DE102014218623A1 - Optische Positionsmesseinrichtung - Google Patents
Optische Positionsmesseinrichtung Download PDFInfo
- Publication number
- DE102014218623A1 DE102014218623A1 DE102014218623.4A DE102014218623A DE102014218623A1 DE 102014218623 A1 DE102014218623 A1 DE 102014218623A1 DE 102014218623 A DE102014218623 A DE 102014218623A DE 102014218623 A1 DE102014218623 A1 DE 102014218623A1
- Authority
- DE
- Germany
- Prior art keywords
- scanning
- measuring device
- optical
- scanning beam
- position measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 79
- 238000006073 displacement reaction Methods 0.000 claims abstract description 46
- 239000000463 material Substances 0.000 claims abstract description 41
- 230000002452 interceptive effect Effects 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims abstract description 8
- 238000010168 coupling process Methods 0.000 claims abstract description 8
- 238000005859 coupling reaction Methods 0.000 claims abstract description 8
- 230000005855 radiation Effects 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims description 17
- 239000011521 glass Substances 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 4
- 239000006059 cover glass Substances 0.000 claims description 4
- 239000000835 fiber Substances 0.000 claims description 3
- 240000000094 Borassus aethiopum Species 0.000 claims 1
- 239000013307 optical fiber Substances 0.000 abstract description 20
- 230000007935 neutral effect Effects 0.000 description 8
- 239000003570 air Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000001514 detection method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- BUHVIAUBTBOHAG-FOYDDCNASA-N (2r,3r,4s,5r)-2-[6-[[2-(3,5-dimethoxyphenyl)-2-(2-methylphenyl)ethyl]amino]purin-9-yl]-5-(hydroxymethyl)oxolane-3,4-diol Chemical compound COC1=CC(OC)=CC(C(CNC=2C=3N=CN(C=3N=CN=2)[C@H]2[C@@H]([C@H](O)[C@@H](CO)O2)O)C=2C(=CC=CC=2)C)=C1 BUHVIAUBTBOHAG-FOYDDCNASA-N 0.000 description 1
- 238000012935 Averaging Methods 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
- 210000004127 vitreous body Anatomy 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02049—Interferometers characterised by particular mechanical design details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02083—Interferometers characterised by particular signal processing and presentation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102014218623.4A DE102014218623A1 (de) | 2013-10-07 | 2014-09-17 | Optische Positionsmesseinrichtung |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013220184.2 | 2013-10-07 | ||
| DE102013220184 | 2013-10-07 | ||
| DE102014218623.4A DE102014218623A1 (de) | 2013-10-07 | 2014-09-17 | Optische Positionsmesseinrichtung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102014218623A1 true DE102014218623A1 (de) | 2015-04-09 |
Family
ID=51541018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102014218623.4A Withdrawn DE102014218623A1 (de) | 2013-10-07 | 2014-09-17 | Optische Positionsmesseinrichtung |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9410797B2 (enExample) |
| EP (1) | EP2857802B1 (enExample) |
| JP (1) | JP6320267B2 (enExample) |
| KR (1) | KR102088869B1 (enExample) |
| CN (1) | CN104515468B (enExample) |
| DE (1) | DE102014218623A1 (enExample) |
| ES (1) | ES2604157T3 (enExample) |
| TW (1) | TWI627379B (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013220214A1 (de) | 2013-10-07 | 2015-04-09 | Dr. Johannes Heidenhain Gmbh | Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück |
| EP3196598A2 (de) | 2016-01-21 | 2017-07-26 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9829409B2 (en) * | 2015-04-28 | 2017-11-28 | Sumix Corporation | Interferometric measurement method for guide holes and fiber holes parallelism and position in multi-fiber ferrules |
| DE102017209093A1 (de) * | 2017-05-31 | 2018-12-06 | Osram Gmbh | Lichtleiteranordnung für ein mobiles kommunikationsgerät zur optischen datenübertragung, mobiles kommunikationsgerät und verfahren zur optischen datenübertragung |
| DE102017213330A1 (de) * | 2017-08-02 | 2019-02-07 | Dr. Johannes Heidenhain Gmbh | Abtastplatte für eine optische Positionsmesseinrichtung |
| JP7060370B2 (ja) | 2017-12-18 | 2022-04-26 | 株式会社ミツトヨ | スケールおよびその製造方法 |
| FR3090904B1 (fr) * | 2018-12-19 | 2021-02-19 | Office National Detudes Rech Aerospatiales | Composant optique monolithique a plusieurs voies |
