CN100460826C - 位移探测装置、位移测量装置以及定点探测装置 - Google Patents
位移探测装置、位移测量装置以及定点探测装置 Download PDFInfo
- Publication number
- CN100460826C CN100460826C CNB2006100716765A CN200610071676A CN100460826C CN 100460826 C CN100460826 C CN 100460826C CN B2006100716765 A CNB2006100716765 A CN B2006100716765A CN 200610071676 A CN200610071676 A CN 200610071676A CN 100460826 C CN100460826 C CN 100460826C
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- light
- polarization
- optical fiber
- diffraction
- diffraction grating
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- E—FIXED CONSTRUCTIONS
- E04—BUILDING
- E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
- E04H13/00—Monuments; Tombs; Burial vaults; Columbaria
- E04H13/006—Columbaria, mausoleum with frontal access to vaults
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
- G01D5/34723—Scale reading or illumination devices involving light-guides
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Abstract
Description
Claims (11)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005092938A JP2006275654A (ja) | 2005-03-28 | 2005-03-28 | 変位検出装置及び変位計測装置並びに定点検出装置 |
JP2005092938 | 2005-03-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1841027A CN1841027A (zh) | 2006-10-04 |
CN100460826C true CN100460826C (zh) | 2009-02-11 |
Family
ID=36660686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100716765A Active CN100460826C (zh) | 2005-03-28 | 2006-03-28 | 位移探测装置、位移测量装置以及定点探测装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20060250900A1 (zh) |
EP (1) | EP1707924A3 (zh) |
JP (1) | JP2006275654A (zh) |
KR (1) | KR20060103868A (zh) |
CN (1) | CN100460826C (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104880159A (zh) * | 2009-09-18 | 2015-09-02 | 直观外科手术操作公司 | 光位置和/或形状感测 |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7933023B2 (en) | 2005-05-23 | 2011-04-26 | Mori Seiki, Co., Ltd. | Displacement detection apparatus, displacement measurement apparatus and fixed point detection apparatus |
JP5066401B2 (ja) * | 2007-07-24 | 2012-11-07 | 株式会社森精機製作所 | 定点検出装置及び変位測定装置 |
JP5209290B2 (ja) * | 2007-12-14 | 2013-06-12 | ミヤチテクノス株式会社 | レーザ加工モニタリング装置及びレーザ加工装置 |
US9025158B2 (en) | 2010-06-01 | 2015-05-05 | Intuitive Surgical Operations, Inc. | Interferometric measurement with crosstalk suppression |
JP5415376B2 (ja) | 2010-08-06 | 2014-02-12 | 株式会社フジクラ | センサヘッド、および光学式センサ |
CN102445152A (zh) * | 2011-09-16 | 2012-05-09 | 浙江师范大学 | 纳米位移测量传感器 |
CN102607468B (zh) * | 2012-03-09 | 2013-08-21 | 方平 | 一种基于双通道光栅的微小角位移传感器 |
CN102589447B (zh) * | 2012-03-09 | 2014-01-29 | 方平 | 基于双通道光栅的微小线性位移传感器 |
JP2013253922A (ja) * | 2012-06-08 | 2013-12-19 | Toshiba Corp | 光電流センサ |
CN103868536B (zh) * | 2014-03-27 | 2016-03-30 | 北京航天时代光电科技有限公司 | 一种嵌入式光纤光栅解调设备 |
JP6427399B2 (ja) * | 2014-04-14 | 2018-11-21 | Dmg森精機株式会社 | 変位検出装置 |
JP2016142552A (ja) * | 2015-01-30 | 2016-08-08 | Dmg森精機株式会社 | 変位検出装置 |
CN107907055B (zh) * | 2017-12-14 | 2024-01-26 | 北京驭光科技发展有限公司 | 图案投射模组、三维信息获取系统、处理装置及测量方法 |
JP2019132859A (ja) * | 2019-05-16 | 2019-08-08 | Dmg森精機株式会社 | 変位検出装置 |
KR102212968B1 (ko) | 2019-10-23 | 2021-02-05 | 국방과학연구소 | 파장제어 빔결합을 위한 광섬유 레이저의 편광 상태 모니터링 장치 및 방법 |
CN111862560B (zh) * | 2020-06-15 | 2021-09-14 | 广东博智林机器人有限公司 | 预警装置、玻璃固定设备、玻璃预警系统及玻璃预警方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5038032A (en) * | 1989-03-03 | 1991-08-06 | Canon Kabushiki Kaisha | Encoder incorporating a displaceable diffraction grating |
US5245407A (en) * | 1990-08-27 | 1993-09-14 | Sumitomo Electric Industries, Ltd. | Fiber-optic gyroscope with depolarizers in a fiber coil located between a light source and a polarizer |
