dependence of the resonance wavelength, which is the reference for the wavelength detection of Fabry-Perot etalon.

In this case, when the absolute wavelength providing source is an absorption cell on which the laser light is incident, in the second step, absorption of an absorption line closest to the set wavelength of the absorption cell becomes maximum. In addition, the transmittance of the wavelength detection device may be maximized.

In the wavelength stabilization control method of the present invention, in the first step, the temperature dependence of the center wavelength of the laser light is also measured in advance, and in the second step, the wavelength control of the laser light is also performed. It is good. In such a case, the absolute wavelength key Replenishment can be completed in a shorter time than when laser wavelength control is not performed.

In the wavelength stabilization control method according to the present invention, the wavelength of the laser light from the laser light source is controlled based on a detection result of the wavelength detection device in which the detection reference wavelength is set to the set wavelength in the third step. A fourth step may be further included. In such a case, since the wavelength of the laser light from the laser light source is controlled based on the detection result of the wavelength detection device whose detection reference wavelength is accurately set to the set wavelength, the wavelength of the laser light is controlled. It can be stably maintained at the set wavelength.

In the wavelength stabilization control method of the present invention, the wavelength control of the laser light may be performed by controlling at least one of a temperature of the laser light source and a supply current. For example, in the case of a single-wavelength oscillation laser such as a DFB semiconductor laser or a fiber laser, the oscillation wavelength of the laser can be controlled by controlling the temperature. In the case of a DFB semiconductor laser, the supply current (drive current) can be controlled. Also, the oscillation wavelength of the laser can be controlled.

According to an eighth aspect of the present invention, there is provided an exposure apparatus for transferring a pattern formed on a mask onto a substrate, wherein the exposure apparatus generates a single-wavelength laser beam within a range from an infrared region to a visible region. A generating unit; a fiber group composed of a plurality of optical fibers arranged in parallel at an output stage of the light generating unit; and an optical output from each of the optical fibers by individually turning on and off the optical output from each of the optical fibers. A light amount control device that controls the amount of laser light to be output; a wavelength conversion unit that converts the wavelength of the laser light output from each of the optical fibers and outputs ultraviolet light that is a harmonic of the laser light; An illumination optical system for illuminating the mask using the ultraviolet light output from the wavelength conversion unit as illumination light for exposure;

According to this, the mask is illuminated with the ultraviolet light output from the wavelength conversion unit by the illumination optical system as illumination light for exposure, and the pattern formed on the mask is transferred onto the substrate. In this case, the amount of ultraviolet light applied to the mask by the light amount control device Since the control can be performed in response to a necessary request, the required exposure control can be realized as a result.

In this case, the apparatus further comprises a storage device in which an output intensity map corresponding to the ON / OFF state of the optical output from each of the optical fibers is stored in advance, and the light amount control device is configured to store the output intensity map and a predetermined setting. The light output from each of the optical fibers may be individually turned on / off based on the light amount to control the light amount of the laser light output from the fiber group. In such a case, even if there is a variation in the output of each optical fiber, the optical output of the fiber group can be made substantially equal to the set light amount, and optical fibers having various performances can be used.

In the first exposure apparatus of the present invention, the light generation unit includes: a light source that generates laser light of a single wavelength; and an optical modulator that converts light from the light source into pulse light of a predetermined frequency and outputs the pulse light. Wherein the light quantity control device further controls the light quantity of the laser light output from the fiber group by controlling the frequency of the pulse light output from the optical modulator. can do. In such a case, in addition to the step-by-step light amount control by individually turning on and off the light output of each fiber constituting the optical fiber group, the light amount control device allows the light modulator to finely adjust the light amount between each stage. It becomes possible by controlling the frequency of the output pulse light. As a result, continuous control of the light amount is possible, and the light amount of the output light can be made to match the set light amount regardless of the set light amount within a predetermined range. Therefore, more accurate exposure amount control becomes possible.

In the first exposure apparatus of the present invention, the light amount control device further controls a light amount of the laser light output from the fiber group by controlling a peak power of the pulse light output from the optical modulator. It may be controlled. In such a case, in addition to the step-by-step light amount control by individually turning on and off the optical output of each fiber constituting the optical fiber group, the light amount control device makes fine adjustment of the light amount between each stage from the optical modulator. This is made possible by controlling the peak power of the output pulse light. Consequent The light quantity can be continuously controlled, and the light quantity of the output light can be made to coincide with the set light quantity regardless of the value of the set light quantity within a predetermined range. Therefore, more accurate exposure amount control becomes possible.

According to a ninth aspect of the present invention, there is provided an exposure apparatus that transfers a pattern formed on a mask onto a substrate, comprising: a light source that generates light of a single wavelength; A light generator that has a light modulator that converts the light into light and outputs the light, and that generates a laser light of a single wavelength within a range from an infrared region to a visible region; and a pulse light generated by the light generator. An optical amplifying unit including at least one stage fiber amplifier for amplifying light; and a light amount control device for controlling the amount of output light from the fiber amplifier by controlling the frequency of the pulse light output from the optical modulator. A wavelength conversion unit that converts the wavelength of the laser light output from the optical amplification unit and outputs ultraviolet light that is a harmonic of the laser light; and converts the ultraviolet light output from the wavelength conversion unit to the ultraviolet light. The illumination light for exposure An illumination optical system for illuminating the mask.

According to this, the mask is illuminated using the ultraviolet light output from the wavelength conversion unit by the illumination optical system as illumination light for exposure, and the pattern formed on the mask is transferred onto the substrate. In this case, the light amount control device can control the light amount of the ultraviolet light applied to the mask in response to a necessary request, so that the required exposure amount control can be realized as a result.

In the second exposure apparatus of the present invention, the light amount control device further controls the light amount of the output light from the optical amplifying unit by controlling a peak power of the pulse light output from the optical modulator. It is good.

According to a tenth aspect, the present invention provides an exposure apparatus that transfers a pattern formed on a mask onto a substrate, comprising: a light source that generates light of a single wavelength; A light generator that has a light modulator that converts the light into pulsed light and outputs the light, and that generates a single-wavelength laser light within a range from an infrared region to a visible region; An optical amplifying unit including at least one fiber amplifier for amplifying the pulse light generated by the unit; and an output light from the optical amplifying unit by controlling a peak power of the pulse light output from the optical modulator. A light amount control device that controls the light amount of the laser light; a wavelength conversion unit that converts the wavelength of the laser light output from the optical amplification unit and outputs ultraviolet light that is a harmonic of the laser light; An illumination optical system that illuminates the mask with the ultraviolet light output as illumination light for exposure.

According to a first aspect, the present invention provides an exposure apparatus that repeatedly transfers a pattern formed on a mask onto a substrate, comprising: a light source that generates light of a single wavelength; and a pulse light that emits light from the light source. A light generator having an optical modulator for converting the pulse light into light; an optical amplifier including at least one fiber amplifier for amplifying the pulse light generated by the light generator; When exposing the substrate through the mask, at least one of the frequency and peak power of the pulse light is transmitted through the optical modulator in accordance with the position of the exposure target area on the substrate. And a control device for controlling.

According to this, the light generator generates pulsed light by converting light of a single wavelength generated by the light source into pulsed light by an optical modulator, and the pulsed light is converted into an optical amplifier including a fiber amplifier. Is amplified by Then, the controller irradiates the mask with the amplified pulsed light, and when exposing the substrate through the mask, through the optical modulator according to the position of the exposure target area on the substrate. At least one of the frequency and peak power of the pulsed light is controlled, thereby irradiating the mask. The amount of light that is emitted, and thus the amount of exposure of the substrate, is controlled with high precision. Therefore, according to the present invention, it is possible to always appropriately control the exposure amount irrespective of the position of the exposure target area on the substrate, and it is possible to accurately transfer the mask pattern onto the substrate.

Here, the “exposure target area” is a concept including both shot areas when there are a plurality of shot areas to be exposed on the substrate, and different areas within each shot area. Therefore, according to the present invention, in a so-called stepper (including a scanning stepper), a process variation in each shot area on a substrate is corrected, and a line width uniformity in one shot area in a scanning exposure apparatus is improved. Is possible.

According to a first aspect of the present invention, there is provided an exposure apparatus for transferring a pattern formed on a mask onto a substrate, comprising: a light source for generating light of a single wavelength; and light from the light source to pulse light. A light generating section having an optical modulator for conversion; and a plurality of optical paths including at least one optical fiber amplifier for amplifying the pulsed light and arranged in parallel at an output stage of the light generating section. An optical amplifier; irradiating the mask with the pulsed light from the optical amplifier, and exposing the substrate through the mask, individually turning on / off the optical output from each optical path; A control device for controlling the amount of pulsed light output from the optical amplifying unit.

According to this, the light generator generates pulsed light by converting light of a single wavelength generated by the light source into pulsed light by an optical modulator, and the pulsed light is converted into an optical amplifier including a fiber amplifier. Is amplified by Then, the controller irradiates the mask with the amplified pulsed light, and when exposing the substrate through the mask, individually turns on / off the light output from each light path, thereby performing optical amplification. The amount of pulsed light output from the unit is controlled, whereby the amount of light applied to the mask and, consequently, the amount of exposure of the substrate is controlled stepwise over a wide range. Therefore, according to the present invention, the resist feeling for each substrate in an exposure apparatus that repeatedly exposes a plurality of substrates is provided. It is possible to control the exposure amount according to the difference in the degree and the like. Therefore, it is possible to transfer the mask pattern onto the substrate with the required accuracy without being affected by the resist sensitivity or the like.

Also in this case, the control device may control at least one of the frequency and the peak power of the pulse light via the optical modulator according to the position of the exposure target area on the substrate as described above.

In the fourth or fifth exposure apparatus of the present invention, the light source generates a laser beam in an infrared region or a visible region, and a wavelength conversion unit that converts the wavelength of the pulse light amplified by the light amplification unit into ultraviolet light. May be further provided.

According to a thirteenth aspect, the present invention is an exposure apparatus that illuminates a mask with a laser beam and transfers a pattern of the mask onto a substrate, wherein the laser light source oscillating the laser beam; A beam monitoring mechanism for monitoring optical characteristics of the laser light related to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined set wavelength; and an absolute wavelength providing source for providing an absolute wavelength close to the set wavelength. A light source device having a temperature dependency map comprising temperature measurement data of a center wavelength of the laser light oscillated from the laser light source and a detection reference wavelength of the beam monitoring mechanism. Performing an absolute wavelength calibration to make the detection reference wavelength of the beam monitor mechanism substantially coincide with the absolute wavelength provided by the absolute wavelength providing source; A first control device for performing a set wavelength calibration for matching the detection reference wavelength to the set wavelength based on the temperature dependence map; and a control device for setting the wavelength of the laser beam emitted from the light source device to the set wavelength calibration. A second control device for irradiating the mask with the laser beam and exposing the substrate through the mask while performing feedback control based on the monitoring result of the beam monitoring mechanism for which the radiation has been completed. This is the sixth exposure apparatus.

According to this, the absolute wavelength carrier for making the detection reference wavelength of the beam monitor mechanism substantially coincide with the absolute wavelength provided from the absolute wavelength providing source by the first control device. And a temperature dependency map stored in the storage device (consisting of measurement data of the temperature dependency of the center wavelength of the laser light emitted from the laser light source and the detection reference wavelength of the beam monitoring mechanism). The set wavelength calibration for matching the wavelength to the set wavelength is performed. In this manner, the detection reference wavelength of the beam monitor mechanism after the absolute wavelength calibration can be made to coincide with the set wavelength by using the temperature dependence of the detection reference wavelength of the known beam monitor mechanism. Then, the second control device controls the wavelength of the laser beam emitted from the light source device based on the monitoring result of the beam monitor mechanism after the completion of the set wavelength calibration, and controls the laser beam while performing feedback control. The substrate is exposed through the mask by irradiating the mask. Therefore, while performing wavelength stabilization control to ensure that the center wavelength of the laser beam is maintained at the predetermined set wavelength based on the monitoring result of the beam monitoring mechanism, the laser beam is irradiated onto the mask and is passed through the mask. Since the substrate can be exposed, it is possible to perform high-precision exposure with little influence of temperature fluctuation of the atmosphere.

In this case, when further comprising: a projection optical system that projects the laser beam emitted from the mask onto the substrate; and an environment sensor that measures a physical quantity related to an environment near the projection optical system. At every predetermined timing after the exposure of the substrate is started by the second control device, based on the measurement value of the environment sensor, the imaging characteristic of the projection optical system caused by the change of the physical quantity from a standard state is determined based on the measurement value of the environment sensor. The apparatus may further include a third control device for calculating a wavelength change amount for almost canceling the variation, and changing the set wavelength according to the wavelength change amount. If the physical quantities related to the installation environment of the projection optical system (pressure, temperature, humidity, etc. of the surrounding gas) fluctuate from the standard state, the refractive index of the atmosphere fluctuates, and the projection optical system was originally adjusted to match it When the exposure wavelength (set wavelength) fluctuates and the wavelength of the laser light as the exposure light is irradiated onto the projection optical system as it is, various aberrations (due to the fluctuation of the physical quantity due to the fluctuation of the physical quantity) appear in the imaging characteristics of the projection optical system. (Including chromatic aberration). According to the present invention, in such a case, the third control device determines whether exposure of the substrate is started. At each predetermined timing, a wavelength change amount for substantially canceling a change in the imaging characteristic of the projection optical system due to a change in the physical quantity from the standard state based on the measurement value of the environment sensor is calculated, The set wavelength is changed according to the wavelength change amount. As a result, various aberrations of the projection optical system are corrected at the same time, and the second controller reliably uses the beam monitor mechanism to set the center wavelength of the laser beam to the predetermined set wavelength based on the changed set wavelength. The laser beam is applied to the mask while performing wavelength stabilization control to maintain the laser beam. Thus, the laser light emitted from the mask is projected on the substrate by the projection optical system, and the substrate is exposed. In this case, as a result, exposure can be performed with high accuracy in a state where there is no change in physical quantity related to environmental conditions (that is, a state in which the change in imaging characteristics is offset). .

For example, when the physical quantity includes the atmospheric pressure, the atmospheric pressure in the standard state (standard atmospheric pressure) may be arbitrary, but for example, the optical performance of the projection optical system (including the imaging characteristics of the projection optical system) is best. It is desirable that the atmospheric pressure be a reference when the adjustment is made. In this case, the fluctuation amount of the optical performance of the projection optical system and the like becomes zero at the standard atmospheric pressure. Normally, the standard atmospheric pressure is often set to the average atmospheric pressure of the delivery destination (factory, etc.) where the exposure apparatus is installed. Therefore, if there is an elevation difference between the assembly site where the exposure equipment is manufactured and the delivery destination (relocation location) where the exposure equipment is installed, for example, a projection optical system is installed under standard atmospheric pressure (such as average atmospheric pressure). At the assembly site, the exposure wavelength is shifted by the wavelength corresponding to the elevation difference, and then the projection optical system is adjusted.At the relocation site, the wavelength is returned to the exposure wavelength, or On the ground, the projection optical system is adjusted under the exposure wavelength, and the exposure wavelength is shifted so that the altitude difference is offset at the relocation site.

When the projection optical system is installed in a gas other than air, the above “atmospheric pressure” is the pressure of the gas around the projection optical system.

Here, in the present invention, for example, changing the wavelength of the illumination light by the projection optical system and changing the installation environment (pressure, temperature, humidity, etc. of the surrounding gas) of the projection optical system. Making use of the fact that changing is substantially equivalent. At this time, when the type of the glass material of the refraction element of the projection optical system is single, the equivalence is completely established, and even when there are a plurality of types of glass materials, the equivalence is almost satisfied. Therefore, when only the wavelength of the illuminating light is changed by using the change characteristic of the refractive index of the projection optical system (particularly the refractive element) with respect to the installation environment, when the installation environment of the projection optical system is substantially changed. Can be realized.

Here, the predetermined timing may be timing each time exposure of a predetermined number of substrates is completed, may be timing each time exposure of one shot on the substrate is completed, or may be a change in exposure conditions. May be the timing of each time. Here, the predetermined number may be one or may be a number corresponding to one lot. Further, the change of the exposure condition includes not only the change of the illumination condition but also all the cases where the condition regarding the exposure in a broad sense such as replacement of a mask is changed.

Alternatively, the predetermined timing may be a timing at which a physical quantity (or a change amount thereof) related to the environment obtained based on the measurement value of the environment sensor changes by a predetermined amount or more, or an optical system such as a projection optical system. It may be performed almost in real time according to the interval (for example, several S) at which the performance (or its variation) is calculated. Alternatively, the predetermined timing may be a timing at every predetermined time.

In this case, the image processing apparatus further includes an imaging characteristic correction device that corrects an imaging characteristic of the projection optical system, wherein the imaging characteristic correction device changes the set wavelength each time the third control device changes the set wavelength. The imaging characteristic variation may be corrected except for the variation in the imaging characteristic of the projection optical system, which is corrected by changing the set wavelength.

Here, the “imaging characteristic change excluding the change in the imaging characteristic of the projection optical system corrected by the change in the set wavelength” includes the projection optical system caused by the change in the physical quantity due to the change in the set wavelength. If the change in the imaging characteristics of the projection optical system was not completely corrected, the change in the imaging characteristics of the projection optical system due to the change in the physical quantity was not corrected. The movement is also included.

In such a case, most of the change in the imaging characteristic of the projection optical system (hereinafter, appropriately referred to as “environmental change”) due to the change in the physical quantity is corrected by the change in the set wavelength, and The remaining environmental fluctuations are corrected by the imaging characteristic correction device together with other irradiation fluctuations. As a result, high-precision exposure is performed while the imaging characteristics of the projection optical system are almost completely corrected.

In this case, the imaging characteristic correction device may correct the imaging characteristic change in consideration of the wavelength change of the laser light during the change of the set wavelength by the third control device. good. The change of the set wavelength is performed at the above-mentioned predetermined timing. However, if the change interval of the set wavelength is long, the physical quantity fluctuates during that time, and the imaging characteristic correction device corrects the environmental fluctuation caused by this. It was decided to do so.

When the sixth exposure apparatus of the present invention further includes an environment sensor that measures a physical quantity related to an environment near the projection optical system, the environment sensor may detect at least atmospheric pressure.

In a sixth exposure apparatus of the present invention, the light source device includes: a fiber amplifier that amplifies laser light from the laser light source; and a nonlinear optical crystal that converts a wavelength of the amplified laser light into a wavelength in an ultraviolet region. A wavelength converter may be further provided. In such a case, the laser light from the laser light source is amplified by the fiber amplifier, and the amplified laser light can be wavelength-converted into light in the ultraviolet region by the wavelength converter. Therefore, for example, even when the required light quantity is large, even if a small laser light source, for example, a solid-state laser such as a DFB semiconductor laser or a fiber laser is used, an energy beam of short wavelength and high energy is output. It becomes possible. This makes it possible to reduce the size and weight of the light source device and, consequently, reduce the footprint of the exposure device, and to transfer a fine pattern onto a substrate with high precision by improving the resolution of exposure. According to a fifteenth aspect, the present invention provides an exposure apparatus for exposing a substrate coated with a photosensitive agent by using an energy beam, comprising: a beam source for generating the energy beam; A wavelength changing device for changing the wavelength of the energy beam; and when the wavelength is changed by the wavelength changing device, the wavelength changing device is provided to the substrate in accordance with an amount of change in the sensitivity characteristic of the photosensitive agent accompanying the wavelength change. And a light exposure control device for controlling the integrated light exposure. According to this, when the wavelength of the energy beam output from the beam source is changed by the wavelength changing device, the change amount of the sensitivity characteristic of the photosensitive agent on the substrate caused by the change of the wavelength by the exposure amount control device. The integrated exposure amount given to the substrate is controlled in accordance with.

That is, when the wavelength of the energy beam is changed, the sensitivity characteristics of the photosensitive agent (resist) on the substrate may change due to the change in the wavelength (wavelength shift). The exposure amount control device can control the integrated exposure amount given to the substrate according to the amount of change in the sensitivity characteristic of the photosensitive agent caused by the wavelength change. Therefore, accurate exposure can be performed without being affected by changes in the sensitivity characteristics of the photosensitive agent.

According to a fifteenth aspect, the present invention is an exposure apparatus for transferring a predetermined pattern onto a substrate by irradiating the substrate with an exposure beam, wherein the light has a wavelength of any one of an infrared region and a visible region. A plurality of optical fibers for emitting light; a polarization adjusting device for aligning the polarization states of a plurality of light beams having the same wavelength through the plurality of optical fibers; A polarization direction conversion device for converting the light into a plurality of linearly polarized light beams having the same; An eighth exposure apparatus, comprising: a wavelength converter that emits light; and an optical system that irradiates the substrate with light emitted from the wavelength converter as the exposure beam. According to this, a plurality of optical fibers, a polarization adjusting device, and a wavelength converter can efficiently generate ultraviolet light suitable for transfer of a fine pattern, and the ultraviolet light is converted into an exposure beam by the optical system as a substrate. As a result, the predetermined pattern can be efficiently transferred to the substrate.

According to a sixteenth aspect, the present invention relates to an exposure apparatus that forms a predetermined pattern by irradiating exposure light to a substrate, wherein the exposure apparatus includes a phosphate glass to which a rare earth element is added and a bismuth oxide glass. An optical amplifier that amplifies the incident light; a wavelength converter that converts the wavelength of the light emitted from the optical amplifier; and an optical amplifier that converts the light emitted from the wavelength converter. A ninth exposure apparatus comprising: an optical system that irradiates the substrate as exposure light.

In this case, the optical waveguide member may be an optical fiber having a core for guiding light and a clad provided around the core.

In a ninth exposure apparatus according to the present invention, the wavelength converter may generate the exposure light having a wavelength of 200 nm or less. In such a case, the exposure of the substrate with high accuracy can be performed efficiently by generating the exposure light having a wavelength of 200 nm or less, which has a small spread of the wavelength spectrum, from the wavelength converter. A fine pattern corresponding to a short wavelength of less than 100 nm can be accurately formed on a substrate.

The ninth exposure apparatus of the present invention has a mask on which a predetermined pattern is formed, and when exposing a substrate via an optical system, a mask having substantially the same wavelength as the exposure light is used. By using the light generated by the wavelength converter in the position detection, it is possible to efficiently supply the position detection light.

According to a seventeenth aspect, the present invention relates to an exposure method for repeatedly transferring a pattern formed on a mask onto a substrate, and a first step of amplifying the pulsed light at least once using a fiber amplifier; Irradiating the mask with the amplified pulsed light A second step of exposing the exposure target area on the substrate via the mask; and, prior to the processing of the first step, converting a laser beam from a light source into the pulsed light, and exposing the exposure target area. A third step of controlling at least one of the frequency and peak power of the pulsed light according to the position on the substrate.

According to this, the pulsed light is amplified at least once by using a fiber amplifier, the amplified pulsed light is irradiated on a mask, and a region to be exposed on the substrate is exposed through the mask. In this case, prior to amplifying the pulsed light using the fiber amplifier, the laser light from the light source is converted into the pulsed light, and the frequency and the peak power of the pulsed light are determined according to the position of the exposure target area on the substrate. Control at least one of Therefore, when irradiating the mask with the pulse light and exposing the exposure target area on the substrate through the mask, the exposure is performed in a state where the exposure amount is adjusted according to the position of the exposure target area on the substrate. Will be Therefore, according to the present invention, it is possible to always appropriately control the exposure amount regardless of the position of the exposure target area on the substrate, and it is possible to transfer the mask pattern onto the substrate with high accuracy.

In this case, when the plurality of fiber amplifiers are provided in parallel, in the first step, the pulsed light may be amplified using only the selected fiber amplifier. In such a case, since the exposure amount can be controlled stepwise in a wide dynamic range, at least one of the frequency and the peak power of the pulsed light is controlled according to the position of the exposure target area on the substrate. When used together with the exposure control, the exposure control over a wider range can be performed with high accuracy. By selecting the fiber amplifier according to the resist sensitivity on the substrate and the like, it becomes possible to control the exposure amount according to the difference in the resist sensitivity for each substrate.

In the first exposure method of the present invention, the light source generates a laser light in an infrared region or a visible region, and wavelength-converts the amplified pulse light to ultraviolet light before the pulse light is applied to the mask. The method may further include a fourth step.

According to an eighteenth aspect, the present invention provides an exposure method for exposing a substrate with a laser beam to form a predetermined pattern on the substrate, wherein the wavelength of the laser light is detected prior to the start of exposure. A first sub-step of preliminarily measuring the temperature dependence of the detection reference wavelength of the wavelength detection device, and the wavelength detection device for an absolute wavelength provided from an absolute wavelength providing source that provides an absolute wavelength close to the set wavelength. A second sub-step of performing an absolute wavelength calibration to make the detection reference wavelengths substantially coincide with each other, and setting the detection reference wavelength of the wavelength detection device based on the temperature dependency obtained in the first sub-step. A first step of sequentially performing processing with a third sub-step of setting a wavelength; and thereafter, based on a detection result of the wavelength detecting device in which the detection reference wavelength is set to the set wavelength in the third sub-step. The laser light A second step of repeatedly exposing a substrate with the laser light while controlling the wavelength of the laser light from a source.

According to this, in the process of the first step, the detection reference wavelength of the wavelength detection device after the absolute wavelength calibration is set to the set wavelength using the temperature dependence of the detection reference wavelength of the wavelength detection device measured in advance. Therefore, the detection reference wavelength of the wavelength detection device is always accurately set to the set wavelength. Then, in the second step, the substrate is repeatedly exposed to the laser light while controlling the wavelength of the laser light from the laser light source based on the detection result of the wavelength detection device in which the detection reference wavelength is set to the set wavelength. . Therefore, according to the present invention, even if the temperature or the like of the atmosphere of the wavelength detecting device fluctuates, it is not affected. Wavelength stabilization control that accurately sets the detection reference wavelength of the wavelength detector to the set wavelength without receiving it, and uses that wavelength detector to ensure that the center wavelength of the laser beam is maintained at the predetermined set wavelength. Since the substrate is repeatedly exposed to laser light while performing the process, high-precision exposure with little influence of temperature fluctuation of the atmosphere can be performed.

In this case, when an optical system arranged in the path of the laser beam is further provided, a third step of changing the set wavelength in order to cancel a change in optical performance of the optical system is further performed. May be included. For example, when the atmospheric pressure fluctuates, the optical performance (various aberrations, etc.) of the optical system may fluctuate. In such a case, it is necessary to cancel the fluctuation of the optical performance of the optical system in the third step. As a result of the change in the set wavelength, the substrate is controlled while performing wavelength stabilization control using a wavelength detector to ensure that the center wavelength of the laser beam is maintained at the predetermined set wavelength, using the changed set wavelength as a reference. Exposure can be repeated with laser light. As a result, exposure can be performed with high accuracy in a state where the fluctuation of the atmospheric pressure does not exist (that is, the fluctuation of the optical performance is offset).

According to a nineteenth aspect, the present invention provides a method for manufacturing an exposure apparatus for irradiating a substrate with an exposure light through an optical system to form a predetermined pattern, the method comprising adjusting the characteristics of the optical system. A sixth aspect of the present invention is a method for manufacturing an exposure apparatus, wherein the method is performed using light having a wavelength belonging to a wavelength band having a predetermined width including the wavelength of the exposure light generated by the light source apparatus. According to this, it is possible to accurately and easily adjust the characteristics of the optical system through which the exposure light passes during the exposure.

Further, in the lithographic process, by performing exposure using the exposure method of the present invention, a pattern of a plurality of layers can be formed on a substrate with a high degree of superposition accuracy. Can be manufactured with high yield, and the productivity can be improved. Similarly, in the lithographic process, by performing exposure using the exposure apparatus of the present invention, the line width control accuracy is improved by the improvement of the exposure amount control accuracy, whereby the pattern of a plurality of layers is formed on the substrate. Pile It can be formed with high alignment accuracy. Therefore, a highly integrated microdevice can be manufactured with a high yield, and the productivity can be improved. Therefore, from another viewpoint, the present invention is a device manufacturing method using the exposure method of the present invention or the exposure apparatus of the present invention, and can be said to be a device manufactured by the manufacturing method. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a view schematically showing a configuration of an exposure apparatus according to one embodiment of the present invention. FIG. 2 is a block diagram showing an internal configuration of the light source device of FIG. 1 together with a main control device.

FIG. 3 is a diagram schematically showing a configuration of the optical amplifier of FIG.

FIG. 4 is a diagram showing a cross-section of a bundle-one fiber formed by bundling the output ends of the final-stage fiber amplifier constituting the optical amplification unit.

FIG. 5 is a diagram schematically illustrating a fiber amplifier constituting the optical amplification unit in FIG. 2 and a peripheral portion thereof together with a part of a wavelength conversion unit.

Figure 6A shows a bundle—the fundamental wave of 1.544 tm emitted from the output end of fiber 173 is converted to an 8th harmonic using a nonlinear optical crystal. Fig. 6B shows an example of the configuration of a wavelength conversion unit that generates 3 nm ultraviolet light. Fig. 6B shows the fundamental wave of 1.57 m emitted from the output end of the bundle fiber 173. FIG. 4 is a diagram showing a configuration example of a wavelength conversion unit that converts a wavelength into a 10th harmonic using a crystal and generates ultraviolet light of 157 nm.

FIG. 7 is a diagram for explaining a modified example, and is a diagram showing another configuration example of the optical amplifying unit.

FIG. 8 is a flowchart for explaining an embodiment of the device manufacturing method according to the present invention.

FIG. 9 is a flowchart showing the processing in step 204 of FIG. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, an embodiment of the present invention will be described with reference to FIGS.

FIG. 1 shows a schematic configuration of an exposure apparatus 10 according to one embodiment including a light source device according to the present invention. The exposure apparatus 10 is a step-and-scan type scanning exposure apparatus.

The exposure apparatus 10 includes an illumination system including a light source device 16 and an illumination optical system 12, and a reticle as a mask illuminated by exposure illumination light (hereinafter, referred to as “exposure light”) IL from the illumination system. A reticle stage RST holding R, a projection optical system PL that projects the exposure light IL emitted from the reticle R onto the wafer W as a substrate, and a Z tilt stage 58 as a substrate stage holding the wafer W are mounted. XY stage 14 and their control systems.

The light source device 1 6 is, for example, a wavelength 1 9 3 nm (A r F excimer laser beam substantially the same wavelength) ultraviolet pulse (approximately the same wavelength as the F ₂ laser beam) ultraviolet pulse light, or wavelength 1 5 7 nm of This is a harmonic generator that outputs light. The light source device 16 has at least a part thereof (for example, a wavelength conversion section described later), the illumination optical system 12, the reticle stage RST, the projection optical system PL, the Z tilt stage 58, and the XY stage 1 4 and an exposure apparatus main body including a main body column (not shown) on which these components are mounted, as well as an environmental instrument and chamber (hereinafter referred to as “chamber”) whose temperature, pressure, humidity, etc. are adjusted with high precision. Housed within. FIG. 2 is a block diagram showing the internal configuration of the light source device 16 together with a main control device 50 that controls the entire device. As shown in FIG. 2, the light source device 16 includes a light source section 16 A including a laser light source as a light source, a laser control device 16 B, a light amount control device 16 C, and a polarization adjusting device 16 D. Etc. are provided.

The light source section 16A includes a pulse light generation section 160 as a light generation section, an optical amplification section 161, a quarter-wave plate 162 as a polarization direction conversion device, and a wavelength conversion section. It is configured to include a wavelength conversion section 163, a beam monitoring mechanism 164, an absorption cell 165, and the like.

The pulse light generator 160 includes a laser light source 160 A, optical couplers BS 1 and BS 2, an optical isolator 160 B, and an electro-optical modulator (hereinafter referred to as ΓΕΟΜ) 160 C as an optical modulator. Have. In addition, each element between the laser light source 16 OA and the wavelength conversion unit 163 is optically connected by an optical fiber. As the laser light source 16 OA, here, a single-wavelength oscillation laser, for example, an oscillation wavelength of 1.544 / m, continuous wave output (hereinafter referred to as “CW output”) 20 mW of InGaAsP, DFB Semiconductor lasers are used. In the following, the laser light source 160A is also referred to as "DFB semiconductor laser 160A" as appropriate. Here, a DFB semiconductor laser is one in which a diffraction grating is built up in a semiconductor laser instead of a flat-peripheral resonator with low longitudinal mode selectivity. It is configured to oscillate and is called a distributed feedback (DFB) laser. Since such a laser basically oscillates in a single longitudinal mode, its oscillation spectrum line width can be suppressed to 0.01 pm or less.

The DFB semiconductor laser is usually provided on a heat sink, and these are housed in a housing. In the present embodiment, a temperature controller (for example, a Peltier element) is provided on a heat sink attached to the DFB semiconductor laser 16 OA. As described later, the laser controller 16 B By controlling the wavelength, the oscillation wavelength can be controlled (adjusted).

In this embodiment, in order to control the above-mentioned oscillation wavelength, the temperature dependence of the oscillation wavelength of the DFB semiconductor laser 160 A is measured in advance, and the measurement result is provided in the main controller 50 as a temperature dependence map. It is stored (stored) as a table shape, a conversion function, or a conversion coefficient in a memory 51 as a storage device.

Here, the oscillation wavelength of the DFB semiconductor laser 16 OA is about 0.1 nm / ° C. It has temperature dependence. Therefore, for example, if the temperature of the DFB semiconductor laser is changed by 1 ° C, the wavelength changes by 0.1 nm in the fundamental wave (1544 nm), and the wavelength changes in the eighth harmonic (193 nm). The wavelength changes by 0.0125 nm, and the wavelength changes by 0.01 nm at the 10th harmonic (157 nm).

In the exposure apparatus, it is sufficient if the wavelength of the exposure illumination light (pulse light) can be changed by about ± 20 pm with respect to the center wavelength. Therefore, the temperature of the DFB semiconductor laser 160 A is ± 1.6 at the eighth harmonic. In the case of C and 10th harmonic, it may be changed by about ± 2 ° C.

The laser light source 160A is not limited to a semiconductor laser such as a DFB semiconductor laser, but may be a ytterbium (Yb) -doped fiber laser having an oscillation wavelength of around 990 nm, for example.

As the optical couplers B S1 and B S2, those having a transmittance of about 97% are used. For this reason, the laser light from the DFB semiconductor laser 160 A is split by the optical coupler BS 1, and about 97% of the laser light is incident on the next-stage optical coupler BS 2, and the remaining about 3% is the beam monitor mechanism 164. Incident on. The laser light incident on the optical coupler BS 2 is demultiplexed by the optical coupler BS 2, and about 97% of the laser light travels toward the next-stage optical isolator 160 B, and the remaining about 3% is absorbed by the absorption cell 165. To be incident on.

The beam monitor mechanism 164, absorption cell 165, etc. will be described later in further detail.

The optical isolator 160B is a device for passing only light in the direction from the optical coupler BS2 to the EOM 160C and blocking the light in the opposite direction. The optical isolator 160B prevents a change in the oscillation mode of the DFB semiconductor laser 160A and the generation of noise due to the reflected light (return light). The EOM 160C is for converting laser light (CW light (continuous light)) that has passed through the optical isolator 160B into pulsed light. EOM 1 as 60 C An electro-optic modulator (for example, a two-electrode type modulator) having an electrode structure with a chirp correction is used so that the wavelength spread of the semiconductor laser output due to the chirp due to the time change of the refractive index is reduced. . The EOM 160 C outputs a pulse light modulated in synchronization with a voltage pulse applied from the light amount control device 16 C. As an example, the laser light oscillated by the DFB semiconductor laser 16 OA by the EOM 160 C is modulated into pulse light with a pulse width of 1 ns and a repetition frequency of 100 kHz (pulse period of about 10 s). As a result, as a result of this optical modulation, the peak output of the pulse light output from the EOM 160 C is 2 OmW, and the average output is 2. Here, it is assumed that there is no loss due to the insertion of EOM 160 C. However, if the insertion loss is present, for example, if the loss is 13 dB, the peak output of the pulsed light is 1 OmW and the average output is 1 OmW. W.

When the repetition frequency is set to about 100 kHz or higher, a decrease in the amplification factor due to the influence of ASE (Amplified Spontaneous Emission) noise can be prevented in the fiber amplifier described later. This is desirable.

If the extinction ratio is not sufficient even when the pulse light is turned off using only the EOM 160 C, it is desirable to use the current control of the DFB semiconductor laser 160 A together. That is, in a semiconductor laser or the like, the output light can be pulse-oscillated by controlling the current.Therefore, the pulse light can be generated by using the current control of the DFB semiconductor laser 160A and the EOM 160C together. As an example of a desirable _c , a pulse light having a pulse width of, for example, about 10 to 20 ns is oscillated by current control of the DFB semiconductor laser 160A, and only a part of the pulse light is cut out from the pulse light by the EOM 160C. The pulse width is modulated to 1 ns. This makes it possible to easily generate pulsed light with a narrower pulse width than when only EOM 160 C is used, and to make it easier to generate pulsed light at intervals such as pulse light oscillation intervals and the start and stop of oscillation. Control more easily It becomes possible.

Note that an acousto-optic light modulator (AOM) can be used instead of the EOM 160C.

The optical amplifying unit 161 amplifies the pulse light from the EOM 160 C, and here includes a plurality of fiber amplifiers. FIG. 3 shows an example of the configuration of the optical amplifier 161, together with the EON / M 60C.

As shown in FIG. 3, the optical amplifying unit 161 includes a branch and delay unit 167 having a total of 128 channels from channel 0 to channel 127, and a channel 0 of the branch and delay unit 167. channel 1 27 total 1 28 channel of the respective output stage connected fiber amplifiers 1 68 from ~ 1 68 _128, these fiber amplifiers 1 68, and 1 68 narrowband filter 1 69 to each of ₁₂₈ ~ 1 6 9 ₁₂₈ and the optical isolator 1 70, and 1 70 ₁₂₈ in the final stage which is connected via respective file I bus amplifier 1 7 1 ~ -! 7 1 ₁₂₈ etc. In this case, as is clear from FIG. 3, the fiber amplifier 168 _n , the narrow-band filter 169 _n , the optical isolator 170 _n , and the fiber amplifier 171 _n (n = 1, 2, ……, 1 28), optical paths 1 72 _π (n = 1, 2,…, 1 28) are respectively formed. The above-described components of the optical amplification unit 161 will be described in more detail. The branching and delay unit 167 has a total of 128 channels, and outputs a predetermined delay time (here, 3 ns).

In this embodiment, the branching and delay unit 167 is an erbium (Er) -doped fiber for amplifying the pulse light output from the EOM 160 C by 35 dB (3162 times). An amplifier (EDFA), a splitter (a flat waveguide 1 X4 splitter), which is an optical splitter that splits the output of the EDFA into four outputs of channels 0 to 3 in parallel, and channels 0 to 3 of the splitter Four optical fibers with different lengths connected to each output end, and four splitters that divide the output of these four optical fibers into channels 0 to 31 respectively (32 planar waveguides 1x32 splitter) ) And 31 optical fibers (total of 124) of different lengths connected to channels 1 to 31 except for channel 0 of each splitter. Hereinafter, the 0 to 31 channels of each of the above splitters (flat waveguide 1 × 32 splitter) will be collectively called a block.

More specifically, the pulse light output from the first-stage EDFA has a peak output of about 63 W and an average output of about 6.3 mW. This pulse light is split in parallel into four outputs of channels 0 to 3 by a splitter (a flat waveguide 1 × 4 splitter), and the output light of each channel is given a delay corresponding to the above four optical fiber lengths. Can be For example, in this embodiment, the propagation speed of light in the optical fiber 2 X 1 0 ⁸ m - and is s, respectively for channel 0, 1, 2, 3 of the splitter (flat plate waveguide 1 X 4 Supuritsu evening) 0 1 m, 19.3 m, 38.5 m, and 57.7 m lengths of optical fiber (hereinafter referred to as “first delay fiber”) are connected.

In this case, the optical delay between adjacent channels at each first delay fiber exit is 96 ns.

In addition, channels 1 to 31 of the four splitters (flat waveguide 1 × 32 splitter) each have an optical fiber of 0.6 XN meter (where N is the channel number) (hereinafter referred to as “No. 2 called "delay fiber"). As a result, a delay of 3 ns is given between adjacent channels in each block, and a delay of 3 × 31 = 93 ns is given to the output of channel 31 with respect to the output of channel 0 of each block.

On the other hand, a delay of 96 ns is given between the first to fourth blocks by the first delay fiber at the time of input of each block as described above. Therefore, the channel 0 output of the second block has a delay of 96 ns with respect to the channel 0 output of the first block, and the delay with the channel 31 of the first block is 3 ns. This is the same between the second and third blocks and the third and fourth blocks. As a result, a total of 128 channels of output ends, adjacent channels A pulse light with a delay of 3 ns between the pulses is obtained.

By the above branching and delay, a pulse light with a delay of 3 ns is obtained between adjacent channels at the output terminals of a total of 128 channels.At this time, the optical pulse observed at each output terminal is EOM It is the same 100 kHz (pulse period 1 O ^ s) as the pulse modulated by 160 C. Therefore, as a whole, the laser beam generator repeats at 128 kHz, with 128 pulses generated at 3 ns intervals and the next pulse train generated at 9.62 s intervals. . That the entire output becomes ^{1 28X 1 00 X 1 0 3} = 1. 28 X 1 0 7 pulses seconds. In this embodiment, an example has been described in which the number of divisions is set to 128 and a short fiber is used as the delay fiber. This resulted in a 9.62 MS non-emission interval between each pulse train, but by increasing the number of divisions, lengthening the delay fiber to an appropriate length, or using a combination of these It is also possible to make the pulse intervals completely equal.

As the fiber amplifier 168 _n (n = 1, 2,..., 128), the mode field diameter of the optical fiber (hereinafter referred to as “mode diameter J”) is the same as that used in normal communication. Erbium (Er) -doped fiber amplifier (EDFA) with a length of 5 to 6 m.The output light from each channel of the delay unit 167 is provided by the fiber amplifier 168 _n . Is amplified according to a predetermined amplification gain.The excitation light source of the fiber amplifier 168 _n will be described later.The narrow band filter 169 _n (n = 1, 2,..., 128) Is to cut the ASE light generated by the fiber amplifier 168 _n and transmit the output wavelength of the DFB semiconductor laser 16 OA (wavelength width is about 1 pm or less) to substantially reduce the wavelength width of the transmitted light. As a result, the ASE light is converted to the fiber amplifier 17 1 _{n in the} subsequent stage. In this case, it is possible to prevent the amplification gain of the laser light from being lowered by being incident on the laser beam, or to prevent the scattering of the laser light due to the propagation of the ASE noise. It is preferably about pm, Since the wavelength width of the ASE light is about several tens of nm, it is possible to cut the ASE light so that there is no practical problem even if a narrow band filter with a transmission wavelength width of about 100 pm is available at this time. it can.

Further, in the present embodiment, the output wavelength of the DFB semiconductor laser 16 OA may be actively changed as described later. It is preferable to use a narrow-band filter having a transmission wavelength width (approximately equal to or greater than the variable width) according to (approximately pm). The wavelength width of a laser device applied to an exposure device is set to about 1 pm or less. The optical isolator 170 _n (n = 1, 2,..., 128) is for reducing the effect of return light, similarly to the optical isolator 160 B described above. Said fiber amplifier _{1 7 1 π (n = 1} , 2, ......, 1 28) as here, the light in order to avoid an increase in Supekubokuru width of amplified light due to the nonlinear effect in the optical fiber EDFAs with a large mode diameter, for example, 20 to 30 m, are used, which have fiber mode diameters wider than those used in normal communication (5 to 6 Atm). The fiber amplifier 171 _n further amplifies the optical output from each channel of the branch and delay unit 167 amplified by the above-described fiber amplifier 168. As an example, the branch and delay unit 167 The average output of each channel is about 50 W, and the average output of all channels is about 6.3 mW, which is amplified by a total of 46 dB (40600 times) by two-stage fiber amplifiers 168 „and 17. Then, at the output end of the optical path 172 _n corresponding to each channel (the output end of the optical fiber constituting the fiber amplifier 171 _n ), the peak output is 20 kW, the pulse width is 1 ns, and the pulse repetition frequency is 10 O Obtain 2 kHz, 2 W average power, and 256 W average power on all channels. The pump light source of the fiber amplifier 17 will be described later.