| DE102019210023A1 (de) * | 2019-07-08 | 2021-01-14 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| CN120112768A (zh) * | 2022-11-10 | 2025-06-06 | Asml荷兰有限公司 | 位置测量系统和光刻设备 |
| CN115900782B (zh) * | 2022-12-30 | 2025-05-27 | 四川云盾光电科技有限公司 | 一种绝对式测角装置及方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1739395A2 (de) | 2005-06-28 | 2007-01-03 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
| EP1762828A2 (de) | 2005-09-12 | 2007-03-14 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung zur Erfassung der Position zweier zueinander beweglicher Teile in zwei Bewegungsrichtungen |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6249626B1 (en) * | 1998-03-06 | 2001-06-19 | Lucent Technologies, Inc. | Multimode fiber optical power monitoring tap for optical transmission systems |
| DE10235669B4 (de) * | 2002-08-03 | 2016-11-17 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| JP2005147828A (ja) * | 2003-11-14 | 2005-06-09 | Mitsutoyo Corp | 変位検出装置 |
| US7602489B2 (en) | 2006-02-22 | 2009-10-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7483120B2 (en) | 2006-05-09 | 2009-01-27 | Asml Netherlands B.V. | Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
| JP2008098604A (ja) * | 2006-09-12 | 2008-04-24 | Canon Inc | 露光装置及びデバイス製造方法 |
| DE102006042743A1 (de) * | 2006-09-12 | 2008-03-27 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
| US20080079920A1 (en) * | 2006-09-29 | 2008-04-03 | Heiko Hommen | Wafer exposure device and method |
| DE102008007319A1 (de) * | 2008-02-02 | 2009-08-06 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
| JP5602420B2 (ja) | 2009-12-10 | 2014-10-08 | キヤノン株式会社 | 変位測定装置、露光装置、及び精密加工機器 |
| US8829420B2 (en) * | 2010-06-09 | 2014-09-09 | Nikon Corporation | Two dimensional encoder system and method |
| US20130001412A1 (en) * | 2011-07-01 | 2013-01-03 | Mitutoyo Corporation | Optical encoder including passive readhead with remote contactless excitation and signal sensing |
| DE102013203211A1 (de) * | 2012-06-15 | 2013-12-19 | Dr. Johannes Heidenhain Gmbh | Vorrichtung zur interferentiellen Abstandsmessung |
-
2014
- 2014-09-03 TW TW103130408A patent/TWI627379B/zh active
- 2014-09-17 EP EP14185047.9A patent/EP2857802B1/de active Active
- 2014-09-17 DE DE102014218623.4A patent/DE102014218623A1/de not_active Withdrawn
- 2014-09-17 ES ES14185047.9T patent/ES2604157T3/es active Active
- 2014-09-23 KR KR1020140126684A patent/KR102088869B1/ko active Active
- 2014-10-03 JP JP2014204525A patent/JP6320267B2/ja active Active
- 2014-10-07 US US14/508,097 patent/US9410797B2/en active Active
- 2014-10-08 CN CN201410525795.8A patent/CN104515468B/zh active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1739395A2 (de) | 2005-06-28 | 2007-01-03 | Dr. Johannes Heidenhain GmbH | Positionsmesseinrichtung |
| EP1762828A2 (de) | 2005-09-12 | 2007-03-14 | Dr. Johannes Heidenhain GmbH | Optische Positionsmesseinrichtung zur Erfassung der Position zweier zueinander beweglicher Teile in zwei Bewegungsrichtungen |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013220214A1 (de) | 2013-10-07 | 2015-04-09 | Dr. Johannes Heidenhain Gmbh | Anordnung zur Positionierung eines Werkzeugs relativ zu einem Werkstück |
| US9303980B2 (en) | 2013-10-07 | 2016-04-05 | Dr. Johannes Heidenhain Gmbh | System for positioning a tool relative to a workpiece |
| EP3196598A2 (de) | 2016-01-21 | 2017-07-26 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
| DE102016200847A1 (de) | 2016-01-21 | 2017-07-27 | Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung | Optische Positionsmesseinrichtung |
| EP3196598A3 (de) * | 2016-01-21 | 2017-08-23 | Dr. Johannes Heidenhain GmbH | Optische positionsmesseinrichtung |
| US10119802B2 (en) | 2016-01-21 | 2018-11-06 | Dr. Johannes Heidenhain Gmbh | Optical position-measuring device having grating fields with different step heights |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2857802B1 (de) | 2016-09-14 |
| EP2857802A3 (de) | 2015-07-01 |
| TWI627379B (zh) | 2018-06-21 |
| JP6320267B2 (ja) | 2018-05-09 |
| EP2857802A2 (de) | 2015-04-08 |
| JP2015075486A (ja) | 2015-04-20 |
| CN104515468A (zh) | 2015-04-15 |
| KR20150040744A (ko) | 2015-04-15 |
| TW201527712A (zh) | 2015-07-16 |
| CN104515468B (zh) | 2018-04-10 |
| KR102088869B1 (ko) | 2020-03-16 |
| US9410797B2 (en) | 2016-08-09 |
| US20150098090A1 (en) | 2015-04-09 |
| ES2604157T3 (es) | 2017-03-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |