JP2015075486A5 - - Google Patents
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- Publication number
- JP2015075486A5 JP2015075486A5 JP2014204525A JP2014204525A JP2015075486A5 JP 2015075486 A5 JP2015075486 A5 JP 2015075486A5 JP 2014204525 A JP2014204525 A JP 2014204525A JP 2014204525 A JP2014204525 A JP 2014204525A JP 2015075486 A5 JP2015075486 A5 JP 2015075486A5
- Authority
- JP
- Japan
- Prior art keywords
- scanning
- measuring device
- position measuring
- optical
- scanning system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013220184 | 2013-10-07 | ||
| DE102013220184.2 | 2013-10-07 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015075486A JP2015075486A (ja) | 2015-04-20 |
| JP2015075486A5 true JP2015075486A5 (enExample) | 2017-11-16 |
| JP6320267B2 JP6320267B2 (ja) | 2018-05-09 |
Family
ID=51541018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014204525A Active JP6320267B2 (ja) | 2013-10-07 | 2014-10-03 | 光学式位置測定装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9410797B2 (enExample) |
| EP (1) | EP2857802B1 (enExample) |
| JP (1) | JP6320267B2 (enExample) |
| KR (1) | KR102088869B1 (enExample) |
| CN (1) | CN104515468B (enExample) |
| DE (1) | DE102014218623A1 (enExample) |
| ES (1) | ES2604157T3 (enExample) |
| TW (1) | TWI627379B (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013220214A1 (de) | 2013-10-07 | 2015-04-09 | Dr. Johannes Heidenhain Gmbh | Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück |
| US9829409B2 (en) * | 2015-04-28 | 2017-11-28 | Sumix Corporation | Interferometric measurement method for guide holes and fiber holes parallelism and position in multi-fiber ferrules |
| DE102016200847A1 (de) * | 2016-01-21 | 2017-07-27 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Optische Positionsmesseinrichtung |
| DE102017209093A1 (de) * | 2017-05-31 | 2018-12-06 | Osram Gmbh | Lichtleiteranordnung für ein mobiles kommunikationsgerät zur optischen datenübertragung, mobiles kommunikationsgerät und verfahren zur optischen datenübertragung |
| DE102017213330A1 (de) * | 2017-08-02 | 2019-02-07 | Dr. Johannes Heidenhain Gmbh | Abtastplatte für eine optische Positionsmesseinrichtung |
| JP7060370B2 (ja) * | 2017-12-18 | 2022-04-26 | 株式会社ミツトヨ | スケールおよびその製造方法 |
| FR3090904B1 (fr) * | 2018-12-19 | 2021-02-19 | Office National Detudes Rech Aerospatiales | Composant optique monolithique a plusieurs voies |
| DE102019210023A1 (de) * | 2019-07-08 | 2021-01-14 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| CN120112768A (zh) * | 2022-11-10 | 2025-06-06 | Asml荷兰有限公司 | 位置测量系统和光刻设备 |
| CN115900782B (zh) * | 2022-12-30 | 2025-05-27 | 四川云盾光电科技有限公司 | 一种绝对式测角装置及方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6249626B1 (en) * | 1998-03-06 | 2001-06-19 | Lucent Technologies, Inc. | Multimode fiber optical power monitoring tap for optical transmission systems |
| DE10235669B4 (de) * | 2002-08-03 | 2016-11-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| JP2005147828A (ja) * | 2003-11-14 | 2005-06-09 | Mitsutoyo Corp | 変位検出装置 |
| DE102005029917A1 (de) * | 2005-06-28 | 2007-01-04 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| DE102005043569A1 (de) * | 2005-09-12 | 2007-03-22 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US7602489B2 (en) | 2006-02-22 | 2009-10-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7483120B2 (en) | 2006-05-09 | 2009-01-27 | Asml Netherlands B.V. | Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
| JP2008098604A (ja) * | 2006-09-12 | 2008-04-24 | Canon Inc | 露光装置及びデバイス製造方法 |
| DE102006042743A1 (de) * | 2006-09-12 | 2008-03-27 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US20080079920A1 (en) * | 2006-09-29 | 2008-04-03 | Heiko Hommen | Wafer exposure device and method |
| DE102008007319A1 (de) * | 2008-02-02 | 2009-08-06 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| JP5602420B2 (ja) | 2009-12-10 | 2014-10-08 | キヤノン株式会社 | 変位測定装置、露光装置、及び精密加工機器 |
| US8829420B2 (en) * | 2010-06-09 | 2014-09-09 | Nikon Corporation | Two dimensional encoder system and method |
| US20130001412A1 (en) * | 2011-07-01 | 2013-01-03 | Mitutoyo Corporation | Optical encoder including passive readhead with remote contactless excitation and signal sensing |
| DE102013203211A1 (de) * | 2012-06-15 | 2013-12-19 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur interferentiellen Abstandsmessung |
-
2014
- 2014-09-03 TW TW103130408A patent/TWI627379B/zh active
- 2014-09-17 ES ES14185047.9T patent/ES2604157T3/es active Active
- 2014-09-17 EP EP14185047.9A patent/EP2857802B1/de active Active
- 2014-09-17 DE DE102014218623.4A patent/DE102014218623A1/de not_active Withdrawn
- 2014-09-23 KR KR1020140126684A patent/KR102088869B1/ko active Active
- 2014-10-03 JP JP2014204525A patent/JP6320267B2/ja active Active
- 2014-10-07 US US14/508,097 patent/US9410797B2/en active Active
- 2014-10-08 CN CN201410525795.8A patent/CN104515468B/zh active Active
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