In the present embodiment, Chikaratan out of the optical fibers constituting the output end of the optical path 1 72 _n corresponding to each channel at the branch and delay unit 1 67, i.e. the fiber amplifier 1 7 1 _n is bundled in a bundle shape And have a cross section as shown in Fig. 4. A dollar fiber 1 173 is formed. At this time, since the clad diameter of each optical fiber is about 125 Aim, the diameter of the bundle at the output end of the bundle of 128 fibers can be made about 2 mm or less. In this embodiment, the bundle fiber 173 is formed using the output end of the final stage fiber amplifier 171 „as it is, but the undoped optical fiber is _added to the final stage fiber amplifier 171π. Can be combined to form a bundle-one fiber at its output end.

Note that the previous stage of the fiber amplifier 1 6 8 _eta with standard mode diameter, connected to the fiber amplifier 1 7 1 _eta wide final stage of the mode diameter, the optical fiber the mode diameter in a tapered shape is pressurized增It is performed using.

Next, the excitation light source and the like of each fiber amplifier will be described with reference to FIG. FIG. 5 schematically shows a fiber amplifier constituting the optical amplifying unit 161 and a peripheral portion thereof, together with a part of the wavelength converting unit 163.

In FIG. 5, a semiconductor laser 178 for pumping the first stage fiber amplifier _{168 η} is fiber-coupled to the fiber amplifier _{168 η,} and the output of the semiconductor laser 178 is coupled to a wavelength division multiplexing device (Wavel The signal is input to a fiber amplifier dope fiber through an intensity division multiplexer (WDM) 179 to excite the doped fiber.

On the other hand, the fiber amplifier 17 1 _n having a large mode diameter uses a semiconductor laser 17 4 as a pumping light source for pumping the above-described fiber amplifier dope having a large mode diameter, and a fiber amplifier dope. The fiber is coupled to a large-diameter fiber that matches the diameter of the fiber, and the output of this semiconductor laser 174 is input to a doped * fiber for optical amplifier using 0 1 ^ 1 176, and the doped fiber To excite.

The laser light amplified by the large-mode diameter fiber (fiber amplifier) 17 1 „enters the wavelength conversion section 16 3, where it is converted into an ultraviolet laser light. Configuration 3 and the like will be described later. Large mode diameter fibers (fiber amplifier) 1 7 1 _n les to be amplified propagating Ichizako (signal) is desirably mainly the fundamental mode, which is single-mode or mode order lower multimode In a fiber, this can be mainly achieved by selectively exciting the basic mode.

In the present embodiment, four high-power semiconductor lasers coupled to a large-mode diameter fiber are fiber-coupled from the front and four from the rear. Here, in order to efficiently couple the pumping semiconductor laser light to the optical amplification dope / fiber, an optical fiber having a double clad structure with a double clad structure is used as the optical amplification dope fiber. It is desirable to use. At this time, the pumping semiconductor laser light is introduced into the inner clad of the double clad by WDM176.

The semiconductor lasers 178 and 174 are controlled by a light amount control device 16C.

Further, in the present embodiment, since the fiber amplifier _{1 6 8 n, 1 7 1} " is provided as the optical fiber constituting the optical path 1 7 2 _n described above, the difference between the gain of each fiber amplifier in each channel the variation of the optical output. Thus, in this embodiment, a portion of output fiber amplifier of each channel _{(1 6 8 n, 1 7} 1 n) is branched, provided each branch ends The photoelectric conversion is performed by the photoelectric conversion elements 180 and 181, respectively.The output signals of these photoelectric conversion elements 180 and 181 are supplied to the light quantity control device 16C. It has become.

In the light amount control device 16C, the drive current of each pumping semiconductor laser (178, 174) is controlled so that the optical output from each fiber amplifier is constant (that is, balanced) in each amplification stage. Feedback control.

Further, in the present embodiment, as shown in FIG. 5, the light split by the beam splitter in the middle of the wavelength conversion section 163 is photoelectrically converted by the photoelectric conversion element 182, and the photoelectric conversion element The output signal of 18 2 is supplied to the light quantity control device 16 C. In the light quantity control device 16 C, the output of this photoelectric conversion element 18 2 The light intensity in the wavelength conversion unit 163 is monitored based on the signal, and at least one of the pumping semiconductor lasers 178 and 174 is controlled so that the light output from the wavelength conversion unit 163 becomes a predetermined light output. One drive current is feedback-controlled.

With such a configuration, the amplification factor of the fiber amplifier of each channel is fixed at each amplification stage, so that there is no uneven load between the fiber amplifiers and the light intensity is uniform as a whole. Is obtained. In addition, by monitoring the light intensity in the wavelength converter 163, a predetermined light intensity is fed back to each amplification stage, and a desired ultraviolet light output can be stably obtained.

The light amount control device 16C will be described later in further detail.

From the optical amplifying unit 16 1 (the output end of each optical fiber forming the bundle-to-fiber 1773) configured as described above, all the pulsed light is circularized by the polarization adjusting device 16 D as described later. The output is aligned with the polarized light. These circularly polarized pulse lights are converted by the quarter-wave plate 162 (see Fig. 2) into linearly polarized lights, all of which have the same polarization direction. Incident. The wavelength conversion section 163 includes a plurality of nonlinear optical crystals, and converts the amplified pulse light (light having a wavelength of 1.544 μπ μ) into an 8th harmonic or a 10th harmonic thereof. conversion to, for generating a pulse ultraviolet light a r F excimer laser with the same output wavelength (1 9 3 nm) or an F ₂ laser with the same output wavelength (1 5 7 nm).

FIG. 6A and FIG. 6B show a configuration example of the wavelength conversion unit 163. Here, a specific example of the wavelength converter 163 will be described based on these drawings.

Figure 6A shows a bundle—a 1.54 4 xm fundamental wave emitted from the output end of fiber 173 is converted to an 8th harmonic (harmonic) using a nonlinear optical crystal. An example of a configuration that generates 193 nm ultraviolet light, which is the same wavelength as the rF excimer laser, is shown. Also, FIG. 6 B performs harmonic generation 1 0 harmonic by using a nonlinear optical crystal a fundamental wave having a wavelength 1. 5 7 m emitted from the output end of the bundle one fiber 1 7 3, F ₂ laser An example of a configuration for generating an ultraviolet light having a wavelength of 157 nm, which is the same wavelength as that of FIG. In the wavelength converter shown in Fig. 6A, the fundamental wave (wavelength 1.544 mm) → the second harmonic wave (wavelength 772 nm) → the third harmonic wave (wavelength 5 15 nm) → the fourth harmonic wave (wavelength 386 nm) → 7 Wavelength conversion is performed in the order of harmonic (wavelength 221 nm) → eighth harmonic (wavelength 193 nm). More specifically, the fundamental wave having a wavelength of 1.544 m (frequency ω) output from the output end of the bundle-one fiber 173 enters the first-stage nonlinear optical crystal 533. When the fundamental wave passes through the nonlinear optical crystal 533, a second harmonic is generated, which is twice the frequency ω of the fundamental wave, that is, a second harmonic having a frequency 2ω (wavelength is 12 = 772 nm). In the case of FIG. 6A, the above-described linear polarization by the quarter-wave plate 162 is performed so that the nonlinear optical crystal 533 has a polarization direction in which the second harmonic is generated most efficiently. The setting of the polarization direction of such linearly polarized light is performed by adjusting the direction of the optical axis of the quarter-wave plate 162. As the nonlinear optical crystal 533 in the first _{_{stage, L i B 3 0 5 (}} L BO) Irare use crystals, according to the temperature regulatory of L BO crystal phase matching for wavelength conversion of the fundamental wave to the second harmonic wave Method, NC PM (Non-Critical Phase Matching) is used. The NC PM is capable of high-efficiency conversion to the second harmonic wave because no walk-of occurs between the fundamental wave and the second harmonic in the nonlinear optical crystal. This is advantageous because the beam is not deformed by -off.

The fundamental wave transmitted through the non-linear optical crystal 533 without wavelength conversion and the second harmonic generated by the wavelength conversion are delayed by a half-wavelength and a one-wavelength in the next-stage wave plate 534, respectively. Only the wave rotates its polarization direction by 90 degrees and enters the second-stage nonlinear optical crystal 536. An LBO crystal is used as the second-stage nonlinear optical crystal 536, and the LBO crystal is used in the NC PM having a temperature different from that of the first-stage nonlinear optical crystal (LB0 crystal) 533. In this nonlinear optical crystal 536, a third harmonic (wavelength) is generated by sum frequency generation from the second harmonic generated in the first-stage nonlinear optical crystal 533 and the fundamental wave transmitted through the nonlinear optical crystal 533 without wavelength conversion. 5 15 nm). Next, the third harmonic obtained by the nonlinear optical crystal 536 and the fundamental wave and the second harmonic transmitted through the nonlinear optical crystal 536 without wavelength conversion are separated by the dichroic mirror 537. The third harmonic reflected by the light passes through the condenser lens 540 and the dichroic mirror 543 and enters the fourth-stage nonlinear optical crystal 545. On the other hand, the fundamental wave and the second harmonic transmitted through the dichroic mirror 537 pass through the condenser lens 538 and enter the third-stage nonlinear optical crystal 539.

As the third-stage nonlinear optical crystal 539, an LBO crystal is used. The fundamental wave passes through the LBO crystal without wavelength conversion, and the second harmonic is generated by the second harmonic generation in the LBO crystal. It is converted to a harmonic (wavelength 386 nm). The fourth harmonic obtained by the nonlinear optical crystal 539 and the fundamental wave transmitted therethrough are separated by the dichroic mirror -54 1, and the fundamental wave transmitted there passes through the condenser lens 544 and becomes dichroic · The light is reflected by the mirror 546 and enters the fifth-stage nonlinear optical crystal 548. On the other hand, the fourth harmonic reflected by the dichroic mirror 54 1 passes through the condenser lens 542 and reaches the dichroic mirror 543, where it is coaxial with the third harmonic reflected by the dichroic mirror 537. The synthesized light enters the fourth stage nonlinear optical crystal 545.

The nonlinear optical crystal 545 in the fourth _{stage, / 3- B a B 2 0} 4 (B BO) crystal is used, the third harmonic and 7 harmonic (wavelength 22 1 nm by sum frequency generation and a fourth harmonic ). The 7th harmonic obtained by the nonlinear optical crystal 545 passes through the condenser lens 547, and is coaxially synthesized with the fundamental wave transmitted through the dichroic mirror 541 by the dichroic mirror 546. The light enters the nonlinear optical crystal 548.

An LBO crystal is used as the fifth-stage nonlinear optical crystal 548, and an eighth harmonic (wavelength: 193 nm) is obtained from the fundamental wave and the seventh harmonic by generating a sum frequency. The arrangement smell Te, seventh harmonic wave generation B BO crystal 545, and eighth harmonic wave L BO or crystal 548 of a generator _{Warini, C s L i B 6 O} 10 (CL BO) crystal, or L i ₂ B ₄ 0 ₇ (LB 4) Yui It is also possible to use crystals.

In the configuration example of FIG. 6A, since the third harmonic and the fourth harmonic enter the fourth-stage nonlinear optical crystal 545 through optical paths different from each other, a lens 540 that condenses the third harmonic is used. And the lens 542 that collects the fourth harmonic can be placed in separate optical paths. The cross-section of the fourth harmonic generated by the third-stage nonlinear optical crystal 539 has an elliptical shape due to the walk-of-f phenomenon. For this reason, in order to obtain good conversion efficiency in the fourth-stage nonlinear optical crystal 545, it is desirable to perform beam shaping of its fourth harmonic. In this case, the condenser lenses 540 and 542 are arranged in separate optical paths, for example, a pair of cylindrical lenses can be used as the lens 542, thereby facilitating beam shaping of the fourth harmonic. It becomes possible. For this reason, it is possible to improve the conversion efficiency by improving the overlap with the third harmonic in the fourth-stage nonlinear optical crystal (BBO crystal) 545.

Further, the lens 544 for condensing the fundamental wave incident on the fifth-stage nonlinear optical crystal 548 and the lens 545 for condensing the seventh harmonic can be placed in different optical paths.

The seventh harmonic generated by the fourth-stage nonlinear optical crystal 545 has an elliptical cross-sectional shape due to the walk-of-f phenomenon. Therefore, in order to obtain good conversion efficiency in the fifth-stage nonlinear optical crystal 548, it is preferable to perform beam shaping of the seventh harmonic. In the present embodiment, the condenser lenses 544 and 544 can be arranged in separate optical paths, so that, for example, a pair of cylindrical lenses can be used as the lens 544, so that beam shaping of the seventh harmonic can be easily performed. Can be performed. For this reason, it is possible to improve the conversion efficiency by improving the overlap with the fundamental wave in the fifth-stage nonlinear optical crystal (LB0 crystal) 548.

Note that the configuration between the second-stage nonlinear optical crystal 536 and the fourth-stage nonlinear optical crystal 545 is not limited to that shown in FIG. 6A. Non-linear optics are used to reflect the third harmonic reflected by the mirror 537 and the second harmonic generated from the nonlinear optical crystal 536 and transmitted through the dichroic mirror 537. Any configuration is possible as long as the two optical path lengths between the nonlinear optical crystals 536 and 545 are equal so that the fourth harmonic obtained by wavelength conversion by the crystal 539 simultaneously enters the nonlinear optical crystal 545. No problem. This is the same between the third-stage nonlinear optical crystal 539 and the fifth-stage nonlinear optical crystal 548. According to the experiment performed by the inventor, in the case of FIG. 6A, the average output of the eighth harmonic (wavelength 193 nm) per channel was 45.9 mW. Therefore, the average output from the bundle including all 128 channels is 5.9 W, and it is possible to provide ultraviolet light with a wavelength of 193 nm, which has a sufficient output as a light source for an exposure apparatus.

In this case, LB0 crystals, which are readily available as high-quality crystals on the market, are currently used to generate the eighth harmonic (193 nm). This LBO crystal has an extremely small absorption coefficient of 193 nm ultraviolet light, and is advantageous in terms of durability since optical damage of the crystal is not a problem.

In the generation part of the eighth harmonic (for example, the wavelength of 193 nm), the LB0 crystal is used after being phase-matched. However, since the phase-matching angle is large, the effective nonlinear optical constant (d eff) becomes small. Therefore, it is preferable to provide a temperature control mechanism for the LBO crystal and use the LBO crystal at a high temperature. As a result, the phase matching angle can be reduced, that is, the constant (deff) can be increased, and the efficiency of generating the eighth harmonic can be improved.

In the wavelength converter shown in Fig. 6B, the fundamental wave (wavelength 1.57 m) → the second harmonic wave (wavelength 785 nm) → the fourth harmonic wave (wavelength 392.5 nm) → the eighth harmonic wave (wavelength 196.25 nm) ) → The wavelength is converted in the order of the 10th harmonic (wavelength: 157 nm). In this configuration example, the second harmonic generation of the wavelength incident on each wavelength conversion stage is performed in each wavelength conversion stage from the second harmonic generation to the eighth harmonic generation.

Also, in this configuration example, as a nonlinear optical crystal used for wavelength conversion, an LB0 crystal is used as a nonlinear optical crystal 602 that generates a second harmonic by generating a second harmonic from a fundamental wave. Nonlinear optical coupling that generates fourth harmonic by second harmonic generation LBO crystal is used as crystal 604. Further, by using the _{_{_{S r 2 B e 2 B 2}}} 0 7 (SBBO) crystal is the nonlinear optical crystal 6 0 9 for generating a more eighth harmonic wave from the fourth harmonic to the second harmonic generation, the second harmonic and 8 The SBB0 crystal is used for the nonlinear optical crystal 611 that generates a 10th harmonic (wavelength: 157 nm) by sum frequency generation from the harmonic.

The second harmonic generated from the nonlinear optical crystal 602 enters the nonlinear optical crystal 604 through the condenser lens 603, and the nonlinear optical crystal 604 has the above-described fourth harmonic and wavelength. Generates second harmonics that are not converted. Next, the second harmonic transmitted through the dichroic * mirror 605 passes through the condenser lens 606, is reflected by the dichroic mirror 607, and enters the nonlinear optical crystal 611. On the other hand, the fourth harmonic reflected by the dich aperture mirror 605 enters the nonlinear optical crystal 609 through the condenser lens 608, and the eighth harmonic generated here is collected. Optical lens 610 and dichroic ■ It enters the nonlinear optical crystal 611 through the mirror 607. Further, the nonlinear optical crystal 611 generates a 10th harmonic (wavelength: 157 nm) from the second harmonic and the eighth harmonic coaxially synthesized by the dichroic mirror 607 by generating a sum frequency.

By the way, in the present configuration example, the second harmonic and the fourth harmonic generated from the second-stage nonlinear optical crystal 604 are branched by the dichroic mirror 605 so that the second harmonic transmitted therethrough Although the fourth harmonic is obtained by wavelength-converting the fourth harmonic with the nonlinear optical crystal 609, and is incident on the fourth-stage nonlinear optical crystal 611 through different optical paths, the dichroic 'Four non-linear optical crystals 62, 604, 609, and 611 may be arranged on the same optical axis without using the mirrors 605 and 607. However, in the present configuration example, the fourth harmonic generated in the second-stage nonlinear optical crystal 604 has an elliptical cross-sectional shape due to the walk-of phenomenon. Therefore, in order to obtain good conversion efficiency with the fourth-stage nonlinear optical crystal 611 using this beam as an input, the beam shape of the fourth harmonic wave, which is the incident beam, is shaped and overlapped with the second harmonic wave It is desirable to improve the quality. In this configuration example, the condenser lenses 606 and 608 are placed on separate optical paths. Since the lenses can be arranged, for example, a cylindrical lens can be used as the lens 608, and beam shaping of the fourth harmonic can be easily performed. For this reason, it is possible to make the overlap with the second harmonic in the fourth-stage nonlinear optical crystal 6 11 1 good, and to increase the conversion efficiency.

The wavelength converters shown in FIGS. 6A and 6B are merely examples, and it goes without saying that the configuration of the wavelength converter of the present invention is not limited to this. For example, performs harmonic generation 1 0 harmonic by using a nonlinear optical crystal a fundamental wave having a wavelength 1. 5 7 m emitted from the output end of the bundle one fiber 1 7 3, is at the same wavelength as the F ₂ laser Ultraviolet light of 157 nm may be generated.

Returning to FIG. 2, the beam monitor mechanism 164 is composed of a photoelectric conversion element such as a Fabry-Pero etalon (hereinafter also referred to as “etalon element j”) and a photoelectric conversion element such as a photodiode. The light incident on the etalon element constituting the beam monitor mechanism 16 4 has a transmittance corresponding to the frequency difference between the resonance frequency of the etalon element and the frequency of the incident light. An output signal of a photodiode or the like for detecting the transmitted light intensity is supplied to a laser controller 16 B. The laser controller 16 B performs a predetermined signal processing on this signal. Thus, information on the optical characteristics of the incident light to the beam monitor mechanism 16 4, specifically, the etalon element (specifically, the center wavelength and the wavelength width of the incident light (spectral half width), etc.) Then, the information on the optical characteristics is notified to the main controller 50 in real time.

The frequency characteristics of the transmitted light intensity generated by the ETA element are affected by the temperature and pressure of the atmosphere. In particular, the resonance frequency (resonance wavelength) is temperature-dependent. Therefore, in order to accurately control the center wavelength of the laser light oscillated from the laser light source 16 OA based on the detection result of this etalon element, it is necessary to examine the temperature dependence of the resonance wavelength. is important. In the present embodiment, the temperature dependence of the resonance wavelength is measured in advance, and the measurement result is attached to the main controller 50 as a temperature dependence map. It is stored in a memory 51 (see FIG. 1) as a storage device. The temperature dependence map may be stored in the memory 51 in the form of a table, or may be stored as a function or a coefficient.

Then, main controller 50 uses the temperature dependence map to determine the resonance wavelength at which the transmittance of the etalon element becomes maximum (detection reference wavelength) at the time of absolute wavelength calibration of beam monitor mechanism 164, which will be described later. In order to make exactly match the set wavelength, an instruction is given to the laser controller 16 B to actively control the temperature of the etalon element in the beam monitor mechanism 164.

The output of the energy monitor constituting the beam monitor mechanism 164 is supplied to the main controller 50. The main controller 50 detects the energy power of the laser beam based on the output of the energy monitor. The DFB semiconductor laser 16 OA controls the amount of laser light oscillated by the DFB semiconductor laser 16 OA via the laser controller 16 B as necessary, or turns off the DFB semiconductor laser 16 OA. However, in the present embodiment, as will be described later, normal light amount control (exposure amount control) is mainly performed by the light amount control device 16 C by controlling the peak power or frequency of the output pulse light of the EOM 160 C, or Since the output power of each fiber amplifier constituting the optical amplifying unit 16 1 is controlled by on / off control, when the energy power of the laser light fluctuates greatly for some reason, the main controller 50 is controlled by the laser controller 1. 6B will be controlled as described above.

The absorption cell 165 is an absolute wavelength source for the absolute wavelength calibration of the oscillation wavelength of the DFB semiconductor laser 16OA, that is, the absolute wavelength calibration of the beam monitor mechanism 164. In the present embodiment, since the absorption cell 165 uses a DFB semiconductor laser 160 A having an oscillation wavelength of 1.544 Atm as a laser light source, the absorption cell 165 has a wavelength band near this wavelength. Acetylene isotopes with dense absorption lines are used.

As described later, a fundamental wave and a fundamental wave are used as light for monitoring the wavelength of the laser light. Alternatively or in place of this, when selecting the above-described intermediate wave (second harmonic, third harmonic, fourth harmonic, etc.) of the wavelength conversion unit 163 or the light after wavelength conversion, the intermediate wave, etc. It is sufficient to use an absorption cell in which absorption lines exist densely in the above wavelength band. For example, when the third harmonic is selected as the light for monitoring the wavelength, an iodine molecule having an absorption line in the vicinity of a wavelength of 50353111 to 530 nm is used as an absorption cell, and the iodine molecule is used. The appropriate absorption line may be selected and its wavelength may be used as the absolute wavelength.

Further, the absolute wavelength source is not limited to the absorption cell, and an absolute wavelength light source may be used.

Under the control of the main controller 50, the laser controller 16B detects the center wavelength and the wavelength width (spectral half width) of the laser beam based on the output of the beam monitor mechanism 164, The temperature control (and current control) of the DFB semiconductor laser 16 OA is performed by feedback control so that the center wavelength becomes a desired value (set wavelength). In this embodiment, the intensity of the DFB semiconductor laser 16 OA can be controlled in 0.001 ° C. units.

In addition, the laser controller 16B switches between the pulse output and the continuous output of the DFB semiconductor laser 160A according to the instruction from the main controller 50, and the output interval and pulse width at the time of the pulse output. Controls the oscillation of the DFB semiconductor laser 16 OA so as to compensate for the output fluctuation of the pulsed light. In this way, the laser controller 16B stabilizes the oscillation wavelength to control it at a constant wavelength, or fine-tunes the output wavelength. Conversely, the laser control device 16B may adjust the output wavelength by positively changing the oscillation wavelength of the DFB semiconductor laser 160A in accordance with an instruction from the main control device 50. This is described further below.

Next, a method for controlling wavelength stabilization of laser light oscillated by a DFB semiconductor laser will be described.

First, the etalon element in the beam monitor mechanism 164, which is the premise of wavelength stabilization control, The absolute wavelength calibration of the child will be described.

As described above, in this embodiment, the temperature dependence of the oscillation wavelength of the DFB semiconductor laser 16 OA and the resonance wavelength (A _res ) of the etalon element in the beam monitor mechanism ₁₆₄ is measured in advance, and the measurement results are stored in the memory. 5 Memorized in 1.

Therefore, at the time of absolute wavelength calibration of the etalon element, the main controller 50 absorbs the laser light through the laser controller 16 B while the DFB semiconductor laser 16 OA is oscillated via the laser controller 16 B. The absorption line of the wavelength (A _ref ) closest to or matching the set wavelength (A _set ) at which the transmittance of the cell ₁₆₅ becomes the maximum is selected. An instruction is given to the laser controller 16B to control the temperature of the etalon element in the beam monitor mechanism 164. That is, the resonance wavelength (A _res ) of the etalon element is calibrated using the absolute wavelength (λ _ref ). Thus, A _res is the detection reference wavelength of the etalon device matches the absolute wavelength (lambda _"βί).

Here, when performing the above absolute wavelength calibration, the main controller changes the oscillation wavelength of the DF {semiconductor laser 160} through the laser controller 16 within a predetermined range. Is also good. In this way, even when the oscillation wavelength of the DF Β semiconductor laser 16 OA is greatly deviated from the set wavelength at the start of the oscillation, the setting is such that the transmittance of the absorption cell 16 5 is quickly maximized. This makes it possible to select the absorption line at the wavelength (A _rei ) closest to or coincident with the wavelength (A _set ), so that the absolute wavelength calibration can be completed in a short time.

When the absolute wavelength calibration is completed, the main controller ₅₀ uses the temperature-dependent data of the resonance wavelength (A _res ) of the etalon element stored in the memory 51 to store the laser controller 1. 6 Control the temperature of the etalon element via B, and execute the setting wavelength calibration to _set the resonance wavelength (A _res ) of the etalon element to the set wavelength (A _set ).

Thus, according to the wavelength stabilization control method of the present embodiment, the etalon element The ringing wavelength (A _res ), that is, the detection reference wavelength can be surely matched with the set wavelength.

After that, the temperature of the DFB semiconductor laser 160 A is controlled by the laser controller 16 B based on the detected value of the etalon element for which the set wavelength calibration has been completed (the monitoring result of the beam monitor mechanism 164). Control and current control are performed by feedback control. Here, the reason why the laser controller 16 B controls not only the temperature of the DFB semiconductor laser 16 OA but also the supply current (drive current) is that the responsiveness is better with the current control. . For example, according to the former, the occurrence (or image change) of the aberration of the projection optical system PL due to wavelength fluctuation or its fluctuation is prevented, and the image characteristic (optical characteristics such as image quality) changes during pattern transfer. Disappears.

According to the latter, the difference in elevation and pressure between the manufacturing site where the exposure equipment is assembled and adjusted and the location where the exposure equipment is installed (delivery destination), as well as differences in the environment (the atmosphere in the clean room), etc. Variations in the imaging characteristics (such as aberrations) of the projection optical system PL that occur depending on the situation can be offset, and the time required to start up the exposure apparatus at the delivery destination can be reduced. Furthermore, according to the latter, during the operation of the exposure apparatus, there are also variations in the aberration, projection magnification, and focal position of the projection optical system PL caused by irradiation of the exposure illumination light and changes in the atmospheric pressure. It is possible to cancel each other and transfer the pattern image onto the substrate in the best imaging state at all times.

As described above, the light amount control device 16C is provided with the photoelectric conversion elements 18 0 and 18 1 for detecting the optical outputs of the fiber amplifiers 16 68 _n and 17 1 _n in the optical amplification section 16 1. Based on the output, the drive current of each pumping semiconductor laser (178, 174) is feedback-controlled to stabilize the gain of the fiber amplifier of each channel for each amplification stage. Based on the output signal of the photoelectric conversion element 182, which detects the light split by the beam splitter in the middle of the wavelength conversion section 163, the drive current of at least one of the semiconductor lasers for excitation 1778, 174 is determined. Feedback control It has a function of feeding back a predetermined predetermined light intensity to each amplification stage and stabilizing a desired ultraviolet light output.

Further, in the present embodiment, the light amount control device 16C also has the following functions.

That is, the light amount control device 16 C

(1) In accordance with an instruction from the main controller 50, the output of the fiber of each channel constituting the bundle 1 fiber 173, that is, the output of each optical path 172 _n is individually turned off. Function to control the average light output of the entire bundle

(Hereinafter referred to as "the first function" for convenience)

(2) By controlling the frequency of the pulse light output from the EOM 160 C in response to an instruction from the main controller 50, the average light of each channel of the optical amplifying unit 16 1 per unit time is controlled. Output (output energy), that is, a function of controlling the intensity of output light from each optical path 17 2 _n per unit time (hereinafter referred to as “second function” for convenience)

③ By controlling the peak power of the pulse light output from the EOM 160 C in response to the instruction from the main controller 50, the average light of each channel of the optical amplification unit 16 1 per unit time is controlled. An output (output energy), that is, a function of controlling the intensity of output light from each optical path 172 „per unit time (hereinafter, referred to as“ third function ”for convenience).

Hereinafter, the first to third functions will be described in detail.

First, the light quantity control device _16C turns on / off the output of each optical path ₁₇₇₂ in the first function, and turns on / off the output from the fiber amplifier 17 1 _{η at} the last stage of each channel. Perform by turning off. In this case, the light amount control device 16C turns on / off the semiconductor laser for excitation of the fiber amplifier 174, that is, sets the intensity of the excitation light from the semiconductor laser 174 to one of a predetermined level and a zero level. It can also be done by setting it as an alternative, or the drive current of the semiconductor laser 174 By adjusting the current value, the intensity of the pumping light from the semiconductor laser 174 can be adjusted to the first level at which the fiber amplifier 171 _n can be amplified, and the fiber amplifier 171. Alternatively, it can be performed by setting either the first level or the second level at which amplification is disabled. In the non-amplification state, the light absorption becomes large, and the output from the fiber amplifier becomes almost zero, so that the output of each optical path 172 _n is turned off. When the semiconductor laser 174 is turned on and off, the power is not consumed in the state where the semiconductor laser 174 is turned off, so that energy can be saved. On the other hand, when the intensity of the pump light from the semiconductor laser 174 is switched between the first level and the second level, the first level and the second level may be fixed values. You don't have to. In other words, in a fiber amplifier, whether the state of amplification is possible or not is determined by going up or down from a certain value of the excitation light intensity.

According to the first function of the light quantity control device 16C, the average light output (light quantity) of the entire bundle can be controlled at 1 / 128th of the maximum output light quantity (about 1% or less). is there. That is, the dynamic range can be set in a wide range from〗 to 1 128. Since each optical path 172 _n is configured by using the same component, the optical output of each optical path 172 _n is equal to the harm from the viewpoint of design. The light quantity control has good linearity.

In the present embodiment, the wavelength converter 163 for wavelength-converting the output of the optical amplifier 161, that is, the output of the bundle-fiber 173 is provided. Is proportional to the number of fibers with the output of each optical path 172 _n , that is, the output of the fiber amplifier 171 _n turned on.Therefore, for the set light amount, a linear output of 1/128 of the maximum output light amount It is a harm that control is possible in principle.

However, in practice, variations in the output of each optical path 172 _n and variations in the wavelength conversion efficiency with respect to the output of each optical path 172 _n exist due to manufacturing errors and the like. Because there is a high possibility that there is a high possibility, the output variation of each optical fiber (optical path 172 _n ) and the output variation due to the wavelength conversion efficiency variation for each optical fiber output are measured in advance. This is a map of the intensity of the optical output from the wavelength converter 163 corresponding to the on / off status of the optical output from each optical fiber based on the result (a conversion table of the output intensity corresponding to the fiber group to be turned on). A first output intensity map is created, and the first output intensity map is stored in the memory 51 attached to the main controller 50. This first output intensity map may be stored in the memory 51 in the form of a table, or may be stored as a function or a coefficient. The same applies to the second and third output intensity maps described later.

Then, in the light amount control device, when performing the light amount control by the first function, the light amount control is performed based on the set light amount given from the main control device 50 and the output intensity map.

The light quantity control device 16C controls the frequency control of the pulse light output from the EOM 160 in the second function by changing the frequency of the rectangular wave (voltage pulse) applied to the EOM 160C. Do. Since the frequency of the pulse light output from the EOM 160 C matches the frequency of the voltage pulse applied to the EOM 160 C, the frequency of the output pulse light is controlled by controlling the applied voltage. It is.

In the case of the present embodiment, as described above, the frequency of the rectangular wave applied to the EOM 160 C is 100 kHz. For example, if this frequency is set to 110 kHz, the number of optical pulses output from the EOM 160 C per unit time increases by 10%. As a result of division by channel 167 from channel 0 to channel 128 for a total of 128 channels for each pulse, pulse light per unit time increases by 10% for each channel and one light pulse If the light energy per unit light is the same, that is, if the peak power of the pulsed light is constant, the output light intensity (light amount) of each optical path 172 _n per unit time also increases by 10%. Further, in the present embodiment, the wavelength conversion unit 163 for performing wavelength conversion of the output light of each channel of the optical amplification unit 161 is provided. The light intensity is proportional to the frequency of the output pulse of each channel if the peak power is constant. As described above, the light quantity control by the second function is excellent in linearity.

However, the pulse light output from the EON / M 60 C is, via the delay unit 1 67, full multiplexing amplifier 1 68 ", since the input of the 1 7 1 _n, in practice, re Niariti is as described above That is, in general, the gain of a fiber amplifier depends on the input light intensity, and therefore, when the frequency of the output light of the EOM 160 C is changed, the fiber amplifiers 168 _n and 17 1 the input light intensity is changed in _n, resulting fiber amplifier 1 68 _n, 1 7 pulsed light peak power of output from the 1 _n is because sometimes changes. fiber amplifier 1 68 _n, 1 7 1 By properly designing „, it is possible to suppress this peak power change, but it may reduce other performances such as the optical output efficiency of the fiber amplifier.

Therefore, in the present embodiment, the input frequency intensity dependence of the fiber amplifier output is measured in advance, and based on the measured value, each channel of the optical amplifier 161 (corresponding to the frequency of the pulse light input to the optical amplifier 161) Create a second output intensity map (a conversion table of the output intensity of the optical amplifier 161, corresponding to the frequency of the output light of the EOM), which is a map of the output intensity of the EOM, and store the second output intensity map in the memory. 5 Memorized in 1.

Then, when performing the light amount control by the second function, the light amount control device 16C performs the light amount control based on the set light amount given from the main control device 50 and the above-mentioned second output intensity map. It has become.

The light amount control device 16C controls the peak power of the pulse light output from the EOM 160 C in the third function by controlling the peak intensity of the voltage pulse applied to the EOM 160 C. Do. The peak power of the output light of EOM 160 C depends on the peak intensity of the voltage pulse applied to EOM 160 C. It is.

Further, in the present embodiment, the wavelength conversion section 163 for performing wavelength conversion of the output light of each channel of the optical amplification section 161 is provided, but the output light intensity of the wavelength conversion section 163 is The peak intensity of the pulsed light output from each optical fiber (optical path 1 72 _n ) exhibits a nonlinear dependence that is at most proportional to the power of the harmonic order. For example, in the case of 19.3 nm light generation by 8th harmonic generation in Fig. 6A, the 193 nm light output intensity shows a change in intensity that is proportional to the eighth power at the maximum of the peak power of the fiber amplifier output. In the case of the present embodiment, the dependency of the peak power of the pulse light output from the EOM 160 C on the peak intensity of the voltage pulse applied to the EOM 160 C is c 0 s (V). Therefore, the nonlinear dependence of the wavelength conversion section 163 is moderated. Therefore, in the light source device having the wavelength conversion unit as in the present embodiment, it is not possible to control the intensity (light amount) of the output light by controlling the peak intensity of the voltage pulse applied to the EOM160C. It makes sense.

However, as described above, the amplification gain of the fiber amplifier depends on the input light intensity. Therefore, if the peak intensity of the pulse light output from the EOM 160 C is changed, the fiber amplifiers 168 _n , 1 7 1 _n input light intensity is changed, there Ru if the result fiber amplifier 1 6 8 _n, 1 7 peak power of the outputted pulse light from 1 _n is changed. Fiber amplifier _{1 6 8 n, 1 7 1} n properly by the designing Li case, although it is possible to suppress the peak Kupawa change, reducing the other performance such as the light output efficiency of the fiber amplifier There is also.

Therefore, in the present embodiment, the dependence of the output of the fiber amplifier on the input pulse peak intensity is measured in advance, and based on the measured value, the optical amplification unit 16 1 corresponding to the peak intensity of the pulse light input to the optical amplifier 16 A third output intensity map (a conversion table of the intensity of the output pulse light of the optical amplifier unit 161 corresponding to the peak intensity of the output light of the EOM), which is a map of the output intensity of each channel, is created. The output intensity map is stored in the memory 51. This third output intensity map is a purple It may be an external light intensity map.

Then, when performing the light amount control by the third function, the light amount control device 16C performs the light amount control based on the set light amount given from the main control device 50 and the third output intensity map. It is supposed to do.

In addition, in addition to the EOM 160 C, an E 0 M for transmittance control is provided at the output stage of the DFB semiconductor laser 160 A, and the EOM is changed by changing the voltage applied to the E 0 M. It is also possible to change the emission energy from the optical amplification unit and wavelength conversion unit per unit time by changing the transmittance of the light.

As is clear from the above description, the second and third functions of the light amount control device 16C can control the light amount of the output light of the light source device 16 more finely than the first function. is there. On the other hand, the first function can set a wider dynamic range than the second and third functions.

Therefore, in the present embodiment, at the time of exposure to be described later, coarse adjustment of the exposure amount is performed by the first function of the light amount control device 16C, and fine adjustment of the exposure amount is performed by using the second and third functions. It is supposed to do. This will be described later.

The light amount control device 16C also controls the start and stop of the pulse output based on an instruction from the main control device 50.

The polarization adjustment device 1 6 D, by than the optical fiber amplifier 1 7 l _n for controlling the polarization characteristics of the front side of the optical component, to circularly polarized light of the light emitted from the optical fiber amplifier 1 7 1 _n. _If the doped fiber of the optical fiber amplifier 171 _n has a substantially cylindrically symmetric structure and is relatively short, the light incident on the optical fiber amplifier 171 _n is circularly polarized. Also, the light emitted from the optical fiber amplifier 17 1 _n can be circularly polarized.

Here, the front side of the optical component than the optical fiber amplifier 1 7 1 _n may relay optical fiber or the like (not shown) for coupling the elements of the optical amplification section 1 6 1 described above optically. Methods for controlling the polarization characteristics of such relay optical fibers include, for example, There is a method of adding anisotropic mechanical stress to the ray fiber, and this method is also employed in the present embodiment.

Generally, a relay optical fiber has a refractive index distribution that is cylindrically symmetric. However, when an anisotropic mechanical stress is applied, an anisotropic stress is generated in the relay optical fiber. An isotropic refractive index distribution occurs. By controlling the amount of such anisotropic refractive index distribution, the polarization characteristics of the relay optical fiber can be controlled.

Also, the amount of change in the refractive index distribution due to the stress of the relay optical fiber and the polarization characteristics of other optical components generally depend on temperature. For this reason, the polarization adjusting device 16D performs temperature control to keep the ambient temperature of the relay optical fiber or the like constant so that the circular polarization once performed can be maintained.

In addition, without performing the temperature control described above, the polarization state of light is monitored at any position downstream of the relay optical fiber, and based on the monitoring result, the polarization characteristics of the relay optical fiber, that is, the refractive index distribution. May be controlled.

Returning to FIG. 1, the illumination optical system 12 includes a beam shaping optical system 18, a fly-eye lens system 22 as an optical integrator (homogenizer), an illumination system aperture stop plate 24, a beam splitter 26, and a first optical system. It has a relay lens 28A, a second relay lens 28B, a fixed reticle blind 30A, a movable reticle blind 30B, a mirror M for bending the optical path, and a condenser lens 32. The beam shaping optical system 18 converts the cross-sectional shape of the LB (hereinafter referred to as “laser beam”) generated by the wavelength conversion of the wavelength conversion unit 16 3 of the light source device 16 into the laser beam. It is shaped so as to efficiently enter the fly-eye lens system 22 provided behind the LB optical path, and includes, for example, a cylinder lens and a beam expander (both not shown).

The fly-eye lens system 22 is arranged on the optical path of the laser beam LB emitted from the beam shaping optical system 18 and is used to illuminate the reticle R with a uniform illuminance distribution. Form a surface light source consisting of a number of light source images, that is, a secondary light source. The laser beam emitted from the secondary light source is also referred to as “exposure light IL” in this specification. An illumination system aperture stop plate 24 made of a disc-shaped member is arranged near the exit surface of the fly-eye lens system 22. This illumination system aperture stop plate 24 is provided at equal angular intervals, for example, an aperture stop composed of a normal circular aperture, an aperture stop for reducing the σ value, which is a lithocoherence factor, compared to a small circular aperture, and an annular aperture. A ring-shaped aperture stop, a modified aperture stop with multiple apertures eccentrically arranged for the modified light source method (only two of these apertures are shown in Fig. 1), etc. Has been done. The illumination system aperture stop plate 24 is configured to be rotated by a drive unit 4 such as a motor controlled by a main controller 50 so that any one of the apertures can be selected according to the reticle pattern. The aperture is selectively set on the optical path of the exposure light IL.

A beam splitter 26 having a small reflectance and a large transmittance is arranged on the optical path of the exposure light I coming out of the illumination system aperture stop plate 24, and a fixed reticle blind 3 is provided on the optical path behind this. A relay optical system including a first relay lens 28A and a second relay lens 28B is provided with an OA and a movable reticle blind 30B interposed therebetween.

The fixed reticle blind 30A is disposed on a plane slightly defocused from a conjugate plane with respect to the pattern plane of the reticle R, and has a rectangular opening defining an illumination area 42R on the reticle R. A movable reticle blind 30B having an opening whose position and width in the scanning direction is variable is arranged near the fixed reticle blind 30A, and the movable reticle blind 30B is provided at the start and end of scanning exposure. By further restricting the illumination area 42R via B, unnecessary portions of the exposure are prevented.

On the optical path of the exposure light IL behind the second relay lens 28 B constituting the relay optical system, the exposure light IL passing through the second relay lens 28 B is directed toward the reticle R. A bending mirror M that reflects light is disposed, and a condenser lens 32 is disposed on the optical path of the exposure light I behind the mirror M.

Furthermore, an integrator sensor 46 and a reflected light monitor 47 are arranged on one of the optical paths that are bent vertically by the beam splitter 26 in the illumination optical system 12 and on the other optical path. The integrator sensor 46 and the reflected light monitor 47 have high sensitivity in the deep ultraviolet region and the vacuum ultraviolet region and have a high response frequency for detecting the pulse light emission of the light source device 16. A type diode is used. Note that a semiconductor light-receiving element having a GaN-based crystal can also be used as the integrator sensor 46 and the reflected light monitor 47. In the above configuration, the entrance surface of the fly-eye lens system 22, the arrangement surface of the movable reticle blind 30 B, and the pattern surface of the reticle R are optically set to be conjugate with each other, and the emission of the fly-eye lens system 22 is performed. The light source surface formed on the surface side and the Fourier transform plane (exit pupil plane) of the projection optical system PL are optically set to be conjugate to each other, and form a Koehler-single illumination system.

The operation of the illumination optical system 12 configured as described above will be briefly described. A laser beam LB pulsed from the light source device 16 is incident on the beam shaping optical system 18, where the laser beam LB at the rear is formed. After its cross-sectional shape is shaped so as to efficiently enter the eye lens system 22, the light enters the fly-eye lens system 22. As a result, a secondary light source is formed on the exit-side focal plane of the fly-eye lens system 22 (the pupil plane of the illumination optical system 12). The exposure light IL emitted from the secondary light source passes through one of the aperture stops on the illumination system aperture stop plate 24 and then reaches a beam splitter 26 having a large transmittance and a small reflectance. Exposure light IL transmitted through the beam splitter 26 passes through the first relay lens 28 A, passes through the rectangular opening of the fixed reticle blind 30 A and the movable reticle blind 30 B, and then passes through the second relay lens. After passing through 28B, the optical path is bent vertically downward by the mirror M, and then passes through the condenser lens 32, on the reticle R held on the reticle stage RST. The rectangular illumination area 42R is illuminated with a uniform illuminance distribution.

