JP2016505711A5 - - Google Patents

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Publication number
JP2016505711A5
JP2016505711A5 JP2015545199A JP2015545199A JP2016505711A5 JP 2016505711 A5 JP2016505711 A5 JP 2016505711A5 JP 2015545199 A JP2015545199 A JP 2015545199A JP 2015545199 A JP2015545199 A JP 2015545199A JP 2016505711 A5 JP2016505711 A5 JP 2016505711A5
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JP
Japan
Prior art keywords
tilt angle
angle adjustable
adjustable valve
gas flow
tilt
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JP2015545199A
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English (en)
Japanese (ja)
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JP6180541B2 (ja
JP2016505711A (ja
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Priority claimed from PCT/US2013/072079 external-priority patent/WO2014085497A1/en
Publication of JP2016505711A publication Critical patent/JP2016505711A/ja
Publication of JP2016505711A5 publication Critical patent/JP2016505711A5/ja
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JP2015545199A 2012-11-30 2013-11-26 処理チャンバガス流装置、システム、及び方法 Active JP6180541B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261732186P 2012-11-30 2012-11-30
US61/732,186 2012-11-30
PCT/US2013/072079 WO2014085497A1 (en) 2012-11-30 2013-11-26 Process chamber gas flow apparatus, systems, and methods

Publications (3)

Publication Number Publication Date
JP2016505711A JP2016505711A (ja) 2016-02-25
JP2016505711A5 true JP2016505711A5 (enExample) 2017-01-19
JP6180541B2 JP6180541B2 (ja) 2017-08-16

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JP2015545199A Active JP6180541B2 (ja) 2012-11-30 2013-11-26 処理チャンバガス流装置、システム、及び方法

Country Status (6)

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US (1) US9429248B2 (enExample)
JP (1) JP6180541B2 (enExample)
KR (1) KR101800719B1 (enExample)
CN (1) CN104812939B (enExample)
TW (1) TWI587358B (enExample)
WO (1) WO2014085497A1 (enExample)

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JP6606551B2 (ja) 2015-08-04 2019-11-13 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、半導体装置の製造方法および記録媒体
EP3258149A1 (de) * 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
EP3406340B1 (de) * 2017-05-26 2021-07-07 Thinxxs Microtechnology Ag Flusszelle mit gehäusebauteil
WO2020033378A1 (en) * 2018-08-07 2020-02-13 Persimmon Technologies Corp. Direct-drive flexure-mechanism vacuum control valve
FI130051B (en) * 2019-04-25 2023-01-13 Beneq Oy DEVICE AND METHOD
GB2584160A (en) * 2019-05-24 2020-11-25 Edwards Ltd Vacuum assembly and vacuum pump with an axial through passage
WO2021181498A1 (ja) * 2020-03-10 2021-09-16 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 基板処理装置、排気流量制御装置及び半導体装置の製造方法
TWI890811B (zh) 2020-06-17 2025-07-21 美商應用材料股份有限公司 用於高溫化學氣相沉積的處理腔室蓋及處理方法
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KR102795009B1 (ko) * 2023-09-27 2025-04-15 (주)동헌기업 2-스테이지 액츄에이터

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