JP6320267B2 - 光学式位置測定装置 - Google Patents

光学式位置測定装置 Download PDF

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Publication number
JP6320267B2
JP6320267B2 JP2014204525A JP2014204525A JP6320267B2 JP 6320267 B2 JP6320267 B2 JP 6320267B2 JP 2014204525 A JP2014204525 A JP 2014204525A JP 2014204525 A JP2014204525 A JP 2014204525A JP 6320267 B2 JP6320267 B2 JP 6320267B2
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Japan
Prior art keywords
scanning
optical
measuring device
position measuring
grating
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JP2014204525A
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English (en)
Japanese (ja)
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JP2015075486A (ja
JP2015075486A5 (enExample
Inventor
ヴォルフガング・ホルツアップフェル
イェルク・ドレシャー
ロベルト・ケルナー
マルクス・マイスナー
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2014204525A 2013-10-07 2014-10-03 光学式位置測定装置 Active JP6320267B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102013220184 2013-10-07
DE102013220184.2 2013-10-07

Publications (3)

Publication Number Publication Date
JP2015075486A JP2015075486A (ja) 2015-04-20
JP2015075486A5 JP2015075486A5 (enExample) 2017-11-16
JP6320267B2 true JP6320267B2 (ja) 2018-05-09

Family

ID=51541018

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014204525A Active JP6320267B2 (ja) 2013-10-07 2014-10-03 光学式位置測定装置

Country Status (8)

Country Link
US (1) US9410797B2 (enExample)
EP (1) EP2857802B1 (enExample)
JP (1) JP6320267B2 (enExample)
KR (1) KR102088869B1 (enExample)
CN (1) CN104515468B (enExample)
DE (1) DE102014218623A1 (enExample)
ES (1) ES2604157T3 (enExample)
TW (1) TWI627379B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013220214A1 (de) 2013-10-07 2015-04-09 Dr. Johannes Heidenhain Gmbh Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück
US9829409B2 (en) * 2015-04-28 2017-11-28 Sumix Corporation Interferometric measurement method for guide holes and fiber holes parallelism and position in multi-fiber ferrules
DE102016200847A1 (de) * 2016-01-21 2017-07-27 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
DE102017209093A1 (de) * 2017-05-31 2018-12-06 Osram Gmbh Lichtleiteranordnung für ein mobiles kommunikationsgerät zur optischen datenübertragung, mobiles kommunikationsgerät und verfahren zur optischen datenübertragung
DE102017213330A1 (de) * 2017-08-02 2019-02-07 Dr. Johannes Heidenhain Gmbh Abtastplatte für eine optische Positionsmesseinrichtung
JP7060370B2 (ja) * 2017-12-18 2022-04-26 株式会社ミツトヨ スケールおよびその製造方法
FR3090904B1 (fr) * 2018-12-19 2021-02-19 Office National Detudes Rech Aerospatiales Composant optique monolithique a plusieurs voies
DE102019210023A1 (de) * 2019-07-08 2021-01-14 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
CN120112768A (zh) * 2022-11-10 2025-06-06 Asml荷兰有限公司 位置测量系统和光刻设备
CN115900782B (zh) * 2022-12-30 2025-05-27 四川云盾光电科技有限公司 一种绝对式测角装置及方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6249626B1 (en) * 1998-03-06 2001-06-19 Lucent Technologies, Inc. Multimode fiber optical power monitoring tap for optical transmission systems
DE10235669B4 (de) * 2002-08-03 2016-11-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP2005147828A (ja) * 2003-11-14 2005-06-09 Mitsutoyo Corp 変位検出装置
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7602489B2 (en) 2006-02-22 2009-10-13 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7483120B2 (en) 2006-05-09 2009-01-27 Asml Netherlands B.V. Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method
JP2008098604A (ja) * 2006-09-12 2008-04-24 Canon Inc 露光装置及びデバイス製造方法
DE102006042743A1 (de) * 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US20080079920A1 (en) * 2006-09-29 2008-04-03 Heiko Hommen Wafer exposure device and method
DE102008007319A1 (de) * 2008-02-02 2009-08-06 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP5602420B2 (ja) 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
US8829420B2 (en) * 2010-06-09 2014-09-09 Nikon Corporation Two dimensional encoder system and method
US20130001412A1 (en) * 2011-07-01 2013-01-03 Mitutoyo Corporation Optical encoder including passive readhead with remote contactless excitation and signal sensing
DE102013203211A1 (de) * 2012-06-15 2013-12-19 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung

Also Published As

Publication number Publication date
KR102088869B1 (ko) 2020-03-16
JP2015075486A (ja) 2015-04-20
EP2857802B1 (de) 2016-09-14
DE102014218623A1 (de) 2015-04-09
US9410797B2 (en) 2016-08-09
EP2857802A3 (de) 2015-07-01
CN104515468A (zh) 2015-04-15
EP2857802A2 (de) 2015-04-08
ES2604157T3 (es) 2017-03-03
KR20150040744A (ko) 2015-04-15
TWI627379B (zh) 2018-06-21
TW201527712A (zh) 2015-07-16
US20150098090A1 (en) 2015-04-09
CN104515468B (zh) 2018-04-10

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