On the other hand, the exposure light IL reflected by the beam splitter 26 is received by the integrator sensor 46 via the condenser lens 44, and the photoelectric conversion signal of the integrator sensor 46 is converted to a peak hold circuit (not shown) and an AZD. It is supplied to the main controller 50 as an output DS (digital / pulse) via a converter. The correlation coefficient between the output DS of the integrator sensor 46 and the illuminance (exposure amount) of the exposure light I on the surface of the wafer W is obtained in advance, and the storage device provided in the main controller 50 is provided. As stored in memory 51.

The illuminated area 42 R on the reticle R illuminates and the reflected light flux reflected on the pattern surface of the reticle (the lower surface in Fig. 1) passes through the condenser lens 32 and the relay optical system in the opposite direction to the front. The light is reflected by the beam splitter 26 and received by the reflected light monitor 47 via the condenser lens 48. When the Z tilt stage 58 is below the projection optical system PL, the exposure light IL transmitted through the pattern surface of the reticle is applied to the projection optical system PL and the surface of the wafer W (or a reference mark plate described later). The reflected light flux passes through the projection optical system P, passes through the reticle R, the condenser lens 32, and the relay optical system in the reverse direction, and is reflected by the beam splitter 26. The reflected light is received by the reflected light monitor 47 via the optical lens 48. In addition, although each optical element disposed between the beam splitter 26 and the wafer W has an anti-reflection film formed on its surface, the exposure light IL is slightly reflected on its surface, and these reflected lights are also reflected. The light is received by the optical monitor 47. The photoelectric conversion signal of the reflected light monitor 47 is supplied to the main controller 50 via a peak hold circuit (not shown) and an AZD converter. In this embodiment, the reflected light monitor 47 is mainly used for measuring the reflectance of the wafer W. Note that the reflected light monitor 47 may be used for the preliminary measurement of the transmittance of the reticle R.

As a fly-eye lens system, for example, Japanese Patent Application Laid-Open No. Hei 11-235289 and US Patent No. 5,307,207 corresponding thereto, Japanese Patent Application Laid-Open No. The double fly-eye lens system disclosed in, for example, Japanese Patent Application Laid-Open Publication No. Heisei 5 and corresponding US Pat. No. 5,534,970, etc. may be adopted to constitute a Koehler illumination system. To the extent permitted by the national laws of the designated or designated elected country in the international application, the disclosures in each of the aforementioned gazettes and corresponding US patents are incorporated herein by reference to constitute a part of the description of this specification.

In addition, a diffractive optical element may be used together with the fly-eye lens system 22. When such a diffractive optical element is used, the light source device 16 and the illumination optical system 12 may be connected via a diffractive optical element. That is, a diffractive optical element in which a diffractive element is formed corresponding to each fiber of a bundle fiber is provided in the beam shaping optical system 18, and a laser beam output from each fiber is diffracted to form a fly-eye lens system 2. It may be superimposed on the incident surface of No. 2. In the present embodiment, the output end of the bundle-one fiber may be arranged on the pupil plane of the illumination optical system. In this case, however, the first function (decimation) causes the intensity distribution on the pupil plane (ie, the secondary The shape and size of the light source), which may differ from the optimal shape and size for the reticle pattern. Therefore, it is desirable to superimpose the laser beam from each fiber on the pupil plane of the illumination optical system or the entrance plane of the optical integrator using the above-described diffractive optical element.

In any case, in the present embodiment, even if the distribution of the light output portion of the bundle-one fiber 1 73 changes due to the first function of the light amount control device 16 C described above, the reticle R The uniformity of the illuminance distribution can be sufficiently ensured on both the pattern surface (object surface) and the surface (image surface) of the wafer W.

A reticle R is mounted on the reticle stage RST, and is held by suction via a vacuum chuck (not shown). The reticle stage RST can be finely driven in a horizontal plane (XY plane), and is moved in the scanning direction (here, the Y direction, which is the horizontal direction in FIG. 1) by a reticle stage driving unit 49. Scanning is performed within a fixed stroke range. The position and the rotation amount of the reticle stage RST during this scanning are measured by an external laser interferometer 54 R via a movable mirror 52 R fixed on the reticle stage RST, and the laser interferometer 54 The measured value of R is supplied to the main controller 50.

The material used for the reticle R needs to be properly used depending on the wavelength of the exposure light IL. That is, when using exposure light with a wavelength of 193 nm, synthetic quartz can be used, but when using exposure light with a wavelength of 157 nm, synthetic quartz doped with fluorite or fluorine is used. , Or must be formed of quartz or the like. The projection optical system P L is, for example, a telecentric reduction system on both sides, and is composed of a plurality of lens elements 70 a, 70 b,... Having a common optical axis in the Z-axis direction. Further, as the projection optical system PL, one having a projection magnification) 8 of, for example, 1Z4, 15 or 16 is used. Therefore, as described above, when the illumination area 42 R on the reticle R is illuminated by the exposure light I, the pattern formed on the reticle R is projected by the projection optical system PL at a projection magnification β. The reduced image is projected and transferred to a slit-shaped exposure area 42 W on a wafer W having a resist (photosensitive agent) applied on the surface.

In the present embodiment, among the above lens elements, a plurality of lens elements are independently movable. For example, the uppermost lens element 70a closest to the reticle stage RS is held by a ring-shaped support member 72. This support member 72 is a telescopic drive element, for example, a piezo element 74a. , 74 b, 74 c (the drive element 74 c on the back side of the drawing is not shown), and is supported at three points and connected to the lens barrel 76. The driving elements 74a, 74b, and 74c allow the three points around the lens element 70a to be independently moved in the optical axis AX direction of the projection optical system PL. I have. That is, the lens element 70a can be translated along the optical axis AX according to the displacement of the driving elements 74a, 74b, and 74c, and can be moved perpendicularly to the optical axis AX. It can also be arbitrarily inclined with respect to a simple plane. The voltages applied to these drive elements 74 a, 74 b, and 74 c are controlled by the imaging characteristic correction controller 78 based on a command from the main controller 50, whereby The displacement amounts of the drive elements 74a, 74b, and 74c are controlled. In FIG. 1, the optical axis AX of the projection optical system PL refers to the optical axis of the lens element 70 b fixed to the lens barrel 76 and other lens elements (not shown).

Further, in the present embodiment, the relationship between the vertical amount of the lens element 70a and the change amount of the magnification (or distortion) is obtained in advance by an experiment, and this is stored in, for example, the memory 51, and the correction is mainly performed. The controller 50 calculates the vertical amount of the lens element 70a from the magnification (or device! ^ 1) corrected by the controller 50, and gives instructions to the imaging characteristic correction controller 78 to drive the drive elements 74a, 7a. By driving 4b and 74c, magnification (or day! ^ 1) correction is performed. That is, in the present embodiment, the imaging characteristic of the projection optical system PL is corrected by the imaging characteristic correction controller 78, the driving elements 74a, 74b, 74c, and the main controller 50. An imaging characteristic correction device is configured.

The relationship between the vertical amount of the lens element 70a and the amount of change in magnification or the like may use an optically calculated value. In this case, the vertical amount of the lens element 70a and the amount of change in magnification may be used. The experiment process for finding the relationship can be omitted.

As described above, the lens element 70a closest to the reticle R is movable.However, this element 70a has a greater effect on magnification and distance! If one of the controls is selected and the same condition is satisfied, any lens element may be configured to be movable for adjusting the lens interval instead of the lens element 70a. good.

It should be noted that at least one lens element other than the lens element 70a is moved to obtain other optical characteristics such as curvature of field, astigmatism, coma, or spherical aberration. And so on. In addition, a sealing chamber is provided between specific lens elements near the center of the projection optical system PL in the optical axis direction, and the pressure of gas in the sealing chamber is adjusted by a pressure adjusting mechanism such as a bellows pump. An imaging characteristic correction mechanism that adjusts the magnification of the projection optical system PL may be provided, or, for example, an aspherical lens is used as a part of the lens elements constituting the projection optical system PL, and this is rotated. You may do it. In this case, so-called rhombic distortion can be corrected. Alternatively, a parallel plane plate may be provided in the projection optical system PL, and the imaging characteristic correction mechanism may be configured by a mechanism that tilts or rotates the parallel flat plate.

When a laser beam with a wavelength of 193 nm is used as the exposure light I, synthetic quartz / fluorite or the like should be used as each lens element (and the above-mentioned parallel flat plate) constituting the projection optical system PL. However, when laser light having a wavelength of 157 nm is used, fluorite is used for all materials such as lenses used in the projection optical system PL.

In the present embodiment, an atmospheric pressure sensor 77 that measures the atmospheric pressure in the chamber 11 is provided. The measured value of the atmospheric pressure sensor 77 is supplied to the main controller 50, and the main controller 50 uses the standard atmospheric pressure sensor 77 based on the measured value of the atmospheric pressure sensor 77. Calculate the fluctuation of the atmospheric pressure from the atmospheric pressure and the atmospheric pressure fluctuation of the imaging characteristics of the projection optical system PL. Then, an instruction is given to the imaging characteristic correction controller 78 in consideration of the variation in the atmospheric pressure to correct the imaging characteristic of the projection optical system PL.

The above-mentioned change of the oscillation wavelength is performed by the laser controller 16B, based on an instruction from the main controller 50, by actively controlling the temperature of the etalon element constituting the beam monitor mechanism 164, and The set wavelength (target wavelength) at which the resonance wavelength (detection reference wavelength) at which the transmittance of the element is maximized is changed, and the oscillation wavelength of the DFB semiconductor laser 16 OA matches the changed set wavelength. As the DFB semiconductor This is easily achieved by feedback controlling the temperature of the laser 160A. The method of calculating the atmospheric pressure fluctuation, the irradiation fluctuation, and the like of the imaging characteristics by the main controller 50 is disclosed in detail in, for example, Japanese Patent Application Laid-Open No. 9-213139, Since it is publicly known, detailed description is omitted here.

The XY stage 14 is driven two-dimensionally by a wafer stage drive unit 56 in the Y direction, which is the scanning direction, and the X direction, which is orthogonal to the scanning direction (the direction orthogonal to the plane of FIG. 1). A wafer W is held on a Z tilt stage 58 mounted on the XY stage 14 by vacuum suction or the like via a wafer holder (not shown). The Z-tilt stage 58 adjusts the position of the wafer W in the Z direction (the position of the wafer) by, for example, three actuators (piezo elements or voice coil motors), and moves the XY plane (projection optical system PL). It has a function of adjusting the inclination angle of the wafer W with respect to the image plane of The position of the XY stage 14 is measured by an external laser interferometer 54 W through a movable mirror 52 W fixed on the Z tilt stage 58, and the measurement of the laser interferometer 54 W is performed. The value is supplied to the main controller 50.

Here, the moving mirror actually has an X moving mirror having a reflecting surface perpendicular to the X axis and a Y moving mirror having a reflecting surface perpendicular to the 丫 axis. X-axis position measurement, Y-axis position measurement, and rotation (including jogging, pitching, and rolling) measurements are provided, respectively. In Figure 1, these are typically used as moving mirrors. Shown as 52 W, laser interferometer 54 W. In addition, on the Z tilt stage 58, a light receiving surface having the same height as the exposure surface of the wafer W is provided near the wafer W, and the light amount of the exposure light IL passing through the projection optical system PL is detected. Dose monitor 59 is provided. The irradiation amount monitor 59 has a rectangular housing in a plan view extending in the X direction around the exposure area 42 W, which is larger than the exposure area 42 W. Is formed. This opening actually forms the ceiling surface of the housing It is formed by removing a part of the light shielding film formed on the upper surface of the light receiving glass made of quartz or the like. An optical sensor having a light receiving element such as a Si-type PIN-type photodiode is disposed directly below the opening via a lens.

The irradiation amount monitor 59 is used for measuring the intensity of the exposure light I irradiated to the exposure area 42 W. A light amount signal corresponding to the amount of light received by the light receiving element constituting the irradiation amount monitor 59 is supplied to the main controller 50.

The optical sensor does not necessarily need to be provided inside the Z tilt stage 58, and an optical sensor is provided outside the Z tilt stage 58, and the illumination light beam relayed by the relay optical system is used for optical fiber or the like. Needless to say, the light sensor may be guided to the optical sensor via the optical sensor.

On the Z tilt stage 58, a reference mark plate FM used for performing a reticle alignment or the like described later is provided. The surface of the reference mark plate FM is substantially the same height as the surface of the wafer W. Reference marks such as a reticle alignment reference mark and a baseline measurement reference mark are formed on the surface of the reference mark plate FM.

Although not shown in FIG. 1 from the viewpoint of avoiding complication of the drawings, the exposure apparatus 10 actually has a reticle alignment system for performing reticle alignment.

When aligning the reticle R, first, the main controller 50 drives the reticle stage RST and the XY stage 14 via the reticle stage drive unit 49 and the wafer stage drive unit 56, thereby forming a rectangular shape. A reticle alignment reference mark on the reference mark plate FM is set in the exposure area 4 2 W, and the reticle R and Z tilt tilt so that the reticle mark image on the reticle R almost overlaps the reference mark The position relative to the stage 58 is set. In this state, both marks are imaged by the main controller 50 using a reticle alignment system, and the main controller 50 processes the image signals and projects the reticle marks onto the corresponding reference marks. image Calculate the amount of displacement in the X and Y directions.

In addition, based on the contrast information included in the detection signal (image signal) of the projected image of the reference mark obtained as a result of the alignment of the reticle, focus offset / leveling offset (focal position of the projection optical system PL) , Image plane tilt, etc.).

Also, in the present embodiment, at the time of the above reticle alignment, the main controller 50 controls the baseline amount of the wafer-side office-side alignment sensor (not shown) provided on the side surface of the projection optical system PL. Measurement is also performed. In other words, a reference mark for baseline measurement is formed on the reference mark plate F in a predetermined positional relationship with respect to the reference mark for reticle alignment, and the reticle mark is provided via the reticle alignment system. When measuring the amount of misalignment of the alignment sensor, the amount of misalignment of the baseline measurement reference mark with respect to the detection center of the alignment sensor is measured via the alignment sensor on the wafer side. The line amount, that is, the relative positional relationship between the reticle projection position and the alignment sensor is measured.

Further, as shown in FIG. 1, the exposure apparatus 10 of the present embodiment has a light source whose on / off is controlled by the main controller 50, and a large number of light sources are directed toward the image forming plane of the projection optical system PL. An irradiation optical system 60a for irradiating an imaging light beam for forming an image of a pinhole or a slit from an oblique direction with respect to the optical axis AX, and a reflection light beam of the imaging light beam on the surface of the wafer W An obliquely incident light type multi-point focal position detection system (focus sensor) composed of a light receiving optical system 60b for receiving light is provided. The main controller 50 controls the inclination of the reflected light flux of the parallel flat plate (not shown) in the light receiving optical system 60b with respect to the optical axis, so that the focus detection system (6 Calibration is performed by giving offsets to 0 a and 60 b). As a result, the image plane of the projection optical system PL and the surface of the wafer W coincide with each other within the range (width) of the depth of focus within the above-described exposure area 42 W. This implementation The detailed configuration of the multi-point focal position detection system (focus sensor) similar to the embodiment is described in, for example, Japanese Patent Application Laid-Open No. Hei 6-284403 and US Patent Nos. 5,448,333 corresponding thereto. No. 2, etc. To the extent permitted by the national laws of the designated or designated elected country in this international application, the disclosures in the above publications and U.S. patents are incorporated herein by reference.

At the time of scanning exposure or the like, the main controller 50 sets the Z tilt stage so that the defocus becomes zero based on the defocus signal (defocus signal) from the light receiving optical system 60b, for example, the S-carp signal. The autofocus (automatic focusing) and the autoleveling are executed by controlling the Z position 8 through a drive system (not shown). The reason why a parallel flat plate is provided in the light receiving optical system 60b to give an offset to the focus detection system (60a, 60b) is that, for example, the lens element 70a is used for magnification correction. When the projection optical system PL absorbs the exposure light IL, the re-imaging characteristics change and the position of the imaging surface fluctuates. This is because it is necessary to apply an offset to the focal point and to make the focus position of the focus detection system coincide with the position of the imaging plane of the projection optical system PL. For this reason, in the present embodiment, the relationship between the vertical amount of the lens element 70a and the focus change amount is obtained in advance by experiments, and is stored in the memory 51, for example. The relationship between the vertical amount of the lens element 70a and the focus change amount may use a calculated value. In addition, the self-leveling may not be performed in the scanning direction, but may be performed only in the non-scanning direction orthogonal to the scanning direction.

The main controller 50 includes a so-called microcomputer (or workstation) including a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. In addition to performing the various controls described above, it controls, for example, synchronous scanning of the reticle R and the wafer W, stepping of the wafer W, exposure timing, and the like so that the exposure operation is properly performed. Further, in the present embodiment, the main control device 50 controls the scanning exposure as described later. It controls the amount of exposure in the case of light, calculates the amount of change in the imaging characteristics of the projection optical system PL by calculation, and, based on the calculation result, passes the projection optical system PL through the imaging characteristic correction controller 78. In addition to adjusting the imaging characteristics of the device, it controls the entire system. Specifically, for example, during scanning exposure, main controller 50 synchronizes with reticle R being scanned at speed V _R = V in the + 丫 direction (or one Y direction) via reticle stage RST. Te, the wafer W is against the exposure area 4 2 W via the XY stage 1 4 over丫direction (or +丫direction) = the velocity V _w) 8 ■ V (projection magnification with respect to the wafer W from the reticle R is) Reticle stage RST, レして through reticle stage drive unit 49 and wafer stage drive unit 56 based on the measured values of laser interferometers 54 R and 54 W, respectively. The position and speed of the stage 14 are controlled respectively. At the time of stepping, main controller 50 controls the position of stage 14 via wafer stage drive unit 56 based on the measured value of laser interferometer 54W.

Next, an exposure sequence when a reticle pattern is exposed on a predetermined number (Ν) of wafers W in the exposure apparatus 10 of the present embodiment will be described focusing on the control operation of the main controller 50.

First, the preconditions will be described.

① Shot map data is prepared in advance based on the shot arrangement, shot size, exposure order of each shot, and other necessary data input from the input / output device 62 (see Fig. 1) by the operator. (Data defining the exposure order and scanning direction of each shot area) are created and stored in the memory 51 (see FIG. 1).

② In addition, the output of the integrator sensor 46 is pre-calibrated against the output of a reference illuminometer (not shown) installed on the tilt stage 58 at the same height as the image plane (ie, the surface of the wafer). (Calibration). Calibration of the Integra sensor 46 means that the output of the Integra sensor 46 is Obtaining a conversion coefficient (or conversion function) for converting to light quantity. When this conversion coefficient is used, the amount of exposure (energy) given to the image plane can be indirectly measured from the output of the integrator sensor 46.

③ In addition, in response to the output of the integrator sensor 46 after the above calibration is completed, the energy monitor in the beam monitor mechanism 164 and the photoelectric conversion elements 1.80, 18 in the optical amplifier 161 1 and the outputs of the photoelectric conversion elements 18 2 in the wavelength converter 16 3 are also calibrated, and the correlation coefficient of each sensor output with respect to the output of the integrator sensor 46 is also obtained in advance. Is stored.

④ Furthermore, the output of the reflected light monitor 47 is calibrated against the output of the integrator sensor 46 after the above calibration is completed, and the output of the integrator sensor 46 and the output of the reflected light monitor 47 are compared. It is assumed that the number of relations is obtained in advance and stored in the memory 51.

First, the lighting conditions (numerical aperture N. の of the projection optical system, the shape of the secondary light source (type of aperture stop 24), the coherence Exposure conditions, including factors and reticle pattern types (contact holes, line and space, etc.), reticle types (phase difference reticle, half I-one reticle, etc.) and minimum line width or exposure tolerance, etc. In response to this input, the main controller 50 sets the aperture stop (not shown) of the projection optical system PL, selects and sets the aperture of the illumination system aperture stop plate 24, and responds to the registry sensitivity. Set the target integrated exposure amount (the amount corresponding to the set light amount). At this time, at the same time, the main controller 50 turns on and off the output of the bundle-one fiber 173 to make the output light amount from the light source device 16 for obtaining the target integrated exposure amount substantially coincide with the set light amount. Is selected, and this selection command is given to the light quantity control device 16C. Thus, almost at the same time as the emission of the laser light source 16 OA during the scanning exposure to be described later, the light quantity control device 16 C causes the fiber amplifiers 17 1 1 _{n of} each channel to respond to the selection command by the first function described above. Is turned on and off, and the exposure Will be roughly adjusted.

Next, main controller 50 loads reticle R to be exposed onto reticle stage R ST using a reticle loader (not shown).

Next, as described above, reticle alignment is performed using the reticle alignment system, and baseline measurement is performed.

Next, main controller 50 instructs a wafer transfer system (not shown) to replace wafer W. As a result, the wafer is exchanged (if there is no wafer on the stage, a simple wafer load) is performed by a wafer transfer system and a wafer transfer mechanism (not shown) on the XY stage 14. The so-called search element and finer disclosed in Japanese Patent Application No. 061 and Japanese Patent Application Laid-Open No. Hei 9-136202 and U.S. Pat. (For example, statistics using the least squares method disclosed in Japanese Patent Application Laid-Open No. 61-44492 and corresponding US Pat. Nos. 4,780,617). A series of alignment processes, such as Enhancement, Global-Alignment (EGA), etc., that determine the array coordinates of all shot areas on the wafer W using a biological method. These wafer exchange and wafer alignment are performed in the same manner as in a known exposure apparatus. To the extent permitted by the national laws of the designated or designated elected country in this international application, the disclosures in the above publications and corresponding U.S. patent applications and U.S. patents shall be incorporated by reference. Department.

