JP2015232562A5 - - Google Patents

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Publication number
JP2015232562A5
JP2015232562A5 JP2015116525A JP2015116525A JP2015232562A5 JP 2015232562 A5 JP2015232562 A5 JP 2015232562A5 JP 2015116525 A JP2015116525 A JP 2015116525A JP 2015116525 A JP2015116525 A JP 2015116525A JP 2015232562 A5 JP2015232562 A5 JP 2015232562A5
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JP
Japan
Prior art keywords
optical position
measuring device
diffraction grating
position measuring
optical
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JP2015116525A
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English (en)
Japanese (ja)
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JP2015232562A (ja
JP6438357B2 (ja
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Priority claimed from DE102014211004.1A external-priority patent/DE102014211004A1/de
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Publication of JP2015232562A5 publication Critical patent/JP2015232562A5/ja
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Publication of JP6438357B2 publication Critical patent/JP6438357B2/ja
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JP2015116525A 2014-06-10 2015-06-09 光学式位置測定装置 Active JP6438357B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014211004.1 2014-06-10
DE102014211004.1A DE102014211004A1 (de) 2014-06-10 2014-06-10 Optische Positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2015232562A JP2015232562A (ja) 2015-12-24
JP2015232562A5 true JP2015232562A5 (enExample) 2018-07-19
JP6438357B2 JP6438357B2 (ja) 2018-12-12

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ID=53269377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015116525A Active JP6438357B2 (ja) 2014-06-10 2015-06-09 光学式位置測定装置

Country Status (5)

Country Link
US (1) US9733068B2 (enExample)
EP (1) EP2955489B1 (enExample)
JP (1) JP6438357B2 (enExample)
CN (1) CN105300278B (enExample)
DE (1) DE102014211004A1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015196048A1 (en) 2014-06-19 2015-12-23 Mastronardi Produce Ltd. Container apparatus
JP6705649B2 (ja) * 2015-12-22 2020-06-03 株式会社ミツトヨ エンコーダ
JP6664211B2 (ja) * 2015-12-22 2020-03-13 株式会社ミツトヨ エンコーダ
DE102017205623B4 (de) * 2017-04-03 2025-03-13 Robert Bosch Gmbh LIDAR-Vorrichtung und Verfahrens zum Abtasten eines Abtastwinkels
JP6969453B2 (ja) * 2018-03-12 2021-11-24 オムロン株式会社 光学計測装置
CN109668525B (zh) * 2019-01-30 2020-08-07 哈尔滨超精密装备工程技术中心有限公司 基于反射光栅的高精度三维角度测量方法与装置
DE102019206937A1 (de) 2019-05-14 2020-11-19 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4033013C2 (de) * 1990-10-18 1994-11-17 Heidenhain Gmbh Dr Johannes Polarisationsoptische Anordnung
JP3937596B2 (ja) * 1998-06-16 2007-06-27 キヤノン株式会社 変位情報測定装置
DE50105554D1 (de) * 2000-09-14 2005-04-14 Heidenhain Gmbh Dr Johannes Positionsmesseinrichtung
CA2438932A1 (en) * 2001-02-21 2002-09-06 Rutgers, The State University Of New Jersey Compositions and methods for cancer prevention and treatment derived from inula britannica
DE10235669B4 (de) * 2002-08-03 2016-11-17 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7292346B2 (en) * 2003-09-15 2007-11-06 Zygo Corporation Triangulation methods and systems for profiling surfaces through a thin film coating
DE102006042743A1 (de) 2006-09-12 2008-03-27 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007023300A1 (de) 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung derselben
DE102008022027A1 (de) * 2008-05-02 2009-11-05 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP5602420B2 (ja) * 2009-12-10 2014-10-08 キヤノン株式会社 変位測定装置、露光装置、及び精密加工機器
DE102009054592A1 (de) * 2009-12-14 2011-06-16 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102010003157B4 (de) * 2010-03-23 2019-10-24 Dr. Johannes Heidenhain Gmbh Vorrichtung zur interferentiellen Abstandsmessung
DE102010029211A1 (de) 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP5517753B2 (ja) * 2010-06-03 2014-06-11 キヤノン株式会社 干渉計測装置
DE102011081879A1 (de) * 2010-11-03 2012-05-03 Dr. Johannes Heidenhain Gmbh Optische Winkelmesseinrichtung
DE102011082156A1 (de) * 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102010063253A1 (de) 2010-12-16 2012-06-21 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102011076178B4 (de) * 2011-05-20 2022-03-31 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

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