US5436724A (en) * | 1991-10-03 | 1995-07-25 | Canon Kabushiki Kaisha | Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60243604A (ja) * | 1984-05-18 | 1985-12-03 | Olympus Optical Co Ltd | 偏光解消板 |
JP3030905B2 (ja) * | 1991-04-24 | 2000-04-10 | ソニー・プレシジョン・テクノロジー株式会社 | 定点検出装置 |
US5424535A (en) * | 1993-04-29 | 1995-06-13 | The Boeing Company | Optical angle sensor using polarization techniques |
JP3307091B2 (ja) * | 1994-06-09 | 2002-07-24 | キヤノン株式会社 | 真直度測定方法及びそれを用いた真直度測定装置 |
JP3177104B2 (ja) * | 1994-09-16 | 2001-06-18 | 日本アイ・ビー・エム株式会社 | フレア防止光学系、フレア防止方法、浮上量測定装置 |
JPH10501113A (ja) * | 1995-03-21 | 1998-01-27 | フィリップス エレクトロニクス エヌ ベー | 画像ピックアップ装置 |
JPH09152374A (ja) * | 1995-11-29 | 1997-06-10 | Daishinku Co | 赤外線検出系および赤外線検出器 |
JP4381671B2 (ja) * | 2002-10-23 | 2009-12-09 | ソニーマニュファクチュアリングシステムズ株式会社 | 変位検出装置 |
US7002733B2 (en) * | 2003-01-30 | 2006-02-21 | Quantum Photonics, Inc. | Methods and devices for amplifying optical signals using a depolarizer |
WO2005005694A1 (ja) * | 2003-07-10 | 2005-01-20 | Nikon Corporation | 人工水晶部材、露光装置、及び露光装置の製造方法 |
JPWO2005010963A1 (ja) * | 2003-07-24 | 2007-09-27 | 株式会社ニコン | 照明光学装置、露光装置および露光方法 |
JP2005092938A (ja) | 2003-09-16 | 2005-04-07 | Fuji Photo Film Co Ltd | サーボライタ |
-
2005
- 2005-03-28 JP JP2005092938A patent/JP2006275654A/ja active Pending
-
2006
- 2006-03-24 EP EP06251603A patent/EP1707924A3/en not_active Withdrawn
- 2006-03-27 US US11/389,745 patent/US20060250900A1/en not_active Abandoned
- 2006-03-27 KR KR1020060027253A patent/KR20060103868A/ko not_active Application Discontinuation
- 2006-03-28 CN CNB2006100716765A patent/CN100460826C/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5038032A (en) * | 1989-03-03 | 1991-08-06 | Canon Kabushiki Kaisha | Encoder incorporating a displaceable diffraction grating |
US5245407A (en) * | 1990-08-27 | 1993-09-14 | Sumitomo Electric Industries, Ltd. | Fiber-optic gyroscope with depolarizers in a fiber coil located between a light source and a polarizer |
US5436724A (en) * | 1991-10-03 | 1995-07-25 | Canon Kabushiki Kaisha | Apparatus for measuring relative movement using a diffraction grating having an orthogonally polarized input beam |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104880159A (zh) * | 2009-09-18 | 2015-09-02 | 直观外科手术操作公司 | 光位置和/或形状感测 |
CN104880159B (zh) * | 2009-09-18 | 2017-11-17 | 直观外科手术操作公司 | 光位置和/或形状感测 |
Also Published As
Publication number | Publication date |
---|---|
EP1707924A2 (en) | 2006-10-04 |
US20060250900A1 (en) | 2006-11-09 |
EP1707924A3 (en) | 2008-05-28 |
KR20060103868A (ko) | 2006-10-04 |
JP2006275654A (ja) | 2006-10-12 |
CN1841027A (zh) | 2006-10-04 |
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ASS | Succession or assignment of patent right |
Owner name: MEIGENSIGE CO., LTD. Free format text: FORMER OWNER: SONY CORP. Effective date: 20101022 |
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Effective date of registration: 20101022 Address after: Tokyo, Japan Patentee after: Ltd. Mei roots lattice Address before: Tokyo, Japan Patentee before: Sony Corporation |
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Owner name: K. K. MORI SEIKI SEISAKUSHO Free format text: FORMER OWNER: MEIGEN SIGE CO., LTD. Effective date: 20140108 |
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Effective date of registration: 20140108 Address after: Nara Japan Patentee after: Mori Seiki Seisakusho K. K. Address before: Tokyo, Japan Patentee before: Ltd. Mei roots lattice |