Next, based on the alignment result and the shot map data, an operation of moving the wafer W to a scanning start position for exposure of each shot area on the wafer W and the above-described scanning exposure operation are described. The reticle pattern is repeatedly transferred to a plurality of shot areas on the wafer W by a step-and-scan method. During this scanning exposure, the main controller 50 applies the target integrated exposure amount determined according to the exposure conditions and the resist sensitivity to the wafer W, so that the output of the integrator sensor 46 is monitored while the light amount controller 50 is monitored. Give a command to 16 C. This allows light In the amount control device 16C, the coarse adjustment of the exposure amount is performed by the first function described above, and the laser beam (light beam) from the light source device 16 is controlled by the second and third functions described above. It controls the frequency and peak power of ultraviolet pulse light, and performs fine adjustment of the exposure.

Further, the main controller 50 controls the illumination system aperture stop plate 24 via the driving device 40, and further controls the opening / closing operation of the movable reticle blind 30B in synchronization with the operation information of the stage system. .

When the exposure for the first wafer W is completed, main controller 50 instructs a wafer transfer system (not shown) to replace wafer W. As a result, the wafer is exchanged by the wafer transfer system and the wafer transfer mechanism (not shown) on the XY stage 14, and thereafter, the search alignment and the fine alignment are performed on the replaced wafer in the same manner as described above. Perform In this case, the main controller 50 causes the irradiation fluctuation of the imaging characteristics (including the focus fluctuation) of the projection optical system PL from the start of the exposure of the first wafer W to the integrator sensor 46 and the reflected light monitor. A command value, which is obtained based on the measurement value of 47 and corrects this irradiation variation, is given to the imaging characteristic correction controller 78 and an offset is given to the light receiving optical system 60b. The main controller 50 also obtains the atmospheric pressure fluctuation of the imaging characteristics of the projection optical system PL based on the measurement value of the atmospheric pressure sensor 77, and issues a command value for correcting this irradiation fluctuation. The offset is given to the imaging characteristic correction controller 78 and the light receiving optical system 60b.

Then, similarly to the above, the reticle pattern is transferred to a plurality of shot areas on the wafer W by a step-and-scan method. When the exposure of the second wafer is completed, the wafer exchange and the step-and-scan exposure are sequentially repeated in the same manner as described above.

By the way, when performing the exposure on the N wafers W, the main controller 50 controls the laser controller 16 B based on the monitoring result of the beam monitor mechanism 16 4. Feedback control is performed to maintain the oscillation wavelength of the laser light source 16 OA stably at the set wavelength via the. For this reason, generation of aberration (imaging characteristics) of the projection optical system PL due to wavelength fluctuation or its fluctuation is prevented, and the image characteristics (optical characteristics such as image quality) do not change during pattern transfer.

On the other hand, the main controller 50 gives instructions to the imaging characteristic correction controller 44 to drive the drive elements 74a, 74b, and 74c, and the above-described atmospheric pressure fluctuation component of the projection optical system PL. Instead of compensating for environmental fluctuations including the following, at predetermined timings after exposure of the first wafer W is started, the atmospheric pressure, temperature, and scale from the standard state are determined based on the measurement values of the environmental sensors 77. Degrees of change, etc. are calculated, and the amount of wavelength change for almost canceling the environmental change of the imaging characteristics of the projection optical system PL due to the change of the atmospheric pressure, temperature, humidity, etc. is calculated, and the amount of change in wavelength is calculated. The oscillation wavelength of the laser light source 16 OA may be positively changed accordingly. The environment sensor 77 may be a sensor that detects atmospheric pressure.

Such a change of the oscillation wavelength is performed based on an instruction from the main controller 50, in which the laser controller 16B actively controls the temperature of the etalon element constituting the beam monitor mechanism 164 to transmit the etalon element. Change the set wavelength (target wavelength) at which the resonance wavelength (detection reference wavelength) at which the efficiency becomes the maximum is adjusted, and make sure that the oscillation wavelength of the DFB semiconductor laser 160 A matches the changed set wavelength. This is easily achieved by feedback controlling the temperature of the DFB semiconductor laser 16 OA. As a result, while the exposure apparatus 10 is operating, fluctuations in the imaging characteristics such as aberrations, projection magnifications, and focal positions of the projection optical system PL caused by changes in atmospheric pressure, temperature, humidity, and the like are simultaneously canceled. can do. That is, in response to the change of the oscillation wavelength of the DFB semiconductor laser 16 OA, it is possible to make a state as if the environment did not fluctuate from the standard state (ie, a state in which the fluctuations in the optical performance were offset). .

Such a wavelength change, more specifically, a change in the set wavelength, and the change after this change The control of stabilizing the oscillation wavelength of the laser light source 16 OA based on the set wavelength is performed in the following cases.

For example, taking atmospheric pressure as an example, the standard atmospheric pressure is usually set to the average atmospheric pressure of the delivery destination (eg, factory) where the exposure apparatus is installed. Therefore, when there is an elevation difference between the assembly site where the exposure apparatus is manufactured and the destination where the exposure apparatus is installed (relocation place), for example, the projection optical system and the like are operated under standard atmospheric pressure (such as average atmospheric pressure). As if installed, the exposure wavelength was shifted by the wavelength corresponding to the elevation difference at the assembly site, and then the projection optical system was adjusted.At the relocation site, the wavelength was returned to the exposure wavelength, or assembly was performed. On the ground, the adjustment of the projection optical system is performed under the exposure wavelength, and the exposure wavelength is shifted at the relocation site so as to offset the elevation difference. The same can be said for other environmental conditions, such as temperature and humidity. This offsets fluctuations in the imaging characteristics (such as aberrations) of the projection optical system PL caused by differences in elevation and pressure between the assembly site and the delivery destination, as well as differences in the environment (atmosphere in the clean room). It is possible to shorten the time required for starting up the exposure apparatus at the delivery destination. Furthermore, during operation of the exposure device, fluctuations in the projection optical system PL caused by changes in atmospheric pressure, etc., such as aberration, projection magnification, and focal position, can be offset, and the pattern image can always be obtained in the best imaging state. Transfer onto a substrate becomes possible.

As described above, in the present embodiment, for example, changing the wavelength of the illumination light by the projection optical system and changing the installation environment (pressure, temperature, humidity, etc. of the surrounding gas) of the projection optical system are not possible. The fact that they are substantially equivalent is used. At this time, when the type of the glass material of the refraction element of the projection optical system is single, the equivalence is completely established, and even when there are a plurality of types of glass materials, the equivalence is almost satisfied. Therefore, by changing only the wavelength of the illumination light using the change characteristic of the refractive index of the projection optical system (particularly the refractive element) with respect to the installation environment, it is substantially equivalent to the case where the installation environment of the projection optical system changes. Can be realized.

The standard atmospheric pressure may be set arbitrarily, but for example, the optical performance of the projection optical system is the best. It is desirable that the atmospheric pressure be a reference when the adjustment is made so that the variation in the optical performance of the projection optical system or the like becomes zero at the standard atmospheric pressure. When the projection optical system PL is installed in an atmosphere other than air, the atmospheric pressure is the pressure of the atmosphere (gas) around the projection optical system PL. That is, in this specification, the atmospheric pressure has a normal meaning, that is, wider than the pressure of the atmosphere (air) and includes the pressure of the atmospheric gas.

In the main controller 50, if there is an environmental change in the imaging characteristic of the projection optical system PL that cannot be canceled due to the above-mentioned wavelength change, the main controller 50 sets the degree of change of the set wavelength. In each case, the driving elements 74a, 74b, and 74c are driven via the imaging characteristic correction controller 78 to exclude environmental fluctuations in the projection optical system PL that are corrected by changing the set wavelength. Correct the imaging characteristic fluctuation. As a result, most of the environmental fluctuations in the imaging characteristics of the projection optical system PL are re-corrected by changing the set wavelength, and the remaining environmental fluctuations and irradiation fluctuations of the projection optical system PL are formed. The correction is performed by driving the drive elements 74 a, 74 b, and 74 c by the image characteristic correction controller 78. As a result, high-precision exposure is performed with the imaging characteristics of the projection optical system PL almost completely corrected.

Further, the main controller 50 may correct the imaging characteristic fluctuation in consideration of the environmental fluctuation during the change of the set wavelength. The change of the set wavelength is performed at the above-mentioned predetermined timing, but if the change interval of the set wavelength is long, fluctuations in the atmospheric pressure, temperature, humidity, etc. occur during that time. Variations in the imaging characteristics of the optical system can be corrected.

Here, the predetermined timing may be timing each time exposure of a predetermined number of wafers W is completed, or timing each time exposure of one shot on the wafer W is completed. Here, the predetermined number may be one, or may be a number corresponding to one lot.

Alternatively, the predetermined timing is a timing every time the exposure condition is changed. There may be. Further, the change of the exposure condition includes not only the change of the illumination condition but also all the cases where the condition regarding the exposure in a broad sense such as a change of a reticle is changed. For example, if the wavelength is changed in parallel with the change of the reticle and the change of the aperture stop of the illumination system during the so-called double exposure, there is almost no time loss, so that a decrease in throughput can be prevented.

Alternatively, the predetermined timing may be a timing at which a change in a physical quantity such as atmospheric pressure obtained based on the measurement value of the environment sensor 77 changes by a predetermined amount or more, or calculates the optical performance of the projection optical system PL. It may be performed almost in real time according to the interval (for example, number; s). Alternatively, the predetermined timing may be a timing at a predetermined time interval.

Further, it is possible to cope with the problem by changing the wavelength of the laser beam, including the correction of the irradiation variation. At this time, an irradiation variation model may be obtained by experiment or simulation for each of a plurality of representative wavelengths. Here, when the changed wavelength is between the wavelengths for which the irradiation variation model is obtained, it is desirable to calculate the imaging characteristic or the amount of variation thereof by, for example, interpolation calculation.

In addition, the sensitivity characteristic of the resist (photosensitive agent) applied on the wafer W may change due to the wavelength shift. In this case, the main controller 50 performs the integration described later according to the change in the sensitivity characteristic. It is desirable to control the exposure amount by changing at least one of the exposure parameters, that is, the scanning speed, the width of the illumination area, the intensity of the illumination light, and the oscillation frequency. It is preferable to determine the sensitivity characteristics of the resist by experiments or simulations corresponding to a plurality of representative wavelengths, and when the changed wavelength is between the wavelengths for which the sensitivity characteristics were determined, For example, it is desirable to calculate the sensitivity characteristic by interpolation calculation or the like.

The above-described coarse adjustment of the exposure amount (light amount) may be performed by performing test emission before actual exposure, and performing control with an accuracy of 1% or less with respect to the exposure amount set value. The dynamic range of the coarse adjustment of the exposure amount according to the present embodiment is in the range of 1 to 1/128. Although it can be set within the range, the required dynamic range is typically about 1 to 1 Z7, so the number of channels (the number of optical fibers) for which the optical output should be turned on is 128 to 8 What is necessary is to perform by controlling between. As described above, in the present embodiment, the coarse adjustment of the exposure amount according to the difference in the resist sensitivity or the like for each wafer can be accurately performed by controlling the exposure amount by individually turning on / off the light output of each channel. .

Therefore, in this embodiment, an energy coarse adjuster such as an ND filter used in a conventional excimer laser exposure apparatus is not required.

In addition, the light amount control by the second and third functions by the above-described light amount control device 16C has characteristics that the control speed is fast and the control accuracy is high. It is possible to surely satisfy the required control requirements.

In other words, the dynamic range is a requirement for exposure control to correct the process variation in the shot area (for each chip) caused by, for example, the variation in the thickness of the resist in the same wafer. Approximately ± 10%, control to the set value within about 100 ms, which is the time of stepping between shots, Control accuracy is approximately ± 1% of the set exposure amount, and line width of one shot area is uniform Is a requirement for exposure control to realize the characteristic, the control accuracy is typically set to ± 0.2% of the set exposure within the time of 2 O msec which is the exposure time of one shot, Control speed is about 1 ms.

Therefore, in order to control the exposure amount, the light amount control device 16C only needs to perform at least one of the light amount control by the second and third functions.

In a scanning exposure apparatus having a laser light source (pulse light source) such as the exposure apparatus 10 of the present embodiment, the scanning speed (scan speed) of the wafer W is set to V _w , and the slit-shaped exposure on the wafer W is performed. Region 4 If the width in the scanning direction (slit width) of 2 W is D and the repetition frequency of the pulse of the laser light source is “, the interval at which the wafer W moves between pulse emission is V _W ZF. Exposure light IL to be irradiated per spot The number of pulses (the number of exposure pulses) N is expressed by the following equation (3).

N = DZ (V _w / F) …… (3)

Assuming that the pulse energy is P, the energy to be given per point on the wafer per unit time is expressed by the following equation (4).

E = NP = PD / (V _w / F) …… (4)

Therefore, in a scanning exposure apparatus, the exposure amount (integrated exposure amount) can be controlled by controlling any of the slit width D, the scanning speed _Vw , the pulse repetition frequency F of the laser light source, and the pulse energy P. It is. There is a difficulty in adjusting the slit width D during scanning exposure due to the problem of response speed, so control either the scanning speed V _w , the pulse repetition frequency F of the laser light source, or the pulse energy P Just do it.

Therefore, also in the exposure apparatus 10 of the present embodiment, the exposure light quantity may be controlled by combining any one of the light quantity control by the second and third functions of the light quantity control apparatus 16C and the scan speed. Well, of course.

For example, the exposure condition of the wafer W is changed according to the reticle pattern to be transferred onto the wafer W. For example, the intensity distribution of the illumination light on the pupil plane of the illumination optical system (ie, the shape and size of the secondary light source) is Change or insert or remove an optical filter that shields a circular area centered on the optical axis almost on the pupil plane of the projection optical system PL. The change in the exposure condition changes the illuminance on the wafer W, which also occurs due to the change in the reticle pattern. This is due to the difference in the area occupied by the light-shielding part (or transmission part) of the pattern. Therefore, when the illuminance changes due to a change in at least one of the exposure condition and the reticle pattern, at least one of the above-described frequency and peak power is controlled so that an appropriate exposure amount is given to the wafer (register). It is desirable to do. At this time, in addition to at least one of the frequency and the peak power, the scanning speed of the reticle and the wafer may be adjusted. As is clear from the above description, in the present embodiment, all of the second control device, the second control device, and the third control device are realized by the main control device 50. Of course, these control devices may be constituted by separate control devices.

As described above, the light amount control device 16C of the present embodiment described above has a light amount control function (first function) by individually turning on and off the light output from the light path, and the light output from the EOM 16C. It has a light quantity control function (second function) by frequency control of pulsed light and a light quantity control function (third function) by peak power control of pulse light output from EOM160C. since, the first function, by at least one of the second function and a third function, in addition to the stepwise light amount control by the individual on-off of the light output of the optical path 1 7 2 _n, between each stage Fine adjustment of the light intensity of light is possible by controlling at least one of the frequency and peak power of the pulsed light output from the EOM 1600C. Output light, no matter what value the set light intensity is set to. The amount can be made to match the set amount of light.

In addition, in the light quantity control device 16C, the second function and the third function allow the peak power to be further controlled in addition to the frequency control of the pulse light output from the EOM 160C. Even if the peak power of the pulse light fluctuates, accurate light quantity control can be performed.

However, the present invention is not limited to this, and the light amount control device constituting the light source device according to the present invention may have at least one of the first to third functions.

According to the exposure apparatus 10 according to this embodiment, the main controller 50 performs the above-described absolute wavelength calibration and subsequent set wavelength calibration prior to exposure, and sets the set wavelength during the exposure. The calibration is completed via the laser controller 16B based on the monitoring result of the beam monitor mechanism. Feedback control of the temperature and current of the light source 16 OA. In other words, the main controller 50 performs wavelength stabilization control for surely maintaining the center wavelength of the laser beam at the predetermined set wavelength based on the monitoring result of the beam monitor mechanism 164 after the set wavelength calibration is completed. While irradiating the reticle R with a laser beam and transferring the pattern of the reticle R to the wafer W via the projection optical system PL, high-precision exposure that is less affected by temperature fluctuations in the atmosphere is possible. become.

Further, according to the exposure apparatus 10, the main controller 50 sets the environment (standard state) from the standard state based on the measurement value of the environment sensor 77 at each of the above-mentioned predetermined timings after the exposure of the wafer W is started. Calculation of a wavelength change amount for almost canceling out a change in the imaging characteristics of the projection optical system PL due to a change in the atmospheric pressure, temperature, humidity, and the like, and changing the set wavelength according to the wavelength change amount. . As a result, various aberrations of the projection optical system PL are corrected at the same time, and the main controller 50 sets the center wavelength of the laser beam to a predetermined value by using the beam monitor mechanism 164 based on the set wavelength after the change. The reticle R is irradiated with a laser beam and exposed, that is, the reticle pattern is transferred onto the wafer W via the projection optical system PL while performing wavelength stabilization control so as to reliably maintain the wavelength. In this case, as a result, exposure can be performed with high accuracy in a state where there is no change in the environment (ie, a state in which the change in optical performance has been offset).

Also, in the exposure apparatus 10 of the present embodiment, the main controller 50 changes the drive elements 74 a, 74 b, and 7 via the imaging characteristic correction controller 78 every time the set wavelength is changed. 4 Drive c to correct the imaging characteristic fluctuation except for the environmental fluctuation of the projection optical system PL that is corrected by changing the set wavelength. As a result, most of the environmental fluctuations in the imaging characteristics of the projection optical system PL are corrected by changing the set wavelength, and the remaining environmental fluctuations, irradiation fluctuations, temperature fluctuations, and the like of the projection optical system PL are corrected. The correction is made by driving the driving elements 74a, 74b, and 74c by the imaging characteristic correction controller 78. As a result, a highly accurate exposure can be achieved with the imaging characteristics of the projection optical system PL almost completely corrected Light is done.

In the above embodiment, the laser light is monitored by the beam monitor mechanism 164 immediately after the laser light source 160 A in order to control the oscillation wavelength of the laser light source 16 OA. However, the present invention is not limited to this. For example, as shown by a dotted line in FIG. 5, a light beam is branched in the wavelength conversion section 163 (or behind the wavelength conversion section 163) and is split into a beam monitor mechanism 16 The beam may be monitored by the same beam monitor mechanism 18 as in 4. Then, based on the result of monitoring by the beam monitor mechanism 183, it is detected whether or not the wavelength conversion is performed accurately. Based on the result of the detection, the main controller 50 controls the laser controller 16B May be feedback controlled. Of course, the oscillation wavelength control of the laser light source 16OA may be performed using the monitoring results of both beam monitoring mechanisms. Further, when changing the set wavelength for compensating for the above-mentioned fluctuations in the environment of the projection optical system PL (for example, including at least atmospheric pressure), the detection reference wavelength of the etalon element constituting the beam monitor mechanism 183 is changed. The wavelength may be changed to the set wavelength.

Instead of the temperature dependence of the resonance wavelength of the wavelength detector described in the above embodiment, the resonator length of the Fabry-Perot etalon constituting the wavelength detector is made variable by a piezo element or the like, and the resonator length of the resonance wavelength is changed. Dependencies may be used. This makes it possible to change the wavelength at high speed.

In the above embodiment, the case where the optical output from each optical path (each channel) is turned on and off by switching the intensity of the pump light of the fiber amplifier has been described. Without limitation, for example, a mechanical or electrical shutter that blocks light incident on each optical path, or a mechanical or electrical shirt that blocks light emission from each optical path is provided. There are various possibilities.

Further, in the above embodiment, the case where the optical amplifying section 161 has an optical path of 128 channels has been described. However, the optical amplifying section may have one channel, Even in this case, the control of the light amount and the exposure amount by the frequency control and the peak power control of the pulse light output from the optical modulator such as the EOM described above can be suitably applied.

In the above embodiment, although the polarization adjustment device 1 6 D is adjusted light emitted optical fiber amplifier 1 7 1 _n into circularly polarized light, when the the polarization adjustment mutually similar elliptically polarized reduction Domaru is A combination of a half-wave plate rotating the plane of polarization, and a quarter-wave plate optically connected in series with the half-wave plate, instead of the quarter-wave plate 16 2 By using, a plurality of light beams emitted from the optical fiber amplifier 17 1 _n can be converted into linearly polarized light having the same polarization direction. Here, in the series connection of the half-wave plate and the quarter-wave plate, either of them may be arranged on the upstream side.

In the above-described embodiment, the light incident on the quarter-wave plate 16 2 is the light emitted from the optical fiber amplifier 17 1 _n , but is emitted from a plurality of optical waveguide optical fibers. A plurality of light beams may be incident on the quarter-wave plate 16 2.

In the above embodiment, the optical amplification section 16 1 has 128 channels of optical paths, and a bundle—fiber is constituted by 128 optical fibers constituting the emission ends of these optical paths. However, the number of optical paths, and thus the number of fibers forming the band roof eyer, may be arbitrarily determined, and a product to which the light source device according to the present invention is applied, for example, a specification required for an exposure apparatus (on a wafer) Illuminance), and the optical performance, that is, the transmittance of the illumination optical system and the projection optical system, the conversion efficiency of the wavelength conversion unit, the output of each optical path, and the like, may be determined. Even in such a case, the control of the light amount and the exposure amount by the frequency control and the peak power control of the pulse light output from the optical modulator can be suitably applied.

Furthermore, in the above embodiment, the wavelength of the ultraviolet light, it is assumed to be set to almost the same as A r F excimer laser or F ₂ laser wavelength, the predetermined wavelength may be arbitrary, depending on the wavelength to be the setting Then, the oscillation wavelength of the laser light source 16 OA, the configuration of the wavelength conversion unit 16 3, the harmonic magnification, and the like may be determined. The setting wavelength is an example. Alternatively, the pattern may be determined according to the design rule (line width, pitch, etc.) of the pattern to be transferred onto the wafer. In addition, the above-described exposure conditions, reticle type (phase shift type or not) May be considered.

In the above embodiment, the polarization adjusting device 16 D for aligning the polarization state of the light beam emitted from each of the optical fiber amplifiers 17 1 _n with circularly polarized light (or elliptically polarized light) is provided. Has been described by using a single quarter-wave plate 162 to emit linearly polarized light in the same direction. It is not always necessary to provide a quarter-wave plate.

