JP6588836B2 - 光学位置測定装置 - Google Patents

光学位置測定装置 Download PDF

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Publication number
JP6588836B2
JP6588836B2 JP2016007673A JP2016007673A JP6588836B2 JP 6588836 B2 JP6588836 B2 JP 6588836B2 JP 2016007673 A JP2016007673 A JP 2016007673A JP 2016007673 A JP2016007673 A JP 2016007673A JP 6588836 B2 JP6588836 B2 JP 6588836B2
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Japan
Prior art keywords
scale
scanning
partial light
measurement
scanning unit
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JP2016007673A
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Japanese (ja)
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JP2016156805A5 (enExample
JP2016156805A (ja
Inventor
ヴォルフガング・ホルツアプフェル
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2016007673A 2015-02-23 2016-01-19 光学位置測定装置 Active JP6588836B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015203188.8A DE102015203188A1 (de) 2015-02-23 2015-02-23 Optische Positionsmesseinrichtung
DE102015203188.8 2015-02-23

Publications (3)

Publication Number Publication Date
JP2016156805A JP2016156805A (ja) 2016-09-01
JP2016156805A5 JP2016156805A5 (enExample) 2018-11-01
JP6588836B2 true JP6588836B2 (ja) 2019-10-09

Family

ID=55299395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016007673A Active JP6588836B2 (ja) 2015-02-23 2016-01-19 光学位置測定装置

Country Status (5)

Country Link
US (1) US9733069B2 (enExample)
EP (1) EP3059554B1 (enExample)
JP (1) JP6588836B2 (enExample)
CN (1) CN105910533B (enExample)
DE (1) DE102015203188A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016210434A1 (de) 2016-06-13 2017-12-14 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102017201257A1 (de) * 2017-01-26 2018-07-26 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102017219125A1 (de) 2017-10-25 2019-04-25 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
WO2020170382A1 (ja) * 2019-02-21 2020-08-27 株式会社ニコン 面位置検出装置、露光装置、基板処理システム、およびデバイス製造方法
DE102020202080A1 (de) 2020-02-19 2021-08-19 Dr. Johannes Heidenhain Gesellschaft Mit Beschränkter Haftung Optische Positionsmesseinrichtung
CN115993088A (zh) * 2021-10-20 2023-04-21 约翰内斯.海德汉博士有限公司 光学位置测量设备

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5953209U (ja) * 1982-10-01 1984-04-07 ソニ−マグネスケ−ル株式会社 光学式測長スケ−ル
JP4023923B2 (ja) * 1998-07-02 2007-12-19 ソニーマニュファクチュアリングシステムズ株式会社 光学式変位測定装置
KR100531458B1 (ko) * 1998-08-20 2005-11-25 소니 매뉴펙츄어링 시스템즈 코포레이션 광학식 변위측정장치
EP1319170B1 (de) * 2000-09-14 2005-03-09 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
JP4722474B2 (ja) * 2004-12-24 2011-07-13 株式会社ミツトヨ 変位検出装置
DE102005043569A1 (de) * 2005-09-12 2007-03-22 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
JP4924884B2 (ja) * 2006-05-19 2012-04-25 株式会社ニコン エンコーダ
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device
DE102010029211A1 (de) * 2010-05-21 2011-11-24 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
JP5618898B2 (ja) * 2010-08-31 2014-11-05 Dmg森精機株式会社 変位検出装置
EP2776790B1 (en) * 2011-11-09 2016-09-14 Zygo Corporation Compact encoder head for interferometric encoder system
TWI476376B (zh) * 2011-11-09 2015-03-11 Zygo Corp 雙程干涉式編碼器系統
DE102014208988A1 (de) 2013-09-11 2015-03-12 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
EP3059554B1 (de) 2017-08-30
DE102015203188A1 (de) 2016-08-25
CN105910533A (zh) 2016-08-31
EP3059554A1 (de) 2016-08-24
CN105910533B (zh) 2019-02-15
US9733069B2 (en) 2017-08-15
US20160245642A1 (en) 2016-08-25
JP2016156805A (ja) 2016-09-01

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