JP2016156805A5 - - Google Patents
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- Publication number
- JP2016156805A5 JP2016156805A5 JP2016007673A JP2016007673A JP2016156805A5 JP 2016156805 A5 JP2016156805 A5 JP 2016156805A5 JP 2016007673 A JP2016007673 A JP 2016007673A JP 2016007673 A JP2016007673 A JP 2016007673A JP 2016156805 A5 JP2016156805 A5 JP 2016156805A5
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- scanning unit
- graduation
- light beams
- partial light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015203188.8A DE102015203188A1 (de) | 2015-02-23 | 2015-02-23 | Optische Positionsmesseinrichtung |
| DE102015203188.8 | 2015-02-23 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016156805A JP2016156805A (ja) | 2016-09-01 |
| JP2016156805A5 true JP2016156805A5 (enExample) | 2018-11-01 |
| JP6588836B2 JP6588836B2 (ja) | 2019-10-09 |
Family
ID=55299395
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016007673A Active JP6588836B2 (ja) | 2015-02-23 | 2016-01-19 | 光学位置測定装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9733069B2 (enExample) |
| EP (1) | EP3059554B1 (enExample) |
| JP (1) | JP6588836B2 (enExample) |
| CN (1) | CN105910533B (enExample) |
| DE (1) | DE102015203188A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016210434A1 (de) | 2016-06-13 | 2017-12-14 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| DE102017201257A1 (de) * | 2017-01-26 | 2018-07-26 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102017219125A1 (de) | 2017-10-25 | 2019-04-25 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| WO2020170382A1 (ja) * | 2019-02-21 | 2020-08-27 | 株式会社ニコン | 面位置検出装置、露光装置、基板処理システム、およびデバイス製造方法 |
| DE102020202080A1 (de) | 2020-02-19 | 2021-08-19 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Optische Positionsmesseinrichtung |
| CN115993088A (zh) * | 2021-10-20 | 2023-04-21 | 约翰内斯.海德汉博士有限公司 | 光学位置测量设备 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5953209U (ja) * | 1982-10-01 | 1984-04-07 | ソニ−マグネスケ−ル株式会社 | 光学式測長スケ−ル |
| JP4023923B2 (ja) * | 1998-07-02 | 2007-12-19 | ソニーマニュファクチュアリングシステムズ株式会社 | 光学式変位測定装置 |
| KR100531458B1 (ko) * | 1998-08-20 | 2005-11-25 | 소니 매뉴펙츄어링 시스템즈 코포레이션 | 광학식 변위측정장치 |
| EP1319170B1 (de) * | 2000-09-14 | 2005-03-09 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
| JP4722474B2 (ja) * | 2004-12-24 | 2011-07-13 | 株式会社ミツトヨ | 変位検出装置 |
| DE102005043569A1 (de) * | 2005-09-12 | 2007-03-22 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| JP4924884B2 (ja) * | 2006-05-19 | 2012-04-25 | 株式会社ニコン | エンコーダ |
| US7858922B2 (en) * | 2006-11-20 | 2010-12-28 | Dr. Johannes Heidenhain Gmbh | Position-measuring device |
| DE102010029211A1 (de) * | 2010-05-21 | 2011-11-24 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| JP5618898B2 (ja) * | 2010-08-31 | 2014-11-05 | Dmg森精機株式会社 | 変位検出装置 |
| EP2776790B1 (en) * | 2011-11-09 | 2016-09-14 | Zygo Corporation | Compact encoder head for interferometric encoder system |
| TWI476376B (zh) * | 2011-11-09 | 2015-03-11 | Zygo Corp | 雙程干涉式編碼器系統 |
| DE102014208988A1 (de) | 2013-09-11 | 2015-03-12 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
-
2015
- 2015-02-23 DE DE102015203188.8A patent/DE102015203188A1/de not_active Withdrawn
-
2016
- 2016-01-19 JP JP2016007673A patent/JP6588836B2/ja active Active
- 2016-02-04 EP EP16154260.0A patent/EP3059554B1/de active Active
- 2016-02-23 CN CN201610097949.7A patent/CN105910533B/zh active Active
- 2016-02-23 US US15/050,620 patent/US9733069B2/en active Active
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