《Modification》

FIG. 7 shows an example of the configuration of the optical amplifying section 161 which can eliminate the need for the polarization adjusting device and the quarter-wave plate (polarization direction changing device). In the following, in order to avoid redundant description, the same reference numerals are used for the same or equivalent components as those in the above-described embodiment, and the description thereof will be omitted or simplified.

The optical amplifier 161, shown in Fig. 7, amplifies the pulse light from the EOM 160C described above, and periodically distributes the pulse light from the EOM 160C in chronological order. It is configured to include a branching / delaying section 167 that branches (for example, 128 branches) and a fiber amplifier 190 as a plurality of optical amplifiers.

The fiber amplifier 190 is composed of an amplification fiber 175 as an optical waveguide member laid in a straight line, a pumping semiconductor laser 178 for generating pump light, and the above-described output light of the EOM 160 C and a pump. A WDM 179 is provided for combining the light with the light and supplying the combined light obtained to the fiber 175 for amplification. Then, the amplification fiber 175 and the WDM 179 are housed in a container 191.

The amplification fiber 175 is mainly composed of phosphate glass, has a core and a clad, and has two cores of Er, or Er and Yb, in a high density. A doped optical fiber is used. Such a phosphate glass optical fiber can be doped with a rare earth element such as Er at a higher density than a conventional silica glass optical fiber, and the fiber length required to obtain the same optical amplification factor is conventionally increased. About 1/100 of the silica glass optical fiber. For example, what used to be several meters to several ten meters in the past, a few centimeters to several ten centimeters is sufficient. For this reason, it is possible to lay a straight line in the amplification fiber 1 75, and in the modified example of FIG. 7 as well, the amplification fiber By laying 1 7 5, a straight line is laid. Note that a double-clad fiber structure having a double clad structure can be adopted as the amplification fiber 175.

In the fiber amplifier 190 configured as described above, the pump light generated by the pumping semiconductor laser 178 is supplied to the amplification fiber 175 via the WDM 179 and the WDM 1 When the pulsed light enters via 79 and travels through the core of the amplification fiber 175, stimulated radiation is generated, and the pulsed light is amplified. In such optical amplification, since the amplification fiber 175 is much shorter than the conventional one and has a high amplification factor, high-intensity pulse light is maintained while almost maintaining the polarization state of the pulse light at the time of incidence. Is output. In addition, since the length of the amplification fiber 175 is very short, the spread of the spectrum due to stimulated Raman scattering and self-phase modulation is also small.

In other words, when doping Er with a density of 100 times higher than that of conventional silica glass using phosphate glass, one of the factors that determine the threshold value at which stimulated Raman scattering occurs compared to conventional silica glass. The Raman gain coefficient is about twice that of this, but even with this factor in mind, it is possible to output light that is about 50 times stronger than silica glass. Further, since the gain per unit length can be made about 100 times, the fiber length necessary to obtain the same gain can be made about 1/100. Furthermore, the threshold of stimulated Raman scattering Since the value can be estimated to be inversely proportional to the fiber length, by reducing the fiber length by a factor of 100, light with an intensity of about 100 times can be output without being affected by Raman scattering.

The spread of the spectrum due to self-phase modulation is almost proportional to the length of the amplifying fiber 175, but the length of the amplifying fiber 175 is much shorter than that of the conventional one, so the spread due to the self-phase modulation is small. The spread of the vector can be suppressed sufficiently smaller than before.

Therefore, in the fiber amplifier 190 of this modified example, amplified light having higher intensity and a smaller spectrum spread than before can be obtained. Therefore, narrow-band light can be obtained efficiently.

In addition, the amplification optical fiber 175 is laid in a straight line and is housed in a substantially sealed container 191, so that the environment around the amplification optical fiber 175 is maintained substantially constant. Therefore, output light can be obtained in which the polarization state at the time of incidence is almost maintained. The pumping semiconductor laser 178 generates light having a wavelength (for example, 980 nm) shorter than the oscillation wavelength of the DFB semiconductor laser 16OA as pump light. This pump light is supplied to the amplification fiber 175 via the WDM 179, thereby exciting Er and generating a so-called inverted population of energy levels. As described above, the excitation semiconductor laser 178 is controlled by the light amount control device 16C.

Also, in this modification, in order to suppress the difference in gain between the fiber amplifiers 190, a part of the output is branched by the fiber amplifier 190, and the photoelectric conversion elements 18 provided at the respective branch ends are provided. 1 is adapted to be photoelectrically converted. Output signals of these photoelectric conversion elements 18 1 are supplied to a light quantity control device 16 C.

In the light amount control device 16C, the drive of each pumping semiconductor laser 178 is performed so that the optical output from each fiber amplifier 190 is constant (that is, balanced). The current is feedback-controlled.

Also, the light amount control device 16C monitors the light intensity of the wavelength converter 163 based on the output signal of the photoelectric conversion element 182, and the light output from the wavelength conversion unit 163 is a predetermined light output. The drive current of the semiconductor laser for excitation 178 is feedback-controlled so that

By adopting such a configuration, the amplification factor of each fiber amplifier 190 is kept constant, so that there is no uneven load between the fiber amplifiers 190 and uniform light intensity can be obtained as a whole. Can be In addition, by monitoring the light intensity in the wavelength converter 163, a predetermined predetermined light intensity can be fed back to stably obtain a desired ultraviolet light output.

The optical amplifier of FIG. 7 can be used as it is in place of the optical amplifier of FIG. 3 described above. According to such a light source device employing the optical amplifier 161 of FIG. The short amplification fiber 175 can amplify the incident light at a high amplification rate. For this reason, it is possible to supply high-intensity light to the wavelength conversion section 163 while reducing the change in the polarization state caused by passing through the amplification fiber 175. In addition, since the length of the path through which light passes during amplification becomes shorter, the spread of the spectrum due to stimulated Raman scattering and self-phase modulation can be suppressed. Therefore, it is possible to efficiently generate narrow-band wavelength converted light with a simple configuration.

In addition, since the amplification fiber 175 is laid in a straight line, it is possible to prevent the occurrence of radial stress asymmetry which may cause a change in the polarization state. Almost maintained output light can be obtained.

In addition, since the amplification fiber 175 is housed in the container 191 having a substantially closed structure, it is possible to prevent a change in the surrounding environment of the amplification fiber 175 which causes a change in the polarization state. As a result, stable wavelength conversion can be performed.

As described above, as a result, according to the light source device employing the optical amplification unit 16 1 in FIG. 7, It is not always necessary to provide a polarization adjusting device or a quarter-wave plate (polarization direction changing device).

Incidentally, the main material in the above description, as an amplification optical fiber 1 7 5, but using an optical fiber for mainly including Fosufei Bokuga lath, bismuth oxide-based glass _{_{_{(B i 2 0 3 B 2}}} 0 3) It is also possible to use an optical fiber. In the bismuth oxide glass, the erbium doping amount can be increased to about 100 times or more as compared with the conventional silica glass, and the same effect as in the case of the phosphate glass can be obtained. In this modification, an Er-doped fiber is used as the amplification fiber, but a Yb-doped fiber or another rare-earth element-doped fiber may be used. Further, the amplifying optical waveguide member is not limited to the optical fiber type member, but other members, for example, a planar waveguide type member can be used.

Although not specifically described in the above embodiment, in the case of an apparatus that performs exposure with an exposure wavelength of 193 nm or less as in this embodiment, a light beam passing portion passes through a chemical filter. clean air and dry air, N ₂ gas, young properly helium, argon, or to be allowed or flow filled with an inert gas krypton, becomes the light beam passage portion requires treatment true empty like.

The exposure apparatus of the above-described embodiment is constructed by assembling various subsystems including the respective components listed in the claims of the present application so as to maintain predetermined mechanical accuracy, electrical accuracy, and optical accuracy. Manufactured. Before and after this assembly, various optical systems such as the illumination optical system 12 and the projection optical system PL are adjusted to achieve optical accuracy (for example, optical axis alignment) before and after this assembly. Various mechanical systems are adjusted to achieve mechanical accuracy, and various electrical systems are adjusted to achieve electrical accuracy. Of these, in adjusting the characteristics of various optical systems, a high output is not required as a light source device for adjustment (for inspection), so one or a small number of fiber amplifiers 16 7 Including A light source device simplified as described above can be used. In such a case, light having a wavelength substantially the same as the wavelength of the exposure light can be easily generated and used for adjustment, so that accurate adjustment can be performed by a low-cost light source device with a simple configuration. . When simplifying to include only one fiber amplifier 167, the branching and delay unit 167 is also unnecessary.

The process of assembling the exposure apparatus from various subsystems includes mechanical connections, wiring connections of electric circuits, and piping connections of pneumatic circuits among the various subsystems. It goes without saying that there is an individual assembly process for each subsystem before the assembly process from these various subsystems to the exposure apparatus. When the process of assembling the various subsystems into the exposure equipment is completed, comprehensive adjustments are made to ensure various precisions of the entire exposure equipment. In such an overall adjustment, the above-described simplified light source device can be used if necessary. It is desirable that the exposure apparatus be manufactured in a clean room where the temperature, cleanliness, etc. are controlled.

Further, in the above-described embodiment, an example in which the light source device according to the present invention is used as a light source device that generates illumination light for exposure has been described. It can also be used as a light source device for reticle alignment. In this case, it goes without saying that the above-described simplified light source device is used.

Further, in the above embodiment, the case where the light source device according to the present invention is applied to a step-and-scan type scanning exposure apparatus has been described. However, the light source apparatus is formed on an apparatus other than the exposure apparatus, for example, a wafer. The light source device according to the present invention can also be applied to a laser repair device used for cutting a part of a circuit pattern (such as a fuse). Further, the light source device according to the present invention can be applied to an inspection device using visible light or infrared light. In this case, it is not necessary to incorporate the above-mentioned wavelength converter into the light source device. That is, the present invention is not limited to an ultraviolet laser device, and does not include a wavelength conversion unit that generates a fundamental wave in the visible or infrared region. This is also effective for a laser device.

Further, the light source device of the present invention can be used as a light source device in an apparatus other than the exposure apparatus, for example, an optical inspection apparatus. Further, the light source device of the present invention can also be used as a light source device such as a device that corrects vision by irradiating the fundus with ultraviolet light, and various devices to which an excimer laser is applied. In addition, the present invention is not limited to a step-and-scan type scanning exposure apparatus, but can be suitably applied to a stationary exposure type, for example, an exposure apparatus (eg, a stepper) of a step-and-repeat type. Further, the present invention can be applied to a step-and-stitch type exposure apparatus, a mirror projection aligner, and the like.

Note that the projection optical system and the illumination optical system described in the above embodiments are merely examples, and it is a matter of course that the present invention is not limited to these. For example, the projection optical system is not limited to the refractive optical system, but may be a reflective system composed of only a reflective optical element, or a catadioptric system having a reflective optical element and a refractive optical element (power dioptric system). . In an exposure apparatus that uses vacuum ultraviolet light (VUV light) having a wavelength of about 200 nm or less, a catadioptric system may be used as the projection optical system. Examples of the reflection bending type projection optical system include, for example, Japanese Patent Application Laid-Open No. Hei 8-171504 and US Patent Nos. 5,668,672 corresponding thereto, and Japanese Patent Application Laid-Open No. A catadioptric system having a beam splitter and a concave mirror as a reflective optical element, or a catadioptric system disclosed in US Pat. No. 2,195,955 and corresponding US Pat. Nos. 5,835,275. — 3 3 4 6 9 5 and the corresponding US Pat. No. 5,689, 3777, and Japanese Patent Application Laid-Open No. 10-309 39 and the corresponding US patent application No. 8 A catadioptric system having a concave mirror or the like can be used as a reflecting optical element without using a beam splitter as disclosed in JP 73,605 (filing date: June 12, 1997) . To the extent permitted by the national laws of the designated or designated elected States in this International Application, the above publications and their corresponding U.S. patents and The disclosure in the national patent application is incorporated herein by reference.

In addition, a plurality of refractive optical elements and two mirrors (concave mirrors) are disclosed in U.S. Pat. No. 5,488,229 and Japanese Patent Application Laid-Open No. H10-1040513. A reticle formed by a plurality of refractive optical elements, in which a primary mirror and a sub-mirror, which is a back-side mirror having a reflective surface formed on the side opposite to the incident surface of the refractive element or the plane-parallel plate, are arranged on the same axis. A catadioptric system that re-images the intermediate image of the pattern on the wafer by the primary mirror and the secondary mirror may be used. In this catadioptric system, a primary mirror and a secondary mirror are arranged following a plurality of refractive optical elements, and the illumination light passes through a part of the primary mirror and is reflected in the order of the secondary mirror and the primary mirror. It will reach the wafer through a portion. To the extent permitted by the national laws of the designated or designated elected country in this international application, the disclosures in the above US patents will be incorporated by reference into this description.

In the above embodiment, a fly-eye lens system is used as an optical integrator (homogenizer). However, a rod integrator may be used instead. In an illumination optics system using a rod integrator, the rod and integrator are arranged so that their exit surface is almost conjugate to the pattern surface of the reticle R. A fixed reticle blind 30 A or a movable reticle blind 30 B may be provided.

Of course, it is used not only for the exposure equipment used for manufacturing semiconductor devices, but also for the manufacture of displays including liquid crystal display elements, etc., and is used for the manufacture of thin film magnetic heads and exposure equipment for transferring device patterns onto glass plates. The present invention is also applicable to an exposure apparatus that transfers device patterns onto a ceramic wafer, and an exposure apparatus that is used for manufacturing an imaging device (such as a CCD), a micromachine, a DNA chip, and further, for manufacturing a reticle or a mask. can do.

《Device manufacturing method》

Next, a device using the above-described exposure apparatus and exposure method in a lithography process. An embodiment of a method for manufacturing a metal will be described.

FIG. 8 shows a flowchart of an example of manufacturing devices (semiconductor chips such as IC and LSI, liquid crystal panels, CCDs, thin-film magnetic heads, micromachines, etc.). As shown in FIG. 8, first, in step 201 (design step), a function and performance design of a device (for example, a circuit design of a semiconductor device) is performed, and a pattern design for realizing the function is performed. . Subsequently, in step 202 (mask manufacturing step), a mask on which the designed circuit pattern is formed is manufactured. On the other hand, in step 203 (wafer manufacturing step), a wafer is manufactured using a material such as silicon.

Next, in step 204 (wafer processing step), using the mask and the wafer prepared in steps 201 to 203, an actual circuit is formed on the wafer by lithography technology or the like as described later. Etc. are formed. Next, in step 205 (device assembling step), device assembly is performed using the wafer processed in step 204. Step 205 includes, as necessary, processes such as a dicing process, a bonding process, and a packaging process (chip encapsulation).

Finally, in step 206 (inspection step), an operation check test, a durability test, and the like of the device manufactured in step 205 are performed. After these steps, the device is completed and shipped.

FIG. 9 shows a detailed flow example of the above step 204 in the case of a semiconductor device. In FIG. 9, in step 2 11 (oxidation step), the surface of the wafer is oxidized. In step 2 1 (CVD step), an insulating film is formed on the wafer surface. In step 2 13 (electrode formation step), electrodes are formed on the wafer by vapor deposition. In step 2 14 (ion implantation step), ions are implanted into the wafer. Each of the above steps 211 to 2114 constitutes a pretreatment process at each stage of wafer processing. In each stage, it is selected and executed according to the required processing.

In each stage of the wafer process, when the above-described pre-processing step is completed, the post-processing step is executed as follows. In this post-processing step, first, in step 2 15 (register forming step), a photosensitive agent is applied to the wafer. Subsequently, in step 2 16 (exposure step), the circuit pattern of the mask is transferred onto the wafer by using the exposure apparatus 10 described above. Next, in Step 217 (imaging step), the exposed wafer is developed, and in Step 218 (etching step), the exposed members other than the portion where the resist remains are etched. Remove it. Then, in step 219 (registry removal step), unnecessary resist after etching is removed.

By repeating these pre-processing and post-processing steps, multiple circuit patterns are formed on the wafer.

According to the device manufacturing method of the present embodiment described above, exposure is performed using the exposure apparatus 10 of the above embodiment and the exposure method in the exposure step (step 2 16). Devices with a high degree of integration can be produced with high yield. Industrial applicability

As described above, the light source device of the present invention is suitable for performing highly accurate light quantity control. Further, the wavelength stabilization control method of the present invention is suitable for setting and maintaining the center wavelength of laser light at a predetermined set wavelength. Further, the exposure apparatus and the exposure method of the present invention are suitable for forming a fine pattern on a substrate such as a wafer with high precision in a lithographic process for manufacturing a micro device such as an integrated circuit. Further, the device manufacturing method according to the present invention is suitable for manufacturing a device having a fine pattern.

Claims

The scope of the claims

1. A light source device for generating light of a single wavelength,

A light generator for generating light of a single wavelength;

A fiber group consisting of a plurality of optical fibers arranged in parallel at an output stage of the light generating unit;

A light amount control device that controls the light amount of light output from the fiber group by individually turning on and off the light output from each of the optical fibers.

2. The light source device according to claim 1,

The light source device, wherein each of the plurality of optical fibers constituting the fiber group has at least an output end bundled to form a bundle fiber.

3. The light source device according to claim 1,

At least one fiber amplifier that can perform optical amplification is provided in a part of each optical path including the optical fibers,

A light source device, wherein the light quantity control device switches on and off the optical output from each of the optical fibers by switching the intensity of excitation light from the excitation light source of the fiber amplifier.

4. The light source device according to claim 3,

The light quantity control device switches the intensity of the excitation light by selectively setting the intensity of the excitation light from the excitation light source to one of a predetermined level and a zero level. Light source device.

5. The light source device according to claim 4,

A light source device characterized in that the light amount control device sets the intensity of the excitation light to one of a predetermined level and a zero level by turning on and off the excitation light source.

6. The light source device according to claim 3,

The light quantity control device may set the intensity of the excitation light from the excitation light source to one of a predetermined first level and a second level smaller than the first level. A light source device for switching the intensity of light.

7. The light source device according to claim 3,

In each of the optical paths, the fiber amplifier is provided in a plurality of stages,

The light source device, wherein the light quantity control device switches on / off the light output from each of the optical fibers by switching the intensity of excitation light from an excitation light source of a final stage fiber amplifier.

8. The light source device according to claim 7,

The light source device, wherein the fiber amplifier of the last stage has a larger mode field diameter than the fiber amplifiers of the other stages.

9. The light source device according to claim 1,

Further comprising a storage device in which an output intensity map corresponding to the ON / OFF state of the optical output from each of the optical fibers is stored in advance,

The light source device, wherein the light amount control device individually turns on / off the light output from each optical fiber based on the output intensity map and a predetermined set light amount.

10. The light source device according to claim 9,

The light source device according to claim 1, wherein the output intensity map is created based on a variation of each fiber output measured in advance.

11. The light source device according to claim 9,

Further comprising a wavelength converter for converting the wavelength of the light output from each of the optical fibers,

The output intensity map is created by further considering a variation in output due to a variation in wavelength conversion efficiency corresponding to each fiber output measured in advance. A light source device characterized by the above-mentioned.

12. The light source device according to claim 11,

The light generation unit generates a laser beam having a single wavelength within a range from an infrared region to a visible region,

The light source device, wherein the wavelength converter outputs ultraviolet light that is a harmonic of the laser light.

13. The light source device according to claim 12,

The light generating section generates a single-wavelength laser light having a wavelength of about 1.5 tm, and the wavelength converting section generates an 8th harmonic and a 10th harmonic of the laser light having a wavelength of about 1.5 m. A light source device for generating one of waves.

14. The light source device according to claim 1,

A light source device, further comprising a wavelength conversion unit that converts a wavelength of the light output from each of the optical fibers.

15. The light source device according to claim 14, wherein

16. The light source device according to claim 15,

The light generating section generates a single-wavelength laser light having a wavelength of about 1.5, and the wavelength converting section generates an 8th harmonic and a 0th harmonic of the laser light having a wavelength of about 1.5 m. A light source device that generates

17. The light source device according to claim 1,

The light generation unit has a light source that generates light of a single wavelength, and an optical modulator that converts light from the light source into pulsed light of a predetermined frequency and outputs the light.

The light quantity control device may control a frequency and a peak of the pulse light output from the optical modulator. A light source device for further controlling at least one of the peak powers.

18. The light source device according to claim 1,

The light source device further includes a delay unit that individually delays the light output from each of the plurality of optical fibers and performs the light output with a time lag.

1 9. The light source device according to claim 1,

The light generation unit has a laser light source that oscillates laser light,

A beam monitoring mechanism for monitoring optical characteristics of the laser light related to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined wavelength;

A wavelength calibration controller that performs wavelength calibration based on data on the temperature dependence of the detection reference wavelength of the beam monitoring mechanism.

20. The light source device according to claim 19,

A polarization adjusting device for aligning the polarization states of a plurality of light beams of the same wavelength via the plurality of optical fibers;

A polarization direction conversion device that converts all the light beams transmitted through the plurality of optical fibers into a plurality of linearly polarized light beams having the same polarization direction.

21. The light source device according to claim 20,

The light source device according to claim 1, wherein the fiber amplifier includes, as an optical waveguide member, an optical fiber mainly composed of either a phosphate glass to which a rare earth element is added or a bismuth oxide-based glass.

2 2. A light source device for generating light of a single wavelength,

A light generator having a light source that generates light of a single wavelength, and an optical modulator that converts light from the light source into pulsed light of a predetermined frequency and outputs the pulsed light; An optical amplification unit including at least one fiber amplifier for amplifying the pulsed light generated by the light generation unit;

A light amount control device that controls the light amount of the output light from the fiber amplifier by controlling the frequency of the pulse light output from the optical modulator.

23. In the light source device according to claim 22,

Further comprising a storage device in which an output intensity map of the optical amplification unit according to the frequency of the pulse light input to the optical amplification unit is stored,

The light source device, wherein the light amount control device controls a frequency of the pulse light output from the optical modulator based on the output intensity map and a predetermined set light amount.

24. In the light source device according to claim 22,

The light source device, wherein the light amount control device further controls a peak power of the pulse light output from the optical modulator.

25. In the light source device according to claim 22,

The light modulator is an electro-optic modulator;

The light source device, wherein the light amount control device controls a frequency of the pulse light by controlling a frequency of a voltage pulse applied to the optical modulator.

26. In the light source device according to claim 22,

A plurality of the optical amplification units are provided in parallel,

A light source device, wherein an optical output end of each of the optical amplifiers is constituted by an optical fiber.

27. The light source device according to claim 26,

The light source device, wherein the plurality of optical fibers constituting each of the plurality of optical amplifiers are bundled to form one bundle fiber.

28. In the light source device according to claim 22, The light source device further includes a wavelength conversion unit that converts a wavelength of light output from the optical amplification unit.

29. The light source device according to claim 28,

30. The light source device according to claim 29,

The light generating section generates a single-wavelength laser light having a wavelength of about 1.5, and the wavelength converting section generates an 8th harmonic and a 10th harmonic of the laser light having a wavelength of about 1.5 tm. A light source device that generates any one of the following.

3 1. A light source device for generating light of a single wavelength,

A light generator having a light source that generates light of a single wavelength, and an optical modulator that converts light from the light source into pulsed light of a predetermined frequency and outputs the pulsed light;

An optical amplification unit including at least one fiber amplifier for amplifying the pulsed light generated by the light generation unit;

A light amount control device that controls a light amount of the output light from the optical amplifying unit by controlling a peak power of the pulse light output from the optical modulator.

3 2. The light source device according to claim 31,

A storage device in which an output intensity map of the optical amplifier according to the intensity of the pulse light input to the optical amplifier is stored;

The light source device, wherein the light amount control device controls a peak power of the pulse light output from the optical modulator based on the output intensity map and a predetermined set light amount.

33. The light source device according to claim 31, The light modulator is an electro-optic modulator;

The light source device, wherein the light amount control device controls a peak power of the pulse light by controlling a peak level of a voltage pulse applied to the optical modulator.

34. In the light source device according to claim 31,

A plurality of the optical amplification units are provided in parallel,

35. The light source device according to claim 34,

The light source device, wherein the plurality of optical fibers constituting each of the plurality of optical amplifiers are bundled to form a bundle-fiber.

36. In the light source device according to claim 34,

The light source device further comprises a delay unit that individually delays the optical output from each of the plurality of optical amplifiers and shifts the optical output in time.

37. The light source device according to claim 31,

The light source device further includes a wavelength conversion unit that converts a wavelength of light output from the optical amplification unit.

38. In the light source device according to claim 37,

39. In the light source device according to claim 38,

The light generating section generates a single-wavelength laser light having a wavelength of about 1.5 m, and the wavelength converting section generates an 8th harmonic and a 10th harmonic of the laser light having a wavelength of about 1.5 m. A light source device for generating one of waves.

40. In the light source device according to claim 22 or 31,

The light generation unit has a laser light source that oscillates laser light as the light source, and has an optical characteristic of the laser light related to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined set wavelength. A beam monitoring mechanism for monitoring;

41. The light source device according to claim 40,

A plurality of the optical amplification units are provided in parallel;

A polarization adjusting device for aligning the polarization states of a plurality of light beams having the same wavelength via the plurality of optical fibers constituting the plurality of optical amplification units;

A polarization direction conversion device that converts all light beams transmitted through the plurality of optical fibers into a plurality of linearly polarized light beams having the same polarization direction.

42. In the light source device according to claim 41,

4 3. A laser light source that oscillates laser light;

A beam monitoring mechanism for monitoring optical characteristics of the laser light related to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined set wavelength;

A first controller that performs wavelength calibration based on data on the temperature dependence of the detection reference wavelength of the beam monitor mechanism.

44. In the light source device according to claim 43,

The apparatus further comprises an absolute wavelength providing source that provides an absolute wavelength close to the set wavelength, wherein the first control device controls an absolute wavelength provided from the absolute wavelength providing source. Performing an absolute wavelength calibration for substantially matching the detection reference wavelength of the beam monitor mechanism, and performing a set wavelength calibration for matching the detection reference wavelength to the set wavelength based on the temperature dependency data. Characteristic light source device.

45. In the light source device according to claim 44,

The beam monitoring mechanism includes a pupil perot etalon,

The data of the temperature dependency includes data based on a measurement result of the temperature dependency of the resonance wavelength of the Fluoro-Perot etalon,

The first control device performs the absolute wavelength calibration of the detection reference wavelength and the set wavelength calibration by controlling a temperature of the Fabry-Port-etalon constituting the beam monitoring mechanism. A light source device characterized in that:

46. In the light source device according to claim 44,

The temperature-dependent data further includes temperature-dependent data of a center wavelength of the laser light oscillated from the laser light source,

The light source device, wherein the first control device also performs the wavelength control of the laser light source when performing the absolute wavelength calibration.

47. The light source device according to claim 44, wherein

The absolute wavelength providing source is an absorption cell on which the laser light is incident.The first control device, when performing the absolute wavelength calibration, determines an absorption line closest to the set wavelength of the absorption cell. A light source characterized in that absorption is maximized, and transmittance of the Fabry-Perot etalon is maximized.

48. In the light source device according to claim 43,

A light source device further comprising a fiber amplifier for amplifying a laser beam from the laser light source.

49. In the light source device according to claim 48,

A light source device, further comprising: a wavelength converter including a nonlinear optical crystal that converts a wavelength of the amplified laser light.

50. The light source device according to claim 43,

After the set wavelength calibration is completed, a second control device that performs feedback control of the wavelength of the laser light from the laser light source based on the monitoring result of the beam monitor mechanism that has completed the set wavelength calibration. A light source device, further comprising:

51. The light source device according to claim 43,

A plurality of optical amplifying units arranged in parallel with an output stage of the laser light source and each including a fiber amplifier;

A polarization adjusting device for aligning the polarization states of a plurality of light beams of the same wavelength via the plurality of optical fibers respectively configuring the plurality of optical amplification units;

52. The light source device according to claim 51,

5 3. With multiple optical fibers;

54. The light source device according to claim 53, The polarization adjusting device sets the polarization state of each of the plurality of light beams passing through each of the optical fibers to substantially circular polarization,

The light source device, wherein the polarization direction conversion device has a quarter-wave plate.

55. The light source device according to claim 54, wherein

The optical fiber has a substantially cylindrically symmetric structure,

The light source device, wherein the polarization adjusting device sets the polarization state of each of the plurality of light beams incident on each of the optical fibers to substantially circular polarization.

56. In the light source device according to claim 53,

The polarization adjusting device sets the polarization state of each of the plurality of light beams passing through each of the optical fibers to substantially the same elliptically polarized light,

A light source device comprising: a half-wave plate rotating a plane of polarization; and a quarter-wave plate optically connected in series with the half-wave plate. .

57. The light source device according to claim 53,

Each of the plurality of optical fibers constitutes an optical fiber amplifier that uses a plurality of light beams incident on the plurality of optical fibers as amplification target light, and is an optical fiber through which the amplification target light is guided. Light source device.

58. In the light source device according to claim 54,

The optical fiber is formed by using any one of a phosphate glass and a bismuth oxide-based glass to which a rare earth element is added as a main material.

59. In the light source device according to claim 53,

The light source device, wherein each of the plurality of light beams incident on the plurality of optical fibers is a pulse light train.

60. The light source device according to claim 53, The light source device, wherein each of the plurality of light beams incident on the plurality of optical fibers is a light beam amplified by one or more optical fiber amplifiers before being incident on the plurality of optical fibers.

6 1. The light source device according to claim 53,

The light source device, wherein the polarization adjusting device controls the optical characteristics of optical components disposed upstream of the plurality of optical fibers to adjust the polarization.

6 2. The light source device according to claim 53,

A light source, wherein the plurality of optical fibers are bundled substantially in parallel.

6 3. The light source device according to claim 53,

A light source device further comprising a wavelength converter that performs wavelength conversion by passing a light beam emitted from the polarization direction conversion device through at least one nonlinear optical crystal.

6 4. The light source device according to claim 6,

A light source device characterized in that light emitted from the plurality of optical fibers has a wavelength in one of an infrared region and a visible region, and light emitted from the wavelength converter has a wavelength in an ultraviolet region. .

65. In the light source device according to claim 64,

Light emitted from the plurality of optical fibers has a wavelength of about 147 nm, and light emitted from the wavelength converter has a wavelength of about 193.4 nm. apparatus.

66. An optical amplifier that includes an optical waveguide member mainly composed of a phosphate glass to which a rare earth element is added or a bismuth oxide-based glass, and amplifies incident light. A wavelength converter for conversion.

67. The light source device according to claim 66,

The light source device according to claim 1, wherein the optical waveguide member is an optical fiber having a core that guides light and a clad provided around the core.

68. In the light source device according to claim 67,

The light source device, wherein the optical fiber is laid in a straight line.

69. The light source device according to claim 67,

The light source device, wherein the optical amplifier further includes a container accommodating at least the optical fiber.

70. The light source device according to claim 66,

The light source device, wherein the wavelength converter includes at least one nonlinear optical crystal that performs wavelength conversion.

7 1. A wavelength stabilization control method for maintaining a center wavelength of laser light oscillated from a laser light source at a predetermined set wavelength,

A first step of previously measuring the temperature dependence of a detection reference wavelength of a wavelength detection device for detecting the wavelength of the laser light;

A second step of performing an absolute wavelength calibration for making a detection reference wavelength of the wavelength detection device substantially coincide with an absolute wavelength provided from an absolute wavelength providing source providing an absolute wavelength close to the set wavelength;

A third step of setting the detection reference wavelength of the wavelength detection device to the set wavelength based on the temperature dependency obtained in the first step.

7 2. The wavelength stabilization control method according to claim 7 1,

The wavelength detector is a Fabry-Perot etalon,

Measuring the temperature dependence of the resonance wavelength of the wavelength detection device in the first step, and controlling the temperature of the wavelength detection device in the second step so that the resonance wavelength substantially matches the absolute wavelength;

By controlling the temperature of the wavelength detection device in the third step, the resonance wavelength is controlled. Is set to the set wavelength.

7 3. The wavelength stabilization control method according to claim 7 2,

The absolute wavelength providing source is an absorption cell on which the laser light is incident.In the second step, the absorption of the absorption line closest to the set wavelength of the absorption cell is maximized, and the transmittance of the wavelength detection device is A wavelength stabilization control method characterized by maximizing the wavelength.

74. In the wavelength stabilization control method according to claim 71,

In the first step, the temperature dependency of the center wavelength of the laser light is also measured in advance, and in the second step, the wavelength control of the laser light is also performed.

75. In the wavelength stabilization control method according to claim 71,

The method further includes a fourth step of controlling the wavelength of the laser light from the laser light source based on a detection result of the wavelength detection device in which the detection reference wavelength is set to the set wavelength in the third step. Wavelength stabilization control method.

76. In the wavelength stabilization control method according to claim 74 or 75,

A wavelength stabilization control method, wherein the wavelength control of the laser light is performed by controlling at least one of a temperature of the laser light source and a supply current.

77. An exposure apparatus for transferring a pattern formed on a mask onto a substrate, wherein the light generating section generates a laser beam of a single wavelength within a range from an infrared region to a visible region;

A light amount control device that controls the light amount of the laser light output from the fiber group by individually turning on and off the light output from each of the optical fibers;

A wavelength converter that converts a wavelength of the laser light output from each of the optical fibers, and outputs ultraviolet light that is a harmonic of the laser light; An exposure optical system that illuminates the mask using the ultraviolet light output from the wavelength conversion unit as exposure illumination light;

78. The exposure apparatus according to claim 77,

The light amount control device controls the light amount of the laser light output from the fiber group by individually turning on and off the light output from each of the optical fibers based on the output intensity map and a predetermined set light amount. An exposure apparatus, comprising:

79. The exposure apparatus according to claim 77,

The light generation unit includes a light source that generates a single-wavelength laser light, and an optical modulator that converts light from the light source into pulsed light having a predetermined frequency and outputs the pulsed light.

An exposure apparatus, wherein the light amount control device further controls the light amount of laser light output from the fiber group by controlling the frequency of the pulse light output from the optical modulator.

80 ・ In the exposure apparatus according to claim 79,

An exposure apparatus, wherein the light quantity control device further controls the light quantity of laser light output from the fiber group by controlling a peak power of the pulse light output from the optical modulator.

8 1. An exposure apparatus for transferring a pattern formed on a mask onto a substrate, comprising: a light source for generating light of a single wavelength; and light for converting light from the light source into pulsed light of a predetermined frequency and outputting the pulsed light. A light generator that has a modulator and generates a single-wavelength laser beam within a range from an infrared region to a visible region;

A light amount control device for controlling a light amount of the output light from the fiber amplifier by controlling a frequency of the pulse light output from the optical modulator; A wavelength converter that converts the wavelength of the laser light output from the optical amplifier and outputs ultraviolet light that is a harmonic of the laser light;

An exposure optical system that illuminates the mask with the ultraviolet light output from the wavelength conversion unit as illumination light for exposure.

8 2. The exposure apparatus according to claim 8,

An exposure apparatus, wherein the light quantity control device further controls the light quantity of the output light from the optical amplifying unit by controlling a peak power of the pulse light output from the optical modulator.

83. An exposure apparatus for transferring a pattern formed on a mask onto a substrate, comprising: a light source for generating light of a single wavelength; and light for converting light from the light source into pulsed light of a predetermined frequency and outputting the pulsed light. A light generator that has a modulator and generates a single-wavelength laser beam within a range from an infrared region to a visible region;

A light amount control device that controls the light amount of the output light from the optical amplifying unit by controlling the peak power of the pulse light output from the optical modulator;

A wavelength converter that converts a wavelength of the laser light output from the optical amplifier, and outputs an ultraviolet light that is a harmonic of the laser light;

An illumination optical system that illuminates the mask with the ultraviolet light output from the wavelength conversion unit as illumination light for exposure.

8 4. An exposure apparatus that repeatedly transfers a pattern formed on a mask onto a substrate,

A light generation unit having a light source that generates light of a single wavelength, and a light modulator that converts light from the light source into pulsed light;

An optical amplification unit including at least one fiber amplifier for amplifying the pulsed light generated by the light generation unit; When the substrate is exposed through the mask by irradiating the mask with the amplified pulsed light, the pulsed light is transmitted through the optical modulator in accordance with the position of the exposure target area on the substrate. And a control device for controlling at least one of the frequency and the peak power.

85. An exposure apparatus that transfers a pattern formed on a mask onto a substrate, comprising: a light source that generates light of a single wavelength; and a light modulator that converts light from the light source into pulsed light. Generating part;

An optical amplifier comprising at least one optical fiber amplifier for amplifying the pulse light, and comprising a plurality of optical paths arranged in parallel at an output stage of the light generator; and When irradiating the mask and exposing the substrate through the mask, the light output from each optical path is individually turned on / off to thereby control the amount of pulsed light output from the optical amplifier. An exposure apparatus comprising: a control device that controls

86. The exposure apparatus according to claim 84 or 85,

The light source emits infrared or visible laser light,

An exposure apparatus, further comprising: a wavelength converter for converting the wavelength of the pulse light amplified by the optical amplifier to ultraviolet light.

87. An exposure apparatus that illuminates a mask with a laser beam and transfers a pattern of the mask onto a substrate,

A laser light source that oscillates the laser light, a beam monitor mechanism that monitors optical characteristics of the laser light related to wavelength stabilization for maintaining a center wavelength of the laser light at a predetermined set wavelength, and the setting. A light source device having an absolute wavelength providing source for providing an absolute wavelength close to the wavelength;

A storage device that stores a temperature dependence map including measurement data of the temperature dependence of the center wavelength of the laser light oscillated from the laser light source and the detection reference wavelength of the beam monitor mechanism; Absolute wavelength calibration is performed so that the detection reference wavelength of the beam monitor mechanism substantially matches the absolute wavelength provided from the absolute wavelength providing source, and the detection reference wavelength is set to the set wavelength based on the temperature dependence map. A first controller for performing a set wavelength calibration to match

The laser beam is emitted to the mask through the mask while feedback-controlling the wavelength of the laser beam emitted from the light source device based on the monitoring result of the beam monitoring mechanism after the set wavelength calibration is completed. A second control device for exposing the substrate.

88. The exposure apparatus according to claim 87,

A projection optical system for projecting the laser light emitted from the mask onto the substrate;

An environment sensor for measuring a physical quantity related to an environment in the vicinity of the projection optical system; and at predetermined timings after exposure of the substrate is started by the second control device, based on a measurement value of the environment sensor. Calculating a wavelength change amount for substantially canceling a change in the imaging characteristic of the projection optical system due to the change in the physical amount from the standard state, and changing the set wavelength according to the wavelength change amount. An exposure apparatus, further comprising: a third control device.

8 9. The exposure apparatus according to claim 8,

The image forming apparatus further includes an image forming characteristic correcting device that corrects an image forming characteristic of the projection optical system, wherein the image forming characteristic correcting device changes the set wavelength every time the third control device changes the set wavelength. An exposure apparatus that corrects the imaging characteristic variation except for a variation in the imaging characteristic of the projection optical system corrected by the following.

90. The exposure apparatus according to claim 87,

A fiber amplifier for amplifying laser light from the laser light source;

A nonlinear optical crystal that converts the wavelength of the amplified laser light into a wavelength in the ultraviolet region. An exposure apparatus, further comprising: a wavelength converter.

9 1. An exposure apparatus for exposing a substrate coated with a photosensitive agent by an energy beam,

A beam source for generating the energy beam;

A wavelength changing device for changing a wavelength of the energy beam output from the beam source;

When the wavelength is changed by the wavelength changing device, an exposure amount control device that controls an integrated exposure amount given to the substrate in accordance with an amount of change in sensitivity characteristics of the photosensitive agent caused by the wavelength change. Exposure equipment provided.

9 2. An exposure apparatus for transferring a predetermined pattern onto a substrate by irradiating the substrate with an exposure beam,

A plurality of optical fibers for emitting light of any one of infrared and visible wavelengths; a polarization adjusting device for aligning the polarization states of a plurality of light beams of the same wavelength via the plurality of optical fibers;

A polarization direction conversion device that converts all light beams transmitted through the plurality of optical fibers into a plurality of linearly polarized light beams having the same polarization direction;

A wavelength converter that performs wavelength conversion by passing a light beam emitted from the polarization direction conversion device through at least one nonlinear optical crystal, and emits light having a wavelength in an ultraviolet region;

An optical system for irradiating the substrate with light emitted from the wavelength converter as the exposure beam.

9 3. An exposure apparatus for irradiating exposure light to a substrate to form a predetermined pattern, including an optical waveguide member mainly composed of either a phosphate glass to which a rare earth element is added or a bismuth oxide-based glass. An optical amplifier for amplifying incident light; a wavelength converter for converting the wavelength of light emitted from the optical amplifier;

Light for irradiating the substrate with light emitted from the wavelength converter as the exposure light An exposure apparatus having a science system.

94. The exposure apparatus according to claim 93,

The exposure apparatus according to claim 1, wherein the optical waveguide member is an optical fiber having a core that guides light and a clad provided around the core.

95. The exposure apparatus according to claim 93,

An exposure apparatus, wherein the wavelength converter generates the exposure light having a wavelength of 200 nm or less.

9 6. An exposure method for repeatedly transferring a pattern formed on a mask onto a substrate,

A first step of amplifying the pulsed light at least once using a fiber amplifier; and a second step of irradiating the mask with the amplified pulsed light and exposing a region to be exposed on the substrate via the mask. ;

Prior to the processing in the first step, the laser light from the light source is converted into the pulse light, and at least one of the frequency and the peak power of the pulse light is controlled according to the position of the exposure target area on the substrate. A third step of performing exposure.

97. In the exposure method according to claim 96,

A plurality of the fiber amplifiers are provided in parallel,

The exposure method, wherein in the first step, the pulse light is amplified using only the selected fiber amplifier.

98. In the exposure method according to claim 96,

The light source emits infrared or visible laser light,

An exposure method, further comprising a fourth step of converting the wavelength of the amplified pulse light into ultraviolet light before the pulse light is irradiated on the mask.

9 9. An exposure method for exposing a substrate with a laser beam to form a predetermined pattern on the substrate,

Prior to the start of exposure, the detection base of the wavelength detection device for detecting the wavelength of the laser light A first sub-step of measuring the temperature dependence of the quasi-wavelength in advance; and A second sub-step of performing an absolute wavelength calibration to make the wavelengths substantially coincide with each other; and a second sub-step of setting the detection reference wavelength of the wavelength detection device to the set wavelength based on the temperature dependency obtained in the first sub-step. A first step in which the processing of the three sub-steps is performed sequentially;

Thereafter, while controlling the wavelength of the laser light from the laser light source based on the detection result of the wavelength detection device in which the detection reference wavelength is set to the set wavelength in the third sub-step, the substrate is irradiated with the laser. A second step of repeatedly exposing with light.

100. The exposure method according to claim 99,

An optical system arranged in the path of the laser light is further provided,

An exposure method, further comprising a third step of changing the set wavelength in order to cancel a change in optical performance of the optical system.

101. A method for manufacturing an exposure apparatus, comprising irradiating exposure light to a substrate via an optical system to form a predetermined pattern.

The characteristic of the optical system is adjusted by using light of a wavelength belonging to a wavelength band having a predetermined width including the wavelength of the exposure light generated by the light source device according to any one of claims 66 to 70. A method of manufacturing an exposure apparatus.

102. A device manufacturing method including a lithographic process,

A device manufacturing method, comprising performing exposure using the exposure apparatus according to any one of claims 77 to 85 and 87 to 95 in the lithographic process.

103. A device manufactured by the device manufacturing method according to claim 102.

104. A device manufacturing method including a lithographic process,

A device manufacturing method using the exposure method according to any one of claims 96 to 100 in the lithographic process.

05. Device _t manufactured by the device manufacturing method according to claim 104